公开(公告)号：US07038850B2

公开(公告)日：2006-05-02

申请号：US11030735

申请日：2005-01-06

申请人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01B11/00

CPC分类号： G01N21/4788

摘要： A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.

摘要翻译： 一种用于模拟光学散射的方法包括为包括扰动域和背景材料的对象定义零级结构（理想化表示）的初始步骤。 使用严格的耦合波分析（RCWA）为零阶结构获得了绿色函数和零阶波函数。 构建了包括绿色函数，零阶波函数和扰动函数的Lippmann-Schwinger方程。 然后在扰动域内的选定的一组网格点上评估Lippmann-Schwinger方程。 求出所得到的线性方程，以计算被摄体的一个或多个反射系数。

公开(公告)号：US20060012803A1

公开(公告)日：2006-01-19

申请号：US11231638

申请日：2005-09-21

申请人： Jon Opsal ,  Allan Rosencwaig

发明人： Jon Opsal ,  Allan Rosencwaig

IPC分类号： G01B11/14

CPC分类号： G01B11/024 ,  G01B11/02 ,  G01B11/14 ,  G03F7/70625

摘要： A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure. In one embodiment, the sample is scanned with respect to the probe beam and output signals are generated as a function of position of the probe beam spot.

公开(公告)号：US06972852B2

公开(公告)日：2005-12-06

申请号：US10973703

申请日：2004-10-26

申请人： Jon Opsal ,  Allan Rosencwaig

发明人： Jon Opsal ,  Allan Rosencwaig

IPC分类号： G01B11/02 ,  G01B11/14

CPC分类号： G01B11/024 ,  G01B11/02 ,  G01B11/14 ,  G03F7/70625

摘要： A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure. In one embodiment, the sample is scanned with respect to the probe beam and output signals are generated as a function of position of the probe beam spot.

摘要翻译： 公开了一种用于评估在半导体样品上形成的相对小的周期性结构的方法和装置。 在这种方法中，光源产生指向样品的探针束。 在一个优选实施例中，使用非相干光源。 使用透镜将探针束聚焦在样品上，使得探针束内的射线产生入射角的扩展。 样品上的探针光斑的尺寸大于周期结构特征之间的间距，所以一些光从结构散射。 提供了一种用于监测反射和散射光的检测器。 检测器包括多个检测器元件，其布置成使得多个输出信号同时产生并对应于多个入射角。 输出信号被提供给处理器，该处理器根据允许评估周期性结构的几何形状的散射模型分析信号。 在一个实施例中，相对于探测光束扫描样品，并且根据探针束斑的位置产生输出信号。

公开(公告)号：US06963401B2

公开(公告)日：2005-11-08

申请号：US10691132

申请日：2003-10-22

申请人： Jon Opsal ,  Minna Hovinen

发明人： Jon Opsal ,  Minna Hovinen

IPC分类号： G01N21/17 ,  G01N21/21 ,  G01J4/00

CPC分类号： G01N21/1717 ,  G01N21/211

摘要： A combination metrology tool is disclosed which is capable of obtaining both thermal wave and optical spectroscopy measurements on a semiconductor wafer. In a preferred embodiment, the principal combination includes a thermal wave measurement and a spectroscopic ellipsometric measurement. These measurements are used to characterize ion implantation processes in semiconductors over a large dosage range.

摘要翻译： 公开了一种能够在半导体晶片上获得热波和光谱测量的组合计量工具。 在优选实施例中，主要组合包括热波测量和光谱椭偏测量。 这些测量用于表征在大剂量范围内的半导体中的离子注入过程。

公开(公告)号：US06922244B2

公开(公告)日：2005-07-26

申请号：US10864233

申请日：2004-06-09

申请人： Allan Rosencwaig ,  Jon Opsal

发明人： Allan Rosencwaig ,  Jon Opsal

IPC分类号： G01B11/06 ,  G01J4/00

CPC分类号： G01B11/0641

摘要： An optical measurement system, including a reference ellipsometer and a non-contact optical measurement device, evaluates a sample having at least a partially known composition. The reference ellipsometer includes a light generator to generate a beam of quasi-monochromatic light of known wavelength and polarization, directed at a non-normal angle of incidence to interact with the sample. An analyzer creates interference between S and P polarized components of the reflected beam, the intensity of which is measured by a detector. A processor determines the polarization state using the detected intensity, and determines an optical property of the sample based upon the determined polarization state, the known wavelength, and the composition. The processor calibrates the optical measurement device, used to measure an optical parameter of the sample, by comparing the measured optical parameter from the optical measurement device to the determined optical property from the reference ellipsometer.

