公开(公告)号：US07196343B2

公开(公告)日：2007-03-27

申请号：US11025851

申请日：2004-12-30

申请人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Levinus Pieter Bakker ,  Derk Jan Wilfred Klunder

发明人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Levinus Pieter Bakker ,  Derk Jan Wilfred Klunder

IPC分类号： G03F7/20 ,  G02B27/14

CPC分类号： G03F7/70958 ,  G02B1/113 ,  G02B5/0891 ,  G03F7/70575 ,  G21K1/06 ,  G21K2201/067

摘要： An optical element including an anti-reflection (AR) coating is configured to reflect Extreme-Ultra-Violet (EUV) radiation only.

摘要翻译： 包括抗反射（AR）涂层的光学元件被配置为仅反射极紫外（EUV）辐射。

公开(公告)号：US07170586B2

公开(公告)日：2007-01-30

申请号：US11335681

申请日：2006-01-20

申请人： Vadim Yevgenyevich Banine ,  Levinus Pieter Bakker ,  Jeroen Jonkers ,  Erik Roelof Loopstra

发明人： Vadim Yevgenyevich Banine ,  Levinus Pieter Bakker ,  Jeroen Jonkers ,  Erik Roelof Loopstra

IPC分类号： G03B24/54

CPC分类号： G03F7/70008 ,  G03F7/7005

摘要： A lithographic apparatus includes an illumination system configured to provide a beam of radiation, a support configured to support a patterning device, a substrate table and a projection system. Furthermore, the lithographic apparatus includes a plurality of EUV sources for providing EUV radiation to the illumination system and a distributor which is arranged to convert the EUV radiation from each of the EUV sources into an intermediate beam of radiation. The intermediate beam of radiation is directed from the distributor in a first direction by a mirror surface. The distributor may include a rotationally driven mirror arrangement, the axis of rotation being non-parallel to the mirror surface.

摘要翻译： 光刻设备包括被配置为提供辐射束的照明系统，被配置为支撑图案形成装置的支撑件，衬底台和投影系统。 此外，光刻设备包括用于向照明系统提供EUV辐射的多个EUV源和布置成将来自每个EUV源的EUV辐射转换成中间辐射束的分配器。 辐射的中间束通过镜面从第一方向从分配器引导。 分配器可以包括旋转驱动的反射镜布置，旋转轴线不平行于镜面。

公开(公告)号：US07136141B2

公开(公告)日：2006-11-14

申请号：US10743270

申请日：2003-12-23

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G03B27/52 ,  G03B27/42 ,  G03B27/72

CPC分类号： G03F7/70941 ,  G03F7/70916

摘要： A lithographic projection apparatus is disclosed. The apparatus includes a radiation system that includes a radiation source and an illumination system that supplies a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, a projection system that projects the patterned beam onto a target portion of the substrate, an electrode, and a voltage source that applies an electric field between the radiation source and the electrode to generate a discharge between the radiation source and the electrode.

摘要翻译： 公开了一种光刻投影装置。 该装置包括辐射系统，其包括辐射源和提供辐射束的照明系统，以及支撑图案结构的支撑结构。 图形结构被配置为根据期望的图案对辐射束进行图案化。 该装置还包括支撑基板的基板支撑件，将图案化的光束投影到基板的目标部分上的投影系统，电极和在辐射源和电极之间施加电场的电压源，以产生 在辐射源和电极之间放电。

公开(公告)号：US06930760B2

公开(公告)日：2005-08-16

申请号：US10716443

申请日：2003-11-20

申请人： Jan Van Elp ,  Martinus Hendrikus Antonius Leenders ,  Vadim Yevgenyevich Banine ,  Hugo Matthieu Visser ,  Levinus Pieter Bakker

发明人： Jan Van Elp ,  Martinus Hendrikus Antonius Leenders ,  Vadim Yevgenyevich Banine ,  Hugo Matthieu Visser ,  Levinus Pieter Bakker

IPC分类号： G02B5/18 ,  G03F7/20 ,  G03F7/22 ,  H01L21/027 ,  G03B27/54 ,  G03B27/72

CPC分类号： G03F7/70575 ,  G03F7/70191 ,  G03F7/702

摘要： In a lithographic projection apparatus, a grating spectral filter is used to filter an EUV projection beam. The grating spectral filter is preferably a blazed, grazing incidence, reflective grating. Cooling channels may be provided in or on the rear of the grating spectral filter. The grating spectral filter may be formed of a material effectively invisible to the desired radiation.

