公开(公告)号：US20050217577A1

公开(公告)日：2005-10-06

申请号：US11121919

申请日：2005-05-05

申请人： Kazuyuki Okuda ,  Yasushi Yagi ,  Toru Kagaya ,  Masanori Sakai

发明人： Kazuyuki Okuda ,  Yasushi Yagi ,  Toru Kagaya ,  Masanori Sakai

IPC分类号： C23C16/34 ,  C23C16/44 ,  C23C16/455 ,  C23C16/00

CPC分类号： C23C16/45523 ,  C23C16/345

摘要： A vertical type semiconductor device producing apparatus comprises a vertical type reaction chamber which is to accommodate a plurality of stacked substrates; an exhaust path which exhausts the reaction chamber, a vacuum exhaust device which exhausts the reaction chamber through the exhaust path; an exhaust valve which opens and closes the exhaust path; a first supply path which supplies a first kind of gas, which contributes to film formation, to the reaction chamber; a second supply path which supplies a second kind of gas, which contributes to the film formation, to the reaction chamber; a first and a second gas supply valves which respectively open and close the first and second supply paths; and a controller which controls the exhaust valve and the first and second gas supply valves such that when the first kind of gas is supplied to the reaction chamber, the first kind of gas is supplied to the reaction chamber from the first supply path in a state in which exhaust of the reaction chamber is being stopped to expose the plurality of substrates in the reaction chamber to the first kind of gas, and when the second kind of gas is supplied to the reaction chamber, the second kind of gas is supplied to the reaction chamber through the second supply path in a state in which the reaction chamber is being exhausted by the vacuum exhaust device to expose the plurality of substrates in the reaction chamber to the second kind of gas.

公开(公告)号：US06905549B2

公开(公告)日：2005-06-14

申请号：US10411092

申请日：2003-04-11

申请人： Kazuyuki Okuda ,  Yasushi Yagi ,  Toru Kagaya ,  Masanori Sakai

发明人： Kazuyuki Okuda ,  Yasushi Yagi ,  Toru Kagaya ,  Masanori Sakai

IPC分类号： C23C16/34 ,  C23C16/44 ,  C23C16/455 ,  C23C16/00

CPC分类号： C23C16/45523 ,  C23C16/345 ,  Y10T29/41

摘要： A vertical type semiconductor device producing apparatus comprises a vertical type reaction chamber which is to accommodate a plurality of stacked substrates; an exhaust path which exhausts the reaction chamber, a vacuum exhaust device which exhausts the reaction chamber through the exhaust path; an exhaust valve which opens and closes the exhaust path; a first supply path which supplies a first kind of gas, which contributes to film formation, to the reaction chamber; a second supply path which supplies a second kind of gas, which contributes to the film formation, to the reaction chamber; a first and a second gas supply valves which respectively open and close the first and second supply paths; and a controller which controls the exhaust valve and the first and second gas supply valves such that when the first kind of gas is supplied to the reaction chamber, the first kind of gas is supplied to the reaction chamber from the first supply path in a state in which exhaust of the reaction chamber is being stopped to expose the plurality of substrates in the reaction chamber to the first kind of gas, and when the second kind of gas is supplied to the reaction chamber, the second kind of gas is supplied to the reaction chamber through the second supply path in a state in which the reaction chamber is being exhausted by the vacuum exhaust device to expose the plurality of substrates in the reaction chamber to the second kind of gas.

摘要翻译： 垂直型半导体器件制造装置包括：垂直型反应室，其容纳多个堆叠的基板; 排出反应室的排气路径，通过排气路排出反应室的真空排气装置; 用于打开和关闭排气通道的排气阀; 向反应室供给有助于成膜的第一种气体的第一供给路径; 将有助于成膜的第二种气体供给到反应室的第二供给路径; 分别打开和关闭第一和第二供应路径的第一和第二供气阀; 以及控制器，其控制所述排气阀和所述第一和第二气体供给阀，使得当所述第一种气体被供应到所述反应室时，所述第一种气体在状态下从所述第一供给路径供应到所述反应室 其中停止反应室的排气以将反应室中的多个基板暴露于第一种气体，并且当将第二种气体供应到反应室时，将第二种气体供应到 在反应室被真空排气装置排出的状态下通过第二供给路径反应室，将反应室内的多个基板暴露于第二种气体。

