公开(公告)号：US20170237409A1

公开(公告)日：2017-08-17

申请号：US15274359

申请日：2016-09-23

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Won HAN ,  Moon Chul LEE ,  Jae Chang LEE ,  Sang Uk SON ,  Tae Hun LEE

IPC: H03H9/17 ,  H01L41/047 ,  H01L41/053 ,  H03H9/54

CPC classification number: H03H9/17 ,  H01L41/047 ,  H01L41/053 ,  H03H9/13 ,  H03H9/173 ,  H03H9/54

Abstract: An acoustic resonator includes: a substrate; a resonance part mounted on the substrate and including resonance part electrodes, the resonance part being configured to generate acoustic waves; a cavity disposed between the resonance part and the substrate; a frame part disposed on at least one electrode among the resonance part electrodes, and being configured to reflect the acoustic waves; and a connection electrode configured to connect the at least one electrode to an external electrode, and having a thickness less than a thickness of the at least one electrode.

公开(公告)号：US20160301380A1

公开(公告)日：2016-10-13

申请号：US15007725

申请日：2016-01-27

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Moon Chul LEE ,  Yeong Gyu LEE ,  Chul Soo KIM ,  Jea Shik SHIN ,  Duck Hwan KIM ,  Sang Uk SON

IPC: H03H9/54 ,  H03H9/17 ,  H03H9/02

CPC classification number: H03H9/02133 ,  H03H9/173 ,  H03H9/587 ,  H03H9/605

Abstract: A bulk acoustic wave resonator including a substrate; an air cavity formed on the substrate; and a resonating part formed on the air cavity and comprising a first electrode, a piezoelectric layer, and a second electrode which are sequentially laminated, wherein a cross section of the air cavity has a short side, a long side opposing the short side, a first lateral side and a second lateral side connecting the short side and the long side to each other, the first and second lateral sides are inclined, and a surface roughness of the first electrode, the piezoelectric layer, the second electrode, or any combination thereof is between 1 nm and 100 nm.

Abstract translation: 一种包括衬底的体声波谐振器; 形成在基板上的空气腔; 以及谐振部，其形成在所述空气腔上并且包括依次层叠的第一电极，压电层和第二电极，其中所述空气腔的横截面具有短边，与所述短边相对的长边， 第一侧面和第二侧面将短边和长边彼此连接，第一和第二横向侧倾斜，并且第一电极，压电层，第二电极或其任何组合的表面粗糙度 在1nm和100nm之间。