公开(公告)号：US07760325B2

公开(公告)日：2010-07-20

申请号：US12118254

申请日：2008-05-09

申请人： Yoshiyuki Okada

发明人： Yoshiyuki Okada

IPC分类号： G03B27/52 ,  G03B27/42

CPC分类号： G03F7/70858 ,  G03F7/7085 ,  G03F7/70991

摘要： An exposure system includes an exposure apparatus and a fluid supplying apparatus that supplies fluid to the exposure apparatus via flow channels. The fluid supplying apparatus includes a fluid sending unit, a heat exchanger, a first temperature sensor that measures the temperature of the fluid, a filter that removes unwanted substances in the fluid, and a heater disposed downstream of the filter in the fluid supplying apparatus for adjusting the temperature of the fluid. The exposure apparatus includes a second temperature sensor that measures the temperature of the fluid supplied from the fluid supplying apparatus. The heater adjusts the temperature of the fluid on the basis of the information on the temperature measured by the second temperature sensor.

摘要翻译： 曝光系统包括通过流动通道向曝光装置供应流体的曝光装置和流体供给装置。 流体供给装置包括：流体送出单元，热交换器，测量流体温度的第一温度传感器，去除流体中不需要的物质的过滤器;以及设置在流体供给装置中的过滤器下游的加热器 调节流体的温度。 曝光装置包括测量从流体供给装置供给的流体的温度的第二温度传感器。 加热器基于由第二温度传感器测量的温度的信息来调节流体的温度。

公开(公告)号：US20090213156A1

公开(公告)日：2009-08-27

申请号：US12379401

申请日：2009-02-20

申请人： Yoshiyuki Okada ,  Asayo Nishimura

发明人： Yoshiyuki Okada ,  Asayo Nishimura

IPC分类号： B41J2/07 ,  B41J29/38

CPC分类号： B41J2/175 ,  B41J2/04505 ,  B41J2/04508 ,  B41J2/04543 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04591 ,  B41J2/04595 ,  B41J2/04596 ,  B41J2/17509 ,  B41J2202/20 ,  B41J2202/21

摘要： A printing apparatus is provided with a line-type ink jet head having a plurality of blocks on each of which a set of ink ejection elements are arranged. In the printing apparatus, a drive voltage signal is accompanied with a prepulse to be applied to each ink ejection element. Particularly, drive signal adjustment values are stored in association with each block. The drive voltage signal is generated for each set of ink ejection elements with reference to the drive signal adjustment values in association with the block on which the each set of ink ejection elements are arranged. By this configuration, it is possible to reduce the differential density between the image portion printed by the imperfect block having misaligned nozzles and the image portion printed by the normal block having nozzles arranged in their correct positions throughout the density range.

摘要翻译： 一种印刷装置设置有具有多个块的线型喷墨头，每个块布置有一组喷墨元件。 在打印装置中，驱动电压信号伴随着用于每个喷墨元件的预脉冲。 特别地，与每个块相关联地存储驱动信号调整值。 参考与布置有每组喷墨元件的块相关联的驱动信号调节值，为每组喷墨元件产生驱动电压信号。 通过这种构造，可以减小由具有不对准喷嘴的不完美块打印的图像部分和由具有布置在整个密度范围内的正确位置的喷嘴的普通块打印的图像部分之间的差分密度。

公开(公告)号：US07565926B2

公开(公告)日：2009-07-28

申请号：US11177323

申请日：2005-07-11

申请人： Yoshiyuki Okada

发明人： Yoshiyuki Okada

IPC分类号： F25B29/00 ,  F24F11/06

CPC分类号： G05D23/1919 ,  F24F11/83 ,  F25D17/02 ,  F28F27/00 ,  H01L21/67109 ,  Y02P70/605

摘要： A heat exchange method which uses a heat exchange unit for exchanging heat between first and second media to adjust a temperature of the first medium. The method includes (a) a detection step of detecting temperatures of the first and second media to enter the heat exchange unit, and (b) an adjustment step of adjusting a flow rate of the second medium based on the temperatures of the first and second media detected in the detection step. The adjustment step includes (i) a target heat quantity calculation step of calculating a target heat quantity based on a target temperature of the first medium and the temperature of the first medium detected in the detection step, (ii) a first temperature difference calculation step of calculating a first temperature difference based on the target temperature and the temperature of the second medium detected in the detection step, (iii) a setting step of setting a provisional target flow rate of the second medium, (iv) a second temperature difference calculation step of calculating a second temperature difference based on the target heat quantity, the provisional target flow rate, and the temperatures of the first and second media detected in the detection step, (v) an average temperature difference calculation step of calculating one of a logarithmic average temperature difference and an average temperature difference at the heat exchange unit based on the first and second temperature differences, (vi) a heat exchange quantity calculation step of calculating a heat exchange quantity at the heat exchange unit based on one of the logarithmic average temperature difference and the average temperature difference and a heat exchange gain of the heat exchange unit, and (vii) a determination step of determining a target flow rate of the second medium based on a result of a comparison between the heat exchange quantity and the target heat quantity.