公开(公告)号：US06497767B1

公开(公告)日：2002-12-24

申请号：US09570571

申请日：2000-05-12

申请人： Wataru Okase ,  Yasushi Yagi

发明人： Wataru Okase ,  Yasushi Yagi

IPC分类号： C23C1600

CPC分类号： H01L21/68735 ,  C23C16/4585 ,  C23C16/46 ,  C30B25/12 ,  C30B31/14 ,  H01L21/67115 ,  H01L21/68742

摘要： A thermal processing unit for a single substrate of the invention includes a processing chamber vessel whose inside can be made a predetermined atmosphere of a process gas, and an elevating shaft which can be moved up and down in the processing chamber vessel. A supporting body which can support a substrate is arranged on an upper end of the elevating shaft. The substrate supported by the supporting body is adapted to be heated by a heater. The supporting body has a circular supporting part which can support a substantially full surface of a peripheral area of the substrate, and a pushing-up member which can push up the substrate from on the supporting part for conveying the substrate. According to the invention, concentration of stress onto the substrate can be restrained, and a thermal process can be conducted uniformly within a surface of the substrate because heating from a peripheral area of the substrate may be restrained. In addition, the substrate can be easily conveyed although the substantially full surface of the peripheral area of the substrate is supported.

摘要翻译： 用于本发明的单个基板的热处理单元包括处理室容器，其内部可以被制成处理气体的预定气氛，以及可在处理室容器中上下移动的升降轴。 可以支撑基板的支撑体布置在升降轴的上端。 由支撑体支撑的基板适于被加热器加热。 支撑体具有能够支撑基板的周边区域的基本上整个表面的圆形支撑部，以及可以从用于输送基板的支撑部上推动基板的上推构件。 根据本发明，可以抑制对基板的应力集中，并且可以抑制从基板的周边区域的加热来在基板的表面内均匀地进行热处理。 此外，尽管基板的周边区域的基本上完整的表面被支撑，但是可以容易地传送基板。

公开(公告)号：US5651670A

公开(公告)日：1997-07-29

申请号：US341047

申请日：1994-11-16

申请人： Wataru Okase ,  Yasushi Yagi ,  Satoshi Kawachi

发明人： Wataru Okase ,  Yasushi Yagi ,  Satoshi Kawachi

IPC分类号： C23C16/458 ,  C23C16/46 ,  C23C16/48 ,  C30B25/10 ,  C30B25/12 ,  C30B31/12 ,  C30B31/14 ,  H01L21/00 ,  H01L21/205 ,  H01L21/314 ,  H01L21/677 ,  F27D5/00

CPC分类号： H01L21/67109 ,  C23C16/4583 ,  C23C16/46 ,  C23C16/463 ,  C23C16/481 ,  C30B25/10 ,  C30B25/12 ,  C30B31/12 ,  C30B31/14 ,  H01L21/67115 ,  H01L21/67745 ,  H01L21/67751

摘要： The present invention relates to a thermal processing method wherein a cylindrical process tube that has at one end an entrance/exit is provided at the other end thereof with a heat source, and thermal processing is performed on a workpiece which has been brought in from the entrance/exit of the process tube to a prescribed position therein. This thermal processing method and an apparatus therefor is characterized in that, when the workpiece is moved to the prescribed position, it is first moved to a proximity position that is closer to the heat source than the prescribed position, then it is returned therefrom to the prescribed position. The invention is further characterized in that, if the actual processing temperature at the prescribed position changes while the workpiece is undergoing thermal processing, the workpiece is moved such that the position of the workpiece with respect to the heat generation source is changed in order to return the processing temperature at the prescribed position to the prescribed processing temperature. This ensures that the temperature of the workpiece can be rapidly raised to the prescribed processing temperature and also that, if the temperature of the workpiece should change, it can be rapidly returned to the prescribed processing temperature.

