SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PROGRAM THEREOF
    51.
    发明申请
    SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PROGRAM THEREOF 审中-公开
    用于记录控制程序的溅射装置和记录介质

    公开(公告)号:US20110042209A1

    公开(公告)日:2011-02-24

    申请号:US12934497

    申请日:2009-06-16

    IPC分类号: C23C14/34

    摘要: Disclosed is a sputtering device wherein a target (2) is disposed offset with respect to a substrate (7), wherein said sputtering device can ensure a uniform amount of deposition, even when a substrate support holder (6) has a low number of rotations of several rotations to several tens of rotations, and the amount of deposition is extremely small, such as a film thickness of 1 nm or less. A control unit (11) is provided to perform control using input of the values of a total whole number of rotations N and a fractional number of rotations α such that X=N+α (where N is the total whole number of rotations and is a positive whole number, and α is the fractional number of rotations and is a positive pure decimal) and, by input of the value of a deposition time T such that the rotational velocity V (rps) of the aforementioned substrate support holder (6) satisfies V·T=N+α when the total number of rotations of the aforementioned substrate support holder (6) is X, during the deposition time of T (seconds) for particles sputtered onto the surface of the aforementioned substrate (7) where a film is to be formed.

    摘要翻译: 公开了一种溅射装置,其中靶(2)相对于基板(7)偏置地设置,其中即使当基板支撑架(6)具有低转数时,也可以确保均匀的沉积量 几个旋转到几十个旋转,并且沉积量非常小,例如膜厚度为1nm以下。 提供控制单元(11),以使用总共转数N和分数转数α的值的输入来执行控制,使得X = N +α(其中N是总的总转数,并且是 正整数,α是分数旋转数,为正纯的十进制),通过输入沉积时间T,使得上述基板支撑保持架(6)的旋转速度V(rps) 在溅射到上述基板(7)的表面上的颗粒的沉积时间T(秒)期间,当上述基板支撑保持器(6)的总转数为X时,满足V·T = N +α,其中 电影将要成立。

    COOLING MECHANISM FOR AXIAL GAP TYPE ROTATING MACHINES
    53.
    发明申请
    COOLING MECHANISM FOR AXIAL GAP TYPE ROTATING MACHINES 有权
    轴流式旋转机械的冷却机理

    公开(公告)号:US20100289350A1

    公开(公告)日:2010-11-18

    申请号:US12775127

    申请日:2010-05-06

    IPC分类号: H02K5/18 H02K9/04

    摘要: A stator has a mechanism for effectively dissipating internally generated heat, and is for use in a high power axial gap type rotating machine. The stator comprises a coil holding member and a coil secured to the coil holding member, in which the coil holding member comprises a material having a thermal conductivity of not less than 5 W/mK that is measured compliant with the ASTM E1530 and having an electrical conductivity of not more than 1×105 S/m that is measured compliant with the ASTM E345. This stator preferably comprises a radiation fin, having a thermal conductivity of not less than 150 W/mK, and having a bumpy surface so as to increase the surface area thereof threefold or more, at the circumference of the coil holding member.

    摘要翻译: 定子具有有效地消散内部产生的热量的机构,并且用于高功率轴向间隙型旋转机械。 定子包括线圈保持构件和固定到线圈保持构件的线圈,其中线圈保持构件包括具有不小于5W / mK的热导率的材料,该材料根据ASTM E1530测量并具有电气 电导率不超过1×105 S / m,符合ASTM E345标准。 该定子优选地包括具有不小于150W / mK的导热率的辐射翅片,并且在线圈保持构件的圆周处具有颠簸的表面以将其表面积增加三倍或更多。

    INLINE-TYPE WAFER CONVEYANCE DEVICE
    54.
    发明申请
    INLINE-TYPE WAFER CONVEYANCE DEVICE 有权
    在线式波浪输送装置

    公开(公告)号:US20100239394A1

    公开(公告)日:2010-09-23

    申请号:US12728588

    申请日:2010-03-22

    IPC分类号: H01L21/677

    摘要: There are comprised a load chamber (51) for carrying in a wafer from outside, an unload chamber (53) for carrying out a wafer to outside, and a plurality of conveyance chambers (54a, 54b, 54c) and a plurality of process modules (52a, 52b) connected in series between the load chamber and the unload chamber. The conveyance chambers and the process modules are connected alternately and the plurality of conveyance chambers includes a first end conveyance chamber (54a) connected to the load chamber, a second end conveyance chamber (54c) connected to the unload chamber, and another one or a plurality of intermediate conveyance chambers (54b).

