摘要:
Disclosed is a sputtering device wherein a target (2) is disposed offset with respect to a substrate (7), wherein said sputtering device can ensure a uniform amount of deposition, even when a substrate support holder (6) has a low number of rotations of several rotations to several tens of rotations, and the amount of deposition is extremely small, such as a film thickness of 1 nm or less. A control unit (11) is provided to perform control using input of the values of a total whole number of rotations N and a fractional number of rotations α such that X=N+α (where N is the total whole number of rotations and is a positive whole number, and α is the fractional number of rotations and is a positive pure decimal) and, by input of the value of a deposition time T such that the rotational velocity V (rps) of the aforementioned substrate support holder (6) satisfies V·T=N+α when the total number of rotations of the aforementioned substrate support holder (6) is X, during the deposition time of T (seconds) for particles sputtered onto the surface of the aforementioned substrate (7) where a film is to be formed.
摘要翻译:公开了一种溅射装置,其中靶(2)相对于基板(7)偏置地设置,其中即使当基板支撑架(6)具有低转数时,也可以确保均匀的沉积量 几个旋转到几十个旋转,并且沉积量非常小,例如膜厚度为1nm以下。 提供控制单元(11),以使用总共转数N和分数转数α的值的输入来执行控制,使得X = N +α(其中N是总的总转数,并且是 正整数,α是分数旋转数,为正纯的十进制),通过输入沉积时间T,使得上述基板支撑保持架(6)的旋转速度V(rps) 在溅射到上述基板(7)的表面上的颗粒的沉积时间T(秒)期间,当上述基板支撑保持器(6)的总转数为X时,满足V·T = N +α,其中 电影将要成立。
摘要:
This invention provides a polyester and a polyester molded product, which, while maintaining color tone, transparency, and thermal stability, can realize a high polycondensation rate, are less likely to cause the production of polycondensation catalyst-derived undesired materials, and can simultaneously meet both quality and cost effectiveness requirements, which can exhibit the characteristic features, for example, in the fields of ultrafine fibers, high transparent films for optical use, or ultrahigh transparent molded products. These advantages can be realized by using, in the production of a polyester in the presence of an aluminum compound-containing polyester polycondensation catalyst, an aluminum compound having an absorbance of not more than 0.0132 as measured in the form of an aqueous aluminum compound solution, prepared by dissolving the aluminum compound in pure water to give a concentration of 2.7 g/liter in terms of the amount of aluminum element, under conditions of cell length 1 cm and wavelength 680 nm.
摘要:
A stator has a mechanism for effectively dissipating internally generated heat, and is for use in a high power axial gap type rotating machine. The stator comprises a coil holding member and a coil secured to the coil holding member, in which the coil holding member comprises a material having a thermal conductivity of not less than 5 W/mK that is measured compliant with the ASTM E1530 and having an electrical conductivity of not more than 1×105 S/m that is measured compliant with the ASTM E345. This stator preferably comprises a radiation fin, having a thermal conductivity of not less than 150 W/mK, and having a bumpy surface so as to increase the surface area thereof threefold or more, at the circumference of the coil holding member.
摘要:
There are comprised a load chamber (51) for carrying in a wafer from outside, an unload chamber (53) for carrying out a wafer to outside, and a plurality of conveyance chambers (54a, 54b, 54c) and a plurality of process modules (52a, 52b) connected in series between the load chamber and the unload chamber. The conveyance chambers and the process modules are connected alternately and the plurality of conveyance chambers includes a first end conveyance chamber (54a) connected to the load chamber, a second end conveyance chamber (54c) connected to the unload chamber, and another one or a plurality of intermediate conveyance chambers (54b).
