Method and device for irradiating spots on a layer
    1.
    发明授权
    Method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置

    公开(公告)号:US07399978B2

    公开(公告)日:2008-07-15

    申请号:US10539351

    申请日:2003-11-20

    摘要: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.

    摘要翻译: 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于光学元件的相对运动,使得相继地照射该层的不同部分和在该层的表面之间的间隙 保持最靠近层的光学元件。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应管道供给,并通过总投影横截面通过面积流出流出开口 在与平面平行的平面上。 流出开口或多个流出开口定位成使得从垂直于该层的方向看,总横截面积在该空间部分中的中心,辐射辐射穿过该点。

    Method and device for irradiating spots on a layer
    2.
    发明授权
    Method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置

    公开(公告)号:US07514699B2

    公开(公告)日:2009-04-07

    申请号:US10539313

    申请日:2003-11-20

    摘要: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.

    摘要翻译: 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于透镜的相对运动,使得相继地照射该层的不同部分和透镜表面之间的间隙 最靠近层保持。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应导管供给。 至少一部分液体填充了辐射照射到该点的凹槽。

    Non-leaching adhesive system and its use in a liquid immersion objective
    3.
    发明授权
    Non-leaching adhesive system and its use in a liquid immersion objective 有权
    非浸出粘合剂系统及其在液体浸入物中的应用

    公开(公告)号:US07935213B2

    公开(公告)日:2011-05-03

    申请号:US12629155

    申请日:2009-12-02

    IPC分类号: B29C65/00 B32B37/12 B32B7/12

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymerizable groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学不同的可聚合基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。

    Non-leaching adhesive system and its use in a liquid immersion objective
    4.
    发明授权
    Non-leaching adhesive system and its use in a liquid immersion objective 有权
    非浸出粘合剂系统及其在液体浸入物中的应用

    公开(公告)号:US07642297B2

    公开(公告)日:2010-01-05

    申请号:US10568837

    申请日:2004-08-05

    IPC分类号: C08F2/46 C09J4/02

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymeriazble groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学上不同的聚合物基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。

    Device for Directing Radiation to a Layer, Apparatus with Such Device and Method Using Such Apparatus
    5.
    发明申请
    Device for Directing Radiation to a Layer, Apparatus with Such Device and Method Using Such Apparatus 失效
    用于将辐射定向到层的装置,具有这种装置的装置和使用这种装置的方法

    公开(公告)号:US20080186549A1

    公开(公告)日:2008-08-07

    申请号:US11911559

    申请日:2006-04-13

    IPC分类号: G02B26/08

    摘要: A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.

    摘要翻译: 描述了用于将辐射引导到层(1)的装置。 该装置包括用于将源自第一辐射源(S1)的第一辐射束(B 1)聚焦到所述层上的第一光学元件(L 1),用于聚焦第二辐射束的第二光学元件(L 2) B 2)源自第二辐射源(S 2)到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件(L 2)具有允许第一辐射束(B 1)的光学上不受干扰地通过的孔径(A 2)。 以这种方式,实现了L 1和L 2的紧凑和轻型结构以及改进的辐射束质量。 此外,公开了一种包括这种装置的装置和使用这种装置的方法。

    Imprint lithography
    6.
    发明授权
    Imprint lithography 有权
    印刷光刻

    公开(公告)号:US07354698B2

    公开(公告)日:2008-04-08

    申请号:US11030326

    申请日:2005-01-07

    IPC分类号: G03F7/00

    摘要: An imprinting method is disclosed which involves irradiating a photo-curable imprintable medium in a flowable state on a substrate with radiation to initiate curing of the medium, after the irradiating, contacting the medium with a template to form an imprint in the medium, allowing the medium to substantially cure such that the medium is in a substantially non-flowable state while the medium is contacted by the template, and separating the template from the medium while the medium is in the substantially non-flowable state.

    摘要翻译: 公开了一种压印方法,其包括在辐射下以可流动状态在基板上照射可光固化的可印刷介质以引发介质的固化,在照射之后,使介质与模板接触以在介质中形成印记, 介质基本上固化,使得介质处于基本不可流动的状态,同时介质与模板接触,并且当介质处于基本上不可流动的状态时将模板与介质分离。

    NON-LEACHING ADHESIVE SYSTEM AND ITS USE IN A LIQUID IMMERSION OBJECTIVE
    8.
    发明申请
    NON-LEACHING ADHESIVE SYSTEM AND ITS USE IN A LIQUID IMMERSION OBJECTIVE 有权
    非浸出粘合剂体系及其在液体渗透中的应用目的

    公开(公告)号:US20100071848A1

    公开(公告)日:2010-03-25

    申请号:US12629155

    申请日:2009-12-02

    IPC分类号: C09J5/02 G03F7/004 C09J5/04

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymerizable groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学不同的可聚合基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。

    Device for directing radiation to a layer, apparatus with such device and method using such apparatus
    9.
    发明授权
    Device for directing radiation to a layer, apparatus with such device and method using such apparatus 失效
    用于将辐射引导到层的装置,具有这种装置的装置和使用这种装置的方法

    公开(公告)号:US07605979B2

    公开(公告)日:2009-10-20

    申请号:US11911559

    申请日:2006-04-13

    IPC分类号: G02B27/10 G02B27/14

    摘要: A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.

    摘要翻译: 描述了用于将辐射引导到层(1)的装置。 该装置包括用于将源自第一辐射源(S1)的第一辐射束(B1)聚焦到所述层上的第一光学元件(L1),用于聚焦源自第二辐射源 第二辐射源(S2)到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件(L2)具有孔(A2),其允许第一辐射束(B1)的光学上不受干扰地通过。 以这种方式实现L1和L2的紧凑且轻的配置以及改进的辐射束质量。 此外,公开了一种包括这种装置的装置和使用这种装置的方法。