    摘要翻译: 包括用于从外部承载晶片的负载室(51),用于将晶片输送到外部的卸载室(53)和多个输送室(54a,54b,54c)和多个处理模块 (52a,52b)串联连接在负载室和卸载室之间。 传送室和处理模块交替连接,多个传送室包括连接到装载室的第一端部传送室(54a),连接到卸载室的第二端部传送室(54c),以及另一个或 多个中间输送室(54b)。

    CANTILEVER EVALUATION SYSTEM, CANTILEVER EVALUATION METHOD, AND CANTILEVER EVALUATION PROGRAM
    55.
    发明申请
    CANTILEVER EVALUATION SYSTEM, CANTILEVER EVALUATION METHOD, AND CANTILEVER EVALUATION PROGRAM 失效
    CANTILEVER评估系统,CANTILEVER评估方法和CANTILEVER评估程序

    公开(公告)号:US20100204968A1

    公开(公告)日:2010-08-12

    申请号:US12677607

    申请日:2008-10-22

    IPC分类号: G06F17/50

    CPC分类号: G01Q30/12 G01Q30/04

    摘要: A controller of a cantilever evaluation system calculates a stream function value ψz(x, y; t+1) and vorticity ωz(x, y; t+1) at a subsequent time step t+1 using boundary conditions according to displacement h(z; t) of a cantilever and velocity δh/δt(z; t), a stream function value φz(x, y; t) and vorticity ωz(x, y; t) in two-dimensional planes. The controller uses the calculated stream function value φz(x, y) and vorticity ωz(x, y) to calculate a fluid drag force acting on the cantilever. The controller substitutes the calculated fluid drag force into a displacement calculation equation to calculate the displacement h(z; t+1) of the one-dimensional beam at the subsequent time step t+1. The controller repeats such calculation for each grid point and further repeats it at each time step.

    摘要翻译: 悬臂评估系统的控制器使用根据位移h(的边界条件)在随后的时间步长t + 1处计算流函数值ψz(x,y; t + 1)和涡度ωz(x,y; t + z; t)和速度δh/δt(z; t),二维平面中的流函数值&phgr; z(x,y; t)和涡度ωz(x,y; t)。 控制器使用计算的流函数值&phgr; z(x,y)和涡度ωz(x,y)来计算作用在悬臂上的流体阻力。 控制器将计算的流体阻力代入位移计算方程,以计算随后时间步长t + 1时一维梁的位移h(z; t + 1)。 控制器对每个网格点重复这样的计算,并在每个时间步长进一步重复该计算。

    Method and Apparatus for Manufacturing Magnetoresistive Devices
    56.
    发明申请
    Method and Apparatus for Manufacturing Magnetoresistive Devices 有权
    制造磁阻器件的方法和装置

    公开(公告)号:US20100155231A1

    公开(公告)日:2010-06-24

    申请号:US11991967

    申请日:2006-09-13

    摘要: Disclosed are method and apparatus for manufacturing a magnetoresistive device which are suitable for manufacturing a high-quality magnetoresistive device by reducing damages caused during the processing of a multilayer magnetic film as a component of the magnetoresistive device, thereby preventing deterioration of magnetic characteristics due to such damages. Specifically disclosed is a method for manufacturing a magnetoresistive device, which includes processing a multilayer magnetic film by performing a reactive ion etching on a substrate which is provided with the multilayer magnetic film as a component of the magnetoresistive device. This method for manufacturing a magnetoresistive device includes irradiating the multilayer magnetic film with an ion beam after the reactive ion etching.

    摘要翻译: 公开了用于制造磁阻器件的方法和装置,其适用于通过减少在作为磁阻器件的组件的多层磁性膜的处理期间引起的损坏而制造高品质磁阻器件,从而防止由于这种磁阻特性而导致的磁特性的劣化 损害赔偿 具体公开了一种用于制造磁阻器件的方法,其包括通过在设置有作为磁阻器件的组件的多层磁性膜的衬底上进行反应离子蚀刻来处理多层磁性膜。 这种制造磁阻器件的方法包括在反应离子蚀刻之后用离子束照射多层磁性膜。

    STORAGE SYSTEM HAVING PROCESSOR AND INTERFACE ADAPTERS THAT CAN BE INCREASED OR DECREASED BASED ON REQUIRED PERFORMANCE
    57.
    发明申请
    STORAGE SYSTEM HAVING PROCESSOR AND INTERFACE ADAPTERS THAT CAN BE INCREASED OR DECREASED BASED ON REQUIRED PERFORMANCE 审中-公开
    具有处理器和接口适配器的存储系统可根据需要的性能增加或减少

    公开(公告)号:US20100153961A1

    公开(公告)日:2010-06-17

    申请号:US12714755

    申请日:2010-03-01

    CPC分类号: G06F13/4022

    摘要: A storage system is comprised of an interface unit 10 which has an interface with a server 3 or hard drives 2, a memory unit 21 which has a cache memory module 126 for storing data to be read from/written to the server 3 or the hard drives 2 and a control information memory module 127 for storing control information of the system, a processor unit 81 which has a microprocessor for controlling the read/write of data between the server 3 and the hard drives 2, and an interconnection 31, wherein the interface unit 10, memory unit 21 and processor unit 81 are interconnected with the interconnection 31.

