公开(公告)号：US20060186356A1

公开(公告)日：2006-08-24

申请号：US11214819

申请日：2005-08-31

申请人： Yousuke Imai ,  Hideo Hoshino ,  Hiroshi Komori

发明人： Yousuke Imai ,  Hideo Hoshino ,  Hiroshi Komori

IPC分类号： G01J3/10

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/008

摘要： An EUV light source device for protecting a collection mirror from debris that is considered harmful to a mirror coating. The EUV light source device includes: a chamber in which extreme ultra violet light is generated; a target injection unit and a target injection nozzle that supply the chamber with a material to become the target; a laser light source that applies a laser beam to the target so as to generate plasma; a collection mirror that collects the extreme ultra violet light emitted from the plasma; an X-ray source that ionizes neutral particles included in particles emitted from the plasma into charged particles; and plural magnets that generate a magnetic field within the chamber so as to trap at least the charged particles ionized by the X-ray source.

摘要翻译： EUV光源装置，用于保护收集镜免受被认为对镜面涂层有害的碎片。 EUV光源装置包括：产生极紫外光的室; 目标喷射单元和目标喷射喷嘴，其向所述室供给成为所述目标的材料; 激光源，其将激光束施加到所述靶，以产生等离子体; 收集从等离子体发射的极紫外光的收集镜; 将从等离子体发射的粒子中包含的中性粒子离子化为带电粒子的X射线源; 以及在室内产生磁场以便至少捕获由X射线源离子化的带电粒子的多个磁体。

公开(公告)号：US06437501B1

公开(公告)日：2002-08-20

申请号：US09529747

申请日：2000-04-18

申请人： Hiroshi Komori

发明人： Hiroshi Komori

IPC分类号： C03C3102

CPC分类号： C03C3/102 ,  C03C3/105 ,  C03C4/087 ,  H01J29/863

摘要： In an X-ray absorbing CRT bulb glass containing 10-40 weight % PbO and having an absorption coefficient not smaller than 40 cm−1 with respect to an X-ray having a wavelength of 0.6 angstrom, the glass contains 0.06-10 weight % Fe2O3 to thereby suppress lead from leaching into water in the atmosphere or in the ground where the CRT is wasted and dumped, so as to avoid the environmental pollution by the lead leached in the ground.

摘要翻译： 在相对于波长为0.6埃的X射线的含有10-40重量％PbO并且吸收系数不小于40cm -1的X射线吸收CRT灯泡玻璃中，玻璃含有0.06-10重量％ 从而抑制铅在大气中或CRT的浪费和倾倒的地面浸入水中，以避免在地面浸出的铅的环境污染。

公开(公告)号：US6101211A

公开(公告)日：2000-08-08

申请号：US945219

申请日：1997-10-01

申请人： Osamu Wakabayashi ,  Hiroshi Komori ,  Hakaru Mizoguchi

发明人： Osamu Wakabayashi ,  Hiroshi Komori ,  Hakaru Mizoguchi

IPC分类号： H01S3/1055 ,  H01S3/225 ,  H01S3/08

CPC分类号： H01S3/225 ,  H01S3/1055

摘要： A narrow-band laser apparatus comprising a laser generating section having laser activity and capable of generating laser beam; bandwidth narrowing section which is provided on one end side of the laser generating section on the optical axis of the laser beam generated in the laser generating section to narrow the bandwidth of the laser beam by means of at least one angel-dispersion wavelength selection element, fold back the laser beam in the narrowed band and output the folded laser beam toward the laser generating section; beam folding section which is provided on the other end of the laser generating section on the optical axis of the laser beam generated in the laser generating section to fold back the input laser beam and reflect the folded laser beam into the laser generating section; and a laser beam branching unit which is provided between the laser generating section and the bandwidth narrowing section to permit part of the laser beam input from the laser generating section to pass therethrough into the bandwidth narrowing section while deflecting the remaining part of the laser beam and drawing out the same as an output beam. The laser apparatus is constructed so that the light which has passed straight through the laser beam branching unit is input into the bandwidth narrowing section, thereby stabilizing a resonance system to eliminate multiwavelength oscillation accompanying the vibration.

