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1.发明授权Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample 有权椭圆偏振计满足scheimpflug条件，在样品上提供基本上圆形的电磁辐射点公开(公告)号：US07567345B1
公开(公告)日：2009-07-28
申请号：US11784750
申请日：2007-04-10
申请人： Martin M. Liphardt , Brooks A. Hitt , Jeffrey S. Hale , Ping He
发明人： Martin M. Liphardt , Brooks A. Hitt , Jeffrey S. Hale , Ping He
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J4/00
摘要： A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on incident and/or, optionally, reflection sides of a sample. In addition beneficial aperture hole aspect ratio and aperture plane orientation is described.
摘要翻译： 具有孔径，聚焦装置，样品和可选的检测器平面的反射计，椭偏仪，偏振计等系统，使得在入射和/或可选的反射面上基本满足Scheimpflug条件。 此外，还描述了有利的孔径纵横比和孔平面取向。
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2.发明授权Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US08436994B2
公开(公告)日：2013-05-07
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01J4/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
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3.发明申请Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US20090103093A1
公开(公告)日：2009-04-23
申请号：US12313760
申请日：2008-11-25
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N21/01 , G01N21/21 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，应用于 映射椭偏仪等。
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4.发明申请Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US20110109906A1
公开(公告)日：2011-05-12
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01B11/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
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5.发明授权Discrete polarization state spectroscopic ellipsometer system and method of use 有权离散偏振态光谱椭偏仪系统及其使用方法公开(公告)号：US07492455B1
公开(公告)日：2009-02-17
申请号：US11483888
申请日：2006-07-10
申请人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
发明人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0224 , G01J3/10 , G01N21/274 , G01N2021/213
摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
摘要翻译： 一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。 优选的光谱椭偏仪系统没有在数据采集期间移动的部件，并且其提供渐进多个顺序离散而不是连续变化的偏振状态。
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6.发明授权Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence 有权旋转或可旋转的补偿器系统以多个入射角对样品上的斑点提供畸变校正的电磁辐射公开(公告)号：US07304737B1
公开(公告)日：2007-12-04
申请号：US11497920
申请日：2006-08-03
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/212 , G01N2021/213 , G01N2021/215
摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
摘要翻译： 光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统 的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。
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7.发明授权Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter 有权旋转补偿器椭圆计/偏振计中的组合空间滤波器和继电器系统公开(公告)号：US07245376B2
公开(公告)日：2007-07-17
申请号：US11284213
申请日：2005-11-22
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008
摘要： Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
摘要翻译： 改进的低像差继电器系统在旋转补偿器椭圆偏振器，偏振计等系统中作为空间滤波器。
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公开(公告)号：US07623237B1
公开(公告)日：2009-11-24
申请号：US11452483
申请日：2006-06-14
申请人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
发明人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/55
摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。
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公开(公告)号：US07535566B1
公开(公告)日：2009-05-19
申请号：US11453656
申请日：2006-06-15
申请人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden , Brian D. Guenther , Martin M. Liphardt , Ping He
发明人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden , Brian D. Guenther , Martin M. Liphardt , Ping He
CPC分类号： G01N21/211 , G01J3/02 , G01J3/021 , G01J3/0224 , G01J2003/1213 , G01J2003/1282 , G01N21/274 , G01N2021/213 , G02B27/141
摘要： An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively emphasizing intensity in another wavelength range, (eg. UV wavelengths).
摘要翻译： 一种用于反射地引导电磁辐射的分光束同时在第一波长范围（例如可见波长）中强调强度的电磁光束色移和引导装置，同时相对强调另一波长范围内的强度， （例如UV波长）。
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公开(公告)号：US07336361B1
公开(公告)日：2008-02-26
申请号：US11256891
申请日：2005-10-25
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J4/00 , G01N21/211 , G01N2021/213
摘要： A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.
摘要翻译： 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统还具有至少一个多元件透镜，并且可选地存在于环境控制室中。
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