公开(公告)号：US20060203204A1

公开(公告)日：2006-09-14

申请号：US11348338

申请日：2006-02-07

申请人： Byung-cheol Yu

发明人： Byung-cheol Yu

IPC分类号： G03B21/16

CPC分类号： H04N9/3155 ,  G03B27/72 ,  G09G3/3413 ,  G09G2310/0235 ,  G09G2320/041 ,  G09G2320/0633 ,  G09G2320/064 ,  G09G2320/0666

摘要： An image projection apparatus for adjusting a white balance in consideration of a temperature of an LED and a method thereof. The image projection apparatus includes a light source unit to sequentially emit lights generated by a red (R)-light emitting element, a green (G)-light emitting element, and a blue (B)-light emitting element. Light levels of the R-light emitting element, the G-light emitting element and the B-light emitting element change depending on changes in temperature. An image generation unit generates an image using the lights sequentially emitted from the light source unit and projects the image. A driving unit drives the light source unit and the image generation unit. A temperature sensor measures a temperature of the light source unit, and a controller controls a driving operation of the driving unit based on the temperature of the light source unit measured by the temperature sensor to adjust a white balance of the image projected from the image generation unit.

摘要翻译： 考虑到LED的温度来调整白平衡的图像投影装置及其方法。 图像投影装置包括：顺序地发射由红色（R）光发射元件，绿色（G）光发射元件和蓝色（B））光发射元件产生的光的光源单元。 R发光元件，G发光元件和B发光元件的亮度随温度变化而变化。 图像生成单元使用从光源单元顺序发射的光来投影图像。 驱动单元驱动光源单元和图像生成单元。 温度传感器测量光源单元的温度，并且控制器基于由温度传感器测量的光源单元的温度来控制驱动单元的驱动操作，以调整从图像生成投影的图像的白平衡 单元。

公开(公告)号：US07002665B2

公开(公告)日：2006-02-21

申请号：US10781652

申请日：2004-02-20

申请人： Takashi Sato ,  Satoshi Tanaka ,  Ayako Nakano

发明人： Takashi Sato ,  Satoshi Tanaka ,  Ayako Nakano

IPC分类号： G03B27/42

CPC分类号： G03B27/72 ,  G03F7/705

摘要： An aspect of the present invention provides simulation that includes dividing a surface of a substrate onto which light that is focused at an aperture angle by a projection lens is shone into a first region onto which all of the light strikes and a second region onto which a portion of the light strikes, calculating an intensity of the light shone onto the first region, and calculating an intensity of the light shone onto the second region.

摘要翻译： 本发明的一个方面提供了一种模拟，其包括将基板的表面划分成以投影透镜在孔径角聚焦的光照射到所有光照射到的第一区域和第二区域上， 计算光照射到第一区域上的光的强度，并计算第二区域上的光的强度。

公开(公告)号：US20050264785A1

公开(公告)日：2005-12-01

申请号：US10854634

申请日：2004-05-27

申请人： Michael Albert

发明人： Michael Albert

IPC分类号： G03F7/20 ,  G02B27/10 ,  G03B27/72 ,  H01L21/027

CPC分类号： G03F7/7055 ,  G03B27/72

摘要： A pulse stretcher with a first prism and a second prism positioned opposite each other. A first coupling prism is optically coupled to the first prism with a partially reflective interface that directs a beam towards the second prism in a helical path. The first prism and the first coupling prism form a beamsplitter. A recirculating prism (or a reflective element) reflects the beam from the first prism into the second prism. Mirrors are positioned around the first and second prisms to permit recirculation of the beam through the first and second prisms. The partially reflective interface is about 80-95% reflective. The beam recirculates through the first and second prisms using two or four (or more) helical paths. The mirrors include convex and concave mirrors. The first and second prisms and the recirculating prism can be a unitary component. The pulse stretcher can be incorporated into a lithographic system that is arranged, in order of light propagation, with an illumination source, the pulse stretcher, illumination optics, a reticle, and projection optics.

摘要翻译： 一种具有第一棱镜和相对定位的第二棱镜的脉冲展开器。 第一耦合棱镜通过部分反射接口光学耦合到第一棱镜，所述部分反射接口将光束以螺旋形路径引向第二棱镜。 第一棱镜和第一耦合棱镜形成分束器。 再循环棱镜（或反射元件）将来自第一棱镜的光束反射到第二棱镜中。 反射镜围绕第一和第二棱镜定位，以允许光束再循环通过第一和第二棱镜。 部分反射界面反射率约为80-95％。 光束使用两个或四个（或更多个）螺旋路径再循环通过第一和第二棱镜。 镜子包括凸面和凹面镜。 第一和第二棱镜和再循环棱镜可以是整体部件。 脉冲展开器可以并入光刻系统中，该光刻系统以光传播的顺序与照明源，脉冲展开器，照明光学器件，标线片和投影光学器件一起布置。

公开(公告)号：US20050213071A1

公开(公告)日：2005-09-29

申请号：US11090150

申请日：2005-03-28

申请人： Takeshi Fukuda

发明人： Takeshi Fukuda

IPC分类号： G02B26/00 ,  G03B21/13 ,  G03B27/72 ,  G03F7/20

CPC分类号： G03B27/72 ,  G03B21/13 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358