摘要翻译： PCT No.PCT / JP96 / 00921 Sec。 371日期：1997年10月1日 102（e）1997年10月1日PCT PCT 1996年4月3日PCT公布。 第WO96 / 31929号公报 日期：1996年10月10日一种窄带激光装置，包括具有激光活动并能产生激光束的激光发生部分; 带宽窄化部，其在激光发生部生成的激光的光轴上设置在激光发生部的一端侧，通过至少一个角度分散型波长选择元件使激光束的带宽变窄， 折叠在窄带中的激光束并将折叠的激光束输出到激光产生部分; 光束折叠部分，其设置在激光产生部分的另一端上，在激光产生部分中产生的激光束的光轴上折回输入的激光束并将折叠的激光束反射到激光产生部分中; 以及激光束分支单元，其设置在激光产生部分和带宽窄化部分之间，以允许从激光产生部分输入的激光束的一部分通过其进入带宽窄化部分，同时偏转激光束的剩余部分， 绘出与输出光束相同的图像。 激光装置被构造成使直接穿过激光束分支单元的光被输入到带宽窄化部分中，从而稳定谐振系统以消除伴随振动的多波长振荡。

公开(公告)号：US5622495A

公开(公告)日：1997-04-22

申请号：US478343

申请日：1995-06-07

申请人： Kunio Chikami ,  Hiroshi Komori

发明人： Kunio Chikami ,  Hiroshi Komori

IPC分类号： A61C7/12 ,  A61C3/00

CPC分类号： A61C7/12

摘要： A supplementary device is provided for sliding operation for use in a device for correcting teeth irregularities. The supplementary device abuts a bracket, and has a wire-engaging slit having the same shape as a slit in the bracket so that a wire engaged in the bracket can also be engaged in the slit. The supplementary device has a pair of protrusions which forms a T-shape. The projections are used to anchor a rubber band. The supplementary device is slidable along the wire and slides until stopped, for example by the bracket.

摘要翻译： 提供了用于滑动操作的辅助装置，用于校正牙齿不规则的装置。 辅助装置邻接支架，并且具有与支架中的狭缝相同形状的线接合狭缝，使得接合在支架中的线也可以接合在狭缝中。 辅助装置具有形成T形的一对突起。 这些突起用于锚定橡胶带。 辅助装置可沿导线滑动并滑动直到停止，例如通过支架。

公开(公告)号：US08532591B2

公开(公告)日：2013-09-10

申请号：US13383256

申请日：2010-06-02

申请人： Mikihiro Shimada ,  Ryo Kitamura ,  Kaoru Ishida ,  Hiroshi Komori

发明人： Mikihiro Shimada ,  Ryo Kitamura ,  Kaoru Ishida ,  Hiroshi Komori

IPC分类号： H04B1/02

CPC分类号： H03F1/0222 ,  H03F1/0266 ,  H03F3/24 ,  H03F2200/408 ,  H03G3/004 ,  H03G3/3042 ,  H03G11/00 ,  H04B1/0475

摘要： A transmission circuit according to the present invention includes: an amplitude signal driving section (220) that generates a control voltage based on an amplitude signal in a high-output mode, and generates a control voltage at a predetermined level and a bias current based on the amplitude signal in a low-output mode; a variable gain adjustment section (114) that adjusts a power level of the phase signal; and a power amplifier (130) which amplitude-modulates the phase signal having the adjusted power level on the basis of the control voltage, in the high-output mode, and to a power supply terminal of which the control voltage is supplied and which amplitude-modulates the phase signal having the adjusted power level on the basis of the bias current, in the low-output mode. In a specific region in a low-output region and close to a high-output region, the variable gain adjustment section (114) adjusts the power level of the phase signal to a predetermined upper-limit level, and the amplitude signal driving section (220) adjusts a gain of the power amplifier (130) to obtain a desired output power level.

