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    Spatter ion pump
    41.
    发明授权
    Spatter ion pump 失效
    飞溅离子泵

    公开(公告)号：US06616417B2

    公开(公告)日：2003-09-09

    申请号：US09959879

    申请日：2001-11-09

    Applicant: Guo Hua Shen

    Inventor： Guo Hua Shen

    IPC: H02K4400

    CPC classification number: H01J41/18 ,  H01J27/08 ,  H01J2237/1825

    Abstract: The sputter ion pump includes a vacuum chamber that includes an inner wall having a cylindrical section which is rugged in cross section. The rugged cylindrical section has outer recesses each of which is provided with a permanent magnets, each magnet having a same shape and a same characteristic so that a magnetic pole is directed to a same direction. The rugged cylindrical section has also inner recesses each of which is provided with a cylindrical anode electrode member spaced from the vacuum chamber wall. The rugged cylindrical section of the vacuum chamber wall is formed as a cathode electrode. A cylindrical shield member having a peripheral portion provided with evacuating bores is provided coaxially to the permanent magnets and anode electrodes. The permanent magnets and anode electrode members are arranged with equal spacing in an axis symmetrical configuration.

    Abstract translation: 溅射离子泵包括真空室，其包括具有横截面坚固的圆柱形部分的内壁。 凹凸的圆柱形部分具有每个都具有永磁体的外凹槽，每个磁体具有相同的形状和相同的特性，使得磁极被引向相同的方向。 凹凸的圆柱形部分还具有内部凹槽，每个凹槽设置有与真空室壁间隔开的圆柱形阳极电极构件。 真空室壁的凹凸圆柱形部分形成为阴极电极。 具有设置有抽气孔的周边部分的圆筒形屏蔽构件与永磁体和阳极电极同轴地设置。 永磁体和阳极电极构件以轴对称构造相等间隔地布置。

    Plasma vacuum pump
    42.
    发明授权
    Plasma vacuum pump 失效
    等离子真空泵

    公开(公告)号：US06559601B1

    公开(公告)日：2003-05-06

    申请号：US09869766

    申请日：2001-07-02

    Applicant: Wayne L. Johnson ,  Raphael A. Dandl ,  Gareth E. Guest

    Inventor： Wayne L. Johnson ,  Raphael A. Dandl ,  Gareth E. Guest

    IPC: F04B3702

    CPC classification number: H01J37/32834 ,  H01J41/12 ,  H01J41/18 ,  H05H1/54

    Abstract: A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.

    Abstract translation: 一种用于从第一到第二区域泵送离子的等离子体泵和方法，所述泵包括具有限定多个导管（30）的通孔的分隔构件; 一组磁体（24），用于提供延伸到导管的磁力; 以及用于产生将离子从管道加速到第二区域的静电场的多个电位源（14）。

    Corrugated style anode element for ion pumps
    43.
    发明授权
    Corrugated style anode element for ion pumps 有权
    用于离子泵的瓦楞式阳极元件

    公开(公告)号：US06388385B1

    公开(公告)日：2002-05-14

    申请号：US09528093

    申请日：2000-03-17

    Applicant: James B. McGinn ,  Miriam Spagnol

    Inventor： James B. McGinn ,  Miriam Spagnol

    IPC: H01J718

    CPC classification number: H01J41/18

    Abstract: An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which support a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.

    Abstract translation: 离子泵阳极消除细胞间隙，同时保持有效的细胞形状，其中等离子体鞘跟随细胞壁的轮廓。 电池优选是准圆柱形的，并且可以通过将一个或多个金属带折叠成波纹并焊接带以产生单独的电池来制造。 通过消除支持高等离子体密度的细胞间区域，可以防止这种区域下的枝晶形成，并消除由那些树突引起的不稳定性。

    Magnetic field immersion type electron gun
    46.
    发明授权
    Magnetic field immersion type electron gun 失效
    磁场浸入式电子枪

