公开(公告)号：US20180233338A1

公开(公告)日：2018-08-16

申请号：US15948465

申请日：2018-04-09

Applicant: ColdQuanta, Inc.

Inventor： Steven Michael Hughes

IPC: H01J41/14 ,  F04B37/14 ,  H01J41/18

CPC classification number: H01J41/14 ,  F04B37/14 ,  H01J41/18

Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

公开(公告)号：US20070205359A1

公开(公告)日：2007-09-06

申请号：US11365415

申请日：2006-03-01

Applicant: Ulrich Bonne

Inventor： Ulrich Bonne

IPC: H01J49/00

CPC classification number: H01J41/18

Abstract: A method and apparatus are provided for pumping gas. The method includes the steps of providing an orifice with an entry diameter that is substantially larger than an exit diameter, imposing a non-uniform electric field between the entry and exit of the orifice and pumping permanent and field induced molecular dipoles through the orifice using the non-uniform electric field wherein the dipoles drift towards a direction of higher field strength within the non-uniform, time-dependent and multi-phase electric field.

Abstract translation: 提供了一种用于泵送气体的方法和装置。 该方法包括以下步骤：提供具有基本上大于出口直径的入口直径的孔，在孔的入口和出口之间施加不均匀的电场，并且通过孔使泵送永久和场诱导的分子偶极子 非均匀电场，其中偶极子在非均匀，时间依赖和多相电场内向较高场强的方向漂移。

公开(公告)号：US06236156B1

公开(公告)日：2001-05-22

申请号：US09129993

申请日：1998-08-06

Applicant: Fuminori Ito

Inventor： Fuminori Ito

IPC: H01J162

CPC classification number: H01J41/18 ,  H01J9/385 ,  H01J29/94 ,  H01J2329/945

Abstract: The present invention provides a micro vacuum pump capable of enhancing the performance of exhausting rare gases as well as active gases thereby to ensure quality, good repeatability and stable getter action of the micro vacuum pump over a long time. The invention also provides an apparatus assembling the micro vacuum pump. The micro vacuum pump capable of maintaining a high degree of vacuum includes a first conductive substrate having many protrusions and mounting a second conductive substrate disposed with a predetermined interval provided with respect to the first conductive substrate so that it faces the protrusions. A gate electrode is disposed in the vicinity of the apexes of the protrusions on the first conductive substrate via an insulator layer, and is positioned to face the second conductive substrate. Relative to the first conductive substrate, a negative potential is supplied to the second conductive substrate, and, a same negative potential difference is also applied to the gate electrode relative to the cones.

Abstract translation: 本发明提供一种微型真空泵，其能够提高排出稀有气体和活性气体的性能，从而确保微型真空泵长时间的质量，良好的重复性和稳定的吸气剂作用。 本发明还提供组装微型真空泵的装置。 能够保持高真空度的微型真空泵包括具有许多突起的第一导电基板，并且安装以相对于第一导电基板设置的预定间隔设置的第二导电基板，使得其面对突起。 栅电极经由绝缘体层设置在第一导电基板上的突起的顶点附近，并且被定位成面向第二导电基板。 相对于第一导电衬底，向第二导电衬底提供负电位，并且相对于锥体也向栅电极施加相同的负电位差。

公开(公告)号：US5655886A

公开(公告)日：1997-08-12

申请号：US469512

申请日：1995-06-06

Applicant: Richard K. Alderson

Inventor： Richard K. Alderson

IPC: F04B37/02 ,  H01J7/16 ,  H01J29/94 ,  H01J41/18

CPC classification number: H01J29/94 ,  F04B37/02 ,  H01J41/18 ,  H01J7/16

Abstract: An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump, due to its small size and integration within the vacuum chamber, enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.

Abstract translation: 离子泵允许在抽取相对较小量的功率（微瓦）的同时，连续抽真空小真空室。 在优选实施例中，本离子泵由于其小尺寸和集成在真空室内，使得其中结合有真空室的装置可移动并保持其原始尺寸。

公开(公告)号：US3241490A

公开(公告)日：1966-03-22

申请号：US20533062

申请日：1962-06-26

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： PIERRE RICATEAU ,  CAMILLE VAVASSEUR

IPC: H01J41/18 ,  H01J41/20 ,  H02K44/04

CPC classification number: H02K44/04 ,  H01J41/18 ,  H01J41/20

公开(公告)号：US11708824B2

公开(公告)日：2023-07-25

申请号：US16071476

申请日：2017-01-20

Applicant: APR Technologies AB

Inventor： Robert Thorslund ,  Peter Nilsson

IPC: F04B19/00 ,  H01L23/467 ,  F04B53/00 ,  F28F13/16 ,  F04B43/04 ,  F04B37/10 ,  F04B33/00 ,  F04B39/06 ,  H01J41/18 ,  F04B17/03 ,  F04B49/06 ,  H02K44/00 ,  H02K44/02

CPC classification number: F04B19/006 ,  F04B19/00 ,  F04B33/00 ,  F04B37/10 ,  F04B39/06 ,  F04B43/043 ,  F04B53/00 ,  F28F13/16 ,  H01J41/18 ,  H01L23/467 ,  F04B17/03 ,  F04B49/06 ,  H01L2924/00 ,  H01L2924/0002 ,  H02K44/00 ,  H02K44/02

Abstract: A fluidic device is disclosed, comprising an enclosed passage that is adapted to convey a circulating fluid. The enclosed passage comprises a flow unit having a first electrode and a second electrode offset from the first electrode in a downstream direction of a flow of the circulating fluid. The first electrode is formed as a grid structure and arranged to allow the circulating fluid to flow through the first electrode. The fluidic device may be used for controlling or regulating the flow of the fluid circulating in the enclosed passage, and thereby act as a valve opening, reducing or even closing the passage.

