摘要:
To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.
摘要:
A thin film pattern substrate, including an area provided to the substrate to form a recess and including a wider section and a linear section connected to the wider section, wherein the wider section having a width greater than the width of the linear section, and a thin film pattern provided on the area, wherein a mean diameter of the wider section is set to be no greater than double the width of the linear section.
摘要:
An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piezoelectric elements is exhibited while sealing the space hermetically.
摘要:
An ink jet recording head includes at least a row of nozzle aperture; a passage formed substrate having partitions forming at least a row of pressure generating chambers, each communicating the respective nozzle aperture; a diaphragm forming a part of the pressure generating chambers and at least an upper surface of which serves as a lower electrode; a piezoelectric vibrator including, a piezoelectric active part having a piezoelectric layer formed on the surface of the diaphragm, and an upper electrode formed on the surface of said piezoelectric layer and formed in an area opposite to said pressure generating chamber; and a backing member joined to the side of the piezoelectric layer and having partitioning walls forming a concave portion being space to extent that a movement of the piezoelectric active part is not prevented, and fixed to the passage formed substrate such that each partitioning wall is opposite to the partition of the passage formed substrate.
摘要:
In an ink-jet type recording head including a nozzle plate provided with nozzle openings, a spacer provided with partitions for partitioning pressure generating chambers, ink supply ports and reservoirs, and a plate member sandwiched and fixed together. Displacement of the plate member is produced by piezoelectric vibrators to thereby generate ink droplets. The spacer is formed by anisotropic etching of a silicon single crystal substrate so that the pressure generating chambers, the ink supply ports and the reservoirs are formed as through-holes communicated with each other. Accordingly, etching conditions for the respective through-holes are made equal to each other. In different embodiments, the spacer includes chamfered portions or a plurality of fine planes and steps along which adhesive spreads during assembly of the head. In a further embodiment, the spacer includes different length partitions are between the pressure generating chambers.
摘要:
An ink jet printer head includes a spacer including pressure generating chambers continuous to nozzle openings, ink supply paths, and reservoirs, a cover member for covering the pressure generating chambers in a sealing fashion, and pressure generating means for generating pressure in the pressure generating chambers in accordance with print data. In processing a silicon single-crystal substrate vertically oriented in (110) by anisotropic etching process, one of the walls of a path hole for forming a pressure generating chamber is aligned with one of the walls of a path hole for forming a reservoir. Walls defining the path hole for forming a pressure generating chamber, which are located in the vicinity of a nozzle opening, are connected to each other at an obtuse angle. As a result, the ink supply path serving as a narrow path for ink flow and the pressure generating chamber are formed as smooth flow paths. The walls in an area in the vicinity of the nozzle opening where ink tends to stay are substantially equally distanced from the nozzle opening. A smooth flow of ink is ensured.
摘要:
A droplet discharging head includes a first drive unit and a base coupled to the first drive unit. The base includes a portion defining a first cavity, a portion defining a first discharging port, and a portion defining a first through hole through which the portion defining a first cavity and the portion defining a first discharging port communicate with each other. The droplet discharging head also includes a plurality of first electrode branches and a plurality of second electrode branches. The plurality of first electrode branches and the plurality of second electrode branches are disposed alternately apart from each other on a periphery of the portion defining a first discharging port, and extend on a surface of the portion defining a first through hole.
摘要:
To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.
摘要:
A method of manufacturing an active matrix substrate includes forming wiring lines each having a matrix pattern on a substrate such that a wiring line extending in any one of a first direction and a second direction is separated from another wiring line at an intersection; forming a laminated portion composed of an insulating layer and a semiconductor layer on a portion of the wiring line and the intersection; and forming a conductive layer electrically connecting the separated wiring line, and a pixel electrode electrically connected to the wiring line via the semiconductor layer on the laminated portion.
摘要:
A thin film pattern substrate on which a thin film pattern is formed by placing a functional liquid on the substrate, the thin film pattern includes a first domain area into which the functional liquid is infused and a second domain area on which the functional liquid infused into the first domain area flows, wherein the first domain area includes a plurality of linear patterns the width of which is narrower than the width of the first domain area, and the linear patterns forming the second domain area are connected to at least one of the plural linear patterns that constitute the first domain area.