公开(公告)号：US06326619B1

公开(公告)日：2001-12-04

申请号：US09299940

申请日：1999-04-26

Applicant: Joseph R. Michael ,  Raymond P. Goehner ,  Max E. Schlienger

Inventor： Joseph R. Michael ,  Raymond P. Goehner ,  Max E. Schlienger

IPC: H01J3726

CPC classification number: H01J37/2955 ,  G01N23/203 ,  G01N2223/605

Abstract: A method and apparatus for determining the crystalline phase and crystalline characteristics of a sample. This invention provides a method and apparatus for unambiguously identifying and determining the crystalline phase and crystalline characteristics of a sample by using an electron beam generator, such as a scanning electron microscope, to obtain a backscattered electron Kikuchi pattern of a sample, and extracting crystallographic and composition data that is matched to database information to provide a quick and automatic method to identify crystalline phases.

Abstract translation: 用于确定样品的结晶相和结晶特性的方法和装置。 本发明提供一种用于通过使用诸如扫描电子显微镜的电子束发生器明确地鉴定和确定样品的结晶相和晶体特性的方法和装置，以获得样品的背散射电子菊池图案，并提取晶体学和 与数据库信息匹配的组合数据，以提供快速和自动的方法来识别结晶相。

公开(公告)号：US06278114B1

公开(公告)日：2001-08-21

申请号：US09184074

申请日：1998-11-02

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: H01J3726

CPC classification number: H01J37/28 ,  H01J2237/2814

Abstract: An electron microscope for measuring a dimension of a feature of a specimen includes a focusing lens for focusing an electron beam onto the specimen and a supplying circuit for supplying an exciting current supplied to the focusing lens. A control circuit controls the supplying circuit to vary the exciting current which is supplied to the focusing lens and obtains dimension data of a feature of the specimen at each of the exciting currents which is supplied to the focusing lens. An actual dimension of the feature is determined based on the obtained dimension data. Further, a profile of the feature may be determined based on the changes observed in the dimension data.

Abstract translation: 用于测量样本特征尺寸的电子显微镜包括：聚焦透镜，用于将电子束聚焦到样本上;以及供应电路，用于提供供给聚焦透镜的激励电流。 控制电路控制供电电路来改变提供给聚焦透镜的激励电流，并且在提供给聚焦透镜的每个激励电流处获得样品特征的尺寸数据。 基于获得的尺寸数据确定特征的实际尺寸。 此外，可以基于在尺寸数据中观察到的变化来确定特征的轮廓。

公开(公告)号：US06185178B2

公开(公告)日：2001-02-06

申请号：US09057456

申请日：1998-04-09

Applicant: Sung Woo Noh

Inventor： Sung Woo Noh

IPC: H01J3726

CPC classification number: G11B7/0903 ,  B82Y10/00 ,  B82Y20/00 ,  G01Q80/00 ,  G11B7/1384

Abstract: An optical storage apparatus, using the near field optical effect, performs tracking along a track of a recording medium to reproduce information recorded on the recording medium without error. The optical storage apparatus includes a first probe to read information recorded on the recording medium and at least two to judge if the track direction of the recording medium is in accordance with the information scanning direction of the first probe. The apparatus also includes a probe actuator to adjust the tracking direction of the first and second probes using a tracking control signal, and a number of sensors to sense the intensity of radiation probed by the first and second probes and to generate tracking signals corresponding to the sensed radiation. The apparatus also includes a controller to generate a tracking control signal using the tracking signals, and to provide the tracking control signal to the probe actuator.

Abstract translation: 使用近场光学效应的光学存储装置沿着记录介质的轨迹执行跟踪，以便再现无记录地记录在记录介质上的信息。 光存储装置包括：第一探头，用于读取记录在记录介质上的信息;至少两个，用于判断记录介质的轨道方向是否符合第一探测器的信息扫描方向。 该装置还包括探针致动器，用于使用跟踪控制信号来调节第一和第二探针的跟踪方向，以及多个传感器，用于感测由第一和第二探针探测到的辐射的强度，并产生对应于 感应辐射。 该装置还包括控制器，用于使用跟踪信号产生跟踪控制信号，并向追踪致动器提供跟踪控制信号。

公开(公告)号：US06169281A

公开(公告)日：2001-01-02

申请号：US09124302

申请日：1998-07-29

Applicant: Dong Chen ,  Edwin Flecha ,  James Michael Hammond ,  Yves Corfield Martin ,  Kenneth Gilbert Roessler

Inventor： Dong Chen ,  Edwin Flecha ,  James Michael Hammond ,  Yves Corfield Martin ,  Kenneth Gilbert Roessler

IPC: H01J3726

CPC classification number: G01Q60/38 ,  G01Q70/10 ,  Y10S977/851 ,  Y10S977/852

Abstract: The probe tip of a scanning probe microscope is scanned either along an X- or Y-direction of the apparatus, or along a scan line forming an acute angle with both the X- and Y-directions. During scanning, an excitation vibration is applied in the Z-direction, perpendicular to the surface of the sample being scanned. In a first mode of operation, a dithering vibration is applied to the probe tip, along the scan line. In a second mode of operation, the probe tip is dithered in a circular motion, which is used to identify the direction in which a wall extends along the sample surface. Alternately, in a third mode of operation, the probe tip is dithered in X- and Y-directions at differing vibrational frequencies to identify this direction of a wall. When this direction is identified, the probe proceeds straight up or down the wall to obtain an accurate profile thereof.