摘要翻译： 一种热交换方法，其使用热交换单元来在第一和第二介质之间交换热量，以调节第一介质的温度。 该方法包括：（a）检测第一和第二介质进入热交换单元的温度的检测步骤，以及（b）基于第一和第二介质的温度调节第二介质的流量的调整步骤 在检测步骤中检测到介质。 调整步骤包括：（i）目标热量计算步骤，基于第一介质的目标温度和在检测步骤中检测到的第一介质的温度来计算目标热量;（ii）第一温度差计算步骤 基于在检测步骤中检测到的目标温度和第二介质的温度来计算第一温度差;（iii）设定第二介质的临时目标流量的设定步骤，（iv）第二温度差计算 基于目标热量，临时目标流量以及在检测步骤中检测到的第一和第二介质的温度来计算第二温度差的步骤，（v）平均温度差计算步骤，计算对数 平均温差和基于第一和第二温度的热交换单元的平均温度差 （vi）热交换量计算步骤，基于所述热交换单元的对数平均温度差和所述平均温度差以及所述热交换单元的热交换增益之一计算所述热交换单元的热交换量，以及（ vii）基于热交换量和目标热量之间的比较的结果来确定第二介质的目标流量的确定步骤。

公开(公告)号：US20090011376A1

公开(公告)日：2009-01-08

申请号：US12118254

申请日：2008-05-09

申请人： Yoshiyuki Okada

发明人： Yoshiyuki Okada

IPC分类号： G03F7/20 ,  G03B27/52

CPC分类号： G03F7/70858 ,  G03F7/7085 ,  G03F7/70991

摘要： An exposure system includes an exposure apparatus and a fluid supplying apparatus that supplies fluid to the exposure apparatus via flow channels. The fluid supplying apparatus includes a fluid sending unit, a heat exchanger, a first temperature sensor that measures the temperature of the fluid, a filter that removes unwanted substances in the fluid, and a heater disposed downstream of the filter in the fluid supplying apparatus for adjusting the temperature of the fluid. The exposure apparatus includes a second temperature sensor that measures the temperature of the fluid supplied from the fluid supplying apparatus. The heater adjusts the temperature of the fluid on the basis of the information on the temperature measured by the second temperature sensor.

摘要翻译： 曝光系统包括通过流动通道向曝光装置供应流体的曝光装置和流体供给装置。 流体供给装置包括：流体送出单元，热交换器，测量流体温度的第一温度传感器，去除流体中不需要的物质的过滤器;以及设置在流体供给装置中的过滤器下游的加热器 调节流体的温度。 曝光装置包括测量从流体供给装置供给的流体的温度的第二温度传感器。 加热器基于由第二温度传感器测量的温度的信息来调节流体的温度。

公开(公告)号：US20080062391A1

公开(公告)日：2008-03-13

申请号：US11849698

申请日：2007-09-04

申请人： Yoshinori Uchida ,  Yoshiyuki Okada

发明人： Yoshinori Uchida ,  Yoshiyuki Okada

IPC分类号： G03B27/68

CPC分类号： G03B27/68 ,  G03F7/70258

摘要： An exposure apparatus which exposes a substrate to light is disclosed. The exposure apparatus for exposing a substrate to light, the apparatus comprises: a projection optical system configured to project light from a reticle onto the substrate, the projection optical system including at least one optical element driven to adjust aberration of the projection optical system; a driver configured to drive the at least one optical element; and a calculator configured to calculate a target amount to which the driver drives the at least one optical element, wherein the apparatus is configured so that the driver drives the at least one optical element a plurality of times based on outputs from the calculator in a non-exposure period during which the substrate is not exposed to light.

