公开(公告)号：US20080047341A1

公开(公告)日：2008-02-28

申请号：US11781569

申请日：2007-07-23

申请人： Yasuhiro KANAMARU ,  Keiji Hanzawa

发明人： Yasuhiro KANAMARU ,  Keiji Hanzawa

IPC分类号： G01F1/692

CPC分类号： G01F1/6845 ,  G01F1/688 ,  G01F15/006

摘要： An object of the invention is to realize a thermal gas flow sensor capable of reducing time fluctuation of a heating resistor. A heating resistor 3 and thermometric resistors 4 and 14 are formed on a surface of a thin-wall portion 2. Electrode drawn wires 18 to 23 and pad portions 8 to 13 are formed so as to draw signal lines from the heating resistor 3 and the thermometric resistors 4 and 14. Contact portions 24 to 29 are formed to come in contact with the heating resistor 3, the thermometric resistors 4 and 14, and the electrode drawn wires 18 to 23. The heating resistor 3 and the thermometric resistors 4 and 14 are covered with protective films 30a, 30b, and 31a and insulating films 31b and 30c. The protective films 31a and 31b are formed of a dense film formed of nitride or the like. A part coming in contact with a drawn wire portion 34 and the heating resistor 3 is covered with a contact barrier metal film 36 (titanium-based electrical conductor such as titanium nitride, titanium tungsten, and titanium). The titanium-based electrical conductor is a dense film and resistant to hydrogen. Therefore, it is possible to reduce a time fluctuation of the heating resistor.

摘要翻译： 本发明的目的是实现能够减少加热电阻器的时间波动的热气流量传感器。 在薄壁部分2的表面上形成一个加热电阻器3和测温电阻器4和14。 形成电极拉丝18〜23以及焊盘部8〜13，从加热电阻体3和测温电阻体4,14取出信号线。 形成接触部分24至29与加热电阻器3，测温电阻器4和14以及电极拉丝18至23接触。 加热电阻器3和温度测量电阻器4和14被保护膜30a，30b和31a以及绝缘膜31b和30c覆盖。 保护膜31a和31b由氮化物等形成的致密膜形成。 与拉丝部分34和加热电阻器3接触的部分被接触阻挡金属膜36（钛基电导体，例如氮化钛，钛钨和钛）覆盖。 钛基电导体是致密膜并且耐氢。 因此，可以减少加热电阻器的时间波动。

公开(公告)号：US06968283B2

公开(公告)日：2005-11-22

申请号：US10848166

申请日：2004-05-19

申请人： Takafumi Matsumura ,  Noboru Sugiura ,  Kenichi Katagishi ,  Masahiro Matsumoto ,  Keiji Hanzawa

发明人： Takafumi Matsumura ,  Noboru Sugiura ,  Kenichi Katagishi ,  Masahiro Matsumoto ,  Keiji Hanzawa

IPC分类号： F02D35/00 ,  F02D45/00 ,  G01F1/696 ,  G01F1/698 ,  G01F1/699 ,  G01F1/12

CPC分类号： G01F1/6965 ,  G01F1/696 ,  G01F1/699

摘要： A gas flow meter having a gas flow detection circuit for detecting a current flowing through a resistor installed in a gas passage and a voltage generated across the resistor and outputting a voltage signal representing a gas flow passing through the gas passage; a noise reduction circuit for reducing external noise; and a digital adjusting circuit for digitally adjusting a signal representing the detected gas flow and outputting the adjusted signal; wherein a voltage signal based on the signal adjusted by the digital adjusting circuit is output.

摘要翻译： 一种气体流量计，其具有用于检测流过安装在气体通道中的电阻器的电流的气体流量检测电路和跨过电阻器产生的电压，并输出表示通过气体通道的气流的电压信号; 用于减少外部噪声的降噪电路; 以及数字调节电路，用于数字调节表示检测到的气流的信号并输出​​调整后的信号; 其中输出基于由数字调节电路调节的信号的电压信号。

公开(公告)号：US06769298B2

公开(公告)日：2004-08-03

申请号：US10124370

申请日：2002-04-18

申请人： Takafumi Matsumura ,  Kenichi Katagishi ,  Masahiro Matsumoto ,  Keiji Hanzawa

发明人： Takafumi Matsumura ,  Kenichi Katagishi ,  Masahiro Matsumoto ,  Keiji Hanzawa

IPC分类号： G01F168

CPC分类号： G01F1/696 ,  F02D41/187 ,  F02D2041/2072

摘要： A flow rate signal analog-digital conversion circuit 30, an adjustment processing circuit 40 and a chip temperature sensor circuit 60 are disposed a single semiconductor chip 100 to form an integrated circuit, and a chip temperature signal in a form of digital signal outputted from the chip temperature sensor circuit 60 is inputted into the adjustment processing circuit 40 in which correction reducing temperature dependent error in a series of signal processing circuits is performed. Thereby, a board temperature dependent error in a gas flow rate measuring device can be reduced in which adjustment is performed for digital signals.

