Fluorescent lamp with heat radiation sheet member
    41.
    发明授权
    Fluorescent lamp with heat radiation sheet member 失效
    带散热片的荧光灯

    公开(公告)号:US5869931A

    公开(公告)日:1999-02-09

    申请号:US927602

    申请日:1997-09-12

    Inventor: Toshiyuki Terada

    CPC classification number: H01J65/00 H01J61/52 H01J61/70

    Abstract: There is provided an improved fluorescent lamp comprising a tubular glass bulb, an internal electrode provided inside of said tubular glass bulb, a fluorescent layer provided on an inner surface of said tubular glass bulb, an external electrode having an opening portion and provided on an outer surface of said tubular glass bulb, and a heat radiation sheet fitly provided on said tubular glass bulb, in which a temperature rise in the glass bulb caused by heat generated by discharge at the time of lighting is inhibited by the heat radiation function of the heat radiation sheet and a reduction in the illuminance caused thereby can also be inhibited.

    Abstract translation: 提供了一种改进的荧光灯,其包括管状玻璃灯泡,设置在所述管状玻璃灯泡内部的内部电极,设置在所述管状玻璃灯泡的内表面上的荧光层,具有开口部分并设置在外部的外部电极的外部电极 所述管状玻璃灯泡的表面以及适合设置在所述管状玻璃灯泡上的散热片,其中由于在发光时由放电产生的热引起的玻璃灯泡中的温度上升被热量的热辐射功能所禁止 辐射片和由此引起的照度的降低也可以被抑制。

    Excimer lamp and light irradiation device having the same

    公开(公告)号:US11881389B2

    公开(公告)日:2024-01-23

    申请号:US17743627

    申请日:2022-05-13

    CPC classification number: H01J61/06 H01J61/547 H01J65/00

    Abstract: An excimer lamp according to an embodiment of the present disclosure is capable of improving start-up characteristics and a light irradiation efficiency of a lamp and being miniaturized. The excimer lamp includes a light emitting tube emitting light, a first electrode disposed at an outer side of the light emitting tube, a second electrode disposed at an outer side of the light emitting tube in correspondence to the first electrode, and an auxiliary light emitting body disposed between the first electrode and the second electrode to emit light toward the light emitting tube when a voltage is applied to the first and second electrodes, and a light irradiation device having the same.

    Lighting element
    45.
    发明授权

    公开(公告)号:US11764053B1

    公开(公告)日:2023-09-19

    申请号:US18046262

    申请日:2022-10-13

    Applicant: mb-microtec ag

    Abstract: A lighting element with a gaseous tritium light source and an elongated plastic housing that at least partially encloses the gaseous tritium light source with its housing shell and forms a latching element that snaps together with the gaseous tritium light source, which can be inserted into the plastic housing, and holds it in the plastic housing. A rugged lighting element can be produced if the latching element is formed by at least one catch element, which catch element has a radially sprung flexible spring and at least one, preferably two, inwardly oriented snaps with an indentation for snapping together with the gaseous tritium light source.

    RADIATION SOURCE, METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD
    48.
    发明申请
    RADIATION SOURCE, METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD 有权
    辐射源,计量装置,光刻系统和器件制造方法

    公开(公告)号:US20160316550A1

    公开(公告)日:2016-10-27

    申请号:US15103721

    申请日:2014-11-14

    Abstract: A radiation source apparatus comprising: a container (400) for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation (50), wherein said container is operable (66, 67) substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element (64) operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element (65) operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.

    Abstract translation: 一种辐射源装置,包括:用气体介质加压的容器(400),在所述气体介质中,通过驱动辐射(50)激发气体介质之后,产生发射等离子体发射的辐射的等离子体,其中所述容器可操作(66, 67)基本上在所述等离子体发射的辐射作为输出辐射离开所述容器之前从所述等离子体发射的辐射中去除波长为10-400nm的辐射。 在一个实施例中,容器包括:入口辐射透射元件(64),其可操作以将所述驱动辐射从所述容器外部传送到所述容器内部;以及出口辐射传输元件(65),其可操作以透射所述等离子体发射辐射 从所述容器内部到所述容器的外部作为输出辐射; 其中所述入口和出射辐射传递元件中的至少一个包括平面平行板。

    Electrode-less Incandescent Bulb
    49.
    发明申请
    Electrode-less Incandescent Bulb 失效
    无电极白炽灯泡

    公开(公告)号:US20130040529A1

    公开(公告)日:2013-02-14

    申请号:US13541838

    申请日:2012-07-05

    Abstract: The manufacture of an electrodeless bulb involves one end of a tube closed off, and a first neck is formed in the tube close to the closed end. A second neck is formed in the tube, close to the still open end; a metal halide pellet of known size is dropped into the tube and the tube is evacuated. With the vacuum being maintained heat is applied to the closed end, causing the metal halide pellet to sublime and with it the impurities. The impurities are drawn off, the vacuum being maintained and the metal halide condenses in the tube between the necks. Once the tube is cool, the evacuation is discontinued and the tube is refilled with noble gas and the quartz tube is sealed off at the second neck.

    Abstract translation: 无电极灯泡的制造涉及管的一端封闭,并且在靠近封闭端的管中形成第一颈部。 在管中形成第二个颈部,靠近静止的开口端; 将已知尺寸的金属卤化物颗粒滴入管中并将管抽真空。 在保持真空的情况下,将热量施加到封闭端,导致金属卤化物颗粒升华并带有杂质。 杂质被抽出,保持真空并且金属卤化物在颈部之间在管中冷凝。 一旦管冷却,停止排气,并用惰性气体重新填充管,并在第二颈部密封石英管。

    Substrate processing chamber with dielectric barrier discharge lamp assembly
    50.
    发明授权
    Substrate processing chamber with dielectric barrier discharge lamp assembly 失效
    带介质阻挡放电灯组件的基板处理室

    公开(公告)号:US07978964B2

    公开(公告)日:2011-07-12

    申请号:US11380553

    申请日:2006-04-27

    CPC classification number: H01L21/67115 H01J65/00 H01J65/046

    Abstract: A thermal processing chamber with a dielectric barrier discharge (DBD) lamp assembly and a method for using the same are provided. In one embodiment, a thermal processing chamber includes a chamber body and a dielectric barrier discharge lamp assembly. The dielectric barrier discharge lamp assembly further comprises a first electrode, a second electrode and a dielectric barrier. The dielectric barrier discharge lamp assembly is positioned between the first electrode and the second electrode. The dielectric barrier defines a discharge space between the dielectric barrier and the second electrode. A circuit arrangement is coupled to the first and second electrodes, and is adapted to operate the dielectric barrier discharge lamp assembly.

    Abstract translation: 提供具有介电阻挡放电(DBD)灯组件的热处理室及其使用方法。 在一个实施例中,热处理室包括室主体和电介质阻挡放电灯组件。 电介质阻挡放电灯组件还包括第一电极,第二电极和电介质阻挡层。 电介质阻挡放电灯组件位于第一电极和第二电极之间。 电介质阻挡层限定介电阻挡层和第二电极之间的放电空间。 电路布置耦合到第一和第二电极,并且适于操作电介质阻挡放电灯组件。

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