Functional material comprising fluorine-containing compound

    公开(公告)号:US20070179263A1

    公开(公告)日:2007-08-02

    申请号:US10591860

    申请日:2005-03-03

    IPC分类号: C08F214/18 C07C215/28

    摘要: There is provided an ionic liquid type functional material which is useful for a lubricant, acid-removing agent, various ionic liquid materials, electrolyte for solar cell and actuator material. The ionic liquid type functional material contains an aromatic compound which has a fluorine-containing ether chain and is represented by the formula (1): [Ra-DmRy  (1)wherein -D- is a fluoroether unit represented by the formula (1-1): O—Rn or R—On  (1-1) in which R is at least one selected from divalent fluorine-containing alkylene groups having 1 to 5 carbon atoms in which at least one of hydrogen atoms is replaced by fluorine atom; n is an integer of from 1 to 20; when m is not less than 2, two or more of D may be the same or different; Ra is a monovalent organic group which has 1 to 20 carbon atoms and does not contain D; when m is not less than 2, two or more of Ra may be the same or different; m is an integer of from 1 to 4; Ry is a mono-, di-, tri- or tetra-valent organic group having 2 to 30 carbon atoms which has at least one selected from a basic functional group Y1 and/or a salt Y2 of the basic functional group and contains an aromatic ring structure, provided that a unit of —O—O— is not contained in the formulae (1) and (1-1).

    Process for preparing fluorine-containing norbornene derivative
    43.
    发明申请
    Process for preparing fluorine-containing norbornene derivative 失效
    含氟降冰片烯衍生物的制备方法

    公开(公告)号:US20070129576A1

    公开(公告)日:2007-06-07

    申请号:US11649265

    申请日:2007-01-04

    IPC分类号: C07C45/45

    摘要: There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F2 laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.

    摘要翻译: 提供了一种新颖的降冰片烯衍生物,其是用于F 2激光的化学放大型光致抗蚀剂的材料,具有优异的透明度和改善的干蚀刻电阻率,并且具有含氟酮单元或含氟三级 直接与降冰片烯骨架结合的醇单元; 通过使用降冰片烯衍生物作为可共聚单体得到的含氟聚合物; 以及包含含氟聚合物,光致酸产生剂和溶剂的化学放大型光致抗蚀剂组合物。

    Optical material containing fluorine-containing polymer having functional group
    44.
    发明授权
    Optical material containing fluorine-containing polymer having functional group 有权
    含有具有官能团的含氟聚合物的光学材料

    公开(公告)号:US07220809B1

    公开(公告)日:2007-05-22

    申请号:US10654888

    申请日:2003-09-05

    IPC分类号: C08F16/24

    摘要: There is provided an optical material obtained from an organic composition which is suitable for an optical material in optical communication and comprises a fluorine-containing polymer having functional group and a rare earth metal ion, in which the fluorine-containing polymer having functional group has at least one ketone structure in its side chain and a maximum absorption coefficient of not more than 1 cm−1 in each wavelength range of from 1,290 to 1,320 nm, from 1,530 to 1,570 nm and from 600 to 900 nm and the rare earth metal ion is at least one selected from the group consisting of erbium (Er) ion, thulium (Tm) ion, praseodymium (Pr) ion, holmium (Ho) ion, neodymium (Nd) ion, europium (Eu) ion, dysprosium (Dy) ion, samarium (Sm) ion and cerium (Ce) ion.

    摘要翻译: 提供了一种由有机组合物获得的光学材料,其适用于光学连接的光学材料,并且包括具有官能团的含氟聚合物和稀土金属离子,其中具有官能团的含氟聚合物具有 其侧链中的至少一个酮结构和在1,290至1,320nm,1,530至1,570nm和600至900nm的每个波长范围内的最大吸收系数不超过1cm -1 -1 稀土金属离子选自铒(Er)离子,ium(Tm)离子,镨(Pr)离子,钬(Ho)离子,钕(Nd)离子,铕(Eu) 离子,镝(Dy)离子,钐(Sm)离子和铈(Ce)离子。

    Fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and fluorine-containing polymer prepared by polymerization of same
    45.
    发明授权
    Fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and fluorine-containing polymer prepared by polymerization of same 有权
    具有羟基或氟代烷基羰基的含氟乙烯性单体和通过聚合制备的含氟聚合物

    公开(公告)号:US07214470B2

    公开(公告)日:2007-05-08

    申请号:US10644953

    申请日:2003-08-21

    IPC分类号: G03F7/038

    摘要: There are provided a fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and represented by the formula (1): and the formula (14): respectively, wherein X1 and X2 are the same or different and each is H or F; X3 is H, F, Cl or CF3; Rf1 and Rf2 are the same or different and each is a perfluoroalkyl group having 1 to 20 carbon atoms; Rf3 is a fluorine-containing alkylene group having 1 to 40 carbon atoms or a fluorine-containing alkylene group having ether bond which has 1 to 100 carbon atoms and the sum of carbon atom and oxygen atom of two or more; a is 0 or 1, a fluorine-containing polymer having a structural unit of the above-mentioned monomer and a composition for a photoresist. The monomer has good polymerizability, particularly radical polymerizability, and the polymer obtained by polymerizing the monomer has excellent optical characteristics and is useful as a base polymer for an antireflection film and for a composition for a resist.

