公开(公告)号：US6022795A

公开(公告)日：2000-02-08

申请号：US73861

申请日：1998-05-07

申请人： Tung-Po Chen ,  Hong-Tsz Pan ,  Wen-Yi Hsieh

发明人： Tung-Po Chen ,  Hong-Tsz Pan ,  Wen-Yi Hsieh

IPC分类号： H01L21/28 ,  H01L21/285 ,  H01L21/336 ,  H01L21/3205

CPC分类号： H01L29/665 ,  H01L21/28052 ,  H01L21/28518

摘要： A method of making a semiconductor device including a MOS transistor provides an insulator formed on a semiconductor substrate and a gate electrode formed on the insulator. Source/drain regions are formed within the substrate on either side of the gate electrode. A layer of titanium is sputtered onto the semiconductor device, and a layer of titanium nitride is direct sputtered over the titanium layer using a titanium nitride target. The device is annealed at a first temperature to form a structure including titanium silicide on the polysilicon electrode, titanium silicide on the surface of the source/drain regions, unreacted titanium over the silicide regions, and titanium nitride over the unreacted metal. The unreacted titanium and titanium nitride are removed from the structure, and the structure is annealed at a higher temperature than the first temperature to form a lower resistivity titanium silicide.

公开(公告)号：US06277721B1

公开(公告)日：2001-08-21

申请号：US09467005

申请日：1999-12-20

申请人： Tung-Po Chen ,  Hong-Tsz Pan ,  Wen-Yi Hsieh

发明人： Tung-Po Chen ,  Hong-Tsz Pan ,  Wen-Yi Hsieh

IPC分类号： H01L213205

CPC分类号： H01L29/665 ,  H01L21/28052 ,  H01L21/28518

摘要： A method of making a semiconductor device including a MOS transistor provides an insulator formed on a semiconductor substrate and a gate electrode formed on the insulator. Source/drain regions are formed within the substrate on either side of the gate electrode. A layer of titanium is sputtered onto the semiconductor device, and a layer of titanium nitride is direct sputtered over the titanium layer using a titanium nitride target. The device is annealed at a first temperature to form a structure including titanium silicide on the polysilicon electrode, titanium silicide on the surface of the source/drain regions, unreacted titanium over the silicide regions, and titanium nitride over the unreacted metal The unreacted titanium and titanium nitride are removed from the structure, and the structure is annealed at a higher temperature than the first temperature to form a lower resistivity titanium silicide.

摘要翻译： 制造包括MOS晶体管的半导体器件的方法提供形成在半导体衬底上的绝缘体和形成在绝缘体上的栅电极。 源极/漏极区域形成在栅电极两侧的衬底内。 将钛层溅射到半导体器件上，并且使用氮化钛靶将一层氮化钛直接溅射在钛层上。 器件在第一温度下退火以在多晶硅电极上形成包括硅化钛的结构，源极/漏极区域的表面上的硅化钛，硅化物区域上的未反应的钛以及未反应的金属上的氮化钛。未反应的钛和 从结构中除去氮化钛，并且该结构在比第一温度更高的温度下退火以形成较低电阻率的硅化钛。

公开(公告)号：US6010958A

公开(公告)日：2000-01-04

申请号：US907005

申请日：1997-08-06

申请人： Tung-Po Chen ,  Bing-Chang Wu ,  Hong-Tsz Pan

发明人： Tung-Po Chen ,  Bing-Chang Wu ,  Hong-Tsz Pan

IPC分类号： H01L21/3105 ,  H01L21/768 ,  H01L21/4763

CPC分类号： H01L21/3105 ,  H01L21/76819 ,  Y10S438/937

摘要： A method for improving the planarization of a dielectric layer in the fabrication of metallic interconnects wherein a rapid thermal processing operation is used in order to consolidate exposed surfaces of a dielectric layer after local planarization of the dielectric layer. This method avoids damage to the dielectric layer caused during a pre-metal etching operation, and consequently, prevents residual tungsten from becoming lodged in fissures during subsequent tungsten deposition to produce stringers which may cause short circuiting on coming in contact with metal wiring.

