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公开(公告)号：US20100102224A1
公开(公告)日：2010-04-29
申请号：US12651209
申请日：2009-12-31
Applicant: Atsushi TAKANE , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
Inventor： Atsushi TAKANE , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
IPC: G01N23/00
CPC classification number: G01N23/225 , H01J2237/21 , H01J2237/2817
Abstract: A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.
Abstract translation: 一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从 样本和比较与不平坦表面的边缘部分相对应的轮廓波形。
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公开(公告)号：US07652249B2
公开(公告)日：2010-01-26
申请号：US11699065
申请日：2007-01-29
Applicant: Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
Inventor： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
CPC classification number: G01N23/225 , H01J2237/21 , H01J2237/2817
Abstract: A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.
Abstract translation: 一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从 样本和比较与不平坦表面的边缘部分相对应的轮廓波形。
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公开(公告)号：US07545977B2
公开(公告)日：2009-06-09
申请号：US11499805
申请日：2006-08-07
Applicant: Mitsuji Ikeda , Tatsuya Maeda , Osamu Nasu , Fumihiro Sasajima
Inventor： Mitsuji Ikeda , Tatsuya Maeda , Osamu Nasu , Fumihiro Sasajima
IPC: G09K9/00
CPC classification number: G06T7/001 , G01N21/95607 , G06T2207/30148
Abstract: Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.
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公开(公告)号：US20070258640A1
公开(公告)日：2007-11-08
申请号：US11790883
申请日：2007-04-27
Applicant: Yuichi Abe , Mitsuji Ikeda
Inventor： Yuichi Abe , Mitsuji Ikeda
CPC classification number: G06K9/03 , G06K9/6253 , G06T7/001 , G06T2207/10048 , G06T2207/10056 , G06T2207/10116 , G06T2207/30128 , G06T2207/30148
Abstract: An inspection apparatus and method are provided, wherein even when an image that cannot be processed by a current image processing algorithm is input to an image processing unit while a working line is in operation, the inspection can be continued by newly generating an image processing algorithm optimized in keeping with a particular image. The apparatus includes an erroneous recognition detector, a teacher data generator and a switching unit for switching the current image processing algorithm to a new image processing algorithm generated based on an updated teacher data group. As a result, the inspection can be continued without extremely decreasing the accuracy even when an unexpected image is input to the working line.
Abstract translation: 提供了一种检查装置和方法，其中即使在工作线处于运行中，当图像处理单元不能被当前图像处理算法处理的图像输入到图像处理单元时，也可以通过新生成图像处理算法来继续检查 根据特定图像进行优化。 该装置包括错误识别检测器，教师数据发生器和用于将当前图像处理算法切换到基于更新的教师数据组生成的新图像处理算法的切换单元。 结果，即使当意外的图像被输入到工作线路时，也可以继续检查，而不会极大地降低精度。
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公开(公告)号：US07235782B2
公开(公告)日：2007-06-26
申请号：US10082286
申请日：2002-02-26
Applicant: Atsushi Takane , Haruo Yoda , Shoji Yoshida , Mitsuji Ikeda , Yasuhiko Ozawa
Inventor： Atsushi Takane , Haruo Yoda , Shoji Yoshida , Mitsuji Ikeda , Yasuhiko Ozawa
IPC: H01J37/28
CPC classification number: H01J37/28
Abstract: An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof. Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.
Abstract translation: 实现了高吞吐量的无操作员和全自动半导体检测系统。 捕获和检查所需的所有条件都是从CAD数据等设计信息生成的。 为了在条件下进行实际检查，半导体检查系统由用于从设计信息产生捕获和检查所需的所有条件的导航系统和用于实际执行捕获和检查的扫描电子显微镜系统组成。 此外，在进行设计数据和SEM图像之间的匹配处理的情况下，通过使用根据多个方向的边缘信息和平滑来校正变形部分。 此外，将与检测位置对应的SEM图像重新登记为模板，由此进行匹配处理。
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Patent Agency Ranking
公开(公告)号：US20070023657A1
公开(公告)日：2007-02-01
申请号：US11515732
申请日：2006-09-06
Applicant: Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
Inventor： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC: G21K7/00
CPC classification number: G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。
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公开(公告)号：US07026615B2
公开(公告)日：2006-04-11
申请号：US10365383
申请日：2003-02-13
Applicant: Atsushi Takane , Haruo Yoda , Shoji Yoshida , Mitsuji Ikeda , Yasuhiko Ozawa
Inventor： Atsushi Takane , Haruo Yoda , Shoji Yoshida , Mitsuji Ikeda , Yasuhiko Ozawa
IPC: G21K7/00
CPC classification number: H01J37/28
Abstract: An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof. Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.
