公开(公告)号：US5331191A

公开(公告)日：1994-07-19

申请号：US954142

申请日：1992-09-30

申请人： Jun Sugiura ,  Osamu Tsuchiya ,  Makoto Ogasawara ,  Fumio Ootsuka ,  Kazuyoshi Torii ,  Isamu Asano ,  Nobuo Owada ,  Mitsuaki Horiuchi ,  Tsuyoshi Tamaru ,  Hideo Aoki ,  Nobuhiro Otsuka ,  Seiichirou Shirai ,  Masakazu Sagawa ,  Yoshihiro Ikeda ,  Masatoshi Tsuneoka ,  Toru Kaga ,  Tomotsugu Shimmyo ,  Hidetsugu Ogishi ,  Osamu Kasahara ,  Hiromichi Enami ,  Atsushi Wakahara ,  Hiroyuki Akimori ,  Sinichi Suzuki ,  Keisuke Funatsu ,  Yoshinao Kawasaki ,  Tunehiko Tubone ,  Takayoshi Kogano ,  Ken Tsugane

发明人： Jun Sugiura ,  Osamu Tsuchiya ,  Makoto Ogasawara ,  Fumio Ootsuka ,  Kazuyoshi Torii ,  Isamu Asano ,  Nobuo Owada ,  Mitsuaki Horiuchi ,  Tsuyoshi Tamaru ,  Hideo Aoki ,  Nobuhiro Otsuka ,  Seiichirou Shirai ,  Masakazu Sagawa ,  Yoshihiro Ikeda ,  Masatoshi Tsuneoka ,  Toru Kaga ,  Tomotsugu Shimmyo ,  Hidetsugu Ogishi ,  Osamu Kasahara ,  Hiromichi Enami ,  Atsushi Wakahara ,  Hiroyuki Akimori ,  Sinichi Suzuki ,  Keisuke Funatsu ,  Yoshinao Kawasaki ,  Tunehiko Tubone ,  Takayoshi Kogano ,  Ken Tsugane

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/02 ,  H01L21/285 ,  H01L21/336 ,  H01L21/76 ,  H01L21/768 ,  H01L21/8238 ,  H01L21/8242 ,  H01L23/29 ,  H01L23/495 ,  H01L23/525 ,  H01L23/532 ,  H01L23/544 ,  H01L27/092 ,  H01L27/10 ,  H01L27/108 ,  H01L29/78 ,  H01L29/10

CPC分类号： H01L27/10852 ,  G03F7/70333 ,  G03F9/70 ,  H01L21/28512 ,  H01L21/76 ,  H01L21/76801 ,  H01L21/76804 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76838 ,  H01L21/76843 ,  H01L21/76877 ,  H01L21/823807 ,  H01L23/291 ,  H01L23/4951 ,  H01L23/5258 ,  H01L23/532 ,  H01L23/544 ,  H01L27/0922 ,  H01L28/40 ,  H01L2223/54473 ,  H01L2224/05554 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/45565 ,  H01L2224/4569 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/4826 ,  H01L2224/73215 ,  H01L24/45 ,  H01L24/48 ,  H01L27/0928 ,  H01L27/10808 ,  H01L2924/00014 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01021 ,  H01L2924/01029 ,  H01L2924/01039 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/3025 ,  Y10S257/90

摘要： Herein disclosed is a semiconductor integrated circuit device fabricating process for forming MISFETs over the principal surface in those active regions of a substrate, which are surrounded by inactive regions formed of an element separating insulating film and channel stopper regions, comprising: the step of for forming a first mask by a non-oxidizable mask and an etching mask sequentially over the principal surface of the active regions of the substrate; the step of forming a second mask on and in self-alignment with the side walls of the first mask by a non-oxidizable mask thinner than the non-oxidizable mask of the first mask and an etching mask respectively; the step of etching the principal surface of the inactive regions of the substrate by using the first mask and the second mask; the step of forming the element separating insulating film over the principal surface of the inactive regions of the substrate by an oxidization using the first mask and the second mask; and the step of forming the channel stopper regions over the principal surface portions below the element separating insulating film of the substrate by introducing an impurity into all the surface portions including the active regions and the inactive regions of the substrate after the first mask and the second mask have been removed.