摘要翻译： 流量信号模拟数字转换电路30，调整处理电路40和芯片温度传感器电路60设置在单个半导体芯片100上以形成集成电路，并且以从数字信号的形式输出的芯片温度信号 芯片温度传感器电路60被输入到执行一系列信号处理电路中的校正降低温度相关误差的调整处理电路40中。 因此，可以减少对数字信号进行调整的气体流量测量装置中的板温度相关误差。

公开(公告)号：US06538866B1

公开(公告)日：2003-03-25

申请号：US09526737

申请日：2000-03-16

申请人： Keiji Hanzawa ,  Masahiro Matsumoto ,  Fumio Murabayashi ,  Tatsumi Yamauchi ,  Hiromichi Yamada ,  Kohei Sakurai ,  Atsushi Miyazaki

发明人： Keiji Hanzawa ,  Masahiro Matsumoto ,  Fumio Murabayashi ,  Tatsumi Yamauchi ,  Hiromichi Yamada ,  Kohei Sakurai ,  Atsushi Miyazaki

IPC分类号： H02H900

CPC分类号： H01L27/0251 ,  H02H9/04

摘要： A circuit for protecting a load from an overvoltage can be integrated together with the load on the same chip by an MOS transistor manufacture process. This overvoltage protecting circuit is composed of a surge protection circuit, an overvoltage detecting circuit and a switching circuit. The surge protection circuit including two MOS transistors operates so that a surge voltage applied to a power supply receiving terminal is clamped by virtue of the source-drain breakdown voltage of the two MOS transistors, thereby absorbing the surge energy. The overvoltage detecting circuit including two MOS transistors operates so that a DC voltage supplied from the surge protection circuit is monitored with the source-drain voltage of the two MOS transistors taken as a reference voltage, thereby detecting an overvoltage. An overvoltage detection output brings an MOS transistor of the switching circuit into a turned-off condition to protect the load.

摘要翻译： 可以通过MOS晶体管制造工艺将用于保护负载的过电压的电路与负载集成在同一芯片上。 该过电压保护电路由浪涌保护电路，过电压检测电路和开关电路构成。 包括两个MOS晶体管的浪涌保护电路工作，借助于两个MOS晶体管的源极 - 漏极击穿电压来钳位施加到电源接收端的浪涌电压，从而吸收浪涌能量。 包括两个MOS晶体管的过电压检测电路进行工作，从而以两个MOS晶体管的源极 - 漏极电压作为参考电压来监视从浪涌保护电路提供的直流电压，从而检测过电压。 过电压检测输出使开关电路的MOS晶体管成为关断状态，以保护负载。

公开(公告)号：US06377056B1

公开(公告)日：2002-04-23

申请号：US09384289

申请日：1999-08-26

申请人： Keiji Hanzawa ,  Masahiro Matsumoto ,  Satoshi Shimada ,  Akihiko Saito ,  Yasuo Onose ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

发明人： Keiji Hanzawa ,  Masahiro Matsumoto ,  Satoshi Shimada ,  Akihiko Saito ,  Yasuo Onose ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

IPC分类号： G01R2726

CPC分类号： G01P15/125 ,  G01D5/24 ,  G01L9/0073 ,  G01L9/12

摘要： Dynamic quantitative displacement is converted stably and straight into voltage (D.C. output) by using a high speed detection driving frequency without restricting a response of an operational amplifier. When a dynamic quantity detection electrostatic capacitance changes according to a dynamic quantity, electric charges stored in this element and in a reference electrostatic capacitance become unbalanced to produce a difference value, and an output of an operational amplifier changes according to the difference in electric charge quantity. However, the output becomes finally stable when the electric charges in the dynamic quantity detection electrostatic capacitance and in the reference electrostatic capacitance become equal. The output is proportional to a reciprocal of the dynamic quantity detection electrostatic capacitance and it is a D.C. voltage. Further, output without depending on integration feedback capacitance (feedback condenser) CF can be obtained.

摘要翻译： 通过使用高速检测驱动频率将动态定量位移稳定地转换成电压（直流输出），而不限制运算放大器的响应。 当动态量检测静电电容根据动态量而变化时，存储在该元件中的电荷和参考静电电容变得不均衡以产生差值，并且运算放大器的输出根据电荷量的差异而变化 。 然而，当动态量检测静电电容和参考静电电容中的电荷变得相等时，输出最终稳定。 输出与动态量检测静电电容的倒数成比例，为直流电压。 此外，可以获得不依赖积分反馈电容（反馈电容器）CF的输出。

公开(公告)号：US07426154B2

公开(公告)日：2008-09-16

申请号：US11430975

申请日：2006-05-10

申请人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

发明人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

IPC分类号： G11C8/00 ,  G06F9/46

CPC分类号： G01D3/022 ,  G01D3/02

摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.