摘要翻译： 公开了一种将基板曝光的曝光装置。 所述装置包括：投影光学系统，被配置为将光从标线投影到所述基板上，所述投影光学系统包括被驱动以调整所述投影光学系统的像差的至少一个光学元件; 被配置为驱动所述至少一个光学元件的驱动器; 以及计算器，其被配置为计算所述驱动器驱动所述至少一个光学元件的目标量，其中所述装置被配置为使得所述驱动器基于来自所述计算器的输出而非驱动所述至少一个光学元件多次， - 曝光期间，基板未曝光。

公开(公告)号：US07302869B2

公开(公告)日：2007-12-04

申请号：US11205138

申请日：2005-08-17

申请人： Koichiro Kamei ,  Yoshiyuki Okada

发明人： Koichiro Kamei ,  Yoshiyuki Okada

IPC分类号： F02N15/06

CPC分类号： F02N15/023 ,  F02N15/06 ,  F02N15/067 ,  Y10T74/13 ,  Y10T74/137

摘要： A pinion includes: a first pinion flange portion disposed so as to protrude radially at a front end of a pinion boss portion; and a second pinion flange portion disposed so as to protrude radially facing the first pinion flange portion from an opposite side of the pinion boss portion. A movement linking body includes: first and second engaging recess portions fitting together with the pinion boss portion and an intermediate gear boss portion; a first sliding surface coming into contact with the first pinion flange portion, the first sliding surface restricting rearward movement of the pinion; a second sliding surface coming into contact with a front-end end surface of the second pinion flange portion, the second sliding surface restricting forward movement of the pinion; and a third sliding surface coming into contact with the clutch cover, the third sliding surface restricting forward movement of the pinion.

摘要翻译： 小齿轮包括：第一小齿轮凸缘部，其设置成径向地突出于小齿轮凸台部的前端; 以及第二小齿轮凸缘部，其从所述小齿轮凸台部的相反侧朝向所述第一小齿轮凸缘部径向地突出设置。 运动连接体包括：与小齿轮凸台部分和中间齿轮凸台部分配合的第一和第二接合凹槽部分; 与第一小齿轮凸缘部接触的第一滑动面，第一滑动面限制小齿轮的向后运动; 第二滑动面与第二小齿轮凸缘部的前端端面接触，第二滑动面限制小齿轮的向前运动; 以及与所述离合器盖接触的第三滑动面，所述第三滑动面限制所述小齿轮的向前运动。

公开(公告)号：US07180592B2

公开(公告)日：2007-02-20

申请号：US11188462

申请日：2005-07-25

申请人： Seiichiro Yoshioka ,  Yoshiyuki Okada

发明人： Seiichiro Yoshioka ,  Yoshiyuki Okada

IPC分类号： G01N15/02

CPC分类号： G01N15/0205 ,  G01N35/026

摘要： A particle size distribution analyzer is equipped with cells, a light source, to irradiate particles in a cell and multiple photo-detectors that detect a light intensity of a diffraction light and/or a scattering light generated from the particles. An information processor calculates particle size distribution based upon light intensity signals transmitted from each of the photo-detectors. A movement retention unit moves the cells between a light irradiation position and withdrawal positions. A stop unit can stop one of the cells at the light irradiation position. A cell identification unit identifies a cell situated at the light irradiation position and transmits an identification signal of the cell to the information processor, which is equipped with a program switch unit that automatically switches to an appropriate program for controlling the operation of the analyzer corresponding to the cell identification signal.

摘要翻译： 粒度分布分析仪装备有用于照射细胞中的颗粒的细胞，光源和检测衍射光的光强度和/或从颗粒产生的散射光的多个光检测器。 信息处理器基于从每个光检测器发送的光强信号来计算粒度分布。 移动保持单元在光照射位置和取出位置之间移动单元。 停止单元可以在光照射位置停止其中一个单元。 小区识别单元识别位于光照射位置处的小区，并将信元的识别信号发送到信息处理器，信息处理器配备有程序切换单元，该程序切换单元自动切换到用于控制对应于 小区识别信号。

公开(公告)号：US07164464B2

公开(公告)日：2007-01-16

申请号：US11201426

申请日：2005-08-11

申请人： Yoshiyuki Okada

发明人： Yoshiyuki Okada

IPC分类号： G03B27/42 ,  G03B27/68 ,  G03B27/52

CPC分类号： G03F7/70883 ,  G03B27/52 ,  G03F7/70258 ,  G03F7/70516 ,  G03F7/70575

摘要： An exposure apparatus includes a barometer for detecting air pressure, a lens driving unit for driving a lens of a projection optical system, a light-source-wavelength changing unit for changing a wavelength of an exposure light source, and a stage driving unit for driving a wafer stage in an optical-axis direction. The apparatus can correct an aberration caused by a change in air pressure by utilizing the lens driving unit, the light-source-wavelength changing unit, and the stage driving unit. During a shot of an exposure of the exposure apparatus, the lens driving unit and/or the stage driving unit are employed to correct the aberration. In the non-exposure state (shot interval), the light-source-wavelength changing unit and/or the lens driving unit as well as the stage driving unit are employed to correct the aberration.

