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    Beam folding optics system and method of use with application in ellipsometry and polarimetry
    51.
    发明授权
    Beam folding optics system and method of use with application in ellipsometry and polarimetry 有权
    光束折射光学系统及其应用于椭偏仪和偏光镜的方法

    公开(公告)号：US5969818A

    公开(公告)日：1999-10-19

    申请号：US144764

    申请日：1998-08-31

    申请人： Blaine D. Johs ,  Ping He

    发明人： Blaine D. Johs ,  Ping He

    IPC分类号： G01J3/14 ,  G01J3/447 ,  G01J4/00

    CPC分类号： G01J3/14 ,  G01J3/447

    摘要： Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a beam of electromagnetic radiation without significantly changing the phase angle between orthogonal components therein. Two pairs of mirrors are oriented to form two orthogonally related planes such that phase shift entered to an electromagnetic beam by interaction with the first pair of mirrors is canceled by interaction with the second pair.

    摘要翻译： 公开了一种电磁射束引导系统和方法，其能够改变电磁辐射束的传播方向，而不会显着改变其中的正交分量之间的相位角。 两对反射镜被定向以形成两个正交相关平面，使得通过与第二对反射镜相互作用而进入电磁波的相位与第二对的相互作用被抵消。

    Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use
    52.
    发明授权
    Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use 有权
    包括偏振状态补偿光束定向样品摆动补偿系统的椭圆计和偏光计及其使用方法

    公开(公告)号：US08467057B1

    公开(公告)日：2013-06-18

    申请号：US13200413

    申请日：2011-09-23

    申请人： Blaine D. Johs ,  Ping He

    发明人： Blaine D. Johs ,  Ping He

    IPC分类号： G01J4/00

    CPC分类号： G01N21/211 ,  G01N21/55 ,  G01N2021/213

    摘要： An improved system and method for investigation of a wobbling surface of a sample with an electromagnetic beam, involving application of a beam directing dual reflection surface “prism” system, which, while effecting beam locus direction rotation of 90 degrees also preserves beam polarization state. The system allows causing an electromagnetic beam to access an otherwise difficult to access sample in, for instance, a vacuum deposition chamber, and enables achieving very closely spaced incident and spherical mirror reflected points of beam reflection from a sample surface in use.

    摘要翻译： 一种用于利用电磁束研究样品的摆动表面的改进的系统和方法，涉及应用光束定向双反射表面“棱镜”系统，其同时实现90度的光束轨迹方向旋转也保持了束极化状态。 该系统允许使电磁波束访问例如真空沉积室中难以进入的样品，并且使得能够在使用中实现来自样品表面的光束反射的非常紧密间隔的入射和球面反射镜反射点。

    View-finder in ellipsometer or the like systems
    53.
    发明申请
    View-finder in ellipsometer or the like systems 有权
    偏心计或其他系统中的取景器

    公开(公告)号：US20120314218A1

    公开(公告)日：2012-12-13

    申请号：US13573032

    申请日：2012-08-15

    申请人： Martin M. Liphardt ,  Ping He

    发明人： Martin M. Liphardt ,  Ping He

    IPC分类号： G01N21/47

    CPC分类号： G01N21/211 ,  G02B26/0883 ,  G02B27/1073 ,  G02B27/143

    摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.

    摘要翻译： 一种允许目视观察由电磁波束进行调查的样品的系统和方法，以便与检测电磁辐射的样本波束一起被引起撞击的样本，与检测电磁波的样本束的数据检测器结合 它与样品相互作用后的辐射。

    View-finder in ellipsometer or the like systems
    57.
    发明授权
    View-finder in ellipsometer or the like systems 有权
    偏心计或其他系统中的取景器

    公开(公告)号：US08587781B2

    公开(公告)日：2013-11-19

    申请号：US13573032

    申请日：2012-08-15

    申请人： Martin M Liphardt ,  Ping He

    发明人： Martin M Liphardt ,  Ping He

    IPC分类号： G01J4/00 ,  G01N21/00 ,  G01N21/55

    CPC分类号： G01N21/211 ,  G02B26/0883 ,  G02B27/1073 ,  G02B27/143

    摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.

    摘要翻译： 一种允许目视观察由电磁波束进行调查的样品的系统和方法，以便与检测电磁辐射的样本波束一起被引起撞击的样本，与检测电磁波的样本束的数据检测器结合 它与样品相互作用后的辐射。