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公开(公告)号：US08212435B2
公开(公告)日：2012-07-03
申请号：US12050669
申请日：2008-03-18
申请人： Michael B. Binnard , Jean-Marc Gery
发明人： Michael B. Binnard , Jean-Marc Gery
IPC分类号： H02K33/00
CPC分类号： H02K41/0356 , H02K2201/18
摘要： Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.
摘要翻译： 公开了提高音圈电机（VCM）效率的方法和装置。 根据本发明的一个方面，圆柱形和径向对称的VCM包括多组磁体和单个线圈。 多组磁体各配置成阵列构造，并配合形成磁场。 线圈接收电流并具有多个绕组。 第一空间被限定在线圈内，并且多组磁体被布置成使得第一组磁体位于第一空间内，而第二组磁体位于线圈的外部。
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公开(公告)号：US20100238425A1
公开(公告)日：2010-09-23
申请号：US12728196
申请日：2010-03-20
申请人： Michael B. Binnard
发明人： Michael B. Binnard
IPC分类号： G03B27/58 , H02K41/035
CPC分类号： H02K41/0354 , G03B27/58 , G03F7/70758 , H02K2201/18
摘要： Methods and apparatus for providing an efficient oval coil planar motor are disclosed. According to one aspect of the present invention, an electromagnetic actuator includes at least a first coil group, at least a second coil group, and a magnet array. The first coil group includes at least a first coil that is of an elongated toroidal shape. The first coil has a first coil length and a first coil width that is approximately equal to a multiple of three times the first coil width. The second coil group includes at least a second coil that is of an elongated toroidal shape. The second coil has a second coil width and a second coil length that is approximately equal to a multiple of three times the second coil width. The second coil group is approximately adjacent to the first coil group. The magnet array is configured to cooperate with the first and second coil groups, and includes a plurality of magnets. The magnets have an associated magnet pitch, and the first coil width and the second coil width are a function of the magnet pitch.
摘要翻译： 公开了一种用于提供有效的椭圆线圈平面电动机的方法和装置。 根据本发明的一个方面，电磁致动器至少包括第一线圈组，至少第二线圈组和磁体阵列。 第一线圈组至少包括具有细长环形形状的第一线圈。 第一线圈具有第一线圈长度和大致等于第一线圈宽度的三倍的倍数的第一线圈宽度。 第二线圈组至少包括具有细长环形形状的第二线圈。 第二线圈具有大致等于第二线圈宽度的三倍的倍数的第二线圈宽度和第二线圈长度。 第二线圈组大致与第一线圈组相邻。 磁体阵列配置成与第一和第二线圈组配合，并且包括多个磁体。 磁体具有相关联的磁体间距，并且第一线圈宽度和第二线圈宽度是磁体间距的函数。
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公开(公告)号：US07692768B2
公开(公告)日：2010-04-06
申请号：US11427439
申请日：2006-06-29
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译： 公开了用于屏蔽照明系统内的掩模版的方法和装置。 根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。 第一盲部包括至少一个磁体并且不与线圈物理接触。 第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。 当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。
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44.发明申请High NA Catadioptric Imaging Optics For Imaging A reticle to a Pair of Imaging Locations 有权高NA反射折射成像光学用于成像一个掩模版到一对成像位置公开(公告)号：US20100053738A1
公开(公告)日：2010-03-04
申请号：US12547086
申请日：2009-08-25
IPC分类号： G02B17/08
CPC分类号： G02B17/0892 , G02B27/1066 , G02B27/143 , G03F7/70225 , G03F7/7025 , G03F7/70275 , G03F7/70833
摘要： New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.
摘要翻译： 提供了一种被配置为将掩模版同时成像到一对成像位置的成像光学系统的新的和有用的概念，其中成像光学器件包括一对臂，每个臂包括反射折射成像光学元件。 此外，成像光学器件优选地设计成在至少为1.3的数值孔径同时成像成对位置的成对位置成像，并且不会由成像光学元件遮挡光。
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公开(公告)号：US20090303454A1
公开(公告)日：2009-12-10
申请号：US12481326
申请日：2009-06-09
IPC分类号： G03B27/54
CPC分类号： G03B27/54 , G03F7/70358
摘要： An exposure apparatus (10) for transferring a mask pattern (358) from a mask (12) to a substrate (14) includes a mask retainer (44), a substrate stage assembly (24), and an illumination system (18). The mask retainer (44) retains the mask (12). The substrate stage assembly (24) retains and positions the substrate (14). The illumination system (18) generates an illumination beam (31) that moves along a beam scan axis (35) relative to the mask (12) to scan at least a portion of the mask pattern (358). The beam scan axis (35) is substantially parallel to the mask pattern (358). The illumination system (18) can include an illumination source (32) that generates the illumination beam (31) and an illumination optical assembly (34) that guides the illumination beam (31). The illumination optical assembly (34) moves the illumination beam (31) relative to the mask (12) so that the illumination beam (31) scans substantially the entire mask pattern (358). The illumination optical assembly (34) can further include an illumination reflector (36) that is incident on the illumination beam (31), and the illumination reflector (36) can be selectively moved to move the illumination beam (31) along the beam scan axis (35).
