Method and device for irradiating spots on a layer
    51.
    发明授权
    Method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置

    公开(公告)号:US07399978B2

    公开(公告)日:2008-07-15

    申请号:US10539351

    申请日:2003-11-20

    摘要: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.

    摘要翻译: 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于光学元件的相对运动,使得相继地照射该层的不同部分和在该层的表面之间的间隙 保持最靠近层的光学元件。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应管道供给,并通过总投影横截面通过面积流出流出开口 在与平面平行的平面上。 流出开口或多个流出开口定位成使得从垂直于该层的方向看,总横截面积在该空间部分中的中心,辐射辐射穿过该点。

    Method and device for irradiating spots on a layer
    53.
    发明申请
    Method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置

    公开(公告)号:US20070052936A1

    公开(公告)日:2007-03-08

    申请号:US10539313

    申请日:2003-11-20

    IPC分类号: G03B23/04

    摘要: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.

    摘要翻译: 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于透镜的相对运动,使得相继地照射该层的不同部分和透镜表面之间的间隙 最靠近层保持。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应导管供给。 至少一部分液体填充了辐射照射到该点的凹槽。

    Non-leaching adhesvie system and its use in a liquid immersion objective
    54.
    发明申请
    Non-leaching adhesvie system and its use in a liquid immersion objective 有权
    非浸出粘合体系及其在液浸物中的应用

    公开(公告)号:US20060225840A1

    公开(公告)日:2006-10-12

    申请号:US10568837

    申请日:2004-08-05

    IPC分类号: B32B37/12 B32B38/00

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymeriazble groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学上不同的聚合物基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。

    Illumination unit for a device having a multi-color reflective liquid crystal display
    56.
    发明授权
    Illumination unit for a device having a multi-color reflective liquid crystal display 失效
    具有多色反射型液晶显示装置的照明装置

    公开(公告)号:US06568841B2

    公开(公告)日:2003-05-27

    申请号:US09840207

    申请日:2001-04-23

    IPC分类号: G02F11335

    CPC分类号: G02B6/0038 G02B6/0056

    摘要: A reflective liquid crystal display (1) is provided with a front illumination unit. The front illumination unit comprises a flat waveguide (2), at least one surface of which is provided with a diffraction grating (7). A period of the diffraction grating (7) is of the order of the wavelength of the light. A light source (4) generates light of one or more colors, and the colors of light are sequentially coupled into the flat waveguide (2). The diffraction grating (7) is divided into separate areas (10, 11, 12). Each of these separate areas (10, 11, 12) is tuned to one particular wavelength of the light generated by the light source (4). Each separate area (10, 11, 12) is subdivided into various small areas so that the surface of the flat waveguide is subdivided into a large number of small areas (10-1, 11-1, 12-1, . . . 10-11, . . . 12-41). Each small area (10-1, 11-1, 12-1, . . . 10-11, . . . 12-41) is bounded by small areas (10-1, 11-1, 12-1, . . . 10-11, . . . 12-41) tuned to other light wavelengths. A polarizer (6) is present above the waveguide (2) to reflect light polarized in one direction back to the reflective liquid crystal display (1) and to transmit image-wise polarized light in a direction transverse to the one direction.

    摘要翻译: 反射型液晶显示器(1)设置有前照明单元。 前照明单元包括平坦波导(2),其至少一个表面设置有衍射光栅(7)。 衍射光栅(7)的周期为光的波长的数量级。 光源(4)产生一种或多种颜色的光,并且光的颜色顺序地耦合到平坦波导(2)中。 衍射光栅(7)被分成独立的区域(10,11,12)。 这些分离区域(10,11,12)中的每一个被调谐到由光源(4)产生的光的特定波长。 每个分离区域(10,11,12)被细分成各种小的区域,使得平坦波导的表面被细分为大量的小区域(10-1,11-1,12-1 ... 10 -11,... 12-41)。 每个小区域(10-1,11-1,12-1,...,10-11,...,12-41)都被小区域(10-1,11-1,12-1,...)限定。 10-11,... 12-41)调谐到其他光波长。 在波导(2)上方存在偏振器(6),以将在一个方向上偏振的光反射回反射型液晶显示器(1)并且在横向于该一个方向的方向上透射成像的偏振光。

    Device for directing radiation to a layer, apparatus with such device and method using such apparatus
    59.
    发明授权
    Device for directing radiation to a layer, apparatus with such device and method using such apparatus 失效
    用于将辐射引导到层的装置,具有这种装置的装置和使用这种装置的方法

    公开(公告)号:US07605979B2

    公开(公告)日:2009-10-20

    申请号:US11911559

    申请日:2006-04-13

    IPC分类号: G02B27/10 G02B27/14

    摘要: A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.

    摘要翻译: 描述了用于将辐射引导到层(1)的装置。 该装置包括用于将源自第一辐射源(S1)的第一辐射束(B1)聚焦到所述层上的第一光学元件(L1),用于聚焦源自第二辐射源 第二辐射源(S2)到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件(L2)具有孔(A2),其允许第一辐射束(B1)的光学上不受干扰地通过。 以这种方式实现L1和L2的紧凑且轻的配置以及改进的辐射束质量。 此外,公开了一种包括这种装置的装置和使用这种装置的方法。