公开(公告)号：US20160233063A1

公开(公告)日：2016-08-11

申请号：US14874165

申请日：2015-10-02

Applicant: Hamilton Sundstrand Corporation

Inventor： Ben D. Gardner ,  David E. Burchfield

IPC: H01J41/12

CPC classification number: H01J41/12 ,  H01J41/18

Abstract: Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process. In various embodiments, one or more wire internal to the anode structure and having a time-varying electric potential may alter the trajectory of the ions leaving the anode tube, as may the shape of the anode near the ends of the anode tube.

Abstract translation: 在离子泵内，由于阳极管的对称性和大致对称的电场存在，加速离子离开阳极管的中心部分。 阳极管中的表观对称性可以通过使阳极管纵向分段并对每个段施加独立电压而改变。 两个相邻段上的电压可以以不同的速率变化以实现光栅化处理。 在各种实施例中，阳极结构内部并且具有随时间变化的电势的一个或多个导线可以改变离开阳极管的离子的轨迹，阳极的形状可以靠近阳极管的端部。

公开(公告)号：US20070280834A1

公开(公告)日：2007-12-06

申请号：US11807644

申请日：2007-05-30

Applicant: Luca Bonmassar ,  Michele Mura

Inventor： Luca Bonmassar ,  Michele Mura

IPC: F04B37/02

CPC classification number: H01J41/18

Abstract: A sputter ion pump (1) has an improved magnet assembly comprising primary magnets (9a, 9b), disposed on opposite ends of the pump cells of an anode, and secondary magnets (11; 11′, 11″) disposed on one side only of the pump cells, whereby the assembly exhibits an asymmetrical configuration. The sputter ion pump with the improved magnet assembly allows for attaining high pumping speeds even at low pressures with reduced size, weight and manufacturing cost of the pump itself.

Abstract translation: 溅射离子泵（1）具有改进的磁体组件，其包括设置在阳极的泵电池的相对端上的主磁体（9a，9b）和设置在阳极上的次级磁体（11; 11'，11“） 泵单元仅一侧，由此组件呈现不对称的构造。 具有改进的磁体组件的溅射离子泵允许即使在低压下获得高泵送速度，减小了泵本身的尺寸，重量和制造成本。

公开(公告)号：US20020159891A1

公开(公告)日：2002-10-31

申请号：US09959879

申请日：2001-11-09

Inventor： Guo Hua Shen

IPC: H02K044/08

CPC classification number: H01J41/18 ,  H01J27/08 ,  H01J2237/1825

Abstract: There is provided a sputter ion pump that it has a simple structure, a size and a weight can be reduced, the magnetic fields in the vicinity of a central axis can be nullified in the both of a radial and axial directions, and ultimate pressure of the pump can be increased. The sputter ion pump comprises a vacuum chamber that includes an inner wall having a cylindrical section where is formed to be rugged in a cross section. The rugged cylindrical section has outer recesses each of which is provided with a permanent magnets each having a same shape and a same characteristic so that a magnetic pole is directed to a same direction. The rugged cylindrical section has also inner recesses each of which is provided with a cylindrical anode electrode member spaced from the vacuum chamber wall. The rugged cylindrical section of the vacuum chamber wall is formed as a cathode electrode. A cylindrical shield member having a peripheral portion provided with evacuating bores is provided coaxially to the permanent magnets and anode electrodes. The permanent magnets and anode electrode members are arranged with equal spacing in a axis symmetrical configuraton.

Abstract translation: 提供了一种溅射离子泵，其具有简单的结构，可以减小尺寸和重量，中心轴附近的磁场可以在径向和轴向方向上无效，并且极限压力 泵可以增加。 溅射离子泵包括真空室，该真空室包括具有圆柱形部分的内壁，其形成为在横截面中坚固。 凹凸的圆柱形部分具有外部凹槽，每个凹槽设置有各自具有相同形状和相同特性的永磁体，使得磁极指向相同的方向。 凹凸的圆柱形部分还具有内部凹槽，每个凹槽设置有与真空室壁间隔开的圆柱形阳极电极构件。 真空室壁的凹凸圆柱形部分形成为阴极电极。 具有设置有抽气孔的周边部分的圆筒形屏蔽构件与永磁体和阳极电极同轴地设置。 永磁体和阳极电极构件以等轴配置的等间距布置。

公开(公告)号：US5240381A

公开(公告)日：1993-08-31

申请号：US833853

申请日：1992-02-12

Applicant: Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

Inventor： Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

IPC: H01J41/14 ,  H01J41/18

CPC classification number: H01J41/18 ,  H01J41/14

Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置，其中在真空容器中实现高真空，使得真空容器内的气体分子被离子化并加速而被排出， 此外，在高真空泵送单元中，从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。