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公开(公告)号:US10444102B2
公开(公告)日:2019-10-15
申请号:US15698528
申请日:2017-09-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Juan Alejandro Herbsommer , Adam Joseph Fruehling , Swaminathan Sankaran , Benjamin Stassen Cook
Abstract: A pressure transducer includes a cavity, dipolar molecules disposed within the cavity, and pressure measurement circuitry. The pressure measurement circuitry is configured to measure a width of an absorption peak of the dipolar molecules, and to determine a value of pressure in the cavity based on the width of the absorption peak.
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公开(公告)号:US10370760B2
公开(公告)日:2019-08-06
申请号:US15843313
申请日:2017-12-15
Applicant: Texas Instruments Incorporated
Abstract: Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.
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公开(公告)号:US20190186007A1
公开(公告)日:2019-06-20
申请号:US15843313
申请日:2017-12-15
Applicant: Texas Instruments Incorporated
CPC classification number: C23C16/45525 , B29C65/14 , B29C66/034 , B29C66/112 , B29L2031/34 , C23C16/403 , C23C16/56 , G04F5/14 , H03L7/26 , H05K2201/09836
Abstract: Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.
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公开(公告)号:US20190058232A1
公开(公告)日:2019-02-21
申请号:US15681541
申请日:2017-08-21
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Adam Joseph Fruehling , Benjamin Stassen Cook , Juan Alejandro Herbsommer , Swaminathan Sankaran
Abstract: An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction. Various types of launch structures are disclosed herein.
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公开(公告)号:US12187599B2
公开(公告)日:2025-01-07
申请号:US17491416
申请日:2021-09-30
Applicant: Texas Instruments Incorporated
Inventor: Adam Joseph Fruehling
Abstract: Described embodiments include a microelectromechanical system (MEMS) array comprising a first MEMS device that includes a first movable electrostatic plate elastically connected to a first structure, the first movable electrostatic plate having a first mass, a first fixed electrostatic plate, and a first drive circuit having a first drive output coupled to the first fixed electrostatic plate. There is a second MEMS device that includes a second movable electrostatic plate elastically connected to a second structure, the second movable electrostatic plate having a second mass that is different than the first mass, a second fixed electrostatic plate, and a second drive circuit having a second drive output coupled to the second fixed electrostatic plate.
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公开(公告)号:US12046430B2
公开(公告)日:2024-07-23
申请号:US18213296
申请日:2023-06-23
Applicant: Texas Instruments Incorporated
CPC classification number: H01H29/28 , H01H1/0036 , H01H11/00 , H01H2029/008
Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.
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公开(公告)号:US20230335355A1
公开(公告)日:2023-10-19
申请号:US18213296
申请日:2023-06-23
Applicant: Texas Instruments Incorporated
CPC classification number: H01H29/28 , H01H11/00 , H01H1/0036 , H01H2029/008
Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.
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公开(公告)号:US11728111B2
公开(公告)日:2023-08-15
申请号:US16234243
申请日:2018-12-27
Applicant: Texas Instruments Incorporated
CPC classification number: H01H29/28 , H01H1/0036 , H01H11/00 , H01H2029/008
Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency the droplet can spread allowing at least two conductors to be coupled.
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公开(公告)号:US20220146601A1
公开(公告)日:2022-05-12
申请号:US17095271
申请日:2020-11-11
Applicant: Texas Instruments Incorporated
Abstract: In described examples, a magnetic sensor includes a waveguide that encapsulates dipolar molecules. A mm-wave electromagnetic field is launched into the waveguide, travels through the dipolar molecules, and is then received after passing through the dipolar molecules. The frequency of the mm-wave electromagnetic signal is swept across a range that includes an intrinsic quantum rotational state transition frequency (Fr) for the dipolar molecules. Absorption peaks in accordance with the Zeeman effect are determined. A strength of a magnetic field affecting the magnetic sensor is proportional to a difference in the frequencies of the absorption peaks.
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公开(公告)号:US10900837B2
公开(公告)日:2021-01-26
申请号:US16234195
申请日:2018-12-27
Applicant: Texas Instruments Incorporated
Inventor: Adam Joseph Fruehling , Juan Alejandro Herbsommer , Argyrios Dellis
IPC: G01J3/42 , G01N21/3581
Abstract: A compact mmW spectroscopy cell system for detecting volatile organic compounds (compounds) in a gas. The system includes a gas collection chamber, an input buffer cavity for receiving the gas from the gas collection chamber, pumping devices to pass the gas from the buffer cavity to an absorption cell and maintain pressure, and a transceiver connected to the cell. The transceiver interrogates the absorption cell filled with the gas by passing a high frequency electromagnetic signal and sweeping the signal to generate an absorption spectra which is compared to a spectroscopy database for detecting the compounds in the gas. The absorption cell, collection chambers, and pumping devices are fabricated with standard CMOS processing techniques at chip and wafer scale. The transceiver bonded to the absorption cell with chip scale integration.
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