摘要翻译： 用于将掩模图案（358）从掩模（12）传送到基板（14）的曝光装置（10）包括掩模保持器（44），基板台组件（24）和照明系统（18）。 掩模保持器（44）保持掩模（12）。 衬底台组件（24）保持并定位衬底（14）。 照明系统（18）产生相对于掩模（12）沿着光束扫描轴（35）移动以扫描掩模图案（358）的至少一部分的照明光束（31）。 光束扫描轴（35）基本上平行于掩模图案（358）。 照明系统（18）可以包括产生照明光束（31）的照明源（32）和引导照明光束（31）的照明光学组件（34）。 照明光学组件（34）相对于掩模（12）移动照明光束（31），使得照明光束（31）基本上扫描整个掩模图案（358）。 照明光学组件（34）还可以包括入射到照明光束（31）上的照明反射器（36），并且照明反射器（36）可以被选择性地移动以沿着光束扫描来移动照明光束（31） 轴（35）。
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公开(公告)号：US20080285004A1
公开(公告)日：2008-11-20
申请号：US11750545
申请日：2007-05-18
CPC分类号： G03F7/709 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/70816
摘要： Methods and apparatus for controlling a stage assembly in up to six degrees of freedom using actuators which each allow for forces to be generated in a horizontal direction and a vertical direction are disclosed. According to one aspect of the present invention, a stage apparatus includes a stage assembly and a first stator arrangement. The stage assembly includes a first magnet arrangement of an actuator assembly, and the first stator arrangement is part of the actuator assembly. The first magnet arrangement cooperates with the first stator arrangement to allow the stage assembly to move relative to a first horizontal axis as well as a vertical axis.
摘要翻译： 公开了使用致动器在多达六个自由度中控制台组件的方法和装置，每个致动器允许在水平方向和垂直方向上产生力。 根据本发明的一个方面，舞台装置包括舞台组件和第一定子装置。 舞台组件包括致动器组件的第一磁体布置，并且第一定子布置是致动器组件的一部分。 第一磁体装置与第一定子装置配合以允许载物台组件相对于第一水平轴线和垂直轴线移动。
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公开(公告)号：US20080165450A1
公开(公告)日：2008-07-10
申请号：US12050669
申请日：2008-03-18
IPC分类号： G11B5/17
CPC分类号： H02K41/0356 , H02K2201/18
摘要： Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.
摘要翻译： 公开了提高音圈电机（VCM）效率的方法和装置。 根据本发明的一个方面，圆柱形和径向对称的VCM包括多组磁体和单个线圈。 多组磁体各配置成阵列构造，并配合形成磁场。 线圈接收电流并具有多个绕组。 第一空间被限定在线圈内，并且多组磁体被布置成使得第一组磁体位于第一空间内，而第二组磁体位于线圈的外部。
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公开(公告)号：US20080002173A1
公开(公告)日：2008-01-03
申请号：US11427439
申请日：2006-06-29
IPC分类号： G03B27/54
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译： 公开了用于屏蔽照明系统内的掩模版的方法和装置。 根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。 第一盲部包括至少一个磁体并且不与线圈物理接触。 第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。 当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。
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49.发明授权Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same 失效具有低横向刚度的振动衰减装置，以及包括其的曝光装置公开(公告)号：US06987559B2
公开(公告)日：2006-01-17
申请号：US10272195
申请日：2002-10-15
CPC分类号： F16F15/0275 , G03B27/48 , G03F7/709
摘要： Devices are disclosed for placement between first and second masses for attenuating transmission of motions from one of the masses to the other. A general embodiment of such a device includes a fluid isolator and a lateral fluid bearing situated along a support axis. The fluid isolator includes a housing defining an isolator chamber pressurized with a gas at pressure Pisol. The fluid isolator is situated such that motion of the masses relative to each other along the support axis is at the fluid isolator, and lateral motion is at the lateral fluid bearing. The lateral fluid bearing includes first and second bearing surfaces that are transverse to the support axis. At least one such surface defines three channels: pressure channel, atmospheric pressure channel, and vacuum channel. In order from the isolator chamber, the pressure channel (at pressure PXYbearing≈Pisol) is first, the atmospheric pressure channel (at pressure Patm) is second, and the vacuum channel (at pressure Pvac) is third. From this general embodiment, a number of configurations are possible.
摘要翻译： 公开了用于放置在第一和第二质量块之间的装置，用于衰减从一个质量到另一个的运动的传递。 这种装置的一般实施例包括沿着支撑轴线定位的流体隔离器和侧向流体轴承。 流体隔离器包括壳体，该壳体限定了用压力P＆gt;的气体加压的隔离室。 液体隔离器的位置使得质量块沿着支撑轴线相对于彼此的运动位于流体隔离器处，并且横向运动位于侧向流体轴承处。 横向流体轴承包括横向于支撑轴线的第一和第二支承表面。 至少一个这样的表面限定了三个通道：压力通道，大气压力通道和真空通道。 按照隔离器室的顺序，压力通道（处于压力P）处于第一位置，大气压力通道（在压力P大气压< SUB>）为第二，真空通道（处于压力P IN）为第三。 从该一般实施例中，可以进行多种配置。
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公开(公告)号：US06650079B2
公开(公告)日：2003-11-18
申请号：US09870753
申请日：2001-06-01
申请人： Michael B. Binnard
发明人： Michael B. Binnard
IPC分类号： H02K4100
CPC分类号： H02P6/006 , H02K41/03 , H02K2201/18 , Y10T74/20201
摘要： A method for controlling and positioning a two-dimensional electric motor is disclosed. The electric motor has a coil array and a magnet array. The method controls the motor in two directions in the plane of the magnet array and about a third direction generally orthogonal to the plane. The method includes: determining currents for generating the desired forces, determining a resultant torque that would be generated from applying the determined currents, determining current adjustments to compensate for the resultant torque, and applying a current equal to the sum of the determined currents and the current adjustments to the coils to interact with the magnetic fields of the magnet array. The currents are applied to the portion of the coil array within the magnetic field of the magnet array, including those coils which are only partially within the magnetic field of the magnet array. Alternatively, the currents could be applied to all of the coils. Applying the current to all of the coils requires more electrical power, but uses for amplifiers so the electronics are simpler and less expensive. The method of the present invention may be used in applications such as positioning wafers in semiconductor fabrication.
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