摘要翻译： 在光刻投影设备中，使用光栅光谱滤波器来过滤EUV投影光束。 光栅光谱滤波器优选地是闪耀的，掠入射的反射光栅。 冷却通道可以设置在光栅光谱滤波器的背面中或后面。 光栅光谱滤波器可以由对期望的辐射有效地不可见的材料形成。

公开(公告)号：US09097993B2

公开(公告)日：2015-08-04

申请号：US13372093

申请日：2012-02-13

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G02B5/18 ,  G03F7/20

CPC分类号： G03F7/70958 ,  G03F7/70575 ,  G03F7/70983

摘要： An optical element includes a surface including a tilted profile having height differences, thereby providing cavities and elevations having a predetermined maximum height difference, and a transmissive layer that covers the cavities and the elevations of the optical element. A first height of the transmissive layer in the cavities is substantially equal or larger than the predetermined maximum height difference and the transmissive layer has a second height on the elevations and the second height is about 10-500 nm. The transmissive layer is enabled to optically filter incident radiation, and the optical element is a grating.

摘要翻译： 光学元件包括包括具有高度差的倾斜轮廓的表面，从而提供具有预定最大高度差的空腔和高度，以及覆盖光学元件的腔和高度的透射层。 空腔中的透射层的第一高度基本上等于或大于预定的最大高度差，并且透射层在高度上具有第二高度，第二高度为约10-500nm。 透射层能够光学滤除入射的辐射，并且光学元件是光栅。

公开(公告)号：US20120074848A1

公开(公告)日：2012-03-29

申请号：US13376223

申请日：2010-06-02

申请人： Xiaoyan Zhu ,  Georg Greuel ,  Levinus Pieter Bakker ,  Cornelis Reinder Ronda ,  Thomas Juestel

发明人： Xiaoyan Zhu ,  Georg Greuel ,  Levinus Pieter Bakker ,  Cornelis Reinder Ronda ,  Thomas Juestel

IPC分类号： H01J7/00 ,  H01J63/04

CPC分类号： H05B41/2813 ,  Y02B20/22

摘要： The present invention provides a method of monitoring performance of a discharge lamp. The discharge lamp includes electrodes and a discharge vessel filled with gas and equipped with a luminescent layer, wherein the gas is intended to emit a first ultraviolet light in a first spectral range when the gas is excited by an electric field produced by the electrodes, and at least part of the first ultraviolet light is intended to be changed into a second ultraviolet light in a second spectral range of longer wavelength than the first spectral range by the luminescent layer. The method comprises the steps of finding the value of a first intensity of the first ultraviolet light; finding the value of a second intensity of the second ultraviolet light; and determining the conversion efficiency of the luminescent layer for converting the first ultraviolet light into the second ultraviolet light on the basis of the ratio of the value of the second intensity to the value of the first intensity.

摘要翻译： 本发明提供一种监视放电灯性能的方法。 放电灯包括电极和填充有气体并具有发光层的放电容器，其中当气体被电极产生的电场激发时，气体旨在在第一光谱范围内发射第一紫外光，以及 第一紫外光的至少一部分旨在通过发光层在比第一光谱范围更长波长的第二光谱范围内变成第二紫外光。 该方法包括以下步骤：找到第一紫外光的第一强度的值; 找到第二紫外光的第二强度的值; 并根据第二强度的值与第一强度的值确定用于将第一紫外光转换成第二紫外光的发光层的转换效率。

公开(公告)号：US08137869B2

公开(公告)日：2012-03-20

申请号：US10936716

申请日：2004-09-09

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G02B27/44 ,  G02B5/18

CPC分类号： G03F7/70958 ,  G03F7/70575 ,  G03F7/70983

摘要： A method for manufacturing and/or protecting an optical element, wherein the optical element has at least one surface comprising a profile having height differences, thereby providing cavities and elevations having a predetermined maximum height difference, includes providing a transmissive layer in the cavities and on the elevations of the optical elements, the transmissive layer having a first height in the cavities that is larger than the predetermined maximum height difference, and surfacing the transmissive layer after providing the transmissive layer such that the transmissive layer has a second height on the elevations that is substantially zero or larger, thereby providing a transmissive layer with a substantially planar surface.

摘要翻译： 一种用于制造和/或保护光学元件的方法，其中所述光学元件具有包括具有高度差的轮廓的至少一个表面，从而提供具有预定最大高度差的空腔和高度，包括在所述空腔中和在所述腔 光学元件的高度，透射层在空腔中具有大于预定最大高度差的第一高度，并且在提供透射层之后，使透射层铺展，使得透射层在高度上具有第二高度， 基本上为零或更大，由此提供具有基本平坦表面的透射层。

公开(公告)号：US20110121665A1

公开(公告)日：2011-05-26

申请号：US13054552

申请日：2009-07-13

申请人： Chenyang Liu ,  Hendrikus Albertus Adrianus Maria de Ruijter ,  Levinus Pieter Bakker

发明人： Chenyang Liu ,  Hendrikus Albertus Adrianus Maria de Ruijter ,  Levinus Pieter Bakker

IPC分类号： H02J9/00

CPC分类号： H02J7/00

摘要： To solve or mitigate the problem of lacking the “last mile” connection to a power grid, the invention provides a power supply apparatus for supplying electric energy to a plurality of devices. The apparatus comprises a power dock (130) configured to electrically couple to a power pack (110), wherein the power pack is configured to store electric energy; and a plurality of connectors each being configured to supply electric energy from the power dock to one of the plurality of devices (132, 134, 136). By utilizing the power pack, particularly a removable super capacitor (112), accessing power becomes easier for those people living away from power grids or suffering from an unstable power supply.

