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    ELECTROSTATIC CHUCK SYSTEM AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE ELECTROSTATIC CHUCK SYSTEM
    42.
    发明申请
    ELECTROSTATIC CHUCK SYSTEM AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE ELECTROSTATIC CHUCK SYSTEM 有权
    静电卡盘系统及使用静电卡盘系统制造有机发光显示装置的方法

    公开(公告)号：US20160285052A1

    公开(公告)日：2016-09-29

    申请号：US14936585

    申请日：2015-11-09

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Duckjung Lee ,  Kiyoung Yun ,  Jungsun Park

    IPC: H01L51/56 ,  H02N13/00 ,  H01L51/52 ,  H01L21/683 ,  H01L27/32

    CPC classification number: H01L51/56 ,  H01L21/6831 ,  H01L21/6833 ,  H01L27/3211 ,  H01L51/5256 ,  H01L2251/5338 ,  H02N13/00

    Abstract: Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second_polarities as the display substrate.

    Abstract translation: 提供一种静电吸盘系统和通过使用静电吸盘系统制造有机发光显示装置的方法。 静电卡盘系统包括：第一电极和第二电极布置在其中，第一电极具有第一极性，第二电极具有与第一极性不同的第二极性; 所述显示基板在所述平台上，所述显示基板在其表面上包括像素电极; 以及在所述显示基板的表面上的光掩模，所述光掩模包括反射层和要转印到所述显示基板的转印层，其中所述显示基板具有所述第一和第二极性中的一个，并且所述光学掩模具有 第一和第二极性中的另一个作为显示基板。

    DEPOSITION APPARATUS AND METHOD OF DEPOSITING THIN-FILM OF ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE DEPOSITION APPARATUS
    43.
    发明申请
    DEPOSITION APPARATUS AND METHOD OF DEPOSITING THIN-FILM OF ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE DEPOSITION APPARATUS 审中-公开
    沉积装置和使用沉积装置沉积有机发光显示装置的薄膜的方法

    公开(公告)号：US20160072065A1

    公开(公告)日：2016-03-10

    申请号：US14614019

    申请日：2015-02-04

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jaesik Kim ,  Hyunsung Bang ,  Duckjung Lee ,  Sungsoon Im ,  Youngsuk Cho ,  Kyuhwan Hwang

    IPC: H01L51/00 ,  H01L51/56 ,  B05B15/04

    CPC classification number: H01L51/0011 ,  B05B12/16 ,  C23C14/042 ,  C23C14/24 ,  H01L51/0012 ,  H01L51/56

    Abstract: Provided is a deposition apparatus including a deposition source including a plurality of nozzles that spray a deposition material onto a substrate; a mask disposed between the substrate and the deposition source and separated from the substrate, and including a plurality of first openings through which the deposition material passes; and at least one deposition incident angle adjusting plate disposed between the mask and the deposition source and including a plurality of second openings for adjusting a deposition incident angle of the deposition material that is sprayed from the plurality of nozzles; wherein the at least one deposition incident angle adjusting plate is movable in a first direction toward the substrate or a second direction opposite the first direction, and the deposition incident angle adjusting plate is spaced apart from the nozzles.

    Abstract translation: 提供了一种沉积设备，其包括沉积源，该沉积源包括将沉积材料喷射到基底上的多个喷嘴; 掩模，其设置在所述基板和所述沉积源之间并与所述基板分离，并且包括沉积材料通过的多个第一开口; 以及设置在所述掩模和所述沉积源之间的至少一个沉积入射角调整板，并且包括用于调节从所述多个喷嘴喷射的沉积材料的沉积入射角的多个第二开口; 其特征在于，所述至少一个沉积入射角度调整板可朝向所述基板朝向第一方向移动或与所述第一方向相反的第二方向移动，并且所述沉积入射角度调整板与所述喷嘴间隔开。

    Mask assembly and manufacturing method thereof
    44.
    发明授权
    Mask assembly and manufacturing method thereof 有权

    公开(公告)号：US11937492B2

    公开(公告)日：2024-03-19

    申请号：US17371359

    申请日：2021-07-09

    Applicant: Samsung Display Co., Ltd.

    Inventor： Duckjung Lee

    IPC: B05C21/00 ,  C23C14/04 ,  G03F7/00 ,  H10K71/00 ,  H10K71/16

    CPC classification number: H10K71/166 ,  B05C21/005 ,  C23C14/042 ,  G03F7/0015 ,  H10K71/00 ,  H10K71/164

    Abstract: A mask assembly includes a mask frame including a cell opening, and an outer frame defined along a periphery of the cell opening, and a cell mask disposed on the mask frame and including a polymer material. The cell mask includes a masking part which includes a deposition part disposed corresponding to the cell opening of the mask frame and including a masking pattern, and a non-deposition part extending from the deposition part, and a bonding part overlapping the outer frame of the mask frame and extending from the masking part. The non-deposition part includes a non-pattern portion, and a pattern portion having a thickness smaller than a thickness of the non-pattern portion.

    Organic light-emitting display apparatus and method of manufacturing the same
    49.
    发明授权
    Organic light-emitting display apparatus and method of manufacturing the same 有权

    公开(公告)号：US11127902B2

    公开(公告)日：2021-09-21

    申请号：US16549413

    申请日：2019-08-23

    Applicant: Samsung Display Co., Ltd.

    Inventor： Arong Kim ,  Jungsun Park ,  Hyunsung Bang ,  Duckjung Lee ,  Jiyoung Choung

    IPC: H01L51/00 ,  G03F7/09 ,  G03F7/095 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26 ,  H01L51/56 ,  H01L27/32 ,  H01L51/52 ,  H01L51/50

    Abstract: A method of manufacturing an organic light-emitting display apparatus including forming a lift-off layer on a substrate including a first electrode, the lift-off layer including a fluoropolymer; sequentially forming a barrier layer and a photoresist on the lift-off layer, the barrier layer including an inorganic material; patterning the photoresist and the barrier layer to remove a first portion of the photoresist corresponding to the first electrode such that a second portion other than the first portion remains; etching a portion of the lift-off layer corresponding to the first portion to expose the first electrode; forming an organic functional layer and an auxiliary electrode over the first electrode and the second portion of the photoresist, the organic functional layer including an emission layer; and removing the lift-off layer, the barrier layer, the photoresist, the organic functional layer, and the auxiliary electrode remaining on the second portion.

    Display device
    50.
    发明授权
    Display device 有权

    公开(公告)号：US10727433B2

    公开(公告)日：2020-07-28

    申请号：US16378905

    申请日：2019-04-09

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Duckjung Lee ,  Jiyoung Choung ,  Arong Kim

    IPC: H01L51/52 ,  H01L27/32

    Abstract: A display device includes a substrate including a display area and a peripheral area; pixel electrodes in the display area and spaced apart from each other; a pixel-defining layer exposing upper surfaces of the pixel electrodes, covering edges of the pixel electrodes, and including an inorganic insulating material; an auxiliary electrode on the pixel-defining layer; a first intermediate layer on a first pixel electrode among the pixel electrodes; a first opposite electrode on the first intermediate layer; a second intermediate layer on a second pixel electrode from among the pixel electrodes, the second pixel electrode neighboring the first pixel electrode; a second opposite electrode on the second intermediate layer and electrically connected to the first opposite electrode via the auxiliary electrode; a power voltage supply line in the peripheral area; and a connection electrode layer electrically connecting the auxiliary electrode to the power voltage supply line.

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