摘要翻译： 提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。 一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于 积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

公开(公告)号：US06904379B1

公开(公告)日：2005-06-07

申请号：US10221577

申请日：2000-09-04

申请人： Keiji Hanzawa ,  Masahiro Matsumoto ,  Shinya Igarashi

发明人： Keiji Hanzawa ,  Masahiro Matsumoto ,  Shinya Igarashi

IPC分类号： G01F1/696 ,  G01F1/698 ,  G01F1/00 ,  G01F23/00 ,  G06F19/00

CPC分类号： G01F1/6965 ,  G01F1/698

摘要： A thermal type air flowmeter arranges a temperature-dependent heating resistance element in an air flow path and measures the air flow rate from the output of a gauge circuit containing the heating resistance element. A calculation circuit in the flowmeter is provided for correcting the output characteristic by a polynomial expression higher than a quadratic expression. Thereby, high flowmeter measuring accuracy is achieved in lieu of laser trimming and with small-scale circuit composition.

摘要翻译： 热式空气流量计在气流路径中设置与温度相关的加热电阻元件，并且从包含加热电阻元件的量规电路的输出测量空气流量。 提供流量计中的计算电路，用于通过高于二次表达式的多项式表达式校正输出特性。 因此，实现了高流量计测量精度以代替激光修整和小规模电路组成。

公开(公告)号：US06810345B2

公开(公告)日：2004-10-26

申请号：US09942030

申请日：2001-08-30

申请人： Takafumi Matsumura ,  Noboru Sugiura ,  Kenichi Katagishi ,  Masahiro Matsumoto ,  Keiji Hanzawa

发明人： Takafumi Matsumura ,  Noboru Sugiura ,  Kenichi Katagishi ,  Masahiro Matsumoto ,  Keiji Hanzawa

IPC分类号： G01G2301

CPC分类号： G01F1/6965 ,  G01F1/696 ,  G01F1/699

摘要： A gas flow meter having a gas flow detection circuit for detecting a current flowing through a resistor installed in a gas passage and a voltage generated across the resistor and outputting a voltage signal representing a gas flow passing through the gas passage; a noise reduction circuit for reducing external noise; and a digital adjusting circuit for digitally adjusting a signal representing the detected gas flow and outputting the adjusted signal; wherein a voltage signal based on the signal adjusted by the digital adjusting circuit is output.

摘要翻译： 一种气体流量计，其具有用于检测流过安装在气体通道中的电阻器的电流的气体流量检测电路和跨过电阻器产生的电压，并输出表示通过气体通道的气流的电压信号; 用于减少外部噪声的降噪电路; 以及数字调节电路，用于数字调节表示检测到的气流的信号并输出​​调整后的信号; 其中输出基于由数字调节电路调节的信号的电压信号。

公开(公告)号：US06489906B2

公开(公告)日：2002-12-03

申请号：US09785552

申请日：2001-02-20

申请人： Masahiro Matsumoto ,  Fumio Murabayashi ,  Tatsumi Yamauchi ,  Keiji Hanzawa

发明人： Masahiro Matsumoto ,  Fumio Murabayashi ,  Tatsumi Yamauchi ,  Keiji Hanzawa

IPC分类号： H03M300

CPC分类号： H03M3/484 ,  H03M3/474

摘要： A &Dgr;&Sgr; type AD converter includes a local D/A converter having a SC integrator which is constructed by an analog switch operated at the first and second timings of an input 1, an analog switch operated at the first and second timings of an input 2, an analog switch operated at the first and second timings without selection of the input, a capacitor charged and discharged by these analog switches and an operational amplifier (21), a comparator (22), a D-type flip-flop (28), a switch (29) and reference voltage sources (30, 31).

摘要翻译： DELTASIGMA型AD转换器包括具有SC积分器的本地D / A转换器，该SC积分器由在输入端1的第一和第二定时操作的模拟开关，在输入端2的第一和第二定时操作的模拟开关， 在第一和第二定时操作的模拟开关，不选择输入，由这些模拟开关充电和放电的电容器和运算放大器（21），比较器（22），D型触发器（28）， 开关（29）和参考电压源（30,31）。

公开(公告)号：US06282136B1

公开(公告)日：2001-08-28

申请号：US09578854

申请日：2000-05-26

申请人： Kohei Sakurai ,  Tatsumi Yamauchi ,  Masahiro Matsumoto ,  Fumio Murabayashi ,  Hiromichi Yamada ,  Atsushi Miyazaki ,  Keiji Hanzawa

发明人： Kohei Sakurai ,  Tatsumi Yamauchi ,  Masahiro Matsumoto ,  Fumio Murabayashi ,  Hiromichi Yamada ,  Atsushi Miyazaki ,  Keiji Hanzawa

IPC分类号： G11C700

CPC分类号： G11C7/1072 ,  G11C7/12 ,  G11C8/00

摘要： In a semiconductor memory device, the drain of a transistor for pre-charging is connected to a data line via the Y switch. Lower level bit signals are input into an X decoder for selecting the word line in a memory cell array; and higher level bit signals are input into a Y decoder for selecting the Y switch control signal lines. The addresses in the memory cell array are arranged sequentially in the direction of the data lines.

摘要翻译： 在半导体存储器件中，用于预充电的晶体管的漏极经由Y开关连接到数据线。 低电平位信号被输入到用于选择存储单元阵列中的字线的X解码器中; 并且较高电平位信号被输入到用于选择Y开关控制信号线的Y解码器中。 存储单元阵列中的地址在数据线的方向上顺序排列。