    摘要翻译: 提供具有羟基或氟代烷基羰基并由式(1)表示的含氟乙烯性单体:和式(14):其中X 1和X 2 相同或不同,分别为H或F; X 3是H,F,Cl或CF 3; Rf 1和Rf 2相同或不同,各自为具有1至20个碳原子的全氟烷基; Rf 3是具有1〜40个碳原子的含氟亚烷基或具有1〜100个碳原子的醚键的含氟亚烷基,碳原子和氧原子之和为2 或者更多; a为0或1,具有上述单体的结构单元的含氟聚合物和光致抗蚀剂的组合物。 单体具有良好的聚合性,特别是自由基聚合性,通过聚合单体获得的聚合物具有优异的光学特性,可用作抗反射膜和抗蚀剂组合物的基础聚合物。

    Process for preparing fluorine-containing polymer and method of forming fine pattern using same
    46.
    发明授权
    Process for preparing fluorine-containing polymer and method of forming fine pattern using same 失效
    制备含氟聚合物的方法和使用其形成精细图案的方法

    公开(公告)号:US07163982B2

    公开(公告)日:2007-01-16

    申请号:US10914203

    申请日:2004-08-10

    IPC分类号: C08F8/32

    摘要: There is provided a method of forming a fine pattern by using a practicable fluorine-containing polymer which has a high transparency to exposure light having a short wavelength such as F2 laser and can undergo resolution of a fine pattern. The method comprises (I) a step for preparing a fluorine-containing polymer (A) having OH group which has a structural unit derived from a fluorine-containing norbornene derivative having OH group, (II) a step for preparing a fluorine-containing polymer (B) having a protective group by reacting a compound represented by X—CH2OR, wherein X is Cl, Br or I; R is a hydrocarbon group having 1 to 30 carbon atoms in which a part or the whole of hydrogen atoms may be substituted with fluorine atoms, with the above-mentioned fluorine-containing polymer (A) having OH group in the presence of a base, (III) a step for preparing a resist composition comprising (a) the above-mentioned fluorine-containing polymer (B) having a protective group, (b) a photoacid generator and (c) a solvent, (IV) a step for forming a resist film comprising the above-mentioned resist composition on a substrate or on a given layer on the substrate, (V) a step for exposing by selectively irradiating a given area of the resist film with energy rays, and (VI) a step for subjecting the exposed resist film to developing to selectively remove the exposed portion of the resist film, thus forming a fine pattern.

    摘要翻译: 提供了通过使用对具有短波长的曝光光如F 2激光具有高透明度的可行的含氟聚合物来形成精细图案的方法,并且可以经历精细图案的分辨 。 该方法包括:(I)具有OH基的含氟聚合物(A)的制备步骤,其具有衍生自具有OH基的含氟降冰片烯衍生物的结构单元,(II)制备含氟聚合物的步骤 (B)通过使由X-CH 2 OR表示的化合物与其中X为Cl,Br或I的化合物反应而具有保护基; R是具有1至30个碳原子的烃基,其中一部分或全部氢原子可以被氟原子取代,上述含碱基的含氟聚合物(A)具有OH基团, (III)制备抗蚀剂组合物的步骤,包括(a)具有保护基的上述含氟聚合物(B),(b)光致酸产生剂和(c)溶剂,(IV)形成步骤 在基板上或基板上的给定层上包含上述抗蚀剂组合物的抗蚀剂膜,(V)通过用能量射线选择性地照射抗蚀剂膜的给定区域来曝光的步骤,以及(VI) 使曝光的抗蚀剂膜显影以选择性地除去抗蚀剂膜的暴露部分,从而形成精细图案。

    Composite nickel fine powder
    48.
    发明授权
    Composite nickel fine powder 有权
    复合镍细粉

    公开(公告)号:US06312622B1

    公开(公告)日:2001-11-06

    申请号:US09699449

    申请日:2000-10-31

    IPC分类号: H01B102

    摘要: Composite nickel fine powder comprises metal nickel fine particles, at least one member attached to the surface of the fine particles and selected from the group consisting of oxides and double oxides containing at least one metal element selected from the group consisting of the Groups 2 to 14 of the Periodic Table and whose atomic number falls within the range of from 12 to 82, and a saturated or unsaturated fatty acid supported on the surface of the nickel fine particles provided thereon with the oxide and/or double oxide attached thereto. The composite nickel fine powder is excellent in resistance to heat shrinkage, has a high tap density, and has characteristic properties suitable for use as a material for making a conductive paste.

    摘要翻译: 复合镍微粉末包含金属镍微粒,至少一个与微粒表面相连并且选自氧化物和二氧化物的组分,所述氧化物和双氧化物含有至少一种选自第2组至第14组的金属元素 的元素,其原子序数在12〜82的范围内,饱和或不饱和的脂肪酸负载在其上附着有氧化物和/或双氧化物的镍微粒表面上。 复合镍微粉末的耐热收缩性优异,具有高的振实密度,并且具有适用于制造导电浆料的特性。