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公开(公告)号:US20240319617A1
公开(公告)日:2024-09-26
申请号:US18578168
申请日:2022-06-28
Applicant: ASML Holding N.V.
Inventor: Mohamed SWILLAM , Wei GUO , Stephen ROUX
IPC: G03F7/00 , G01N21/956 , G02F1/295
CPC classification number: G03F7/706849 , G01N21/956 , G02F1/2955 , G03F7/7065 , G03F7/706837 , G03F7/706845 , G03F7/706847 , G03F7/70925 , G01N2201/068
Abstract: A metrology system includes a radiation source (708), a phased array (722a,b;724a,b;726;734), a detector, and a comparator. The phased array includes optical elements (706), waveguides (704), and phase modulators (702). The phased array generates a beam of radiation and directs the beam toward a surface of an object. The optical elements radiate radiation waves. The waveguides guide radiation from the radiation source to the optical elements. The phase modulators adjust phases of the radiation waves such that the radiation waves combine to form the beam. The detector receives radiation scattered from the surface and generates a detection signal based on the received radiation. The comparator analyzes the detection signal and determines a location of a defect on the surface based on the analyzing.
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公开(公告)号:US12078911B2
公开(公告)日:2024-09-03
申请号:US17754358
申请日:2020-10-05
Applicant: University of Rochester
Inventor: Hui Wu
CPC classification number: G02F1/2955 , G01S7/4817 , G01S7/4814 , G02F2202/105
Abstract: Methods of manufacturing and operating a monolithically integrated optical phase array (OPA) chip device, and the device itself. A three-dimensional (3-D) integrated optical phase array (OPA) chip device. A system of complementary metal-oxide-semiconductor (CMOS) electronics integrated with a three-dimensional integrated optical array chip device. A method of three-dimension photonic integration to improve optical power in optical phase arrays.
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公开(公告)号:US20240219807A1
公开(公告)日:2024-07-04
申请号:US18609559
申请日:2024-03-19
Applicant: e-Vision Smart Optics, Inc.
Inventor: Anthony Van Heugten
CPC classification number: G02F1/2955 , G02B27/0172 , G02C7/022 , G02C7/041 , G02C7/083 , G02F1/133502 , G02F2203/24
Abstract: A beam steering device includes a substrate with a first refractive index that defines a cavity, an electroactive material in the cavity that has a variable refractive index, and two sets of opposing overlays. The overlays in one set of opposing overlays are parallel to each other, while the overlays in the other set are tilted with respect to each other. This allows one or more electric fields between the overlays to be used to align the electroactive material in two different directions to change its refractive index, allowing for a faster speed of beam steering through refraction than conventional approaches.
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公开(公告)号:US11809060B2
公开(公告)日:2023-11-07
申请号:US16964782
申请日:2019-01-24
Applicant: Robert Bosch GmbH
Inventor: Pedram Lajevardi , Behnam Behroozpour , Christoph Lang , Ken Wojciechowski
CPC classification number: G02F1/2955 , G02F1/025
Abstract: A phase-shifter for a light-transmitting waveguide is segmented into multiple segments that can be calibrated to the overall length of a conventional single phase-shifter. Each segment receives a control signal, which can be a single bit signal, with the phase-shift capability of the segmented phase-shifter controlled by which segment(s) receive(s) a control signal. In one implementation, a binary weighting is applied to determine segment lengths. Smaller segments can be increased in length to achieve a 2π offset of the phase shift produced by the segment while maintaining the same binary relationship among segments. In another embodiment, multiple segments of uniform lengths can be used for a single phase-shifter with each segment controlled by an n-bit signal.
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公开(公告)号:US11803095B2
公开(公告)日:2023-10-31
申请号:US17902500
申请日:2022-09-02
Applicant: Minzu University of China
Inventor: Genxiang Chen , Yunshu Gao , Nan Wang , Bing Yu , Qian Cui , Shengjuan Peng
CPC classification number: G02F1/2955 , G02B6/3556 , G02F2203/05 , G02F2203/12 , G02F2203/30
Abstract: A method for implementing folding M×N wavelength selective switch is provided. A one-dimensional single-mode fiber optic collimator array, a short-focus cylindrical mirror, a first long-focus cylindrical mirror, a retroreflector, a transmission phase diffraction grating, a second long-focus cylindrical mirror, a liquid crystal spatial light modulator, and a liquid crystal graphic loading control system are provided along beam transmission direction. The same set of optical elements is used for incident light and outgoing light by ingenious folding structure. The input port and output port of optical signal are consistent in spatial arrangement, thereby reducing space and improving port utilization. Based on composite liquid crystal chips, a working area of the liquid crystal spatial light modulator is doubled, and a quantity of accommodating ports is greatly increased. A quantity of M×N ports of the WSS can be increased greatly by the above structure and design.
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46.