Abstract translation: 扫描探针显微镜的探针尖端沿着装置的X方向或Y方向扫描，或者沿着与X方向和Y方向成锐角的扫描线扫描。 在扫描期间，Z方向施加激励振动，垂直于被扫描样品的表面。 在第一操作模式中，沿着扫描线向探针尖端施加抖动振动。 在第二种操作模式中，探针尖端以圆周运动颤动，用于识别壁沿着样品表面延伸的方向。 或者，在第三种操作模式中，探针尖端以不同的振动频率在X和Y方向上抖动以识别壁的这个方向。 当该方向被识别时，探针直接向上或向下延伸到壁上以获得其准确的轮廓。

公开(公告)号：US06768113B2

公开(公告)日：2004-07-27

申请号：US10309275

申请日：2002-12-26

Applicant: Hiroyuki Suzuki ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Yasutsugu Usami ,  Shuji Sugiyama

Inventor： Hiroyuki Suzuki ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Yasutsugu Usami ,  Shuji Sugiyama

IPC: H01J3726

CPC classification number: H01J37/28 ,  H01J2237/082 ,  H01J2237/2826

Abstract: Heights of a sample are calibrated by setting a calibrating substrate on a stage and then irradiating a charged particle beam onto standard marks provided on at least two kinds of surfaces having different substrate heights. Secondary charged particles produced from said irradiated standard marks on the substrate are and detected and a surface height of the irradiated portion of the substrate measured. The difference in height between the standard marks is set to be in a range containing an extent, over the entire sample, to which the height of the sample varies due to warping.

Abstract translation: 通过在台上设置校准基板，然后将带电粒子束照射到设置在具有不同衬底高度的至少两种表面上的标准标记上来校准样品的高度。 并且测量从衬底上的所述照射的标准标记产生的二次带电粒子并测量衬底的照射部分的表面高度。 标准标记之间的高度差被设定在包含整个样品的范围内，样品的高度由于翘曲而变化。

公开(公告)号：US06750451B2

公开(公告)日：2004-06-15

申请号：US10183157

申请日：2002-06-28

Applicant: Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

Inventor： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

IPC: H01J3726

CPC classification number: H01J37/2955 ,  H01J2237/2802

Abstract: Disclosed is an observation apparatus and method using an electron beam, capable of measuring stress and strain information on a crystal structure in a specimen using electron beam diffraction images. A method according to the invention includes mounting a specimen on a specimen stage; irradiating a predetermined area in the specimen with an electron beam while scanning the electron beam, and acquiring an enlarged image of a specimen internal structure in the predetermined area; irradiating a specific portion included in the predetermined area and acquiring a diffraction image showing the crystal structure in the specimen; extracting information on the crystal structure in the specimen; displaying the information of the crystal structure in the specimen so as to be superimposed on the acquired enlarged image. The observation method according to the invention can obtain information on the crystal structure in a specimen with a high degree of sensitivity and with a high level of resolution.

Abstract translation: 公开了一种使用电子束的观测装置和方法，其能够使用电子束衍射图像测量样品中的晶体结构的应力和应变信息。 根据本发明的方法包括将样品安装在样品台上; 在扫描电子束的同时用电子束照射样本中的预定区域，并获取预定区域中的样本内部结构的放大图像; 照射包含在预定区域中的特定部分，并获取示出样品中的晶体结构的衍射图像; 提取样品中晶体结构的信息; 在样本中显示晶体结构的信息，以便叠加在所获取的放大图像上。 根据本发明的观察方法可以以高灵敏度和高分辨率获得关于样品中的晶体结构的信息。

公开(公告)号：US06730905B2

公开(公告)日：2004-05-04

申请号：US10130569

申请日：2002-05-17

Applicant: Tohru Nakagawa ,  Tetsuo Yukimasa

Inventor： Tohru Nakagawa ,  Tetsuo Yukimasa

IPC: H01J3726

CPC classification number: G01Q60/42 ,  Y10S977/877

Abstract: There is provided a probe for a scanning probe microscope, comprising: a proximal end; and a distal tip portion, wherein the distal tip portion has a tip surface which faces a fixed sample, and at least one monolayer is formed at least on the tip surface, and a molecule having a chemical sensor function or catalytic function is placed in or on an outermost monolayer above the tip surface. There is provided a probe for a scanning probe microscope, comprising: a cover layer containing an electrically conductive polymer; and a catalyst in the cover layer, the catalyst being selected from a group consisting of inorganic catalysts and organic catalysts. There are provided a scanning probe microscope equipped with the above probe, and a molecule processing method using such a scanning probe microscope.

