公开(公告)号：US06486665B1

公开(公告)日：2002-11-26

申请号：US09623670

申请日：2000-11-21

Applicant: Karsten Funk ,  Wilhelm Frey

Inventor： Karsten Funk ,  Wilhelm Frey

IPC: G01N2772

CPC classification number: G01R33/0283 ,  G01R33/0286

Abstract: A magnetic field sensor that can be manufactured using the technology of surface micromechanics, having a conductor loop that has at least one deformable segment; a deformation device for deforming the deformable segment of the conductor loop with a predeterminable time dependence; a voltage sensing device for sensing the voltage induced at the ends of the conductor loop upon deformation in the presence of a magnetic field; and a magnetic field determining device for determining the present static and/or dynamic magnetic field in consideration of at least the time dependence of the deformation.

Abstract translation: 可以使用表面微机械技术制造的磁场传感器，具有至少一个可变形段的导体回路; 变形装置，用于以可预定的时间依赖性使导体环的可变形段变形; 电压感测装置，用于在存在磁场的情况下感测在导体环的端部感应的变形; 以及磁场确定装置，用于至少考虑变形的时间依赖性来确定当前的静态和/或动态磁场。

公开(公告)号：US6030850A

公开(公告)日：2000-02-29

申请号：US030414

申请日：1998-02-25

Applicant: Juergen Kurle ,  Karsten Funk ,  Franz Laermer ,  Michael Offenberg ,  Andrea Schilp

Inventor： Juergen Kurle ,  Karsten Funk ,  Franz Laermer ,  Michael Offenberg ,  Andrea Schilp

IPC: G01L1/18 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01L1/00 ,  H01L21/461

CPC classification number: B81B7/007 ,  B81C1/0019 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2203/033 ,  B81C2201/0136 ,  B81C2203/0118 ,  G01P2015/0814

Abstract: In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.

Abstract translation: 在传感器和制造传感器的方法中，可移动元件被图案化为硅层并固定到基底。 导电层被细分成彼此电绝缘的各个区域。 通过布置在第一和第二绝缘层之间的导电层来建立硅层的各个区域之间的电连接。

公开(公告)号：US5756901A

公开(公告)日：1998-05-26

申请号：US718603

申请日：1996-09-24

Applicant: Juergen Kurle ,  Karsten Funk ,  Franz Laermer ,  Michael Offenberg ,  Andrea Schilp

Inventor： Juergen Kurle ,  Karsten Funk ,  Franz Laermer ,  Michael Offenberg ,  Andrea Schilp

IPC: G01L1/18 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01L1/00

CPC classification number: B81B7/007 ,  B81C1/0019 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2203/033 ,  B81C2201/0136 ,  B81C2203/0118 ,  G01P2015/0814

Abstract: In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.

Abstract translation: 在传感器和制造传感器的方法中，可移动元件被图案化为硅层并固定到基底。 导电层被细分成彼此电绝缘的各个区域。 通过布置在第一和第二绝缘层之间的导电层来建立硅层的各个区域之间的电连接。