摘要翻译： 为了解决或减轻与电网的“最后一英里”连接缺乏的问题，本发明提供一种用于向多个设备提供电能的电源装置。 该装置包括被配置为电耦合到电源组（110）的功率坞（130），其中所述电源组被配置为存储电能; 以及多个连接器，每个连接器被配置为将电能从功率基座提供给多个设备（132,134,136）中的一个。 通过利用动力组件，特别是可移除的超级电容器（112），对于远离电网或遭受不稳定电源的人来说，接入电力变得更容易。

公开(公告)号：US07868304B2

公开(公告)日：2011-01-11

申请号：US11051477

申请日：2005-02-07

申请人： Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Johannes Hubertus Josephina Moors ,  Carolus Ida Maria Antonius Spee ,  Johannes Christiaan Leonardus Franken ,  Arnoud Cornelis Wassink ,  Paul Peter Anna Antonius Brom

发明人： Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Johannes Hubertus Josephina Moors ,  Carolus Ida Maria Antonius Spee ,  Johannes Christiaan Leonardus Franken ,  Arnoud Cornelis Wassink ,  Paul Peter Anna Antonius Brom

IPC分类号： A61N5/00

CPC分类号： G03F7/70175 ,  G03F7/70916

摘要： A method for removal of deposition on a radiation collector of a lithographic apparatus includes providing a gas barrier to an end of a radiation collector, thereby providing a radiation collector enclosure volume; providing a gas to the enclosure volume, the gas selected from a halogen containing gas and a hydrogen containing gas; and removing at least part of the deposition from the radiation collector. A lithographic apparatus includes a radiation collector; a circumferential hull enclosing the radiation collector; a gas barrier at an end of the radiation collector, thereby providing a radiation collector enclosure volume. The radiation collector is enclosed by the circumferential hull and the gas barrier. An inlet provides a gas to the radiation collector enclosure volume and an outlet removes a gas from the radiation collector enclosure volume.

摘要翻译： 用于去除光刻设备的辐射收集器上的沉积的方法包括向辐射收集器的端部提供气体阻挡层，从而提供辐射收集器外壳体积; 向封闭体积提供气体，所述气体选自含卤素气体和含氢气体; 以及从所述辐射收集器去除所述沉积物的至少一部分。 光刻设备包括辐射收集器; 围绕辐射收集器的周向船体; 在辐射收集器的端部处的气体屏障，从而提供辐射收集器外壳体积。 辐射收集器被周向壳体和气体屏障包围。 入口为辐射收集器外壳体积提供气体，出口从辐射收集器外壳体积中除去气体。

公开(公告)号：US20080309940A1

公开(公告)日：2008-12-18

申请号：US12094698

申请日：2006-11-20

申请人： Martinus Bernardus Van Der Mark ,  Michael Cornelis Van Beek ,  Levinus Pieter Bakker

发明人： Martinus Bernardus Van Der Mark ,  Michael Cornelis Van Beek ,  Levinus Pieter Bakker

IPC分类号： G01N21/00

CPC分类号： G01N21/4795 ,  G01N2021/1787 ,  G01N2021/4766 ,  G01N2021/6439

摘要： The invention relates to a method of imaging an interior of a turbid medium (45) comprising the following steps: accommodation of the turbid medium (45) inside a receiving volume (20); coupling transmission input light (65) from a transmission light source into the receiving volume (12), with said transmission input light (65) being chosen such that it is capable of propagating through the turbid medium (45) and with at least a part of said transmission input light (65) passing through a matching medium (50) in the receiving volume (12), said matching medium (50) being chosen to reduce optical boundary effects at an interface between the turbid medium (45) and its surroundings; detection of transmission output light emanating from the receiving volume as a result of coupling transmission input light (65) from the transmission light source into the receiving volume (12) through use of a transmission photodetector unit. The invention also relates to a system for imaging an interior of a turbid medium (45) and a medical image acquisition system both using the method. According to the invention, the method, system for imaging an interior of a turbid medium (45), and medical image acquisition system are adapted such that data relating to the exterior of the turbid medium (45) can be obtained. This object is realized in that the method further comprises the following additional steps: coupling geometry input light (70, 75, 80) from a geometry light source into the receiving volume (12), with the receiving volume comprising the turbid medium (45), with the receiving volume (12) further comprising a geometry medium (60) for surrounding the turbid medium (45) during coupling of geometry input light (70, 75, 80) into the receiving volume (12), and with the combination of the geometry input light (70, 75, 80), the geometry medium (60), and the interface being chosen for creating a contrast between the turbid medium and its surroundings; —detection of the contrast between the turbid medium (45) and its surroundings; reconstructing an image of an interior of the turbid medium (45) using the detected contrast.