摘要翻译： 本发明涉及一种热处理方法，其中在一端具有入口/出口的圆柱形处理管在其另一端设置有热源，并且对从已经从 处理管的入口/出口到其中的规定位置。 这种热处理方法及其装置的特征在于，当工件移动到规定位置时，首先将其移动到比规定位置更靠近热源的接近位置，然后从其返回到 规定的位置。 本发明的特征还在于，如果在工件进行热加工时在规定位置处的实际加工温度改变，则工件被移动，使得工件相对于发热源的位置改变以返回 在规定位置处理温度达规定处理温度。 这样可以确保工件的温度快速提高到规定的加工温度，而且如果工件的温度变化，则可以迅速地恢复到规定的加工温度。

公开(公告)号：US5048800A

公开(公告)日：1991-09-17

申请号：US563345

申请日：1990-08-07

申请人： Shinji Miyazaki ,  Takahiko Moriya ,  Yasushi Yagi ,  Mituaki Komino ,  Katuhiko Iwabuchi

发明人： Shinji Miyazaki ,  Takahiko Moriya ,  Yasushi Yagi ,  Mituaki Komino ,  Katuhiko Iwabuchi

IPC分类号： C23C16/54 ,  C30B25/10 ,  C30B31/12 ,  F27B17/00 ,  F27D1/00 ,  H01L21/00

CPC分类号： H01L21/67115 ,  C23C16/54 ,  C30B25/10 ,  C30B31/12 ,  F27B17/0025 ,  F27D1/0033

摘要： A vertical heat treatment apparatus includes a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside the reaction chamber, a manifold communicating with a lower portion of the reaction chamber to support the reaction chamber and a gas being supplied and exhausted through the mainfold, a hollow vessel, arranged together with the boat in the reaction furnace, for supporting a lower end of a boat having objects, and a plurality of first heat-insulating members detachably arranged in the hollow vessel, wherein the number of the first insulating members is adjusted to adjust a heat-insulating effect. The first heat-insulating member includes a fin unit constituted by fins horizontally arranged at predetermined intervals and spacers for keeping the intervals between the fins.

摘要翻译： 立式热处理装置包括由反应室构成的反应炉，该反应室具有内管和外管以及布置在反应室外部的加热器，与反应室的下部连通以支撑反应室的歧管和气体 通过主折叠供应和排出的中空容器，与反应炉中的船一起布置的用于支撑具有物体的船的下端的中空容器，以及可拆卸地布置在中空容器中的多个第一绝热构件，其中 调整第一绝缘构件的数量以调节绝热效果。 第一绝热构件包括由以预定间隔水平布置的翅片构成的翅片单元和用于保持翅片之间的间隔的间隔件。

公开(公告)号：US08958641B2

公开(公告)日：2015-02-17

申请号：US13805527

申请日：2011-06-20

申请人： Yasushi Yagi ,  Yasushi Makihara ,  Chunsheng Hua

发明人： Yasushi Yagi ,  Yasushi Makihara ,  Chunsheng Hua

IPC分类号： G06K9/00 ,  G06K9/32 ,  G06K9/46 ,  G06T7/20

CPC分类号： G06K9/3241 ,  G06K9/00369 ,  G06K9/00771 ,  G06K9/4647 ,  G06K2009/3291 ,  G06T7/215 ,  G06T7/269 ,  G06T2207/30196

摘要： A moving object detection device includes a window setting unit configured to set a window having a predetermined volume in a video, an orientation of spatial intensity gradient calculation unit configured to calculate, for each pixel included in the window, an orientation of spatial intensity gradient, a spatial histogram calculation unit configured to calculate a spatial histogram that is a histogram of the orientation of spatial intensity gradient within the window, an orientation of temporal intensity gradient calculation unit configured to calculate, for each pixel included in the window, an orientation of temporal intensity gradient, a temporal histogram calculation unit configured to calculate a temporal histogram that is a histogram of an orientation of temporal intensity gradient within the window, and a determination unit configured to determine whether or not the moving object is included within the window based on the spatial histogram and the temporal histogram.