摘要翻译： 一种在制造金属互连件时改善电介质层的平面化的方法，其中使用快速热处理操作以便在介电层局部平坦化之后固化电介质层的暴露表面。 该方法避免了在预金属蚀刻操作期间对介电层的损坏，因此，防止在随后的钨沉积期间残留的钨变成楔形，从而产生可能导致与金属布线接触的短路的桁条。

公开(公告)号：US5970379A

公开(公告)日：1999-10-19

申请号：US678824

申请日：1996-07-12

申请人： Tung-Po Chen ,  Hong-Tsz Pan

发明人： Tung-Po Chen ,  Hong-Tsz Pan

IPC分类号： H01L21/285 ,  H01L21/336 ,  H01L21/768 ,  H01L21/44

CPC分类号： H01L21/76805 ,  H01L21/28518 ,  H01L21/76814 ,  H01L29/665

摘要： A method of reducing the loss of metal silicide in pre-metal etching which includes the following steps. A polysilicon gate electrode and implanted source/drain electrodes are formed on a silicon substrate. A metal silicide layer is formed on the polysilicon gate electrode and the source/drain electrodes. On the surface of the substrate, the polysilicon gate electrode, the source-drain electrodes region and the metal silicide layer, a protecting glass for insulation is formed and then dry etched to form a contact window. The metal silicide layer will form a damaged metal silicide layer in the contact window. Thereafter, a thermal process is conducted to repair the damaged metal silicide layer and finally, pre-metal etching is conducted completing the process. Pursuant to this method, the extremely low resistance of the metal silicide remains.

摘要翻译： 一种降低金属硅化物在金属前蚀刻中的损耗的方法，包括以下步骤。 在硅衬底上形成多晶硅栅电极和注入源/漏电极。 在多晶硅栅极电极和源极/漏极上形成金属硅化物层。 在基板的表面上形成多晶硅栅电极，源极 - 漏极区域和金属硅化物层，形成用于绝缘的保护玻璃，然后干法蚀刻以形成接触窗口。 金属硅化物层将在接触窗中形成损坏的金属硅化物层。 此后，进行热处理以修复损坏的金属硅化物层，最后完成该工艺的金属前蚀刻。 根据该方法，残留金属硅化物的极低电阻。

公开(公告)号：US6156633A

公开(公告)日：2000-12-05

申请号：US34261

申请日：1998-03-04

申请人： Hong-Tsz Pan ,  Tung-Po Chen

发明人： Hong-Tsz Pan ,  Tung-Po Chen

IPC分类号： H01L21/285 ,  H01L21/44

CPC分类号： H01L21/28518

摘要： A process for forming high temperature stable self-aligned silicide layer that not only establishes itself smoothly and uniformly despite the use of a high temperature in the siliciding reaction, but also can withstand other subsequent high temperature thermal processing operations and maintaining a stable metal silicide layer profile thereafter. Moreover, desired thickness and uniformity of the metal silicide layer can be obtained by suitably adjusting the amorphous implant parameters, while the use of a titanium nitride cap layer help to stabilize the metal silicide layer during high temperature formation and that a stable and uniform metal silicide layer profile can be ensured even if subsequent high temperature processing operations are performed.

摘要翻译： 用于形成高温稳定的自对准硅化物层的方法，其不仅在硅化反应中使用高温使其自身平滑均匀，而且还可以承受其它随后的高温热处理操作并保持稳定的金属硅化物层 之后的档案。 而且，通过适当地调整非晶态注入参数，可以获得所需的金属硅化物层的厚度和均匀性，而使用氮化钛盖层有助于在高温形成期间稳定金属硅化物层，并且使金属硅化物稳定且均匀 即使执行后续的高温处理操作，也可以确保层的轮廓。

公开(公告)号：US06670249B1

公开(公告)日：2003-12-30

申请号：US09686879

申请日：2000-10-12

申请人： Hong-Tsz Pan ,  Tung-Po Chen

发明人： Hong-Tsz Pan ,  Tung-Po Chen

IPC分类号： H01L21336

CPC分类号： H01L21/28518

摘要： A process for forming high temperature stable self-aligned suicide layer that not only establishes itself smoothly and uniformly despite the use of a high temperature in the siliciding reaction, but also can withstand other subsequent high temperature thermal processing operations and maintaining a stable metal silicide layer profile thereafter. Moreover, desired thickness and uniformity of the metal suicide layer can be obtained by suitably adjusting the amorphous implant parameters, while the use of a titanium nitride cap layer help to stabilize the metal silicide layer during high temperature formation and that a stable and uniform metal suicide layer profile can be ensured even if subsequent high temperature processing operations are performed.