Abstract translation: 提供了一种用于扫描探针显微镜的探针，包括：近端; 和远侧末端部分，其中所述远侧末端部分具有面向固定样品的尖端表面，并且至少在所述尖端表面上形成至少一个单层，并且具有化学传感器功能或催化功能的分子置于或 在尖端表面上方的最外层单层上。 提供了一种用于扫描探针显微镜的探针，包括：包含导电聚合物的覆盖层; 和覆盖层中的催化剂，所述催化剂选自无机催化剂和有机催化剂。 提供了配有上述探针的扫描探针显微镜和使用这种扫描探针显微镜的分子处理方法。

公开(公告)号：US06674075B2

公开(公告)日：2004-01-06

申请号：US10146218

申请日：2002-05-13

Applicant: Igor Petrov ,  Zvika Rosenberg

Inventor： Igor Petrov ,  Zvika Rosenberg

IPC: H01J3726

CPC classification number: G01N23/22 ,  H01J37/1472 ,  H01J37/1478 ,  H01J37/244

Abstract: A beam directing method and device are presented for spatially separating between a primary charged particle beam and a beam of secondary particles returned from a sample as a result of its interaction with the primary charged particle beam. The primary charged particle beam is directed towards the beam directing device along a first axis passing an opening in a detector, which has charged particle detecting regions outside this opening. The trajectory of the primary charged particle beam is then affected to cause the primary charged particle beam propagation to the sample along a second axis substantially parallel to and spaced-apart from the first axis. This causes the secondary charged particle beam propagation to the detecting region outside the opening in the detector.

Abstract translation: 提出了一种射束引导方法和装置，用于通过与初级带电粒子束的相互作用在空间上分离初级带电粒子束和从样品返回的二次粒子束之间的空间分离。 初级带电粒子束沿着通过检测器中的开口的第一轴线朝向光束引导装置，该检测器具有在该开口外部的带电粒子检测区域。 然后影响初级带电粒子束的轨迹，使得初级带电粒子束沿着基本上平行于第一轴线并与第一轴线间隔开的第二轴线传播到样品。 这导致二次带电粒子束传播到检测器中的开口外部的检测区域。

公开(公告)号：US06661007B1

公开(公告)日：2003-12-09

申请号：US09696255

申请日：2000-10-26

Applicant: Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

Inventor： Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

IPC: H01J3726

CPC classification number: H01J37/28 ,  H01J2237/282

Abstract: A method of diagnosing a parameter of a scanning electron microscope such as magnification, linearity and stability, includes loading a reference material into a microscope, setting a permissible limit of a value of the parameters, inputting a pitch of the reference material, inputting a magnification of the microscope, acquiring a set of digital images on the reference material, analyzing the digital image line after line with determination of a pitch of features of the image in each line, in mutually orthogonal directions, checking if all lines of the digital image has been analyzed, determining a mean value of the pitch of the features in each orthogonal direction, comparing the obtained value of the pitch of the image with a known value of the pitch of the reference material to determine a ratio indicative of a modification, and determining a precision of the measurements of the pitch by statistical analysis of the pitch measurements.

Abstract translation: 诊断扫描电子显微镜参数如放大率，线性和稳定性的方法包括将参考物质加载到显微镜中，设定参数值的允许极限，输入参考物料的间距，输入放大倍率 在参考材料上获取一组数字图像，在相互正交的方向上确定每行中的图像的特征的间距之后对数字图像行进行分析，检查数字图像的所有行是否具有 进行分析，确定每个正交方向上的特征的间距的平均值，将所获得的图像的间距的值与参考材料的间距的已知值进行比较，以确定表示修改的比率，并确定 通过间距测量的统计分析来测量音高的精度。

公开(公告)号：US06633034B1

公开(公告)日：2003-10-14

申请号：US09565585

申请日：2000-05-04

Applicant: David A. Crewe

Inventor： David A. Crewe

IPC: H01J3726

CPC classification number: H01J37/244 ,  H01J37/28

Abstract: A charged particle beam method and apparatus use a primary electron beam to irradiate a specimen so as to induce the specimen to emit secondary and backscattered electrons carrying information about topographic and material structure of the specimen, respectively. The specimen may be an article to be inspected. The electrons emitted by the specimen are deflected in the electric field of an electron mirror and detected using an electron detector of the apparatus. The electron mirror permits the detection of the secondary electrons traveling close to the optical axis of the apparatus and corrects the aberrations of the secondary electrons. In addition, the electron mirror accelerates the electrons improving the detection efficiency of the electron detector and enhancing the time-of-flight dispersion characteristics of the secondary electron collection. A second electron mirror can be provided to further control the direction of the electron's landing on the surface of the electron detector.

Abstract translation: 带电粒子束方法和装置使用一次电子束照射样本，以便分别诱发样本发射携带关于样本的地形和材料结构信息的二次和背散射电子。 样本可能是要检查的物品。 由样品发射的电子在电子反射镜的电场中被偏转，并使用该装置的电子检测器进行检测。 电子反射镜允许检测靠近设备的光轴行进的二次电子，并校正二次电子的像差。 此外，电子反射镜加速了电子提高了电子检测器的检测效率并提高了二次电子收集的飞行时间分散特性。 可以提供第二电子反射镜以进一步控制电子在电子检测器表面上的着陆方向。