BONDING PAD ARCHITECTURE USING CAPACITIVE DEEP TRENCH ISOLATION (CDTI) STRUCTURES FOR ELECTRICAL CONNECTION

    公开(公告)号:US20190088695A1

    公开(公告)日:2019-03-21

    申请号:US15707009

    申请日:2017-09-18

    Abstract: A semiconductor substrate has a back side surface and a front side surface. Metallization levels are provide at the front side surface. Capacitive deep trench isolation structures extend completely through the semiconductor substrate from the front side surface to the back side surface. Each capacitive deep trench isolation structure includes a conductive region insulated from the semiconductor substrate by an insulating liner. The conductive regions at first ends of the plurality of capacitive deep trench isolation structures are electrically connected to a first metallization level by electrical contacts. A bonding pad structure is located at the back side surface of the semiconductor substrate in direct physical and electrical connection to the conductive regions at second ends of the capacitive deep trench isolation structures.

    INTEGRATED PHOTONIC INTERCONNECT SWITCH AND INTEGRATED PHOTONIC INTERCONNECT NETWORK

    公开(公告)号:US20190079247A1

    公开(公告)日:2019-03-14

    申请号:US16123829

    申请日:2018-09-06

    Abstract: A photonic interconnect switch is formed by first and second linear optical waveguides that cross to form an intersection. First and second redirecting photonic ring resonators are coupled together in an intermediate optical coupling zone and are controllable with an electrical signal. The first ring resonator is coupled to the first optical waveguide in a first optical coupling zone. The second ring resonator is coupled to the second optical waveguide in a second optical coupling zone.

    IMAGE SENSOR CHIP
    563.
    发明申请
    IMAGE SENSOR CHIP 审中-公开

    公开(公告)号:US20190067342A1

    公开(公告)日:2019-02-28

    申请号:US16172044

    申请日:2018-10-26

    Abstract: An image sensor chip includes a semiconductor layer intended to receive illumination on a back face and comprising a matrix of pixels on a front face. An interconnection structure is arranged on the front face and a carrier is attached to the interconnection structure with a first face of the carrier facing the front face. An annular trench, arranged on a perimeter of the image sensor chip, extends from a second face of the carrier through an entire thickness of the carrier and into the interconnection structure. A via opening, arranged within the annual trench, extends from the second face of the carrier through the entire thickness of the carrier to reach a metal portion of the interconnection structure. The via opening an annual trench are lined with an insulating layer. The via opening include a metal conductor making an electrical connection to the metal portion.

    Backside illuminated photosensor element with light pipe and light mirror structures

    公开(公告)号:US10192917B2

    公开(公告)日:2019-01-29

    申请号:US15198824

    申请日:2016-06-30

    Abstract: A photosensor is formed within a semiconductor substrate layer having a front side and a back side. An isolation structure delimits an active region of the semiconductor substrate layer which includes a charge collecting region. The front side of semiconductor substrate layer includes a charge transfer circuit. A reflecting mirror is mounted at the back side of the semiconductor substrate layer. The reflecting mirror includes a pupil opening configured to admit light into the active region at the back side. An underside reflective surface of the reflecting mirror is configured to reflect light received from the active region back into the active region.

    Cyclic epitaxy process to form air gap isolation for a bipolar transistor

    公开(公告)号:US10186605B1

    公开(公告)日:2019-01-22

    申请号:US15783109

    申请日:2017-10-13

    Abstract: A bipolar transistor is supported by a single-crystal silicon substrate including a collector contact region. A cyclical epitaxy process is performed to provide a collector region of a first conductivity type on the collector contact region that is laterally separated from a silicon layer by an air gap. A second epitaxial region forms a base region of a second conductivity type. Deposited semiconductor material forms an emitter region of the first conductivity type. The collector region, base region and emitter region are located within an opening formed in a stack of insulating layers that includes a sacrificial layer. The sacrificial layer is selectively removed to expose a side wall of the base region. Epitaxial growth from the exposed sidewall forms a base contact region.

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