Method of fabricating semiconductor device
    41.
    发明授权
    Method of fabricating semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08012858B2

    公开(公告)日:2011-09-06

    申请号:US12560265

    申请日:2009-09-15

    IPC分类号: H01L21/20

    摘要: A method of fabricating a semiconductor device according to one embodiment includes: removing a native oxide film and adhering silicon nitrides on an area of a Si based substrate in hydrogen gas atmosphere under a condition in which a pressure is a first pressure and a temperature is a first temperature, a silicon nitride-containing member being formed on the Si based substrate, the area being a area not covered by the member; lowering the temperature to a second temperature from the first temperature while maintaining the pressure at the first pressure in hydrogen gas atmosphere; lowering the pressure to a second pressure from the first pressure while maintaining the temperature at the second temperature in hydrogen gas atmosphere; and epitaxially growing a crystal on the area of the Si based substrate in a precursor gas atmosphere after the pressure is lowered to the second pressure, the crystal including at least one of Si and Ge, the precursor gas atmosphere including at least one of hydrogen, Si and Ge.

    摘要翻译: 根据一个实施例的制造半导体器件的方法包括:在氢气气氛中,在压力为第一压力和温度为的条件下,除去天然氧化物膜并将硅氮化物粘附在Si基衬底的区域上 第一温度,在所述Si基衬底上形成含氮化硅的构件,所述区域是未被构件覆盖的区域; 将温度从第一温度降低到第二温度,同时保持在氢气气氛中的第一压力下的压力; 将压力从第一压力降低到第二压力,同时将温度保持在第二温度在氢气气氛中; 并且在所述压力降低到所述第二压力之后,在前驱体气体气氛中,在所述Si基基板的区域上外延生长晶体,所述晶体包括Si和Ge中的至少一种,所述前体气体气体包括氢, Si和Ge。

    Webbing take-up device
    42.
    发明授权

    公开(公告)号:US07934673B2

    公开(公告)日:2011-05-03

    申请号:US10594748

    申请日:2005-03-10

    IPC分类号: B65H75/48

    摘要: To obtain a webbing take-up device that can not only transmit to a take-up shaft only rotation from a motor by a clutch but is also simple and compact.A clutch of this webbing take-up device has a simply configuration where sliders 144 of a clutch body portion 114 are caused by frictional force to be retained in a case, whereby the sliders 144 and lock bars 154 are caused to relatively move and the lock bars 154 are caused by this relative movement to move to positions where they engage with or disengage from a ratchet 134. Consequently, the overall configuration of a clutch 100 can be made significantly compact (thinned) in comparison to a configuration that causes a pawl to move using an inertial disk that is large and has weight as in a conventional clutch. Thus, the overall configuration of a webbing take-up device 10 can be made compact.

    Webbing take-up device
    43.
    发明授权
    Webbing take-up device 有权
    织带收卷装置

    公开(公告)号:US07735767B2

    公开(公告)日:2010-06-15

    申请号:US11547782

    申请日:2005-03-07

    IPC分类号: B60R22/46

    摘要: A webbing take-up device (10, 100) is disclosed, wherein a motor (44) is provided directly below a take-up shaft (20) between a pair of leg plates (16, 18) with a rotary shaft (50) of the motor (44) disposed perpendicularly to the take-up shaft (20), and a clutch (26) is provided at one side of one leg plate (16). Further, a gear (76) of a motor gear portion (46) is removably connected to a worm gear (34) in a clutch gear portion (28), and a mounting stay (84) is detachably attached to a case (30) with screws (86), so that the motor (44) and the motor gear portion (46) can be detached independently of the case (30) while still being assembled together. Still further, a pretensioner mechanism (156) and a sensor mechanism (182) are provided at one end side of a spool (118), and an urging mechanism (136) is disposed at the other end side thereof.