公开(公告)号:US20230291483A1
公开(公告)日:2023-09-14
申请号:US18197751
申请日:2023-05-16
Applicant: ZHEJIANG LAB
Inventor: Qiang ZHANG , Hui YU
CPC classification number: H04B10/60 , G02F1/2955 , G02F1/311 , G02F1/3131 , G02F2202/10 , G02F2201/307 , G02F2203/70 , G02F2201/06 , G02F2201/205 , G02F2203/58
Abstract: A programmable two-dimensional simultaneous multi-beam optically operated phased array receiver chip is manufactured based on silicon-on-insulator (SOI) and indium phosphide (InP) semiconductor manufacturing processes, including the SiN process. The InP-based semiconductor is used for preparing a laser array chip and a semiconductor optical amplifier array chip, the SiN is used for preparing an optical power divider, and the SOI semiconductor is used for preparing a silicon optical modulator, a germanium-silicon detector, an optical wavelength multiplexer, a true delay line, and other passive optical devices. The whole integration of the receiver chip is realized through heterogeneous integration of the InP-based chip and the SOI-based chip. Simultaneous multi-beam scanning can be realized through peripheral circuit programming control. The chip not only can realize two-dimensional multi-beam scanning, but also has strong expansibility, such that the chip can be used for ultra-wideband high-capacity wireless communication and simultaneous multi-target radar recognition systems.
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47.
公开(公告)号:US11681143B2
公开(公告)日:2023-06-20
申请号:US16942418
申请日:2020-07-29
Applicant: DigiLens Inc.
Inventor: Jonathan David Waldern , Alastair John Grant , Milan Momcilo Popovich
CPC classification number: G02B27/0081 , G02B6/005 , G02B6/0026 , G02F1/2955 , G02F2203/24
Abstract: Systems and methods for multiplying the resolution and field-of-view of pixelated displays in accordance with various embodiments of the invention are illustrated. One embodiment includes an apparatus having an image projector for directing light from a pixelated image source into unique angular directions, an image processor electrically connected to the image projector for computing native images of the image source corresponding to first and second field-of-view portions and for computing shifted images in a predefined direction corresponding to the first and second field-of-view portions for sequential display by the image projector, a first set of gratings having a native configuration for propagating the light of the native image and at least one shifted configuration for propagating the light of at least one shifted image, and a second set of gratings having a first configuration for projecting the first field-of-view portion and a second configuration for projecting the second field-of-view portion.
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公开(公告)号:US20190094651A1
公开(公告)日:2019-03-28
申请号:US16132412
申请日:2018-09-15
Applicant: ANALOG PHOTONICS LLC
Inventor: Erman TIMURDOGAN , Ehsan HOSSEINI , Michael WATTS , Michael WHITSON
CPC classification number: G02F1/335 , G02F1/2955
Abstract: Aspects of the present disclosure describe optical structures and devices, and more particularly to improved, tunable optical structures including optical gratings that are dynamically affected and/or tuned by acousto-optic or electro-optic mechanisms.
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公开(公告)号:US20180136540A1
公开(公告)日:2018-05-17
申请号:US15805794
申请日:2017-11-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jaechul Park
CPC classification number: G02F1/2955 , B81B7/0003 , G02B6/3596 , G02B6/4257
Abstract: A beam steering device and a system employing the same are provided. The beam steering device includes: waveguides provided on a substrate to form channels through which light is transmitted; a modulators provided on the waveguides and configured to change, according to electrical signals, a phase of the light by changing a refractive index of the light which passes through the waveguides; and a driving circuit configured to provide the electrical signals to the modulators to drive the modulators.
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公开(公告)号:US20180113303A1
公开(公告)日:2018-04-26
申请号:US15796169
申请日:2017-10-27
Applicant: DIGILENS, INC.
Inventor: Milan Momcilo POPOVICH , Jonathan David WALDERN , Alastair John GRANT
IPC: G02B27/00 , G02F1/313 , F21V8/00 , G02B6/34 , G02B6/42 , G02F1/295 , G02B27/01 , A61B3/113 , G02F1/29 , G02F1/1334 , G02B5/18 , H04N5/33 , G06K9/00
CPC classification number: G02B27/0093 , A61B3/113 , G02B5/18 , G02B6/0016 , G02B6/34 , G02B6/4287 , G02B27/017 , G02B27/0172 , G02B2027/0138 , G02B2027/014 , G02B2027/0174 , G02B2027/0187 , G02F1/13342 , G02F1/292 , G02F1/2955 , G02F1/3132 , G02F2001/294 , G02F2201/16 , G02F2201/30 , G02F2201/302 , G02F2201/305 , G02F2201/307 , G02F2203/24 , G02F2203/28 , G02F2203/62 , G06K9/0061 , H04N5/33
Abstract: An eye tracker comprises a light source; a detector; and first and second waveguides. The first waveguide comprises an input coupler for coupling source light into a waveguide path and a first grating for coupling light out of the waveguide path onto an eye. The second waveguide comprises a second grating for coupling light reflected from the eye into a waveguide path and an output coupler for coupling light out of the waveguide path onto the detector. The second grating is optically configured for imaging the eye onto the detector.
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