摘要翻译： 根据本发明的发送电路包括：振幅信号驱动部（220），其根据高输出模式的振幅信号生成控制电压，并且产生基于预定电平的控制电压和基于 幅度信号处于低输出模式; 调整所述相位信号的功率电平的可变增益调整部（114） 以及功率放大器（130），其在高输出模式下基于控制电压对调整后的功率电平的相位信号进行幅度调制，并且向提供控制电压的电源端子和幅度 在低输出模式下，根据偏置电流调制具有调整功率电平的相位信号。 在低输出区域的特定区域中，接近高输出区域的可变增益调整部114将相位信号的功率电平调整为规定的上限电平，振幅信号驱动部 220）调整功率放大器（130）的增益以获得期望的输出功率电平。

公开(公告)号：US08481983B2

公开(公告)日：2013-07-09

申请号：US12385245

申请日：2009-04-02

申请人： Masato Moriya ,  Hiroshi Komori ,  Takeshi Asayama

发明人： Masato Moriya ,  Hiroshi Komori ,  Takeshi Asayama

IPC分类号： G21K5/04

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

摘要： An extreme ultra violet light source apparatus in which debris moving within a chamber are prevented from reducing reflectance or transmittance of optical elements of an EUV collector mirror, etc, and extreme ultra violet light can stably be generated in a long period. The apparatus includes: a target supply unit for supplying a target to a predetermined position within a chamber; a driver laser for applying a laser beam to the target to generate first plasma; a collector mirror provided within the chamber, for collecting extreme ultra violet light radiated from the first plasma; a gas supply unit for supplying a gas into the chamber; an excitation unit for exciting the gas to generate second plasma around a region where the first plasma is generated; and an exhaust unit for exhausting the chamber and ejecting debris emitted from the first plasma to outside of the chamber.

公开(公告)号：US08396432B2

公开(公告)日：2013-03-12

申请号：US13381240

申请日：2010-04-01

申请人： Ryo Kitamura ,  Kaoru Ishida ,  Mikihiro Shimada ,  Hiroshi Komori

发明人： Ryo Kitamura ,  Kaoru Ishida ,  Mikihiro Shimada ,  Hiroshi Komori

IPC分类号： H04B1/04

CPC分类号： H03F1/0261 ,  H03F1/304 ,  H03F1/32 ,  H03F3/245 ,  H03F2200/108 ,  H03F2200/18 ,  H03F2200/408 ,  H03F2200/468

摘要： A transmitter circuit is provided which is capable of reducing modulation distortion even when an output power of a power amplifying section 141 is low. A signal generation section 11 generates an amplitude signal and a phase signal. A regulator 12 outputs a current based on the amplitude signal. A phase modulation section 13 phase-modulates the phase signal, and outputs a phase-modulated signal. The power amplifying section 141 receives the current which is based on the amplitude signal and supplied as a bias current from the regulator 12, and amplifies the phase-modulated signal by using the supplied current. Further, to the power amplifying section 141, a predetermined DC voltage is supplied as a collector voltage.

摘要翻译： 提供一种即使当功率放大部分141的输出功率低时也能够降低调制失真的发射机电路。 信号生成部11生成振幅信号和相位信号。 调节器12基于振幅信号输出电流。 相位调制部13对相位信号进行相位调制，并输出相位调制信号。 功率放大部分141接收基于振幅信号并作为偏置电流从调节器12提供的电流，并且通过使用所提供的电流放大相位调制信号。 此外，向功率放大部141提供预定的DC电压作为集电极电压。

公开(公告)号：US20120163500A1

公开(公告)日：2012-06-28

申请号：US13391704

申请日：2010-04-07

申请人： Yukihiro Omoto ,  Kaoru Ishida ,  Hiroshi Komori

发明人： Yukihiro Omoto ,  Kaoru Ishida ,  Hiroshi Komori

IPC分类号： H04L27/36

CPC分类号： H03F3/24 ,  H03F1/02 ,  H03F1/0222 ,  H03F1/0277 ,  H03F3/189 ,  H03F2200/336 ,  H03F2200/504 ,  H03G3/004 ,  H03G3/3042 ,  H04B1/04 ,  H04B1/0483

摘要： Provided is a transmitter apparatus including: a signal conversion section for, in polar modulation, converting input data into an amplitude-component signal and a phase-component signal, and in quadrature modulation, converting input data into an in-phase component signal and a quadrature component signal; a carrier wave generation section for outputting a carrier wave; a mixer section for, in quadrature modulation, generating a quadrature modulation signal; a regulator for, in polar modulation, outputting a supply voltage control signal; and a power amplifier for, in polar modulation, amplifying the supply voltage control signal and superimposing the resultant signal onto the carrier wave, thereby generating a transmission signal, wherein in polar modulation, the carrier wave generation section outputs the carrier wave modulated with respect to phase component, and in quadrature modulation, the carrier wave generation section outputs the carrier wave that is yet to be modulated.