    摘要翻译: 公开了一种织带卷绕装置(10,100),其中马达(44)直接设置在带有旋转轴(50)的一对腿板(16,18)之间的卷取轴(20)的正下方, 的电动机(44)垂直于卷取轴(20)设置,离合器(26)设置在一个支脚板(16)的一侧。 此外,马达齿轮部分(46)的齿轮(76)可拆卸地连接到离合器齿轮部分(28)中的蜗轮(34),并且安装支架(84)可拆卸地附接到壳体(30) 通过螺钉(86),使得马达(44)和马达齿轮部分(46)可以在仍被组装在一起的状态下独立于壳体(30)拆卸。 此外,在卷轴(118)的一端侧设置有预张紧机构(156)和传感器机构(182),并且在其另一端侧配置有推压机构(136)。

    Webbing retractor
    44.
    发明授权
    Webbing retractor 有权
    织带牵开器

    公开(公告)号:US07484683B2

    公开(公告)日:2009-02-03

    申请号:US10757546

    申请日:2004-01-15

    IPC分类号: B60R22/46

    摘要: A webbing retractor for an elongated, strip-shaped webbing belt used for application to a body of a vehicle occupant riding in a vehicle. The webbing retractor has: a frame in which a pair of leg plates, which are disposed so as to face one another, are connected by a back plate so as to be integral; a spool which is disposed between the pair of leg plates, one end of the webbing belt being anchored to the spool; a driving mechanism which is disposed between the pair of leg plates and has an output shaft and which is for rotating the spool in at least a take-up direction; and a clutch disposed between the pair of leg plates, transmitting rotation of the output shaft to the spool. Because a motor and gears can be disposed between the leg plates of the frame, the webbing retractor can be made compact.

    摘要翻译: 一种用于细长带状的织带的织带卷收器,用于应用于乘坐车辆的车辆乘员的身体。 带状卷收器具有:一对框架,其中一对腿板彼此相对设置,通过背板连接成一体; 一个线轴,其设置在所述一对腿板之间,所述安全带的一端固定在所述线轴上; 驱动机构,其设置在所述一对脚板之间并具有输出轴,所述输出轴用于使所述线轴沿至少一个卷绕方向旋转; 以及设置在所述一对腿板之间的离合器,其将输出轴的旋转传递到线轴。 因为电动机和齿轮可以设置在框架的腿板之间,因此可以使织带牵开器紧凑。

    Webbing retractor
    45.
    发明授权
    Webbing retractor 有权
    织带牵开器

    公开(公告)号:US07416151B2

    公开(公告)日:2008-08-26

    申请号:US11483730

    申请日:2006-07-11

    IPC分类号: B65H75/48

    摘要: A webbing retractor has two torque transmitting routes for taking-up, such that rapid and reliable taking-up, and gentle taking-up are possible. When an engaging claw of a pawl restricts rotation of a ratchet plate, due to planetary gears rotating around a sun gear, rotation is transmitted from a drive gear to a carrier plate. On the other hand, when restriction of rotation of the ratchet plate is released, a clutch spring tightens around a tube portion of the carrier plate while rotation of the drive gear pulls one peripheral direction end of the clutch spring in a direction of rotation thereof. Frictional resistance between the tube portion and the clutch spring is increased, and rotation is transmitted from the drive gear to the carrier plate.

    摘要翻译: 织带卷收器具有两个扭矩传递路线用于卷绕,使得快速可靠的卷取和温和的卷取是可能的。 当棘爪的接合爪限制棘轮盘的旋转时,由于围绕太阳齿轮旋转的行星齿轮,旋转从驱动齿轮传递到承载板。 另一方面,当解除棘爪板的旋转的限制时,离合器弹簧在支承板的管部周围收紧,同时驱动齿轮的旋转沿着离合器弹簧的一个旋转方向拉动一个周向端。 管部与离合器弹簧之间的摩擦阻力增大,从驱动齿轮传递到承载板。

    Storage structure of a vehicle roof
    46.
    发明申请
    Storage structure of a vehicle roof 有权
    车顶的存储结构