摘要翻译： 这里公开了一种半导体集成电路器件制造工艺，用于在由分离绝缘膜和沟道阻挡区域形成的无源区域围绕的衬底的这些有源区的主表面上形成MISFET，包括：形成步骤 通过不可氧化掩模的第一掩模和顺序地在衬底的有源区的主表面上的蚀刻掩模; 分别通过比第一掩模的不可氧化掩模和蚀刻掩模更薄的不可氧化掩模在第一掩模的侧壁上自对准形成第二掩模的步骤; 通过使用第一掩模和第二掩模蚀刻衬底的非活性区的主表面的步骤; 通过使用第一掩模和第二掩模的氧化在衬底的无活性区域的主表面上形成元件分离绝缘膜的步骤; 以及通过在第一掩模之后将杂质引入到包括基板的有源区和非活性区域的全部表面部分中的方式，在基板的元件分离绝缘膜下方的主表面部分上形成沟道阻挡区域的步骤， 面具已被删除。

公开(公告)号：US5270232A

公开(公告)日：1993-12-14

申请号：US943018

申请日：1992-09-10

申请人： Shinichiro Kimura ,  Shoji Shukuri ,  Hiromasa Noda ,  Digh Hisamoto ,  Hideyuki Matsuoka ,  Kazuyoshi Torii ,  Natsuki Yokoyama ,  Toshiyuki Yoshimura ,  Kazunori Tsujimoto ,  Eiji Takeda

发明人： Shinichiro Kimura ,  Shoji Shukuri ,  Hiromasa Noda ,  Digh Hisamoto ,  Hideyuki Matsuoka ,  Kazuyoshi Torii ,  Natsuki Yokoyama ,  Toshiyuki Yoshimura ,  Kazunori Tsujimoto ,  Eiji Takeda

IPC分类号： H01L29/78 ,  H01L21/285 ,  H01L21/336 ,  H01L21/70

CPC分类号： H01L29/66606 ,  H01L21/28525 ,  H01L29/66621 ,  Y10S438/947

摘要： A very thin oxide film is formed at an opening formed in an insulator film and a conductor layer, on a substrate, and impurity-containing polysilicon is formed on the sidewall of the opening. Impurity diffusion from the from the silicon into the substrate through the very thin oxide film causes a lowering in effective concentration of the diffused impurities, resulting in the formation of shallower source/drain region. Thereafter, a gate insulator film and a gate electrode are formed on the substrate surface in an area bounded by an insulator film formed on the sidewall of the opening. The gate electrode smaller than the opening, the size of which corresponds to the limit of processing, and the shallower source/drain region afford a miniaturized MOSFET.

摘要翻译： 在基板上形成绝缘体膜和导体层的开口处形成非常薄的氧化膜，并且在开口的侧壁上形成含杂质的多晶硅。 通过非常薄的氧化膜从硅到衬底的杂质扩散导致扩散杂质的有效浓度降低，导致形成较浅的源/漏区。 此后，在由形成在开口的侧壁上的绝缘膜限定的区域中的基板表面上形成栅绝缘膜和栅电极。 小于开口的栅极电极，其尺寸对应于处理极限，并且较浅的源极/漏极区域提供小型化的MOSFET。

公开(公告)号：US08638029B2

公开(公告)日：2014-01-28

申请号：US13641611

申请日：2011-04-15

申请人： Kazuyoshi Torii ,  Akira Suzuki ,  Mamoru Musasa

发明人： Kazuyoshi Torii ,  Akira Suzuki ,  Mamoru Musasa

IPC分类号： H01T13/20

CPC分类号： H01T13/39 ,  H01T13/32 ,  H01T21/02

摘要： A spark plug includes a center electrode, a ground electrode, and a noble metal tip. The noble metal tip is joined to an object member of at least one of two electrodes via a fusion zone. A projected overlap region of the noble metal tip and the fusion zone accounts for 70% or more of a projected region of the noble metal tip. The object member contains at least Si out of Al and Si such that the amount of Si is 0.4% by mass or higher and such that the total amount of Al and Si is 0.5% by mass. Multi-fusion spots exist on the surface of the fusion zone. Segments of a baseline which pass through the respective multi-fusion spots have a total length of a predetermined percentage of the length of the baseline. Joining strength to the noble metal tip can thereby be greatly improved when the member to be joined contains Si.

