摘要:
A polishing method and a compact apparatus for the method are presented for efficient production of a polished workpiece for manufacturing high technology devices. The polishing method comprises a first and second steps for polishing a work surface. In the first polishing step, the work surface is pressed against an abrading surface of a first polishing tool which is being rotated. In the second step, the work surface is pressed against a rubbing surface of a second polishing tool which is being moved in a planar translation motion relatively to the work surface.
摘要:
A polishing cloth is dressed between polishing processes each for polishing a workpiece such as a semiconductor wafer. The polishing cloth is dressed while supplying a dressing liquid such as water during a dressing process, and an abrasive liquid for polishing a workpiece is supplied to the polishing cloth for a predetermined period of time prior to a polishing process. The predetermined period of time may be present within the dressing process and immediately precedes the polishing process, and the dressing process may be carried out while supplying the abrasive liquid to the polishing cloth. Alternatively, the predetermined period of time may be present between the dressing process and the polishing process.
摘要:
A polishing apparatus for polishing a surface of an object such as a semiconductor wafer includes a turntable having a polishing cloth mounted on an upper surface thereof, a top ring for holding and pressing the object against the polishing cloth, and a plurality of radially arranged nozzles for supplying a polishing solution, containing abrasive material, of different concentrations that differ along a radial direction of the polishing cloth.
摘要:
A predetermined amount of liquid such as water is supplied to a backside surface of a workpiece such as a semiconductor wafer. Such liquid is a workpiece retaining liquid and is attached to a concave workpiece holding surface of a top ring. The workpiece is positioned between a turntable and the top ring and is polished by an abrasive cloth on the turntable while the workpiece is being pressed against the turntable by the top ring. While polishing, the workpiece is deformed toward the concave workpiece holding surface of the top ring, and a curvature of the deformed workpiece is controlled by the amount of liquid between the workpiece holding surface and the backside surface of the workpiece.
摘要:
An endpoint detection in a polishing process of a polishing object which has a first layer and a second layer, formed under the first layer, is performed by holding the polishing object on a top ring and pressing a surface of the first layer of the polishing object onto a polishing cloth mounted on a rotating turntable so as to remove the first layer, oscillating the top ring in contact with the turntable, periodically measuring a torque on the rotating turntable when the top ring is positioned at a specific radial location defined by a radius from a rotational center of the turntable, and determining the endpoint based on a change in the torque generated when the first layer is removed and the second layer comes into contact with the polishing cloth.
摘要:
A microbiological prevention of aflatoxin contamination in cereals and nuts is provided. Bacillus subtilis NK-330 and NK-C-3 effectively inhibit not only growth of aflatoxin-producing fungi including Aspergillus flavus and Aspergillus parasiticus but also production of aflatoxin by them.
摘要:
A document reading device including an image reader. The image reader includes a first reader to read a first image from a first face of a document fed by a document feeder and a second reader to read a second face of the document. An operation mode is switchable between a normal operation mode in which the image reader is in an operation enabled state and an energy-saving mode in which the image reader is in an operation stop state. In a return from the energy saving mode to the normal operation mode, the image reader performs a start-up operation including a first initial operation for returning the first reader to the normal operation mode and then performs a second initial operation for returning the second reader to the normal operation mode.
摘要:
A beverage container includes a container main body, an inner lid portion that covers the container main body, a spout portion which is formed on the inner lid portion and through which a beverage is discharged, a spout blocking portion 3a that blocks the spout portion, an outer lid portion disposed so as to be able to engage with and disengage from the inner lid portion, a ventilation portion that allows air to flow between the inside and the outside of the container main body, and a vent blocking portion formed on the outer lid portion or the inner lid portion to block the ventilation portion when the outer lid portion is placed to close the inner lid portion. A cancellation operation portion which cancels engagement between the outer lid portion and the inner lid portion is formed, and the beverage container further includes a ventilation adjusting protruding portion.
摘要:
An automatic document feeder comprises: a feeding unit that causes an image of a first side of a document to be read by a first image reading unit; a second image reading unit that reads an image of a second side of the document; a release unit that supports a reading guide opposite to a reading surface of the second image reading unit and enables underneath of the reading surface to be released; and a paper ejection tray on which the document having been subjected to image reading and ejected from a paper ejection roller pair is accumulated, wherein an end fence that rises up at a document ejection direction upstream side of the paper ejection tray is configured of separate members that are an upper portion and a lower portion, and a rotational pivot of the release unit is provided downstream from the end fence in a feeding direction.
摘要:
A sheet conveying device such as a feed mechanism includes a pick-up roller and a cover member. The pick-up roller feeds, into an apparatus, a sheet such as a document on a placing table such as a document placing table on which the sheet is placed. The cover member such as a pick-up cover covers the pick-up roller. The cover member is supported at both ends thereof on a shaft of the pick-up roller or on shaft bearings that receive the shaft of the pick-up roller.