摘要:
The present invention provides a polishing pad which can improve qualities of an object to be polished by improving the flatness of the object. A polishing surface 1a of a polishing pad 1 is subjected to a mechanical process, such as buffing, so that the flatness of the surface is improved, and corrugations on the polishing surface have a cycle of 5 mm-200 mm and a largest amplitude of 40 μm or less. As a result, the flatness of the object polished by the polishing pad 1, such as a silicon wafer, is improved.
摘要:
A technique used for a semiconductor device formed by stacking multiple structural bodies each having a semiconductor device, for preventing generation of thermal load on a structural body at a lower layer which is caused by a laser used in a step of forming a structural body at an upper layer. In a phase-change memory including multiple stacked memory matrices, a metal film is disposed between a memory matrix at a lower layer and a memory matrix at an upper layer formed over the memory matrix at the lower layer, in which the laser used for forming the memory matrix is reflected at the metal film and prevented from transmitting the metal film, thereby preventing the phase-change material layer, etc. in the memory matrix at the lower layer from being directly heated excessively by the laser.
摘要:
The present invention provides a polishing pad which can improve qualities of an object to be polished by improving the flatness of the object. A polishing surface 1a of a polishing pad 1 is subjected to a mechanical process, such as buffing, so that the flatness of the surface is improved, and corrugations on the polishing surface have a cycle of 5 mm-200 mm and a largest amplitude of 40 μm or less. As a result, the flatness of the object polished by the polishing pad 1, such as a silicon wafer, is improved.
摘要:
In a servo operation, position-controlling light, which is red light, is projected onto a recording medium so as to converge to a minimum diameter on a reflecting surface of the recording medium. In a recording operation, information light and recording-specific reference light, each of which is green light, are projected coaxially onto one side of an information recording layer of the recording medium so as to converge to a minimum diameter at an identical position located off the reflecting surface. Information is recorded in the information recording layer in the form of an interference pattern resulting from interference between the information light yet to impinge on the reflecting surface and the recording-specific reference light reflected by the reflecting surface and an interference pattern resulting from interference between the recording-specific reference light yet to impinge on the reflecting surface and the information light reflected by the reflecting surface.
摘要:
Spherical graphite cast iron utilized to prepare a lapping tool is manufactured by casting a molten composition into a mold cavity, and by chilling one side of the resulting casting thereby causing unidirectional solidification, the one side being used as the operating surface of the lapping tool. The molten composition consists of 3.0-3.8 wt. % of carbon, 2.0-2.9 wt. % of silicon, 0.3-0.9 wt. % of manganese, less than 0.05 wt. % of phosphorus, less than 0.03 wt. % of sulfur, 0.2-1.0 wt. % of nickel, 0-0.8 wt. % of copper, 0.05-0.5 wt. % of molybdenum, 0.03-0.09 wt. % of magnesium and the balance of iron. The lapping tool made of this casting has a percentage of sphericity of higher than 80%, graphite particle diameter of less than 100 microns, a density of graphite particles of larger than 70/mm.sup.2, and a Vickers hardness of larger than 200.
摘要:
A vehicular input manipulation apparatus has a target parameter switchover manipulating device and a setup changeover manipulating device in order to change setup contents of several control parameters for drive control of an in-vehicle apparatus. The target parameter switchover manipulating device executes switchover to designate one of the control parameters as a change target control parameter. The setup changeover manipulating device changes a setup content relative to the change target control parameter. When a control mode of the in-vehicle apparatus is changed into a predetermined control mode, a control circuit automatically enforces switchover relative to the change target control parameter by automatically replacing the control parameter, which has been designated as the change target control parameter, with an enforcement change target control parameter, which is a predetermined control parameter associated with the predetermined control mode.
摘要:
A phase change memory is formed of a plug buried within a through-hole in an insulating film formed on a semiconductor substrate, an interface layer formed on the insulating film in which the plug is buried, a recording layer formed of a chalcogenide layer formed on the interface layer, and an upper contact electrode formed on the recording layer. The recording layer storing information according to resistance value change is made of chalcogenide material containing indium in an amount range from 20 atomic % to 38 atomic %, germanium in a range from 9 atomic % to 28 atomic %, antimony in a range from 3 atomic % to 18 atomic %, and tellurium in a range from 42 atomic % to 63 atomic %, where the content of germanium larger than or equal to the content of antimony.
摘要:
An optical disc recording medium of the present invention comprises a first substrate (11) having a physically pre-formatted surface; a reflective film (12) formed on the pre-formatted surface of the first substrate (11); a transparent layer (13) with a thickness of 50-430 μm formed on the reflective film (12); a second substrate (15) composed of transparent material and located at a distance of certain spacing from the transparent layer (13); and a recording layer (14) for hologram recording filled between the transparent layer (13) and the second substrate (15).
摘要:
The present invention makes it possible to acquire image information required for displaying a three-dimensional image of an object in a space with a simple configuration and to achieve display of a stereoscopic dynamic image in a true sense with a simple configuration. Light from an object (10) impinges upon a deflecting plate (11). Among the incident beams of light, the deflecting plate (11) allows beams of light at a predetermined angle to the plane of the deflecting plate (11) to pass, the beams exiting as parallel beams of light perpendicular to the plane of the deflecting plate (11). The light passes through a converging lens (12), a pinhole member (13), and a converging lens (14) to impinge upon a CCD (15). An angle of incident light selected by the deflecting plate (11) is sequentially changed as time passes. Therefore, image information output by the CCD (15) becomes plural pieces of two-dimensional image information for which the photographing direction changes as time passes and which serve as image information required for displaying a three-dimensional image of the object in a space.
摘要:
Spherical graphite cast iron utilized to prepare a lapping tool is manufactured by casting a molten composition into a mold cavity, and by chilling one side of the resulting casting thereby causing unidirectional solidification, the one side being used as the operating surface of the lapping tool. The molten composition consists essentially of 3.0-3.8 wt. % of carbon, 2.0-2.9 wt. % of silicon, 0.3-0.9 wt. % of manganese, less than 0.05 wt. % of phosphorus, less than 0.03 wt. % of sulfur, 0.2-1.0 wt. % of nickel, 0-0.8 wt. % of copper, 0.05-0.5 wt. % of molybdenum, 0.03-0.09 wt. % of magnesium and the balance of iron. The lapping tool made of this casting has a percentage of sphericity of higher than 80%, graphite particle diameter of less than 100 microns, a density of graphite particles of larger than 70/mm.sup.2, and a Vickers hardness of larger than 200.