摘要翻译： 火花塞包括中心电极，接地电极和贵金属电极头。 贵金属端头通过熔融区域与两个电极中的至少一个的目标构件接合。 贵金属端头和熔融区域的突出重叠区域占贵金属电极头的投影区域的70％以上。 目标构件至少包含Al和Si中的Si，使得Si的量为0.4质量％以上，并且使Al和Si的总量为0.5质量％。 融合区表面存在多个融合点。 通过相应的多融合点的基线段具有基线长度的预定百分比的总长度。 因此，当待接合部件含有Si时，能够大大提高与贵金属电极头的接合强度。

公开(公告)号：US08476817B2

公开(公告)日：2013-07-02

申请号：US13146816

申请日：2010-01-27

申请人： Naomichi Miyashita ,  Mamoru Musasa ,  Akira Suzuki ,  Kazuyoshi Torii ,  Tomoaki Kato

发明人： Naomichi Miyashita ,  Mamoru Musasa ,  Akira Suzuki ,  Kazuyoshi Torii ,  Tomoaki Kato

IPC分类号： H01T13/20

CPC分类号： H01T13/39 ,  H01T13/32

摘要： The present invention provides a spark plug which is capable of suppressing a occurrence of crack and separation by determining a structural configuration of a melting portion formed in a junction portion between a discharge portion and a pedestal portion which form an ignition portion that protrudes from a ground electrode. In a profile line shape of a cross section including a center axis P of an ignition portion 80, an exposure surface 88 of a melting portion 83 connects a side surface 82 of a discharge portion 81 and a side surface 85 of a pedestal portion 84. Further, an exterior angle θ formed between an imaginary line Q, which passes through a boundary position X1 between the melting portion 83 and the pedestal portion 84 and a boundary position X2 between the melting portion 83 and the discharge portion 81, and the center axis P at a node C, satisfies 135°≦θ≦175°. Furthermore, a proportion T/S of a forming depth T of the melting portion 83 to an outside diameter S of the discharge portion 81 satisfies T/S≧0.5.

摘要翻译： 本发明提供一种火花塞，其能够通过确定在形成从地面突出的点火部的排出部和基座部之间的接合部中形成的熔融部的结构构造来抑制裂纹和分离的发生 电极。 在包括点火部分80的中心轴线P的截面的轮廓线形状中，熔化部分83的暴露表面88连接排出部分81的侧表面82和基座部分84的侧表面85。 此外，在通过熔融部83和基座部84之间的边界位置X1的虚拟线Q与熔化部83与排出部81之间的边界位置X2之间形成的外角θ和中心轴 P在节点C处满足135°@ @ @ 175°。 此外，熔融部83的成形深度T与排出部81的外径S的比例T / S满足T /S≥0.5。

公开(公告)号：US08410673B2

公开(公告)日：2013-04-02

申请号：US13062571

申请日：2009-09-09

申请人： Kazuyoshi Torii ,  Tomoo Tanaka ,  Akira Suzuki ,  Mamoru Musasa ,  Naomichi Miyashita ,  Osamu Yoshimoto

发明人： Kazuyoshi Torii ,  Tomoo Tanaka ,  Akira Suzuki ,  Mamoru Musasa ,  Naomichi Miyashita ,  Osamu Yoshimoto

IPC分类号： H01T13/28

CPC分类号： H01T13/39 ,  B23K35/322 ,  C22C5/04 ,  C22C19/058

摘要： A spark plug having a center electrode and a ground electrode including a ground electrode main body part having an end thereof facing the center electrode and a noble metal tip joined to the ground electrode main body part at a position facing a leading end of the center electrode, a spark discharge gap being formed between the leading end of the center electrode and the noble metal tip, wherein at least a portion of the ground electrode main body part, to which the noble metal tip is joined, is made of an Ni alloy containing 12 to 45 mass % of Cr, 7 mass % or less of Fe, 0.5 to 5 mass % of Al, 0.3 to 5 mass % of Si and 50 mass % or more of the balance, and wherein the joined portion and the noble metal tip are joined by laser welding or electron beam welding.

摘要翻译： 一种火花塞，其具有中心电极和接地电极，该火花塞具有接地电极主体部分，该接地电极主体部分的端部面向中心电极;以及贵金属电极头，其在面向中心电极前端的位置处接合到接地电极主体部分 在中心电极的前端和贵金属电极头之间形成有火花放电间隙，其中与贵金属电极头接合的接地电极主体部分的至少一部分由含有 12〜45质量％的Cr，7质量％以下的Fe，0.5〜5质量％的Al，0.3〜5质量％的Si和50质量％以上的余量，其中，接合部和贵金属 尖端通过激光焊接或电子束焊接连接。

公开(公告)号：US08378560B2

公开(公告)日：2013-02-19

申请号：US12743022

申请日：2008-11-14

申请人： Akira Suzuki ,  Naomichi Miyashita ,  Kazuyoshi Torii

发明人： Akira Suzuki ,  Naomichi Miyashita ,  Kazuyoshi Torii

IPC分类号： H01T13/20

CPC分类号： H01T13/39 ,  C22C5/04

摘要： An ignition part (80) of a ground electrode (30) includes a fused part (85) in which construction materials of a base portion (82) and a noble metal member (81) are fused and mixed by performing laser welding on the two. In the fused part (85), an average ratio P of components originated from the noble metal member (81) at points K1, L1, and M1 is equal to or greater than 80%, and an average ratio Q of components originated from the base portion at points K3, L3, and M3 is equal to or higher than 20%, and P+Q is equal to or higher than 160%. Accordingly, it is possible to obtain joining strength in the parts in the ignition part (80), thereby sufficiently preventing the generation of cracks, separation, and the like due to thermal stress.