摘要翻译： 包括参考椭偏仪和非接触光学测量装置的光学测量系统评估具有至少部分已知组成的样品。 参考椭偏仪包括光发生器，用于产生已知波长和偏振的准单色光束，指向非正常入射角与样品相互作用。 分析仪产生反射光束的S和P偏振分量之间的干涉，其强度由检测器测量。 处理器使用检测到的强度来确定偏振状态，并且基于所确定的偏振状态，已知波长和组成来确定样本的光学特性。 处理器通过将来自光学测量装置的测量光学参数与来自参考椭偏仪的所确定的光学特性进行比较来校准用于测量样品的光学参数的光学测量装置。

公开(公告)号：US20050137809A1

公开(公告)日：2005-06-23

申请号：US11030735

申请日：2005-01-06

申请人： Yia Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01B11/00 ,  G01N21/47 ,  G01N31/00

CPC分类号： G01N21/4788

摘要： A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.

摘要翻译： 一种用于模拟光学散射的方法包括为包括扰动域和背景材料的对象定义零级结构（理想化表示）的初始步骤。 使用严格的耦合波分析（RCWA）为零阶结构获得了绿色函数和零阶波函数。 构建了包括绿色函数，零阶波函数和扰动函数的Lippmann-Schwinger方程。 然后在扰动域内的选定的一组网格点上评估Lippmann-Schwinger方程。 求出所得到的线性方程，以计算被摄体的一个或多个反射系数。

公开(公告)号：US06894781B2

公开(公告)日：2005-05-17

申请号：US10430510

申请日：2003-05-06

申请人： Lanhua Wei ,  Jon Opsal ,  Allan Rosencwaig

发明人： Lanhua Wei ,  Jon Opsal ,  Allan Rosencwaig

IPC分类号： G01B11/06 ,  G01K11/12 ,  G01N21/21 ,  G01J4/00

CPC分类号： G01K11/12 ,  G01B11/065 ,  G01N21/211

摘要： A method and apparatus are disclosed for accurately and repeatably determining the thickness of a thin film on a substrate. A rotating compensator ellipsometer is used which generates both 2ω and 4ω output signals. The 4ω omega signal is used to provide an indication of the temperature of the sample. This information is used to correct the analysis of the thin film based on the 2ω signal. These two different signals generated by a single device provide independent measurements of temperature and thickness and can be used to accurately analyze a sample whose temperature is unknown.

摘要翻译： 公开了用于精确地和可重复地确定衬底上的薄膜的厚度的方法和装置。 使用旋转补偿器椭偏仪，其产生2omega和4omega输出信号。 4omega欧米茄信号用于提供样品温度的指示。 该信息用于基于2omega信号来校正薄膜的分析。 由单个器件产生的这两个不同的信号提供温度和厚度的独立测量，并可用于准确分析温度未知的样品。

公开(公告)号：US06882424B2

公开(公告)日：2005-04-19

申请号：US10797163

申请日：2004-03-10

申请人： Jon Opsal ,  Li Chen

发明人： Jon Opsal ,  Li Chen

IPC分类号： G01B11/06 ,  G01N21/17 ,  G01N21/21 ,  G01N21/27 ,  G01N21/00

CPC分类号： G01N21/211 ,  G01N21/1717

摘要： An apparatus for characterizing multilayer samples is disclosed. An intensity modulated pump beam is focused onto the sample surface to periodically excite the sample. A probe beam is focused onto the sample surface within the periodically excited area. The power of the reflected probe beam is measured by a photodetector. The output of the photodetector is filtered and processed to derive the modulated optical reflectivity of the sample. Measurements are taken at a plurality of pump beam modulation frequencies. In addition, measurements are taken as the lateral separation between the pump and probe beam spots on the sample surface is varied. The measurements at multiple modulation frequencies and at different lateral beam spot spacings are used to help characterize complex multilayer samples. In the preferred embodiment, a spectrometer is also included to provide additional data for characterizing the sample.

