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    Spectroscopic ellipsometer and polarimeter systems
    2.
    发明授权
    Spectroscopic ellipsometer and polarimeter systems 有权
    光谱椭偏仪和偏光计系统

    公开(公告)号：US07616319B1

    公开(公告)日：2009-11-10

    申请号：US11890354

    申请日：2007-08-05

    申请人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    发明人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    IPC分类号： G01B9/02 ,  G01J3/45 ,  G01J4/00

    CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

    摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

    摘要翻译： 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。

    Functional equivalent to spatial filter in ellipsometer and the like systems
    6.
    发明授权
    Functional equivalent to spatial filter in ellipsometer and the like systems 有权
    功能相当于椭圆仪等系统中的空间滤波器

    公开(公告)号：US06950182B1

    公开(公告)日：2005-09-27

    申请号：US10178723

    申请日：2002-06-24

    申请人： Martin M Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He

    发明人： Martin M Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He

    IPC分类号： G01J4/00 ,  G01N21/00 ,  G01N21/21 ,  G01N21/55

    CPC分类号： G01N21/55 ,  G01N21/211

    摘要： Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

    摘要翻译： 公开了在椭偏仪等系统中应用空间滤波器的功能等同物。 包括的是将电磁波聚焦到光纤上的多元件会聚透镜系统。 目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。

    Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry
    7.
    发明授权
    Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry 有权
    用于透镜延迟，椭圆测量和偏振测量的参数化数学模型方程中参数的不相关评估的多元素透镜系统和方法

    公开(公告)号：US06804004B1

    公开(公告)日：2004-10-12

    申请号：US09583229

    申请日：2000-05-30

    申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt

    发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt

    IPC分类号： G01B1106

    CPC分类号： G01N21/211 ,  G01J3/14 ,  G01J3/447

    摘要： Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.

    摘要翻译： 公开了多元素透镜，其在椭偏仪和偏光计系统中表现出减少的消色差焦距和降低的电磁光束光斑尺寸分散效应。 还公开了用于评估参数化方程式中的参数的方法，该方法能够计算在电磁辐射束中输入到或之间的正交分量的延迟，所述正交分量被引导通过输入和/或输出光学元件并与材料系统相互作用 的输入和输出光学元件，与材料系统进入的延迟基本上不相关。 本发明的输入和/或输出聚焦透镜在光谱椭偏仪介导的对材料系统上的小斑点的调查中的应用发现，其中使电磁辐射束通过输入透镜会聚，与非常小的，色散的未分散的点相互作用 区域，然后在进入检测器系统之前可选地通过输出透镜重新校准。 本发明的方法在需要分离输入和/或输出光学元件聚焦透镜的双折射效应（可选地与存在于椭圆偏振仪系统中的光束引导和/或窗口元件）相关联的位置方面提供了益处，所述光学元件聚焦透镜相对于 输入和/或输出len（es）以便椭圆不能与其区分开来，以得到表征椭圆偏振PSI和DELTA结果的材料系统。