公开(公告)号：US07115866B1

公开(公告)日：2006-10-03

申请号：US11116617

申请日：2005-04-28

Applicant: Roger Kroeze ,  David A. Soltz ,  David A. Crewe ,  Gregory W. Grant ,  Chiyan Kuan ,  Thierry H. C. Nguyen ,  Salvatore T. Fahey ,  Edward M. James

Inventor： Roger Kroeze ,  David A. Soltz ,  David A. Crewe ,  Gregory W. Grant ,  Chiyan Kuan ,  Thierry H. C. Nguyen ,  Salvatore T. Fahey ,  Edward M. James

IPC: G21K7/00 ,  G01N23/00

CPC classification number: G01N23/2252 ,  H01J37/252 ,  H01J37/265 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/2561 ,  H01J2237/30477

Abstract: A method of measuring properties of a sample using an electron beam. Coordinates of a measurement site on the sample, and a diameter of the electron beam are defined. Multiple measurement locations are determined within the measurement site, using the coordinates of the measurement site and the diameter of the electron beam. The measurement locations are selected such that the electron beam when directed at the multiple measurement locations (either through beam deflection or sample movement) substantially covers the measurement site. The electron beam is directed to the measurement locations and properties of the sample are measured at each of the measurement locations.

Abstract translation: 使用电子束测量样品的性质的方法。 定义样品上的测量部位的坐标和电子束的直径。 使用测量部位的坐标和电子束的直径，在测量部位内确定多个测量位置。 选择测量位置使得当指向​​多个测量位置（通过光束偏转或样品移动）时的电子束基本上覆盖测量位置。 电子束被引导到测量位置，并且在每个测量位置处测量样品的性质。

公开(公告)号：US07335894B2

公开(公告)日：2008-02-26

申请号：US11274608

申请日：2005-11-15

Applicant: Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan D. Brodie ,  David A. Crewe

Inventor： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan D. Brodie ,  David A. Crewe

IPC: H01J37/244

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

Abstract translation: 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US06633034B1

公开(公告)日：2003-10-14

申请号：US09565585

申请日：2000-05-04

Applicant: David A. Crewe

Inventor： David A. Crewe

IPC: H01J3726

CPC classification number: H01J37/244 ,  H01J37/28

Abstract: A charged particle beam method and apparatus use a primary electron beam to irradiate a specimen so as to induce the specimen to emit secondary and backscattered electrons carrying information about topographic and material structure of the specimen, respectively. The specimen may be an article to be inspected. The electrons emitted by the specimen are deflected in the electric field of an electron mirror and detected using an electron detector of the apparatus. The electron mirror permits the detection of the secondary electrons traveling close to the optical axis of the apparatus and corrects the aberrations of the secondary electrons. In addition, the electron mirror accelerates the electrons improving the detection efficiency of the electron detector and enhancing the time-of-flight dispersion characteristics of the secondary electron collection. A second electron mirror can be provided to further control the direction of the electron's landing on the surface of the electron detector.

Abstract translation: 带电粒子束方法和装置使用一次电子束照射样本，以便分别诱发样本发射携带关于样本的地形和材料结构信息的二次和背散射电子。 样本可能是要检查的物品。 由样品发射的电子在电子反射镜的电场中被偏转，并使用该装置的电子检测器进行检测。 电子反射镜允许检测靠近设备的光轴行进的二次电子，并校正二次电子的像差。 此外，电子反射镜加速了电子提高了电子检测器的检测效率并提高了二次电子收集的飞行时间分散特性。 可以提供第二电子反射镜以进一步控制电子在电子检测器表面上的着陆方向。