摘要翻译： 用于形成高温稳定的自对准硅化物层的方法，不仅在硅化反应中使用高温而不仅能够均匀且均匀地形成，而且还可以经受其它后续的高温热处理操作并保持稳定的金属硅化物层 之后的档案。 而且，通过适当地调节非晶注入参数，可以获得所需的金属硅化物层的厚度和均匀性，而使用氮化钛盖层有助于在高温形成期间稳定金属硅化物层，并且稳定且均匀的金属硅化物 即使执行后续的高温处理操作，也可以确保层的轮廓。

公开(公告)号：US08063654B2

公开(公告)日：2011-11-22

申请号：US12505215

申请日：2009-07-17

申请人： Arifur Rahman ,  Hong-Tsz Pan ,  Bang-Thu Nguyen

发明人： Arifur Rahman ,  Hong-Tsz Pan ,  Bang-Thu Nguyen

IPC分类号： G01R31/26

CPC分类号： G01R31/318544 ,  H01L2224/16145

摘要： An integrated circuit device includes a stacked die and a base die having probe pads that directly couple to test logic of the base die to implement a scan chain for testing of the integrated circuit device. The base die further includes contacts disposed on a back side of the base die and through-die vias coupled to the contacts and coupled to programmable logic of the base die. The base die also includes a first probe pad configured to couple test input, a second probe pad configured to couple test output, and a third probe pad configured to couple control signals. Test logic of the base die is configured to couple to additional test logic of the stacked die to implement the scan chain. The probe pads are coupled directly to the test logic such that configuration of the programmable logic is not required to implement the scan chain.

摘要翻译： 集成电路器件包括堆叠管芯和具有探针焊盘的基座，该探针焊盘直接耦合到基座芯片的测试逻辑，以实现用于集成电路器件测试的扫描链。 基模还包括设置在基模的背面上的触点和耦合到触点并连接到基模的可编程逻辑的通孔通孔。 基座芯片还包括被配置为耦合测试输入的第一探针焊盘，被配置为耦合测试输出的第二探针焊盘和被配置为耦合控制信号的第三探测焊盘。 基准芯片的测试逻辑被配置为耦合到堆叠芯片的附加测试逻辑以实现扫描链。 探针焊盘直接耦合到测试逻辑，使得不需要可编程逻辑的配置来实现扫描链。

公开(公告)号：US5902752A

公开(公告)日：1999-05-11

申请号：US648618

申请日：1996-05-16

申请人： Shin-Wei Sun ,  Water Lur ,  Ming-Tzong Yang ,  Hong-Tsz Pan

发明人： Shin-Wei Sun ,  Water Lur ,  Ming-Tzong Yang ,  Hong-Tsz Pan

IPC分类号： H01L21/3105 ,  H01L21/762 ,  H01L23/528 ,  H01L27/02 ,  H01L21/283

CPC分类号： H01L27/0207 ,  H01L21/31053 ,  H01L21/76229 ,  H01L23/528 ,  H01L2924/0002

摘要： A method of designing an active layer mask with a dummy pattern by computer aided design (CAD) in shallow trench isolation using chemical mechanical polishing (CMP) to achieve global planarization. In this method, an original mask is provided with an active region including a diffusion area pattern, a polysilicon area pattern and a well area pattern. The diffusion area pattern and the polysilicon area pattern are expanded by an area of dimension a and the well area pattern is extended inward and outward to an area of dimension b. The expanded diffusion, polysilicon and well areas form a first pattern area. The first pattern area is subtracted from the whole region to obtain a second pattern area. A third pattern area is obtained by performing an AND operation on a dummy array pattern and the second pattern area. Expanding the third pattern area to an area of dimension c, a fourth pattern area is obtained. Finally an active layer mask with a dummy pattern is obtained by performing an OR operation on the fourth pattern area and the diffusion area pattern.