    摘要翻译: 存储系统包括与服务器3或硬盘驱动器2具有接口的接口单元10,存储单元21,其具有用于存储要从服务器3读取/写入数据或硬写入的数据的高速缓冲存储器模块126 驱动器2和用于存储系统的控制信息的控制信息存储器模块127,具有用于控制服务器3和硬盘驱动器2之间的数据读/写的微处理器的处理器单元81和互连31,其中, 接口单元10,存储器单元21和处理器单元81与互连31互连。

    Magnetoresistance effect device and method of production thereof
    58.
    发明授权
    Magnetoresistance effect device and method of production thereof 有权
    磁阻效应装置及其制造方法

    公开(公告)号:US07727409B2

    公开(公告)日:2010-06-01

    申请号:US12117753

    申请日:2008-05-09

    IPC分类号: B44C1/22 G11B5/84

    摘要: A method of production of a magnetoresistance effect device is able to prevent or minimize a drop in the MR ratio and maintain the high performance of the magnetoresistance effect device even if forming an oxide layer as a surface-most layer constituting a protective layer by the oxidation process inevitably included in the process of production of microprocessing by dry etching performed in a vacuum. Two mask layers used for microprocessing are doubly piled up. This method of production of a magnetoresistivity effect device including a magnetic multilayer film including at least two magnetic layers includes a step of providing under a first mask material that is a nonorganic material a second mask material able to react with other atoms to form a conductive substance, and a device made according to the method.

    摘要翻译: 制造磁阻效应器件的方法能够防止或最小化MR比的下降并且保持磁阻效应器件的高性能,即使通过氧化形成作为构成保护层的最表层的氧化物层 在真空中进行干法蚀刻的微加工生产过程中不可避免地包含这一过程。 用于微处理的两个掩模层被叠加起来。 制造包括至少两个磁性层的磁性多层膜的磁阻效应器的这种制造方法包括在第一掩模材料下面提供作为无机材料的第二掩模材料的步骤,第二掩模材料能够与其它原子反应以形成导电物质 ,以及根据该方法制造的装置。

    Storage system
    59.
    发明授权
    Storage system 有权
    存储系统

    公开(公告)号:US07594074B2

    公开(公告)日:2009-09-22

    申请号:US11808605

    申请日:2007-06-12

    IPC分类号: G06F12/00

    摘要: To provide a storage system with a cost/performance meeting the system scale, from a small-scale to a large-scale configuration. In the storage system, protocol transformation units and data caching control units are connected to each other through an interconnection, the data caching control units are divided into plural control clusters, each of the control clusters including at least two or more data caching control units, control of a cache memory is conducted independently for each of the control clusters, and one of the plural data caching control units manages, as a single system, protocol transformation units and the plural control clusters based on management information stored in a system management information memory unit.

    摘要翻译: 提供满足系统规模的成本/性能的存储系统,从小规模到大规模配置。 在存储系统中,协议转换单元和数据高速缓存控制单元通过互连相互连接,数据高速缓存控制单元分为多个控制集群,每个控制集群包括至少两个或多个数据高速缓存控制单元, 对于每个控制集群独立地执行高速缓冲存储器的控制,并且多个数据高速缓存控制单元中的一个数据高速缓存控制单元基于存储在系统管理信息存储器中的管理信息来管理协议变换单元和多个控制集群 单元。

    IMAGE PROCESSING DEVICE AND RECORDING MEDIUM STORING IMAGE PROCESSING PROGRAM
    60.
    发明申请
    IMAGE PROCESSING DEVICE AND RECORDING MEDIUM STORING IMAGE PROCESSING PROGRAM 有权
    图像处理设备和记录媒体存储图像处理程序

    公开(公告)号:US20090141979A1

    公开(公告)日:2009-06-04

    申请号:US12339925

    申请日:2008-12-19

    IPC分类号: G06K9/00

    CPC分类号: G06K9/00134

    摘要: An inspection apparatus includes an imaging device and an image processing device. The imaging device photographs a specimen and outputs a color image of the specimen to the image processing device. The image processing device subjects the color image of the specimen to negative-positive reversal. After detecting a mode value of the hue the color image having been subjected to negative-positive reversal, the image processing device changes the hue of the color image in accordance with a difference between a boundary value of two predefined hues and the detected mode value. In accordance with the change of the hue, a plurality of target pixels different in the saturation is extracted and the saturation and the intensity of each pixel are changed, or the gradation of each pixel is converted so that the plurality of target pixels becomes most distant from one another in a color space.

    摘要翻译: 检查装置包括成像装置和图像处理装置。 成像装置拍摄样本并将样本的彩色图像输出到图像处理装置。 图像处理装置使样本的彩色图像呈负反转。 在检测到彩色图像经受负反转后的色调的模式值之后,图像处理装置根据两个预定色调的边界值与检测到的模式值之间的差异来改变彩色图像的色调。 根据色调的变化,提取饱和度不同的多个目标像素,并且改变每个像素的饱和度和强度,或者转换每个像素的灰度,使得多个目标像素变得最远 在一个色彩空间中彼此之间。