摘要:
A method for designing a semiconductor device and a semiconductor device of the present invention permits the achievement of a predetermined pattern area ratio while power supply lines are reinforced by connecting a dummy metal line, which is formed in an unoccupied region of a wiring layer for the purpose of achieving the predetermined area ratio, at its two or more points with a power supply line for VDD or VSS.
摘要:
There is provided an ionic liquid type functional material which is useful for a lubricant, acid-removing agent, various ionic liquid materials, electrolyte for solar cell and actuator material. The ionic liquid type functional material contains an aromatic compound which has a fluorine-containing ether chain and is represented by the formula (1): [Ra-DmRy (1)wherein -D- is a fluoroether unit represented by the formula (1-1): O—Rn or R—On (1-1) in which R is at least one selected from divalent fluorine-containing alkylene groups having 1 to 5 carbon atoms in which at least one of hydrogen atoms is replaced by fluorine atom; n is an integer of from 1 to 20; when m is not less than 2, two or more of D may be the same or different; Ra is a monovalent organic group which has 1 to 20 carbon atoms and does not contain D; when m is not less than 2, two or more of Ra may be the same or different; m is an integer of from 1 to 4; Ry is a mono-, di-, tri- or tetra-valent organic group having 2 to 30 carbon atoms which has at least one selected from a basic functional group Y1 and/or a salt Y2 of the basic functional group and contains an aromatic ring structure, provided that a unit of —O—O— is not contained in the formulae (1) and (1-1).
摘要:
There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F2 laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.
摘要:
There is provided an optical material obtained from an organic composition which is suitable for an optical material in optical communication and comprises a fluorine-containing polymer having functional group and a rare earth metal ion, in which the fluorine-containing polymer having functional group has at least one ketone structure in its side chain and a maximum absorption coefficient of not more than 1 cm−1 in each wavelength range of from 1,290 to 1,320 nm, from 1,530 to 1,570 nm and from 600 to 900 nm and the rare earth metal ion is at least one selected from the group consisting of erbium (Er) ion, thulium (Tm) ion, praseodymium (Pr) ion, holmium (Ho) ion, neodymium (Nd) ion, europium (Eu) ion, dysprosium (Dy) ion, samarium (Sm) ion and cerium (Ce) ion.
摘要:
There are provided a fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and represented by the formula (1): and the formula (14): respectively, wherein X1 and X2 are the same or different and each is H or F; X3 is H, F, Cl or CF3; Rf1 and Rf2 are the same or different and each is a perfluoroalkyl group having 1 to 20 carbon atoms; Rf3 is a fluorine-containing alkylene group having 1 to 40 carbon atoms or a fluorine-containing alkylene group having ether bond which has 1 to 100 carbon atoms and the sum of carbon atom and oxygen atom of two or more; a is 0 or 1, a fluorine-containing polymer having a structural unit of the above-mentioned monomer and a composition for a photoresist. The monomer has good polymerizability, particularly radical polymerizability, and the polymer obtained by polymerizing the monomer has excellent optical characteristics and is useful as a base polymer for an antireflection film and for a composition for a resist.
摘要:
There is provided a method of forming a fine pattern by using a practicable fluorine-containing polymer which has a high transparency to exposure light having a short wavelength such as F2 laser and can undergo resolution of a fine pattern. The method comprises (I) a step for preparing a fluorine-containing polymer (A) having OH group which has a structural unit derived from a fluorine-containing norbornene derivative having OH group, (II) a step for preparing a fluorine-containing polymer (B) having a protective group by reacting a compound represented by X—CH2OR, wherein X is Cl, Br or I; R is a hydrocarbon group having 1 to 30 carbon atoms in which a part or the whole of hydrogen atoms may be substituted with fluorine atoms, with the above-mentioned fluorine-containing polymer (A) having OH group in the presence of a base, (III) a step for preparing a resist composition comprising (a) the above-mentioned fluorine-containing polymer (B) having a protective group, (b) a photoacid generator and (c) a solvent, (IV) a step for forming a resist film comprising the above-mentioned resist composition on a substrate or on a given layer on the substrate, (V) a step for exposing by selectively irradiating a given area of the resist film with energy rays, and (VI) a step for subjecting the exposed resist film to developing to selectively remove the exposed portion of the resist film, thus forming a fine pattern.
摘要:
There is provided a fluorine-containing polymer solid electrolyte which has an excellent ion-conducting property, is high in oxidation resistance, is stable electrochemically and thermally, has sufficient strength and is applicable to various electrochemical devices. The electrolyte comprises (A) a non-crystalline fluorine-containing polymer having, in a trunk chain and/or side chain of the polymer molecule, a structural unit D having five or more chained units derived from a fluorine-containing ether, (B) an electrolytic compound and (C) a solvent, and has an ionic conductivity of from 10−10 to 101 S/cm measured at 25° C. by an alternating current complex impedance method. The electrolyte is useful for various electrochemical devices.
摘要翻译:提供了具有优异的离子传导性,耐氧化性高,电化学和热稳定性好的含氟聚合物固体电解质,具有足够的强度并适用于各种电化学装置。 电解质包含(A)在聚合物分子的主链和/或侧链中具有5个以上来自含氟醚的链状单元的结构单元D(B)的非结晶性含氟聚合物 )电解化合物和(C)溶剂,并且在25℃下通过交替地测量的离子电导率为10 -10 -10 10 S / cm 当前复阻抗法。 电解质可用于各种电化学装置。
摘要:
Composite nickel fine powder comprises metal nickel fine particles, at least one member attached to the surface of the fine particles and selected from the group consisting of oxides and double oxides containing at least one metal element selected from the group consisting of the Groups 2 to 14 of the Periodic Table and whose atomic number falls within the range of from 12 to 82, and a saturated or unsaturated fatty acid supported on the surface of the nickel fine particles provided thereon with the oxide and/or double oxide attached thereto. The composite nickel fine powder is excellent in resistance to heat shrinkage, has a high tap density, and has characteristic properties suitable for use as a material for making a conductive paste.
摘要:
Vinyl ethers having a carboxyl group in a form of salt are stable and is usable as materials for fluorine-containing copolymers. The vinyl ethers can provide stable monomer compositions by mixing with vinyl ethers having a free carboxyl group when the former vinyl ethers are present in an amount of not less than 1% by mole of the latter vinyl ethers. The fluorine-containing copolymer prepared by copolymerizing fluoroolefins with the vinyl ethers are useful as aqueous coatings particularly electro dip coatings.
摘要:
Vinyl ethers having a carboxyl group in a form of salt are stable and is usable as materials for fluorine-containing copolymers. The vinyl ethers can provide sable monomer compositions by mixing with vinyl ethers having a free carboxyl group when the former vinyl ethers are present in an amount of not less than 1% by mole of the latter vinyl ethers. The fluorine-containing copolymer prepared by copolymerizing fluoroolefins with the vinyl ethers are useful as aqueous coatings particularly electro dip coatings.