Exposure apparatus and method thereof
    52.
    发明授权
    Exposure apparatus and method thereof 有权
    曝光装置及其方法

    公开(公告)号:US09594307B2

    公开(公告)日:2017-03-14

    申请号:US14226621

    申请日:2014-03-26

    CPC classification number: G03F7/70291 G03F7/70508 G03F7/7055

    Abstract: An exposure apparatus includes a light source, an illuminating member, a projecting member, a stage, an inspecting member, and an information processing member. The light source is configured to provide a light in accordance with a pulse event generation (PEG) representing a period of light radiation. The illuminating member is configured to change the light into point lights. The projecting member is configured to project the point lights according to a photoresist shape extending in various directions. The point lights are projected on the stage. The inspecting member is configured to inspect a photoresist pattern formed by the projected point lights. The information processing member is configured to analyze different photoresist patterns corresponding to different PEGs to select one PEG from the different PEGs. The one PEG being associated with a minimum error in the various directions.

    Abstract translation: 曝光装置包括光源,照明构件,突出构件,台,检查构件和信息处理构件。 光源被配置为根据表示光辐射周期的脉冲事件生成(PEG)提供光。 照明构件被配置为将光改变为点光。 突出构件被配置为根据在各个方向上延伸的光致抗蚀剂形状来投射点光源。 点灯投射在舞台上。 检查构件被配置为检查由投影点光形成的光致抗蚀剂图案。 信息处理构件被配置为分析对应于不同PEG的不同光刻胶图案,以从不同的PEG中选择一个PEG。 一个PEG与各个方向上的最小误差相关联。

    Display device and a method of manufacturing the same
    54.
    发明授权
    Display device and a method of manufacturing the same 有权
    显示装置及其制造方法

    公开(公告)号:US09244302B2

    公开(公告)日:2016-01-26

    申请号:US14036961

    申请日:2013-09-25

    CPC classification number: G02F1/133377 G02F1/134363 G02F2001/133302

    Abstract: The present invention relates to a display device and a method of manufacturing the display device. The display device according to an exemplary embodiment of the present invention includes a substrate. A pixel electrode is formed on the substrate. A roof layer is formed on the pixel electrode. A first micro-cavity and a second micro-cavity are disposed between the pixel electrode and the roof layer. A liquid crystal fills the first and second micro-cavities. The first and second micro-cavities are connected to each other by a path. The path penetrates the roof layer.

    Abstract translation: 本发明涉及一种显示装置及其制造方法。 根据本发明的示例性实施例的显示装置包括基板。 在基板上形成像素电极。 在像素电极上形成屋顶层。 第一微腔和第二微腔设置在像素电极和屋顶层之间。 液晶填充第一和第二微腔。 第一和第二微腔通过路径相互连接。 路径穿透屋顶层。

    LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF
    55.
    发明申请
    LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF 有权
    液晶显示及其制造方法

    公开(公告)号:US20150200214A1

    公开(公告)日:2015-07-16

    申请号:US14490355

    申请日:2014-09-18

    Abstract: A method of manufacturing a liquid crystal display includes: forming a sacrificial layer by stacking a non-photosensitive resin; initiating formation of an etch stop layer on the sacrificial layer; forming a photoresist pattern; completing the etch stop layer using the photoresist pattern; ashing the photoresist pattern and the sacrificial layer by using the completed etch stop layer as a mask; forming a microcavity by removing the sacrificial layer; and forming a liquid crystal layer in the microcavity. The horizontal area occupied by the sacrificial layer is reduced by forming the common electrode or the etch stop layer at an upper side, thereby increasing the aperture ratio. Further, the vertical electric field is generated without distortion by horizontally forming the common electrode on the sacrificial layer and forming no common electrode on the sidewall thereof.

    Abstract translation: 一种制造液晶显示器的方法包括:通过堆叠非感光树脂形成牺牲层; 在所述牺牲层上引发蚀刻停止层的形成; 形成光致抗蚀剂图案; 使用光致抗蚀剂图案完成蚀刻停止层; 通过使用完成的蚀刻停止层作为掩模来灰化光致抗蚀剂图案和牺牲层; 通过去除牺牲层形成微腔; 并在微腔中形成液晶层。 通过在上侧形成公共电极或蚀刻停止层来减小由牺牲层占据的水平面积,从而增加开口率。 此外,垂直电场通过在牺牲层上水平形成公共电极而在其侧壁上不形成公共电极而产生失真。

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