    公开(公告)号:US20050242613A1

    公开(公告)日:2005-11-03

    申请号:US11110722

    申请日:2005-04-21

    CPC分类号: B60J7/201 B60J7/145

    摘要: A storable vehicle roof structure having an upper roof component for covering an area above seats in a vehicle interior compartment, a rear roof component coupled to the upper roof component at a rear side thereof so as to cover a rear portion of the vehicle interior compartment, and a package tray which covers the top of a rear storage space in the closed position of the roof. The rear side of the package tray is fitted on the rear roof component via a rotary mechanism for rotating at least the front side of the package tray. The front side of the package tray is guided by a guide member to enable the package tray together with roof components to be stored in the storage space for exposing the vehicle interior compartment.

    摘要翻译: 一种可存储的车顶结构,具有用于覆盖车辆内部隔室中的座椅上方的区域的上部屋顶部件,在其后侧联接到所述上部车顶部件的后部车顶部件,以覆盖所述车辆内部车厢的后部, 以及在屋顶的关闭位置覆盖后部存储空间的顶部的包装托盘。 包装托盘的后侧通过用于至少旋转包装托盘的前侧的旋转机构安装在后部车顶部件上。 包装托盘的前侧由引导构件引导,使得包装托盘与屋顶部件一起存储在存储空间中用于暴露车辆内部隔间。

    Motorized retractor
    47.
    发明申请
    Motorized retractor 有权
    电动牵开器

    公开(公告)号:US20050224621A1

    公开(公告)日:2005-10-13

    申请号:US11103514

    申请日:2005-04-12

    申请人: Shinji Mori

    发明人: Shinji Mori

    摘要: A motorized retractor which includes a spool with a webbing wound therearound, a reversible motor, a forward and a reverse driving force transmission mechanisms. The forward and the reverse driving force transmission mechanisms are provided between the spool and an output shaft of the motor, respectively. The forward driving force transmission mechanism reduces forward rotation of the output shaft by a predetermined reduction ratio and transmits this rotation to the spool for rotating the spool in a winding direction. The reverse driving force transmission mechanism reduces reverse direction rotation of the output shaft by a reduction ratio which is lower than the predetermined reduction ratio of the forward driving force transmission mechanism, and transmits this rotation to the spool for rotating the spool in the winding direction. The forward and the reverse driving force transmission mechanisms both block transmission to the output shaft of rotations generated at the spool side.

    摘要翻译: 一种电动牵开器,其包括绕其周围的织带的卷轴,可逆电动机,前进和后退驱动力传递机构。 前后驱动力传递机构分别设置在卷轴和马达的输出轴之间。 前进驱动力传递机构使输出轴的向前旋转减小预定的减速比,并将该旋转传递到卷轴,以沿着卷绕方向旋转卷轴。 反向驱动力传递机构通过比正向驱动力传递机构的预定减速比低的减速比来减小输出轴的反向旋转,并且将该旋转传递到卷轴以沿着卷绕方向旋转。 前进驱动力和反向驱动力传递机构都阻止在卷轴侧产生的旋转输出轴的传动。

    Method and apparatus for forming silicon oxide film
    48.
    发明申请
    Method and apparatus for forming silicon oxide film 失效
    用于形成氧化硅膜的方法和装置

    公开(公告)号:US20050056220A1

    公开(公告)日:2005-03-17

    申请号:US10879034

    申请日:2004-06-30

    摘要: In a method of forming a silicon oxide film, a target substrate that has a silicon layer on a surface is loaded into a process area within a reaction container, while setting the process area to have a loading temperature of 400° C. or less. Then, the process area that accommodates the target substrate is heated, from the loading temperature to a process temperature of 650° C. or more. Water vapor is supplied into the reaction container during said heating the process area, while setting the water vapor to have a first concentration in an atmosphere of the process area, and setting the process area to have a first reduced pressure. After said heating the process area to the process temperature, an oxidation gas is supplied into the reaction container, thereby oxidizing the silicon layer to form a silicon oxide film.