摘要翻译： 公开了一种用于表征多层样品的装置。 将强度调制的泵浦光束聚焦到样品表面上以周期性地激发样品。 探针光束聚焦在周期性激发区域内的样品表面上。 反射探测光束的光束由光电检测器测量。 对光电检测器的输出进行滤波和处理，以得出样品的调制光学反射率。 在多个泵浦光束调制频率下进行测量。 此外，测量取决于泵和探针之间的横向分离，样品表面上的光斑变化。 使用多个调制频率和不同横向光斑间距的测量来帮助表征复杂的多层样品。 在优选实施例中，还包括光谱仪以提供用于表征样品的附加数据。

公开(公告)号：US06882421B2

公开(公告)日：2005-04-19

申请号：US10886111

申请日：2004-07-07

申请人： Jon Opsal ,  Youxian Wen

发明人： Jon Opsal ,  Youxian Wen

IPC分类号： G01N21/21 ,  G01N21/84 ,  G01N25/72 ,  G01J4/00 ,  G01B11/06

CPC分类号： G01N21/211 ,  G01N21/8422 ,  G01N25/72

摘要： Systems and methods are disclosed for evaluating nitrogen levels in thin gate dielectric layers formed on semiconductor samples. In one embodiment, a tool is disclosed which includes both a narrow band ellipsometer and a broadband spectrometer for measuring the sample. The narrowband ellipsometer provides very accurate information about the thickness of the thin film layer while the broadband spectrometer contains information about the nitrogen levels. In another aspect of the subject invention, a thermal and/or plasma wave detection system is used to provide information about the nitrogen levels and nitration processes.

摘要翻译： 公开了用于评估在半导体样品上形成的薄栅介质层中的氮含量的系统和方法。 在一个实施例中，公开了一种工具，其包括窄带椭偏仪和用于测量样品的宽带光谱仪。 窄带椭偏仪提供关于薄膜层的厚度的非常准确的信息，而宽带光谱仪包含关于氮水平的信息。 在本发明的另一方面，使用热和/或等离子体波检测系统来提供关于氮水平和硝化过程的信息。

公开(公告)号：US20050062971A1

公开(公告)日：2005-03-24

申请号：US10947925

申请日：2004-09-23

申请人： Alex Salnik ,  Jon Opsal ,  Lena Nicolaides

发明人： Alex Salnik ,  Jon Opsal ,  Lena Nicolaides

IPC分类号： G01N21/17 ,  G01N21/63 ,  G01N21/95 ,  G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/1717 ,  G01N21/636

摘要： The ability of a Modulated Optical Reflectivity (MOR) or Thermal Wave (TW) system to measure characteristics of a sample based on the amplitude and phase of a probe beam reflected from the surface of the sample can be improved by providing a polychromatic pump and/or probe beam that can be scanned over a wide spectral range, such as a range of at least 100 nm. The information contained in the spectral dependencies of a TW response obtained from the sample can be compared and/or fitted to corresponding theoretical dependencies in order to obtain more precise and reliable information about the properties of the particular sample than is available for single-wavelength systems. This information can further be combined with measurements taken for varying spot separations or varying pump source modulation frequency, as well as with photo-thermal radiometry (PTR), spectroscopic reflectometry, and/or ellipsometry measurements.

摘要翻译： 基于从样品表面反射的探针光束的幅度和相位，调制光学反射率（MOR）或热波（TW）系统测量样品的特性的能力可以通过提供多色泵和/ 或可以在宽光谱范围（例如至少100nm的范围）上扫描的探测光束。 包含在从样本获得的TW响应的频谱相关性中的信息可以与相应的理论依赖性进行比较和/或拟合，以获得关于特定样品的性质的更精确和可靠的信息，而不是可用于单波长系统 。 该信息可以进一步与用于变化的点分离或变化的泵浦源调制频率以及光热辐射测量（PTR），光谱反射测量和/或椭偏仪测量的测量结合。