摘要翻译： 接地电极（30）的点火部（80）包括：熔融部（85），其中基部（82）和贵金属部件（81）的构造材料通过在两者上进行激光焊接而熔融混合 。 在熔融部（85）中，在点K1，L1，M1处，来自贵金属构件（81）的成分的平均比例P为80％以上，来自 点K3，L3，M3处的基极部分等于或高于20％，P + Q等于或高于160％。 因此，可以获得点火部（80）的各部分的接合强度，从而充分防止由于热应力而产生裂纹，分离等。

公开(公告)号：US08294344B2

公开(公告)日：2012-10-23

申请号：US12810767

申请日：2008-12-25

申请人： Kazuyoshi Torii ,  Akira Suzuki ,  Naomichi Miyashita ,  Mamoru Musasa ,  Kenji Moritani

发明人： Kazuyoshi Torii ,  Akira Suzuki ,  Naomichi Miyashita ,  Mamoru Musasa ,  Kenji Moritani

IPC分类号： H01T13/20

CPC分类号： H01T13/39

摘要： A spark member (70) is formed by joining a noble metal member (71) and an intermediate member (75) and is provided in a spark discharge gap between a center electrode and a ground electrode (30). A bottom surface (80) of the intermediate member (75) is resistance-welded to an inner surface (33) of the ground electrode (30), and a weld metal zone (73) is formed in the region of joint therebetween. As viewed on the section of the spark member (70) which contains a centerline (Q), the weld metal zone (73) is reliably formed within the range of the length (D) of a columnar portion (76) as measured along a direction orthogonal to the projecting direction of the spark member (70) and has a length (d) of at least 0.1 times (10% of) the length (D).

摘要翻译： 通过将贵金属构件（71）和中间构件（75）接合而形成火花构件（70），并且设置在中心电极和接地电极（30）之间的火花放电间隙中。 中间构件（75）的底表面（80）被电阻焊接到接地电极（30）的内​​表面（33），并且在它们之间的接合区域中形成焊接金属区域（73）。 如在包含中心线（Q）的火花部件（70）的部分观察的，焊接金属区域（73）可以沿着沿着柱状部分（76）的长度（D）的范围被可靠地形成， 具有与火花部件（70）的突出方向垂直的方向，并且长度（d）为长度（D）的至少0.1倍（10％）。

公开(公告)号：US08072125B2

公开(公告)日：2011-12-06

申请号：US11687828

申请日：2007-03-19

申请人： Kazuyoshi Torii ,  Kazumasa Yoshida ,  Wataru Matsutani

发明人： Kazuyoshi Torii ,  Kazumasa Yoshida ,  Wataru Matsutani

IPC分类号： H01T13/32 ,  H01T13/39

CPC分类号： H01T21/02 ,  H01T13/20 ,  H01T13/36 ,  H01T13/39

摘要： A spark plug 100 comprised of a metal shell 1, an insulator 2, a center electrode 3 and a ground electrode 4. A rear-end face of the ground electrode 4 is welded to a front-end face of the metal shell 1, and a bent portion 5 located at the intermediated position in the longitudinal direction is bent toward the center of the spark plug 100. The ground electrode 4 assumes a circular-shape with a diameter of 2 mm or less whereby an inflow of an air-fuel mixture is not disturbed even when the air-fuel mixture directly flows into a back face of the ground electrode 4. The ground electrode 4 is comprised of an outer layer 4A made of a nickel alloy and an inner layer 4B made of pure copper with an excellent thermal conductivity, in which a ratio of a cross-sectional area of the inner layer 4B to the entire cross-sectional area of the ground electrode 4 is 10% or more to 35% or less. Thus, the spark plug 100 which is excellent in heat sinking ability and can prevent a spring back phenomenon due to a difference in a coefficient of thermal expansion.

