摘要:
An burn-in socket used for connecting an IC package includes an base, a actuated device floatably assembled on said base, a frame retained on said base, a plurality of contacts received in said base and a switch member rotatable assembled on said base. Said actuated device includes a plurality of sustaining shafts with a plurality of rollers ringed thereon. Said switch member includes a plurality of rotating shafts retained on said base and a plurality of latching members engaged with said rotating shafts and rotating between an open position and a locking position. Said rollers of sustaining shafts moveable engaged with said latching member, which lowers the abrasion while the latching members are rotating between said open position and said locking position around said rotating shafts.
摘要:
An IC socket includes a socket body with a plurality of contacts disposed therein, a cover rotatablely coupled to the socket body and at least one slider in the socket body. The socket body defines a receiving space for receiving an IC package, and the cover has a driving member. The slider has one end engageable with the driving member and the other end extending toward the receiving space. When the IC socket is in a close position, the slider touches the IC package or close to the IC package to keep a reliable connection between the IC socket and the IC package.
摘要:
A program verification method for a memory device having a virtual array including a plurality of memory cells determines if leakage current passes through one or more neighboring memory cells to the programmed memory cell. The programmed memory cell is verified based on a first threshold state if leakage current is determined to pass through one or more neighboring memory cells. The programmed memory cell is verified based on a second threshold state if the leakage current is not determined to pass through one or more neighboring memory cells.
摘要:
A method of making a semiconductor device including a MOS transistor provides an insulator formed on a semiconductor substrate and a gate electrode formed on the insulator. Source/drain regions are formed within the substrate on either side of the gate electrode. A layer of titanium is sputtered onto the semiconductor device, and a layer of titanium nitride is direct sputtered over the titanium layer using a titanium nitride target. The device is annealed at a first temperature to form a structure including titanium silicide on the polysilicon electrode, titanium silicide on the surface of the source/drain regions, unreacted titanium over the silicide regions, and titanium nitride over the unreacted metal The unreacted titanium and titanium nitride are removed from the structure, and the structure is annealed at a higher temperature than the first temperature to form a lower resistivity titanium silicide.
摘要:
A fabrication method for a salicide gate is described, wherein the method comprising forming a gate structure on a substrate. The gate structure comprises a polysilicon gate and a selective-deposition dummy layer formed on the polysilicon gate. Source/drain regions are then formed on both sides of the gate structure in the substrate. After this, a dielectric layer is selectively deposited on the substrate, wherein the dielectric layer on the source/drain regions is thicker than the dielectric layer on the anti-reflection layer. A portion of the dielectric layer is removed until the anti-reflection layer is exposed. The anti-reflection layer is subsequently removed, followed by forming a salicide layer on the polysilicon gate to complete the manufacturing of a salicide gate.
摘要:
The proposed invention is a salicide process that is used to avoid bridge phenomena. In short, the proposed method for forming silicide without bridge phenomena comprises following steps: providing a substrate with a pad layer on the substrate; forming a first cap layer on the pad layer; defining a trench region; removing part of both the pad layer and the first cap layer that are located inside the trench region such that a trench is formed; filling the trench by a gate oxide layer and a polysilicon layer in sequence; capping a first metal layer on the polysilicon layer; performing a first rapid thermal process to form a first silicide layer over the gate oxide layer; removing excess the first metal layer; forming a second cap layer on the first silicide layer; planarizing surface of both the first cap layer and the second cap layer; removing the first cap layer; removing part of the pad layer that is not covered by the gate oxide layer and then a gate structure being formed; forming two light doped drain in the substrate; forming a spacer on sidewall of the gate structure; forming a sources and a drain in the substrate, herein the source and the drain is located around the light doped drains; forming some second metal layers on both the source and the drain; performing a second thermal process to form two second silicide layer over the source and the drain; removing excess the second metal layer; and then forming a third rapid thermal process.
摘要:
A method of testing a leakage current caused by a self-aligned silicide process is described. The invention uses different test structure to monitor degree of and reason for a leakage current caused by a self-aligned silicide process. While monitoring a self-aligned silicide process performed on a metal-oxide semiconductor transistor without a LDD region, in addition to considering a leakage current occurring from the metal silicide layer to the junction and occurring at edge of the metal silicide layer, the invention further considers a leakage current at comer of the metal silicide layer. For a metal-oxide semiconductor transistor having a LDD region, the invention further considers a leakage current from the metal silicide layer to the LDD region. The invention monitors a leakage current at comer of the metal silicide layer.
摘要:
A method of forming a metal plug. A contact window is formed to penetrate through a dielectric layer on a substrate having a MOS formed thereon. A titanium glue layer is formed on the dielectric layer and the circumference of the contact window. A titanium barrier layer is formed on the titanium nitride layer. Using nitrogen plasma bombardment on the titanium nitride layer, the structure of the titanium nitride layer is transformed. The number of the nucleation seeds is increased, and the size of grains is reduced. A metal layer is formed on the titanium nitride layer and fills the contact window. A part of the metal layer is removed and a metal plug within the contact window is formed.
摘要:
A photoelectric connection assembly includes a circuit board defining conductive pads on a first surface thereof and waveguides embedded therein, an electrical connector assembled to the circuit board and a light transmission module. The electrical connector includes a seat defining a first receiving cavity for receiving the conversion module and a second receiving cavity below the first receiving cavity, a cover rotatably associated with a rear end of the seat and rotating to shield the first receiving cavity and conductive terminals loaded on the seat. The terminals include contacting portions extending in the first receiving cavity for electrical connection with the conversion module and leg portions connecting with the conductive pads. The light transmission module is received in the second receiving cavity and includes conversion module.
摘要:
A contact for a burn-in socket electrically connecting an IC package and a printed circuit board, comprises a first contact, a second contact and a spring disposed between the first contact and the second contact. The first contact and the second contacts have a same configuration, and each contact has a U-shaped actuating portion with two legs and a conductive portion extending from one of the legs. The first contact and the second contact are orthogonally assembled together, and the first actuating portion bestrides the second actuating portion to clasp with second actuating portion, so that the conductive portions have an offset therebetween.