    公开(公告)号：US5548183A

    公开(公告)日：1996-08-20

    申请号：US364747

    申请日：1994-12-27

    Applicant: Motosuke Miyoshi ,  Katsuya Okumura ,  Yuichiro Yamazaki

    Inventor： Motosuke Miyoshi ,  Katsuya Okumura ,  Yuichiro Yamazaki

    IPC: H01J37/143 ,  H01J37/06 ,  H01J37/065 ,  H01J37/073 ,  H01J37/18 ,  H01J41/12 ,  H01J41/18 ,  H01J3/20

    CPC classification number: H01J37/065 ,  H01J37/18 ,  H01J41/18

    Abstract: In a magnetic field immersion type electron gun for controlling an electron beam emitted by an electron gun (51) with the use of an electric lens (56) and a magnetic field lens formed by permanent magnets (57, 58) of a coaxial ion pump (53), the ion pump magnets are a pair of cylindrical permanent magnets (57, 58) disposed coaxially with an optical axis (52) of the electron gun (51) in such a way as to sandwich a cylindrical ion pump anode (61) of the coaxial ion pump; the two permanent magnets are magnetized in a mutually opposing direction; a hollow cylindrical yoke (60) is disposed also coaxially with the optical axis (52) in such a way as to enclose the two permanent magnets (57, 58) within a hollow portion thereof; and the yoke (60) is formed with an annular yoke gap (63) in a radially inner circumferential surface of the yoke (60) to leak out a magnetic flux flowing through the yoke toward the optical axis. In the above-mentioned construction, the magnetic field lens can be formed efficiently with the use of the magnetic field generated by the permanent magnets for constituting the coaxial ion pump, and further the formed magnetic field lens can be superimposed upon the electron gun. Therefore, an electric field immersion type electron gun of high performance can be obtained, and further the electron gun chamber can be efficiently evacuated in the vicinity of the cathode tip of the electron gun.

    Abstract translation: 在使用电镜（56）和同轴离子泵的永磁体（57,58）形成的磁场透镜的电磁枪（51）发射的电子束的磁场浸渍型电子枪中， （53）中，离子泵磁体是与电子枪（51）的光轴（52）同轴配置的一对筒状的永久磁铁（57,58），夹着圆筒状离子泵阳极 ）的同轴离子泵; 两个永磁体在相互相反的方向被磁化; 中空圆柱形磁轭（60）还与光轴（52）同轴设置，以便将两个永磁体（57,58）包围在其中空部分内; 并且轭（60）在轭（60）的径向内周面上形成有环形磁轭间隙（63），以使流过磁轭的磁通向光轴泄漏。 在上述结构中，可以通过使用由用于构成同轴离子泵的永久磁铁产生的磁场来有效地形成磁场透镜，并且还可以将形成的磁场透镜叠加在电子枪上。 因此，可以获得高性能的电场浸没型电子枪，并且可以在电子枪的阴极尖端附近有效地排出电子枪室。

    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
    47.
    发明授权
    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus 失效
    排气装置和真空泵单元包括排气装置

    公开(公告)号：US5480286A

    公开(公告)日：1996-01-02

    申请号：US217699

    申请日：1994-03-25

    Applicant: Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    Inventor： Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    IPC: H01J41/14 ,  H01J41/18 ,  F04B37/02 ,  F04F11/00

    CPC classification number: H01J41/14 ,  H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置，其中在真空容器中实现高真空，使得真空容器内的气体分子被离子化并加速而被排出， 此外，在高真空泵送单元中，从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。

    Exhaust apparatus with vacuum pump
    48.
    发明授权
    Exhaust apparatus with vacuum pump 失效
    排气装置带真空泵

    公开(公告)号：US5326227A

    公开(公告)日：1994-07-05

    申请号：US11783

    申请日：1993-02-01

    Applicant: Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    Inventor： Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    IPC: H01J41/14 ,  H01J41/18

    CPC classification number: H01J41/14 ,  H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括高真空装置和辅助真空泵的排气装置和高真空泵装置，其中在真空容器中实现高真空，使得真空容器内的气体分子被离子化并加速而被排出。 在高真空泵送单元中，这些气体分子被扩散回或从真空泵中释放出来被离子化并加速回到真空泵中。

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