摘要翻译： 由金属壳1，绝缘体2，中心电极3和接地电极4构成的火花塞100.接地电极4的后端面焊接在金属壳1的前端面上， 位于中间位置的弯曲部分5朝向火花塞100的中心弯曲。接地电极4呈直径为2mm或更小的圆形，由此空气 - 燃料混合物 即使当空气 - 燃料混合物直接流入接地电极4的背面时也不会受到干扰。接地电极4包括由镍合金制成的外层4A和由纯铜制成的内层4B，其具有优异的 内层4B的截面积与接地电极4的整个横截面积的比率为10％以上且35％以下的导热率。 因此，具有散热能力优异且能够防止由于热膨胀系数的差异引起的弹回现象的火花塞100。

公开(公告)号：US20100253203A1

公开(公告)日：2010-10-07

申请号：US12743022

申请日：2008-11-14

申请人： Akira Suzuki ,  Naomichi Miyashita ,  Kazuyoshi Torii

发明人： Akira Suzuki ,  Naomichi Miyashita ,  Kazuyoshi Torii

IPC分类号： H01T13/39

CPC分类号： H01T13/39 ,  C22C5/04

摘要： An ignition part (80) of a ground electrode (30) includes a fused part (85) in which construction materials of a base portion (82) and a noble metal member (81) are fused and mixed by performing laser welding on the two. In the fused part (85), an average ratio P of components originated from the noble metal member (81) at points K1, L1, and M1 is equal to or greater than 80%, and an average ratio Q of components originated from the base portion at points K3, L3, and M3 is equal to or higher than 20%, and P+Q is equal to or higher than 160%. Accordingly, it is possible to obtain joining strength in the parts in the ignition part (80), thereby sufficiently preventing the generation of cracks, separation, and the like due to thermal stress.

摘要翻译： 接地电极（30）的点火部（80）包括：熔融部（85），其中基部（82）和贵金属部件（81）的构造材料通过在两者上进行激光焊接而熔融混合 。 在熔融部（85）中，在点K1，L1，M1处，来自贵金属构件（81）的成分的平均比例P为80％以上，来自 点K3，L3，M3处的基极部分等于或高于20％，P + Q等于或高于160％。 因此，可以获得点火部（80）的各部分的接合强度，从而充分防止由于热应力而产生裂纹，分离等。

公开(公告)号：US20100242888A1

公开(公告)日：2010-09-30

申请号：US12743092

申请日：2008-11-13

申请人： Kazuyoshi Torii ,  Naomichi Miyashita ,  Mamoru Musasa ,  Akira Suzuki ,  Tomoo Tanaka ,  Osamu Yoshimoto

发明人： Kazuyoshi Torii ,  Naomichi Miyashita ,  Mamoru Musasa ,  Akira Suzuki ,  Tomoo Tanaka ,  Osamu Yoshimoto

IPC分类号： H01T13/20

CPC分类号： H01T13/39

摘要： In a spark plug having a precious metal tip joined to the front end portion of a ground electrode, the stable junction state of the precious metal tip is guaranteed for a long time. A precious metal tip 32 on the side of a ground electrode 27 is not directly joined to the front end portion of the ground electrode 27 but indirectly joined with a mounting part 51 interposed therebetween. The mounting part 51 includes a base part 53 which has a disc shape and is provided with a flange part 52 on its outer periphery and a protruding part 54 which protrudes from the base part 53 and has a columnar shape. First, in the state where the precious metal tip 32 is in contact with the protruding part 54 of the mounting part 51, laser welding or the like is performed thereon to form a fused part 42 and obtain a complex, and the base part 53 of the mounting part 51 is joined to a flat surface of the ground electrode 27 by resistance welding. The grain size of the grains of the mounting part 51 in the vicinity of the fused part 42 is smaller than the grain size of the grains thereof in the vicinity of the ground electrode 27, and the grain size of the grains of the flange part 52 of the mounting part 51 is smaller than the grain size of the grains of the protruding part 54.

摘要翻译： 在具有与接地电极的前端部连接的贵金属端头的火花塞中，能够长时间保证贵金属电极头的稳定连接状态。 接地电极27一侧的贵金属电极头32不直接接合到接地电极27的前端部，而是与插入其间的安装部51间接接合。 安装部51包括具有圆盘形状的基部53，并且在其外周上设置有凸缘部52，以及从基部53突出并具有柱状的突出部54。 首先，在贵金属端头32与安装部51的突出部54接触的状态下，进行激光焊接等来形成熔融部42并获得复合体，并且将基部53 安装部51通过电阻焊接与接地电极27的平坦面接合。 在熔接部42附近，安装部51的晶粒的粒径小于接地电极27附近的晶粒的粒径，凸缘部52的晶粒的粒径 的尺寸小于突出部54的晶粒的粒径。