摘要:
A controller of a cantilever evaluation system calculates a stream function value ψz(x, y; t+1) and vorticity ωz(x, y; t+1) at a subsequent time step t+1 using boundary conditions according to displacement h(z; t) of a cantilever and velocity δh/δt(z; t), a stream function value φz(x, y; t) and vorticity ωz(x, y; t) in two-dimensional planes. The controller uses the calculated stream function value φz(x, y) and vorticity ωz(x, y) to calculate a fluid drag force acting on the cantilever. The controller substitutes the calculated fluid drag force into a displacement calculation equation to calculate the displacement h(z; t+1) of the one-dimensional beam at the subsequent time step t+1. The controller repeats such calculation for each grid point and further repeats it at each time step.
摘要翻译:悬臂评估系统的控制器使用根据位移h(的边界条件)在随后的时间步长t + 1处计算流函数值ψz(x,y; t + 1)和涡度ωz(x,y; t + z; t)和速度δh/δt(z; t),二维平面中的流函数值&phgr; z(x,y; t)和涡度ωz(x,y; t)。 控制器使用计算的流函数值&phgr; z(x,y)和涡度ωz(x,y)来计算作用在悬臂上的流体阻力。 控制器将计算的流体阻力代入位移计算方程,以计算随后时间步长t + 1时一维梁的位移h(z; t + 1)。 控制器对每个网格点重复这样的计算,并在每个时间步长进一步重复该计算。
摘要:
Disclosed are method and apparatus for manufacturing a magnetoresistive device which are suitable for manufacturing a high-quality magnetoresistive device by reducing damages caused during the processing of a multilayer magnetic film as a component of the magnetoresistive device, thereby preventing deterioration of magnetic characteristics due to such damages. Specifically disclosed is a method for manufacturing a magnetoresistive device, which includes processing a multilayer magnetic film by performing a reactive ion etching on a substrate which is provided with the multilayer magnetic film as a component of the magnetoresistive device. This method for manufacturing a magnetoresistive device includes irradiating the multilayer magnetic film with an ion beam after the reactive ion etching.
摘要:
A storage system is comprised of an interface unit 10 which has an interface with a server 3 or hard drives 2, a memory unit 21 which has a cache memory module 126 for storing data to be read from/written to the server 3 or the hard drives 2 and a control information memory module 127 for storing control information of the system, a processor unit 81 which has a microprocessor for controlling the read/write of data between the server 3 and the hard drives 2, and an interconnection 31, wherein the interface unit 10, memory unit 21 and processor unit 81 are interconnected with the interconnection 31.
摘要:
A method of production of a magnetoresistance effect device is able to prevent or minimize a drop in the MR ratio and maintain the high performance of the magnetoresistance effect device even if forming an oxide layer as a surface-most layer constituting a protective layer by the oxidation process inevitably included in the process of production of microprocessing by dry etching performed in a vacuum. Two mask layers used for microprocessing are doubly piled up. This method of production of a magnetoresistivity effect device including a magnetic multilayer film including at least two magnetic layers includes a step of providing under a first mask material that is a nonorganic material a second mask material able to react with other atoms to form a conductive substance, and a device made according to the method.
摘要:
To provide a storage system with a cost/performance meeting the system scale, from a small-scale to a large-scale configuration. In the storage system, protocol transformation units and data caching control units are connected to each other through an interconnection, the data caching control units are divided into plural control clusters, each of the control clusters including at least two or more data caching control units, control of a cache memory is conducted independently for each of the control clusters, and one of the plural data caching control units manages, as a single system, protocol transformation units and the plural control clusters based on management information stored in a system management information memory unit.
摘要:
An inspection apparatus includes an imaging device and an image processing device. The imaging device photographs a specimen and outputs a color image of the specimen to the image processing device. The image processing device subjects the color image of the specimen to negative-positive reversal. After detecting a mode value of the hue the color image having been subjected to negative-positive reversal, the image processing device changes the hue of the color image in accordance with a difference between a boundary value of two predefined hues and the detected mode value. In accordance with the change of the hue, a plurality of target pixels different in the saturation is extracted and the saturation and the intensity of each pixel are changed, or the gradation of each pixel is converted so that the plurality of target pixels becomes most distant from one another in a color space.