摘要翻译： 移动物体检测装置包括：窗口设定单元，被配置为在视频中设置具有预定体积的窗口;空间强度梯度计算单元的方向，被配置为针对包括在窗口中的每个像素计算空间强度梯度的方向， 空间直方图计算单元，被配置为计算作为窗口内的空间强度梯度的取向的直方图的空间直方图，时间强度梯度计算单元的方位被配置为针对包括在窗口中的每个像素计算时间方向 强度梯度，时间直方图计算单元，其被配置为计算作为窗口内的时间强度梯度的取向的直方图的时间直方图;以及确定单元，被配置为基于所述窗口中的所述窗口来确定所述移动对象是否包括在所述窗口内 空间直方图和时间直方图。

公开(公告)号：US08576289B2

公开(公告)日：2013-11-05

申请号：US13377038

申请日：2011-03-17

申请人： Yasunori Ishii ,  Yusuke Monobe ,  Yasushi Yagi ,  Yasuhiro Mukaigawa

发明人： Yasunori Ishii ,  Yusuke Monobe ,  Yasushi Yagi ,  Yasuhiro Mukaigawa

IPC分类号： H04N5/228

CPC分类号： H04N5/23258 ,  G06T5/003 ,  H04N5/23267

摘要： Blur correction device (100) includes: a blur information generation unit (203) which generates blur information based on sensor data indicating camera motion; a blur correction unit (204) which corrects blur in a captured image, based on the blur information, to generate a candidate corrected image; an evaluation value calculation unit (205) which calculates an evaluation value indicating a blur correction level for the candidate corrected image; a termination judgment unit (206) which judges whether the blur correction should be terminated, based on a predetermined condition; and a blur information updating unit which updates the blur information, when the blur correction should not be terminated. When the blur information is updated, the blur correction unit (204) corrects the blur, based on the updated blur information, to generate a new candidate corrected image. When the blur correction should be terminated, the termination judgment unit (206) determines the corrected image from the candidate corrected images, based on the evaluation value.

摘要翻译： 模糊校正装置（100）包括：模糊信息生成单元（203），其基于指示相机动作的传感器数据生成模糊信息; 模糊校正单元，其基于所述模糊信息来校正拍摄图像中的模糊，以生成候选校正图像; 评估值计算单元，其计算表示候选校正图像的模糊校正水平的评估值; 基于预定条件判断模糊校正是否应终止的终止判断单元（206）; 以及当模糊校正不应终止时，模糊信息更新单元更新模糊信息。 当模糊信息被更新时，模糊校正单元（204）基于更新的模糊信息来校正模糊，以生成新的候选校正图像。 当模糊校正应该被终止时，终止判断单元206基于评估值从候选校正图像中确定校正图像。

公开(公告)号：US08538650B2

公开(公告)日：2013-09-17

申请号：US13564329

申请日：2012-08-01

申请人： Tomohiro Nozu ,  Ryohei Shigeta ,  Akira Kodama ,  Go Nagayama ,  Yasushi Yagi ,  Daisuke Kofu ,  Akihiro Tatara

发明人： Tomohiro Nozu ,  Ryohei Shigeta ,  Akira Kodama ,  Go Nagayama ,  Yasushi Yagi ,  Daisuke Kofu ,  Akihiro Tatara

IPC分类号： G06F7/00

CPC分类号： B60K23/0808 ,  B60K17/35

摘要： A driving force distribution control device mounted on a vehicle including an engine, a transmission device, a clutch engaging an output shaft of the engine with an input shaft of the transmission device, and a driving force transmission system capable of transmitting output of the transmission device to main and auxiliary drive wheels, includes: a control device obtaining a torque value to be transmitted to the auxiliary drive wheels, the control device reducing the torque value for a predetermined time when the vehicle is in a stopped state or in a state where a vehicle speed of the vehicle is lower than a predetermined value, and an increasing speed of engaging force of the clutch is equal to or greater than a predetermined value; and a driving force transmitting device transmitting torque depending on the obtained torque value to the auxiliary drive wheels.

