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公开(公告)号：US07671989B2
公开(公告)日：2010-03-02
申请号：US12214319
申请日：2008-06-18
申请人： Martin M. Liphardt , Ping He
发明人： Martin M. Liphardt , Ping He
IPC分类号： G01J4/00
CPC分类号： G01J1/04 , G01J1/0418 , G01N21/211
摘要： Maintenance of information content in a focused beam of electromagnetic radiation when the intensity thereof is attenuated by application of an aperture-like element.
摘要翻译： 当其强度通过施加孔径元件而衰减时，在聚焦的电磁辐射束中维护信息内容。
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公开(公告)号：US20090103094A1
公开(公告)日：2009-04-23
申请号：US12315898
申请日：2008-12-08
申请人： James N. Hilfiker , Jianing Sun , Ping He , Martin M. Liphardt
发明人： James N. Hilfiker , Jianing Sun , Ping He , Martin M. Liphardt
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N2021/213
摘要： System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
摘要翻译： 具有例如非随机有效的“规则”织构表面的样品的椭圆测量和椭圆曲线研究和分析方法和/或由不规则阵列的小平面结构表征的表面的系统和方法。
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公开(公告)号：US07505134B1
公开(公告)日：2009-03-17
申请号：US11408679
申请日：2006-04-21
申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
摘要翻译： 用于定向样品的尖端/倾斜和垂直高度的系统和方法，优选为自动化，如应用于椭偏仪等系统。
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54.发明授权System and method of applying xenon arc-lamps to provide 193 nm wavelengths 有权施加氙弧灯以提供193nm波长的系统和方法公开(公告)号：US07489400B1
公开(公告)日：2009-02-10
申请号：US11497921
申请日：2006-08-03
申请人： Ping He , Martin M. Liphardt , James D. Welch
发明人： Ping He , Martin M. Liphardt , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0213 , G01J3/0224 , G01J3/10 , G01N21/274 , G01N2021/213
摘要： Application of Xenon arc-lamps to provide UV/deep UV wavelengths in spectrophotometer, reflectometer, ellipsometer, polarimeter or the like systems.
摘要翻译： 应用氙弧灯在分光光度计，反射计，椭偏仪，偏振计等系统中提供紫外/深紫外波长。
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55.发明授权公开(公告)号：US07468794B1
公开(公告)日：2008-12-23
申请号：US11204929
申请日：2005-08-15
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/55
摘要： Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
摘要翻译： 在采样系统之后，将由会聚透镜和光纤构成的空间滤波器等效应用于旋转补偿器椭偏仪系统中。 目的是消除呈现低强度水平不规则内容的大致任意轮廓波束的径向外环，使电磁波强度作为半径的函数快速衰减为零。
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公开(公告)号：US20080285035A1
公开(公告)日：2008-11-20
申请号：US12214319
申请日：2008-06-18
申请人： Martin M. Liphardt , Ping He
发明人： Martin M. Liphardt , Ping He
IPC分类号： G01J4/00
CPC分类号： G01J1/04 , G01J1/0418 , G01N21/211
摘要： Maintenance of information content in a focused beam of electromagnetic radiation when the intensity thereof is attenuated by application of an aperture-like element.
摘要翻译： 当其强度通过施加孔径元件而衰减时，在聚焦的电磁辐射束中维护信息内容。
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57.发明授权Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like 有权校准多AOI系统的效果的方法，用于在椭偏仪等中容易改变入射角公开(公告)号：US07265838B1
公开(公告)日：2007-09-04
申请号：US10925333
申请日：2004-08-24
申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
摘要翻译： 公开了一种用于使电磁辐射束的不同角度发生的顺序设置能够容易地顺序地设置到采样系统的表面的系统，该系统涉及用于评估和补偿存在电磁波截止角入射角的影响的基于回归的方法 改变系统，包括所需的校准参数的参数化。
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公开(公告)号：US07136162B1
公开(公告)日：2006-11-14
申请号：US10684088
申请日：2003-10-12
申请人： Martin M. Liphardt , Craig M. Herzinger , Brian D. Guenther , Steven E. Green , Galen L. Pfeiffer , Ping He
发明人： Martin M. Liphardt , Craig M. Herzinger , Brian D. Guenther , Steven E. Green , Galen L. Pfeiffer , Ping He
IPC分类号： G01J4/00
CPC分类号： G01N21/211
摘要： Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.
摘要翻译： 公开了一种系统和方法，优选地通过自动化程序对准由其源提供的电磁辐射束，使得其以其已知角度在其表面上的特定位置处接近样品，然后从其反射并进入 数据检测器。
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59.发明授权公开(公告)号：US06930813B1
公开(公告)日：2005-08-16
申请号：US10425801
申请日：2003-04-29
IPC分类号： G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46 , G02F1/00 , G01J3/28 , G01J3/50 , G01J4/00 , G02F1/33
CPC分类号： G01N21/211 , G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46
摘要： Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
摘要翻译： 公开了在采样系统之前在椭偏仪等系统中应用空间滤波器和光束能均匀化系统。 目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。
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公开(公告)号：US06456376B1
公开(公告)日：2002-09-24
申请号：US09864840
申请日：2001-05-24
IPC分类号： G01J400
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/21 , G01N21/211 , G02B5/3058 , G02B5/3083 , G02B27/46
摘要： Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
摘要翻译： 公开了在采样系统之前或之后在旋转补偿器椭偏仪系统中应用空间滤波器。 目的是例如消除具有低强度水平不规则内容的大致任意轮廓波束的径向外环，使得使电磁波强度作为半径的函数快速衰减到零。
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