Abstract:
An electrostatic chuck to minimize an arc and a glow discharge during processing of a semiconductor substrate is provided, In one aspect, an electrostatic chuckin a processing chamber includes a body having a first hole for providing a cooling gas to a backside of a substrate to control a temperature of the substrate, an inner electrode for generating an electrostatic force and a dielectric layer. A ceramic block is tightly inserted into a first hole and has a second hole connected to the first hole. A third hole formed through the dielectric layer is connected to the first hole and the second hole. The cooling gas is provided to the backside of the substrate through the first hole or the second hole. Since the first hole is covered with the ceramic block, the generation of an arc or a glow discharge inside the first hole may be minimized, thereby preventing damage to the electrostatic chuck and improving production yields.
Abstract:
A digital television receiver and antenna control method in the digital television receiver are disclosed. The digital television receiver includes and antenna having directivity according to a control signal for switching patterns of the antenna. A receiving section receives and processes channel signals for digital television broadcasting through the antenna. An antenna control section generates the control signal for switching the patterns of the antenna based on channel information according to the received channel signal. An antenna switching control section switches the patterns of the antenna during a sync signal period of the received channel signal when the control signal is generated.
Abstract:
An apparatus for heating a substrate of a semiconductor device includes a hot plate, on which a semiconductor substrate is placed, and a heater for heating the hot plate. The hot plate is preferably a composite plate including a plurality of plates having different thermal conductivities from each other. For example, a first plate adjacent to the heater can be made of aluminum, which has a relatively high thermal conductivity. A second plate, laminated on top of the first plate, can be made of titanium or stainless steel, which both have a thermal conductivity lower than aluminum. A composite hot plate as disclosed herein is better able to maintain a constant temperature and a uniform temperature distribution in order to more uniformly heat a substrate and to reduce an amount of energy required for the heating process. In addition, the reliability and productivity of the semiconductor device manufactured by the apparatus can be improved.
Abstract:
An alkaline cell having an anode comprising zinc and a cathode comprising manganese dioxide wherein the cathode is located annularly along the inside surface of the cell housing and has a plurality of indentations on the inside of its surface facing the cell interior. Each indentation has a wall defining a channel with an opening thereto running preferably in the direction of the cell's length. The channel and opening facing the cell interior filled with anode material. The cell can have an anode current collector, typically of metal, with at least a portion of its surface extending into the cathode indentation channel. The anode current collector can have a portion of its surface extending from a point within the anode and into the cathode indentation channel through said opening. The cell can include a cathode current collector comprising a sheet of conductive material such as a sheet of metal or graphite placed within the cathode, particularly within thick regions of the cathode. The cathode current collector can be used in conjuction with a conventional single nail anode current collector or in combination with the extended surface anode current collectors of the invention. Such alkaline cells exhibit improved performance, particularly under high power application.
Abstract:
Disclosed herein is an electric generating system using a solar cell, including: a DC/DC converter that converts output voltage generated from a solar cell into DC voltage and has a converter switching device; a snubber device that has a snubber switch clamping voltage applied to the converter switching device; and a control device that detects the voltage applied to the converter switching device and controls an operation of the snubber switch according to a detected voltage level applied to the converter switching device, thereby increasing the efficiency of the electric generating system using a solar cell while reducing switching loss and conduction loss.
Abstract:
There are provided a multi-level converter capable of outputting power having various voltage levels with respect to a single input power supply by using a simple circuit, an inverter having the same, and a solar power supply apparatus having the same. The multi-level converter includes a first buck-boost unit having a first power switch switching an input power supply and outputting a first power having a voltage level varied according to switching of the first power switch; a bypass unit outputting a second power having a voltage level of the input power supply; and a second buck-boost unit having a second power switch switching the input power supply and outputting a third power having a voltage level varied according to switching of the second power switch.
Abstract:
There are provided a power converting apparatus and an operating method thereof, and a solar power generation system. The power converting apparatus for a solar power generation system includes: a power converting unit converting an input signal generated by a solar cell module into an output signal; and a control circuit unit controlling an operation of the power converting unit, wherein the power converting unit includes at least one transformer, and a current sensor and a switching circuit connected to a primary winding of the at least one transformer, and the control circuit unit calculates a voltage and a current of the input signal using a current of the primary winding of the at least one transformer sensed by the current sensor and performs a maximum power point tracking (MPPT) control so that the power converting unit is operated at a maximum power point.
Abstract:
A method for winding a coil on an object, wherein the coil includes a plurality of first coils and a plurality of second coils, may have winding the first coils on an exterior circumferences of the second coils, wherein an outer circumferences of the respective second coil is enclosed and in contact with outer circumference of at least three first coils, and wherein cross-sectional area of the second coil is smaller than that of the first coil, and wherein the outer circumference of the at least three first coils are in contact each other.
Abstract:
There is provided an even-level inverter, including: a voltage-dividing circuit dividing input DC power into an even number of voltage levels; a plurality of switching devices connected to individual nodes of the voltage-dividing circuit having the even number of voltage levels; and a bidirectional switching device connected to the individual nodes of the voltage-dividing circuit through at least one of the plurality of switching devices and including at least two transistors. According to the present invention, the bidirectional switching device is implemented without a diode to thereby reduce conduction loss caused due to an anti-parallel diode included in the related art bidirectional switching device, and a neutral point of the voltage-dividing circuit is electrically separated from the switching devices to thereby control reactive power.
Abstract:
Disclosed are a maximum power point tracker, a power conversion controller, a power conversion device having an insulating structure, and a method for tracking maximum power point. The power conversion device includes: a DC/AC converter including a primary DC chopper unit having a primary switch, a transformer, and an AC/AC conversion unit including a secondary switch; a current detector detecting current from an input stage of the DC/AC converter and providing a detected current value; a voltage detector detecting a system voltage from an output stage of the DC/AC converter; and a power conversion controller generating a primary PWM signal to be provided to the primary DC chopper unit and secondary first and second PWM signals, having the mutually opposing phases, to be provided to the AC/AC conversion unit by using the detected current value and the system voltage.