摘要翻译： 一种驱动力分配控制装置，其安装在包括发动机，变速装置，与发动机的输出轴接合的离合器与变速装置的输入轴的车辆上，以及驱动力传递系统，其能够发送所述发送装置的输出 主辅助驱动轮包括：获取传递给辅助驱动轮的转矩值的控制装置，控制装置在车辆处于停止状态时将转矩值减小预定时间，或者在 车辆的车速低于预定值，并且离合器的接合力的增加速度等于或大于预定值; 以及驱动力传递装置，其根据获得的扭矩值向辅助驱动轮传递扭矩。

公开(公告)号：US20120147183A1

公开(公告)日：2012-06-14

申请号：US13391667

申请日：2011-06-24

申请人： Akio Nishimura ,  Tetsuro Okuyama ,  Yasushi Yagi

发明人： Akio Nishimura ,  Tetsuro Okuyama ,  Yasushi Yagi

IPC分类号： H04N7/18

CPC分类号： G02B13/06 ,  G02B17/061 ,  G03B37/06 ,  H04N5/2259 ,  H04N5/23238

摘要： To enable an image with no blind spot area to be obtained while ensuring a wide field of view, an omnidirectional imaging system includes: a primary mirror (101) including a hyperbolic mirror; a plurality of secondary mirrors (102) arranged around the primary mirror and each including a hyperbolic mirror; and a camera (104) that captures an image reflected by the primary mirror and images reflected by the plurality of secondary mirrors. A hyperboloid of the primary mirror and hyperboloids of the plurality of secondary mirrors have a substantially coincident outer focal point, and the camera (104) is placed so that a viewpoint of the camera substantially coincides with the outer focal point of the hyperboloid of the primary mirror (101) and the hyperboloids of the plurality of secondary mirrors (102), the viewpoint of the camera being an entrance pupil position of a lens attached to the camera (104).

摘要翻译： 为了在确保宽视场的同时能够获得没有盲区的图像，全向成像系统包括：主镜（101），包括双曲面镜; 多个辅助反射镜（102），其布置在主镜周围并且每个包括双曲面镜; 以及拍摄由主反射镜反射的图像和由多个次反射镜反射的图像的照相机（104）。 多个次级反射镜的主镜和双曲面的双曲面具有基本上重合的外焦点，并且相机（104）被放置成使得照相机的视点基本上与主要的双曲面的外焦点重合 反射镜（101）和多个次级反射镜（102）的双曲面，相机的视点是附接到相机（104）的透镜的入射光瞳位置。

公开(公告)号：US20120086822A1

公开(公告)日：2012-04-12

申请号：US13377038

申请日：2011-03-17

申请人： Yasunori Ishii ,  Yusuke Monobe ,  Yasushi Yagi ,  Yasuhiro Mukaigawa

发明人： Yasunori Ishii ,  Yusuke Monobe ,  Yasushi Yagi ,  Yasuhiro Mukaigawa

IPC分类号： H04N5/225

CPC分类号： H04N5/23258 ,  G06T5/003 ,  H04N5/23267

摘要： Blur correction device (100) includes: a blur information generation unit (203) which generates blur information based on sensor data indicating camera motion; a blur correction unit (204) which corrects blur in a captured image, based on the blur information, to generate a candidate corrected image; an evaluation value calculation unit (205) which calculates an evaluation value indicating a blur correction level for the candidate corrected image; a termination judgment unit (206) which judges whether the blur correction should be terminated, based on a predetermined condition; and a blur information updating unit which updates the blur information, when the blur correction should not be terminated. When the blur information is updated, the blur correction unit (204) corrects the blur, based on the updated blur information, to generate a new candidate corrected image. When the blur correction should be terminated, the termination judgment unit (206) determines the corrected image from the candidate corrected images, based on the evaluation value.

摘要翻译： 模糊校正装置（100）包括：模糊信息生成单元（203），其基于指示相机动作的传感器数据生成模糊信息; 模糊校正单元，其基于所述模糊信息来校正拍摄图像中的模糊，以生成候选校正图像; 评估值计算单元，其计算表示候选校正图像的模糊校正水平的评估值; 基于预定条件判断模糊校正是否应终止的终止判断单元（206）; 以及当模糊校正不应终止时，模糊信息更新单元更新模糊信息。 当模糊信息被更新时，模糊校正单元（204）基于更新的模糊信息来校正模糊，以生成新的候选校正图像。 当模糊校正应该被终止时，终止判断单元206基于评估值从候选校正图像中确定校正图像。