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58.发明申请公开(公告)号：US20060045326A1
公开(公告)日：2006-03-02
申请号：US11207936
申请日：2005-08-22
Applicant: Yasutaka Toyoda , Mitsuji Ikeda , Atsushi Takane
Inventor： Yasutaka Toyoda , Mitsuji Ikeda , Atsushi Takane
IPC: G06K9/00
CPC classification number: G06T7/0006 , G01R31/307 , G06K9/3216 , G06T7/74 , G06T2207/30148 , H01J2237/2817
Abstract: A pattern matching apparatus comprising: means for storing photographed image data of a semiconductor device; means for storing CAD data of said semiconductor device; an information input means for inputting information on the white band width contained in said image data; a pattern extracting means for extracting a pattern on the semiconductor device from said image data by using the white band width information; and a matching means for matching said pattern with the CAD data.
Abstract translation: 一种图案匹配装置，包括：用于存储半导体器件的摄影图像数据的装置; 用于存储所述半导体器件的CAD数据的装置; 信息输入装置，用于输入包含在所述图象数据中的白带宽的信息; 模式提取装置，用于通过使用白色带宽信息从所述图像数据中提取半导体装置上的图案; 以及用于将所述图案与CAD数据相匹配的匹配装置。
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公开(公告)号：US20050184237A1
公开(公告)日：2005-08-25
申请号：US11108731
申请日：2005-04-19
Applicant: Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
Inventor： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
CPC classification number: G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles [obtained at] irradiated from a surface portion of said sample [irradiated with] in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample [as viewed from a direction of said charged particle beam source,] based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器 根据所发射的带电粒子束进行[照射]，以及用于构成样品表面部分（从所述带电粒子束源的方向观察）的二维图像的装置，基于所述带电粒子束的信号 粒子束被聚焦，所述信号在从带电粒子检测器输出的信号中。
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60.发明申请公开(公告)号：US20050147305A1
公开(公告)日：2005-07-07
申请号：US11060400
申请日：2005-02-18
Applicant: Mitsuji Ikeda , Syoji Yoshida , Keisuke Nakashima , Koyo Katsura , Shigeru Shibukawa , Haruo Yoda , Takashi Hotta
Inventor： Mitsuji Ikeda , Syoji Yoshida , Keisuke Nakashima , Koyo Katsura , Shigeru Shibukawa , Haruo Yoda , Takashi Hotta
CPC classification number: G06K9/6203 , G06T7/20
Abstract: An apparatus for calculating a normalized correlation coefficient used as a similarity evaluation measure by using image data values of pixels in a template image and image data values of pixels in a subimage, included in a search image, corresponding to the template image, has a memory that stores image data values of pixels in the search image and calculating means that calculate a sum of image data values of pixels in the template image and a sum of image data values of pixels in the first rectangular region in the search image or a sum of squares of image data values of pixels in the template image and a sum of squares of image data values of pixels in the first rectangular region in the search image. Normalized correlation coefficient calculating means calculate a normalized correlation coefficient on the basis of the sum of image data values of pixels in the template image and the sum of image data values of pixels in the first rectangular region in the search image, or the sum of squares of image data values of pixels in the template image and the sum of squares of image data values of pixels in the first rectangular region in the search image.
Abstract translation: 一种用于计算通过使用模板图像中的像素的图像数据值和相应于模板图像的包括在搜索图像中的子图像中的像素的图像数据值而用作相似性评估度量的归一化相关系数的装置，具有存储器 其存储搜索图像中的像素的图像数据值;以及计算装置，其计算模板图像中的像素的图像数据值的和和搜索图像中的第一矩形区域中的像素的图像数据值之和，或者 模板图像中的像素的图像数据值的平方和搜索图像中的第一矩形区域中的像素的图像数据值的平方和。 归一化相关系数计算装置基于模板图像中的像素的图像数据值之和和搜索图像中的第一矩形区域中的像素的图像数据值之和或平方和来计算归一化相关系数 的模板图像中的像素的图像数据值和搜索图像中的第一矩形区域中的像素的图像数据值的平方和。
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