摘要： An exposing device including means which has a plurality of pixels and modulates, per pixel, an optical beam irradiated from a light source, for exposing a plotted image on an exposure surface by modulating, per pixel, the plurality of pixels of the modulating means based on image data, the multi beam exposing device comprising: beam position detecting means for detecting exposure point positional information pertaining to an optical beam irradiated on the exposure surface from predetermined pixels to be measured of the modulating means; and positional deviation calculating means for calculating a relative positional deviation between positional information pertaining to the pixels to be measured of the modulating means and exposure point positional information pertaining to each of the optical beams projected at the exposure surface from each of the pixels to be measured detected by the use of the beam position detecting means, based on the two positional informations.

摘要翻译： 一种曝光装置，包括具有多个像素并且每像素调制从光源照射的光束的装置，用于通过每像素调制调制装置的多个像素来曝光曝光表面上的绘制图像 所述多光束曝光装置包括：光束位置检测装置，用于从所述调制装置的待测定的像素检测与照射在所述曝光表面上的光束有关的曝光点位置信息; 以及位置偏差计算装置，用于计算与待测量的像素相关的位置信息与调制装置的每个被测量的投影在曝光表面上的每个光束的曝光点位置信息之间的相对位置偏差 通过使用光束位置检测装置，基于两个位置信息来检测。

公开(公告)号：US06930758B2

公开(公告)日：2005-08-16

申请号：US09797961

申请日：2001-03-05

申请人： Karl-Heinz Schuster ,  Christian Wagner ,  Martin Schriever

发明人： Karl-Heinz Schuster ,  Christian Wagner ,  Martin Schriever

IPC分类号： G02B19/00 ,  G02B5/30 ,  G02B17/08 ,  G02B27/28 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G03B27/54 ,  G03B27/42

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G02B27/28 ,  G03B27/72 ,  G03F7/70125 ,  G03F7/70225 ,  G03F7/70566

摘要： A method and an arrangement for microlithographic projection exposure at high aperture achieve a contrast increase by the polarization of the light perpendicular to the plane of incidence on the resist. Arrangements are provided which influence the tangential polarization or the linear polarization adapted to the dipole illumination in the illuminating system and in the reduction objective.

公开(公告)号：US06867847B2

公开(公告)日：2005-03-15

申请号：US10615487

申请日：2003-07-07

申请人： Ulrich Klüter

发明人： Ulrich Klüter

IPC分类号： G03B27/72 ,  G03B27/54 ,  G03B27/42

CPC分类号： G03B27/72 ,  G03B27/722

摘要： In an apparatus for producing images on a light-sensitive material, the graphic information content for an image that is to be projected onto the light-sensitive material is divided into individual pixels. The projected image is composed of mutually offset partial images that are represented in a transmissive device consisting of an array of transmissive elements. The apparatus includes a light source that generates light rays passing through the transmissive device, an illumination device that bundles the light rays into light beams before they pass through the transmissive device, and a projection objective that projects the light beams telecentrically onto the light-sensitive material.

摘要翻译： 在用于在感光材料上产生图像的装置中，要投影到感光材料上的图像的图形信息内容被分成单独的像素。 投影图像由在由透射元件阵列组成的透射装置中表示的相互偏移的部分图像组成。 该装置包括产生通过透射装置的光线的光源，在通过透射装置之前将光束束入光束的照明装置以及将光束以中心方向投射到光敏部件上的投影物镜 材料。

公开(公告)号：US20050041232A1

公开(公告)日：2005-02-24

申请号：US10883007

申请日：2004-07-02

申请人： Tetsuya Yamada ,  Atsushi Ueno ,  Takashi Okagawa ,  Ritsuko Ueno

发明人： Tetsuya Yamada ,  Atsushi Ueno ,  Takashi Okagawa ,  Ritsuko Ueno

IPC分类号： G02B5/30 ,  G03B27/72 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03B27/72 ,  G03F7/70308

摘要： The directions of amplitude of polarized light passing through a polarizer are concentric around a position. The polarizer is disposed on the surface of a pupil such that the position lies exactly on the center of the surface of the pupil. Rays of luminous flux of illumination light converted into polarized light by the polarizer are converged onto a wafer with concentric planes of polarization with respect to an optical axis. The illumination light is therefore incident on a photoresist as s-polarized light. Thus, the amount of light entering the photoresist is less likely to depend upon the angle of incidence. Consequently, the contrast of an optical image formed in the photoresist is improved, and hence, resolution characteristics are improved.