摘要翻译： 提供一种发射机装置，包括：信号转换部分，用于在极性调制中将输入数据转换为振幅分量信号和相位分量信号，并在正交调制中将输入数据转换为同相分量信号，以及 正交分量信号; 用于输出载波的载波产生部分; 用于正交调制的混频器部分，产生正交调制信号; 用于在极性调制中输出电源电压控制信号的调节器; 以及功率放大器，用于在极性调制中放大电源电压控制信号并将所得到的信号叠加到载波上，从而产生传输信号，其中在极坐标调制中，载波产生部分输出相对于 在正交调制中，载波生成部输出尚未被调制的载波。

公开(公告)号：US20120091893A1

公开(公告)日：2012-04-19

申请号：US13336749

申请日：2011-12-23

申请人： Tatsuya YANAGIDA ,  Akira Endo ,  Hiroshi Komori ,  Shinji Nagai ,  Kouji Kakizaki ,  Tamotsu Abe ,  Hideo Hoshino

发明人： Tatsuya YANAGIDA ,  Akira Endo ,  Hiroshi Komori ,  Shinji Nagai ,  Kouji Kakizaki ,  Tamotsu Abe ,  Hideo Hoshino

IPC分类号： H05H1/46

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

摘要： In an EUV light source apparatus, a collector mirror is protected from debris damaging a mirror coating. The EUV light source apparatus includes: a chamber in which extreme ultraviolet light is generated; a target supply unit for supplying a target material into the chamber; a plasma generation laser unit for irradiating the target material within the chamber with a plasma generation laser beam to generate plasma; an ionization laser unit for irradiating neutral particles produced at plasma generation with an ionization laser beam to convert the neutral particles into ions; a collector mirror for collecting the extreme ultraviolet light radiated from the plasma; and a magnetic field or electric field forming unit for forming a magnetic field or an electric field within the chamber so as to trap the ions.

摘要翻译： 在EUV光源装置中，集光镜受到保护，不会损坏镜面涂层。 EUV光源装置包括：产生极紫外光的室; 目标供应单元，用于将目标材料供应到所述室中; 等离子体产生激光器单元，用于用等离子体产生激光束照射室内的目标材料以产生等离子体; 电离激光单元，用于用电离激光束照射在等离子体产生时产生的中性粒子，以将中性粒子转化为离子; 用于收集从等离子体辐射的极紫外光的收集镜; 以及用于在室内形成磁场或电场以捕获离子的磁场或电场形成单元。

公开(公告)号：US08143606B2

公开(公告)日：2012-03-27

申请号：US11730139

申请日：2007-03-29

申请人： Hiroshi Komori ,  Yoshifumi Ueno ,  Georg Soumagne

发明人： Hiroshi Komori ,  Yoshifumi Ueno ,  Georg Soumagne

IPC分类号： H05G2/00

CPC分类号： G21K5/00 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

摘要： An extreme ultra violet light source device of a laser produced plasma type, in which charged particles such as ions emitted from plasma can be efficiently ejected. The extreme ultra violet light source device includes: a target nozzle that supplies a target material; a laser oscillator that applies a laser beam to the target material supplied from the target nozzle to generate plasma; collector optics that collects extreme ultra violet light radiated from the plasma; and a magnetic field forming unit that forms an asymmetric magnetic field in a position where the laser beam is applied to the target material.

摘要翻译： 激光产生等离子体的极紫外光源装置，其中可以有效地喷射从等离子体发射的离子等带电粒子。 极紫外光源装置包括：提供目标材料的目标喷嘴; 激光振荡器，其将激光束施加到从所述目标喷嘴供给的目标材料以产生等离子体; 收集从等离子体辐射的极紫外光的收集器光学元件; 以及在将激光束施加到目标材料的位置形成非对称磁场的磁场形成单元。