摘要翻译： 曝光装置包括用于检测气压的气压计，用于驱动投影光学系统的透镜的透镜驱动单元，用于改变曝光光源的波长的光源波长改变单元和用于驱动的​​平台驱动单元 在光轴方向上的晶片台。 该装置可以通过利用透镜驱动单元，光源波长改变单元和平台驱动单元来校正由气压变化引起的像差。 在曝光装置的曝光的拍摄期间，使用透镜驱动单元和/或平台驱动单元来校正像差。 在非曝光状态（拍摄间隔）中，使用光源 - 波长变化单元和/或透镜驱动单元以及平台驱动单元来校正像差。

公开(公告)号：US20060169069A1

公开(公告)日：2006-08-03

申请号：US11205138

申请日：2005-08-17

申请人： Koichiro Kamei ,  Yoshiyuki Okada

发明人： Koichiro Kamei ,  Yoshiyuki Okada

IPC分类号： F02N15/06

CPC分类号： F02N15/023 ,  F02N15/06 ,  F02N15/067 ,  Y10T74/13 ,  Y10T74/137

摘要： A pinion includes: a first pinion flange portion disposed so as to protrude radially at a front end of a pinion boss portion; and a second pinion flange portion disposed so as to protrude radially facing the first pinion flange portion from an opposite side of the pinion boss portion. A movement linking body includes: first and second engaging recess portions fitting together with the pinion boss portion and an intermediate gear boss portion; a first sliding surface coming into contact with the first pinion flange portion, the first sliding surface restricting rearward movement of the pinion; a second sliding surface coming into contact with a front-end end surface of the second pinion flange portion, the second sliding surface restricting forward movement of the pinion; and a third sliding surface coming into contact with the clutch cover, the third sliding surface restricting forward movement of the pinion.

摘要翻译： 小齿轮包括：第一小齿轮凸缘部，其设置成径向地突出于小齿轮凸台部的前端; 以及第二小齿轮凸缘部，其从所述小齿轮凸台部的相反侧朝向所述第一小齿轮凸缘部径向地突出设置。 运动连接体包括：与小齿轮凸台部分和中间齿轮凸台部分配合的第一和第二接合凹槽部分; 与第一小齿轮凸缘部接触的第一滑动面，第一滑动面限制小齿轮的向后运动; 第二滑动面与第二小齿轮凸缘部的前端端面接触，第二滑动面限制小齿轮的前进运动; 以及与所述离合器盖接触的第三滑动面，所述第三滑动面限制所述小齿轮的向前运动。

公开(公告)号：US07054249B2

公开(公告)日：2006-05-30

申请号：US10445909

申请日：2003-05-28

申请人： Yoshiyuki Okada

发明人： Yoshiyuki Okada

IPC分类号： G11B7/00 ,  G06F12/00

CPC分类号： G06F3/0656 ,  G06F3/061 ,  G06F3/0674 ,  G11B7/0037 ,  G11B7/007 ,  G11B7/00718 ,  G11B7/14 ,  G11B19/02 ,  G11B20/10 ,  G11B20/12 ,  G11B20/1217 ,  G11B27/034 ,  G11B27/036 ,  G11B27/105 ,  G11B2020/10592 ,  G11B2020/1062 ,  G11B2020/1238 ,  G11B2220/20 ,  G11B2220/216 ,  H04N5/76 ,  H04N5/765 ,  H04N5/85 ,  H04N9/8042 ,  H04N21/21 ,  H04N21/23

摘要： In a write process through channels Ch1, Ch2, and Ch3, the deadline of each channel is set based on the transfer rate variable by the ratio of dummy packets to valid packets, and deadline information is written with write data on a disk. In a read process through a channel Ch4, the deadline is set according to the deadline information read with read data from the disk. Then, data is sequentially processed in order from the data having the earliest deadline. Considering the difference in transfer rate between outer and inner zones on the disk, a write zone is determined. When data is simultaneously recorded through the channels Ch1 and Ch2 on an ASMO in a groove-land record system, the data is sequentially recorded through the channel Ch1 on the groove and through the channel Ch2 on the land.

摘要翻译： 在通过通道Ch 1，Ch 2和Ch 3的写入处理中，每个通道的截止时间是基于传输速率变量，通过虚拟分组与有效分组的比率来设置的，最后期限信息用写入数据写在磁盘上 。 在通过通道Ch 4的读取过程中，根据从盘读取数据读取的截止日期信息设置截止日期。 然后，从具有最早期限的数据起依次处理数据。 考虑到磁盘上外部和内部区域之间传输速率的差异，确定写入区域。 当通过沟槽陆地记录系统中的ASMO上的通道Ch 1和Ch 2同时记录数据时，通过沟槽上的通道Ch 1和通过槽脊上的通道Ch 2顺序地记录数据。