摘要翻译： 通过偏振器的偏振光的振幅方向在位置周围同心。 偏振器设置在瞳孔的表面上，使得位置恰好位于瞳孔表面的中心。 通过偏振器转换为偏振光的照明光的光通量的光线会聚到具有相对于光轴的同心圆偏振平面的晶片上。 因此照明光作为s偏振光入射到光致抗蚀剂上。 因此，进入光致抗蚀剂的光的量不太可能取决于入射角。 因此，改善了在光致抗蚀剂中形成的光学图像的对比度，因此提高了分辨率特性。

公开(公告)号：US06850313B2

公开(公告)日：2005-02-01

申请号：US10435031

申请日：2003-05-12

申请人： Jun Ishikawa ,  Hiroyuki Nagasaka ,  Naomasa Shiraishi

发明人： Jun Ishikawa ,  Hiroyuki Nagasaka ,  Naomasa Shiraishi

IPC分类号： G03B27/72 ,  G03B27/54

CPC分类号： G03B27/72 ,  G03F7/70558

摘要： The energy amount of the energy beam passing through the illumination optical system is detected with the first photosensor, whereas the energy amount of the energy beam EL passing through at least a portion of the projection optical system PL is detected. And in accordance with the detection results, the main controller controls the exposure amount provided on the substrate during exposure. In the case the transmittance of the energy beam in the optical path from the first photosensor to the substrate surface (image plane) changes, this change is substantially precisely reflected to a value obtained by dividing the detection value of the second photosensor by the detection value of the first photosensor and normalizing the result. Accordingly, the transmittance change of the optical system in the optical path can be substantially cancelled out, allowing an exposure amount control with high precision.

摘要翻译： 通过第一光传感器检测通过照明光学系统的能量束的能量，而检测通过投影光学系统PL的至少一部分的能量束EL的能量。 并且根据检测结果，主控制器控制曝光期间在基板上提供的曝光量。 在从第一光电传感器到基板表面（图像平面）的光路中的能量束的透射率改变的情况下，该变化基本上精确地反映到通过将第二光电传感器的检测值除以检测值 的第一个光电传感器和归一化结果。 因此，可以基本抵消光路中的光学系统的透射率变化，能够高精度地进行曝光量控制。

公开(公告)号：US06580490B1

公开(公告)日：2003-06-17

申请号：US09699552

申请日：2000-10-30

申请人： Victor C. Wong ,  Badhri Narayan ,  Sujatha Ramanujan ,  Dan S. Talbot

发明人： Victor C. Wong ,  Badhri Narayan ,  Sujatha Ramanujan ,  Dan S. Talbot

IPC分类号： G03B2752

CPC分类号： G03B27/72

摘要： A printer (100) able to print in a plurality of output formats depending on width of media (160) loaded in the printer (100) is disclosed. The printer (100) provides high resolution and grayscale imaging capability for monochromatic applications. Illumination optics (11) receive a source light beam, from one or more LEDs, uniformize and polarize the beam and direct the beam through a polarization beamsplitter (50). The polarization beamsplitter (50) directs one polarization state of light to one or more LCD spatial light modulators (52), which modulate the polarization of the polarized beam to provide output exposure energy suitable for image marking on media (160). An optional sensor (234) allows printer (100) to automatically detect the width of a given type of media (160) in order to select from a set of compatible output format. Multiple segments of media (160) at the image plane (150) simultaneously.

摘要翻译： 公开了一种能够根据加载在打印机（100）中的介质（160）的宽度以多种输出格式打印的打印机（100）。 打印机（100）为单色应用提供高分辨率和灰度成像能力。 照明光学器件（11）接收来自一个或多个LED的源光束使光束均匀化和极化，并将光束引导通过偏振分束器（50）。 偏振分束器（50）将一种偏振态光引导到一个或多个LCD空间光调制器（52），其调制偏振光束的偏振，以提供适合于在介质（160）上的图像标记的输出曝光能量。 可选的传感器（234）允许打印机（100）自动检测给定类型的介质（160）的宽度，以便从一组兼容的输出格式中进行选择。 同时在图像平面（150）处的多个介质段（160）。

公开(公告)号：US06552778B1

公开(公告)日：2003-04-22

申请号：US09630392

申请日：2000-08-01

申请人： Tatsuya Konagaya

发明人： Tatsuya Konagaya

IPC分类号： G03B2772

CPC分类号： G02B26/123 ,  G03B27/72 ,  G06T5/005 ,  G06T5/50 ,  G06T2207/10008 ,  G06T2207/10024 ,  G06T2207/10048

摘要： A CCD scanner is provided with a halogen lamp for irradiating illumination light for reading a frame image on a photographic film, and a halogen lamp for irradiating infrared light via an infrared light filter for detecting scratches and the like on the film surface, and the optical axes of the respective light sources are coincided by a half mirror. A diffusion plate turret is also provided for selectively placing each of a plurality of diffusion plates for diffusing the illumination light near the photographic film. As a result, it is possible to perform both an image reading that doubles as an erasure of scratching on the film surface using visible light having different degrees of diffusion and a detection of scratches and the like using infrared light.

摘要翻译： CCD扫描器具有卤素灯，用于照射用于读取照相胶片上的帧图像的照明光;以及卤素灯，用于经由用于检测膜表面上的划痕等的红外光滤光器照射红外光，并且光学 各个光源的轴与半反射镜一致。 还提供扩散板转塔，用于选择性地放置多个扩散板中的每一个用于将照明光扩散到照相胶片附近。 结果，可以使用具有不同扩散程度的可见光和使用红外光检测划痕等，同时执行兼作擦除刮擦的图像读取。