摘要翻译： 通过计算机辅助设计（CAD）在使用化学机械抛光（CMP）的浅沟槽隔离中设计具有虚拟图案的有源层掩模的方法来实现全局平面化。 在该方法中，原始掩模设置有包括扩散区域图案，多晶硅区域图案和阱区域图案的有源区域。 扩散区域图案和多晶硅区域图案通过尺寸a的面积扩大，并且阱区域图案向内和向外延伸到尺寸为b的区域。 扩展的扩散，多晶硅和阱区形成第一模式区域。 从整个区域中减去第一图案区域以获得第二图案区域。 通过对虚拟阵列图案和第二图案区域执行AND运算来获得第三图案区域。 将第三图案区域扩展到尺寸c的区域，获得第四图案区域。 最后，通过对第四图案区域和扩散区域图案执行OR运算来获得具有虚拟图案的有源层掩模。

公开(公告)号：US5449644A

公开(公告)日：1995-09-12

申请号：US181298

申请日：1994-01-13

申请人： Gary Hong ,  Cheng H. Huang ,  Ming-Tzong Yang ,  Hong-Tsz Pan

发明人： Gary Hong ,  Cheng H. Huang ,  Ming-Tzong Yang ,  Hong-Tsz Pan

IPC分类号： H01L21/768 ,  H01L21/302

CPC分类号： H01L21/76802 ,  Y10S148/133

摘要： A new method of forming a contact opening by using a sacrificial spin-on-glass layer is described. A semiconductor substrate is provided wherein the surface of the substrate has an uneven topography. A glasseous layer is deposited over the uneven surface of the substrate and reflowed at low temperature whereby the glasseous layer will have a trench shaped surface over the planned contact opening area. The glasseous layer is covered with a spin-on-glass layer wherein the spin-on-glass planarizes the surface of the substrate. The spin-on-glass layer is baked and then covered with a uniform thickness layer of photoresist. The photoresist layer is exposed and developed to form the desired photoresist mask for the contact opening. The exposed spin-on-glass and glasseous layers are etched away to provide the contact opening to the semiconductor substrate. The photoresist layer is stripped and the sacrificial spin-on-glass layer is removed to complete the formation of the contact opening in the manufacture of the integrated circuit.

摘要翻译： 描述了通过使用牺牲旋涂玻璃层形成接触开口的新方法。 提供半导体衬底，其中衬底的表面具有不平坦的形貌。 在基体的不平坦表面上沉积有胶层，并在低温下回流，由此在层叠的接触开口区域上形成沟槽形表面。 玻璃层被旋涂玻璃层覆盖，其中旋涂玻璃将基材的表面平坦化。 将旋涂玻璃层烘烤，然后用均匀的厚度的光致抗蚀剂层覆盖。 光致抗蚀剂层被曝光和显影以形成用于接触开口的所需光刻胶掩模。 暴露的旋涂玻璃和玻璃层被蚀刻掉以提供到半导体衬底的接触开口。 剥离光致抗蚀剂层，去除牺牲旋涂玻璃层，以在集成电路的制造中完成接触开口的形成。

公开(公告)号：US07737020B1

公开(公告)日：2010-06-15

申请号：US11313521

申请日：2005-12-21

申请人： Jonathan Jung-Ching Ho ,  Hong-Tsz Pan

发明人： Jonathan Jung-Ching Ho ,  Hong-Tsz Pan

IPC分类号： H01L21/4763

CPC分类号： H01L23/5222 ,  H01L21/76801 ,  H01L21/7682 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： Fluid-based dielectric material is used to backfill multiple patterned metal layers of an IC on a wafer. The patterned metal layers are fabricated using conventional CMOS techniques, and are IMD layers in particular embodiments. The dielectric material(s) are etched out of the IC to form a metal network, and fluid dielectric material precursor, such as a polyarylene ether-based resin, is applied to the wafer to backfill the metal network with low-k fluid-based dielectric material.

摘要翻译： 流体介质材料用于在晶片上回填多个IC图案化的金属层。 使用常规CMOS技术制造图案化的金属层，并且在特定实施例中是IMD层。 将介电材料从IC中蚀刻出来形成金属网络，并且将流体介电材料前体（例如聚亚芳基醚基树脂）施加到晶片上以以低k流体为基础回填金属网络 介电材料。