    摘要翻译: 在形成氧化硅膜的方法中,将表面上具有硅层的目标基板装载到反应容器内的处理区域中,同时将处理区域设定为负载温度为400℃以下。 然后,将装载目标基板的处理区域从加载温度加热到650℃以上的处理温度。 在处理区域的加热期间,将水蒸汽供应到反应容器中,同时将水蒸汽设置为在处理区域的气氛中具有第一浓度,并将处理区域设定为具有第一减压。 在将处理区域加热到处理温度之后,将氧化气体供应到反应容器中,从而氧化硅层以形成氧化硅膜。

    Webbing winding device
    49.
    发明授权
    Webbing winding device 有权
    卷绕装置

    公开(公告)号:US06857594B2

    公开(公告)日:2005-02-22

    申请号:US10615390

    申请日:2003-07-09

    IPC分类号: B60R22/48 B60R22/46 B65H75/48

    摘要: In a webbing winding device, when an external gear of a clutch receives driving force of a motor and rotates in a winding direction, a pressing portion of an inertial plate pushes a pawl and meshes the pawl with outward teeth of an adaptor. Consequently, the winding shaft rotates in the winding direction. When the external gear receives rotating force of the motor and rotates in a drawing out direction, another pushing portion of the inertial plate pushes another pawl and meshes the pawl with the outward teeth of the adapter. Consequently, the winding shaft rotates in the drawing out direction. Thus, by providing these pawls, in this webbing winding device it is possible to transmit both forward-rotation and reverse-rotation of the motor for rotating the winding shaft.

    摘要翻译: 在一种织带卷绕装置中,当离合器的外齿轮接收电动机的驱动力并沿卷绕方向旋转时,惯性板的按压部分推动棘爪并用适配器的外齿啮合棘爪。 因此,卷绕轴沿卷绕方向旋转。 当外齿轮接收到电动机的旋转力并沿拉出方向旋转时,惯性板的另一个推动部分推动另一个棘爪并将棘爪与适配器的外齿啮合。 因此,卷绕轴沿拉出方向旋转。 因此,通过设置这些棘爪,在这种织带卷绕装置中,可以传递用于旋转卷轴的马达的向前旋转和反向旋转。

    Webbing take-up device
    50.
    发明授权
    Webbing take-up device 有权
    织带收卷装置

    公开(公告)号:US06641076B2

    公开(公告)日:2003-11-04

    申请号:US09727445

    申请日:2000-12-04

    IPC分类号: B65H7548

    CPC分类号: B60R22/415

    摘要: A webbing take-up device that can prevent unintended and unnecessary switching from an ELR mode to an ALR mode. In a webbing take-up device, a cam protrusion and a tongue portion are provided at a cam member that interlocks with a take-up shaft, and a breaking operational portion and an intermediate holding surface are provided at a disc control member. When a switch is made from the ELR mode to the ALR mode, unwinding and taking-up operations of the webbing are each preformed twice in succession so that the webbing take-up device is switched to the ALR mode, in which an ALR pawl engages with an outer-tooth ratchet wheel of a locking wheel. Accordingly, unless the aformentioned switching is carried out by conscious volition of a vehicle occupant, unintended and unnecessary switching from the ELR mode to the ALR mode does not occur.

    摘要翻译: 一种能够防止从ELR模式到ALR模式的意外和不必要的切换的织带卷绕装置。 在一种织带卷取装置中,凸轮突起和舌部设置在与卷取轴互锁的凸轮构件上,并且在盘控制构件处设置有打开操作部分和中间保持表面。 当从ELR模式切换到ALR模式时,织带的展开和卷绕操作都被连续两次预成形,从而将织带卷取装置切换到ALR模式,其中ALR棘爪接合 具有锁定轮的外齿棘轮。 因此,除非通过车辆乘客的意识进行上述切换,否则不会发生从ELR模式到ALR模式的意外和不必要的切换。