公开(公告)号：US20060203041A1

公开(公告)日：2006-09-14

申请号：US11430893

申请日：2006-05-10

申请人： Masato Shimada ,  Shinri Sakai ,  Shiro Yazaki

发明人： Masato Shimada ,  Shinri Sakai ,  Shiro Yazaki

IPC分类号： B41J2/045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2002/14387 ,  B41J2002/14491

摘要： To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.

摘要翻译： 提供具有减小的隔膜的初始偏转量的喷墨记录头和包括喷墨记录头的喷墨记录器。 一种喷墨记录头，其具有流路形成基板10，其中形成有与喷嘴开口连通的压力产生室12，并且压电元件通过隔膜放置在流路形成基板10的一侧上，并具有至少一个下电极 60，压电层70和上电极80，其特征在于，与压电层70一起沉积的层中的至少一层是具有压缩应力的压缩膜50，压缩膜50具有至少一部分厚度 方向在与压力产生室相对的区域的至少一部分中移除，由此整个膜的应力减小。

公开(公告)号：US06231169B1

公开(公告)日：2001-05-15

申请号：US09069992

申请日：1998-04-30

申请人： Shiro Yazaki ,  Shinri Sakai

发明人： Shiro Yazaki ,  Shinri Sakai

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2002/14387

摘要： An ink jet recording head includes at least a row of nozzle aperture; a passage formed substrate having partitions forming at least a row of pressure generating chambers, each communicating the respective nozzle aperture; a diaphragm forming a part of the pressure generating chambers and at least an upper surface of which serves as a lower electrode; a piezoelectric vibrator including, a piezoelectric active part having a piezoelectric layer formed on the surface of the diaphragm, and an upper electrode formed on the surface of said piezoelectric layer and formed in an area opposite to said pressure generating chamber; and a backing member joined to the side of the piezoelectric layer and having partitioning walls forming a concave portion being space to extent that a movement of the piezoelectric active part is not prevented, and fixed to the passage formed substrate such that each partitioning wall is opposite to the partition of the passage formed substrate.

摘要翻译： 喷墨记录头包括至少一排喷嘴孔; 通道形成的基板具有形成至少一排压力产生室的隔板，每个压力产生室连通相应的喷嘴孔; 形成压力发生室的一部分并且其至少上表面用作下电极的隔膜; 一种压电振动器，包括：具有形成在所述隔膜表面上的压电层的压电有源部分和形成在所述压电层的表面上并形成在与所述压力发生室相对的区域中的上电极; 以及与所述压电体层侧接合并具有形成凹部的分隔壁的背衬构件，所述隔壁形成为空间，所述隔壁的尺寸使得所述压电有源部的移动不被阻止，并且固定到所述通道形成的基板，使得每个分隔壁相对 到通道形成的基底的分隔。

公开(公告)号：US07651201B2

公开(公告)日：2010-01-26

申请号：US11430893

申请日：2006-05-10

申请人： Masato Shimada ,  Shinri Sakai ,  Shiro Yazaki

发明人： Masato Shimada ,  Shinri Sakai ,  Shiro Yazaki

IPC分类号： B41J2/045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2002/14387 ,  B41J2002/14491

摘要： To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.

摘要翻译： 提供具有减小的隔膜的初始偏转量的喷墨记录头和包括喷墨记录头的喷墨记录器。 一种喷墨记录头，其具有流路形成基板10，其中形成有与喷嘴开口连通的压力产生室12，并且压电元件通过隔膜放置在流路形成基板10的一侧上，并具有至少一个下电极 60，压电层70和上电极80，其特征在于，与压电层70一起沉积的层中的至少一层是具有压缩应力的压缩膜50，压缩膜50具有至少一部分厚度 方向在与压力产生室相对的区域的至少一部分中移除，由此整个膜的应力减小。

公开(公告)号：US06332672B1

公开(公告)日：2001-12-25

申请号：US09069991

申请日：1998-04-30

申请人： Shiro Yazaki ,  Shinri Sakai ,  Tsutomu Nishiwaki

发明人： Shiro Yazaki ,  Shinri Sakai ,  Tsutomu Nishiwaki

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2002/14387

摘要： An ink jet recording head comprises: a passage form substrate having, a diaphragm forming a part of a pressure generating chamber communicating with a nozzle aperture and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member.

摘要翻译： 一种喷墨记录头，包括：通道形式基板，具有形成与喷嘴孔连通并且至少其上表面用作下电极的压力发生室的一部分的隔膜，以及包括压电材料的压电振动器 形成在所述隔膜的表面上的上层电极，形成在所述压电体层的表面上的上电极和与所述压力发生室相反的区域形成的压电有源部; 确保在没有防止移动的空间的状态下连接到通道形成基板的压电材料层侧的密封空间的盖构件; 以及用于吸收盖构件的空间中的压力变化的柔性部分。

公开(公告)号：US08057018B2

公开(公告)日：2011-11-15

申请号：US12391910

申请日：2009-02-24

申请人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

发明人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045 ,  H04R17/00

CPC分类号： B41J2/164 ,  B41J2/04 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

摘要翻译： 制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜 所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜 在通道形成基板上并将上电极膜图案化成预定图案。

公开(公告)号：US20090219345A1

公开(公告)日：2009-09-03

申请号：US12391910

申请日：2009-02-24

申请人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

发明人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045 ,  H01L41/24

CPC分类号： B41J2/164 ,  B41J2/04 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

摘要翻译： 制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜 所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜 在通道形成基板上并将上电极膜图案化成预定图案。

公开(公告)号：US06682178B2

公开(公告)日：2004-01-27

申请号：US10076348

申请日：2002-02-19

申请人： Shiro Yazaki

发明人： Shiro Yazaki

IPC分类号： B41J245

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/11

摘要： An ink-jet recording head includes a passage-forming substrate and a plurality of piezoelectric elements provided on one side of the passage-forming substrate via an vibration plate, the passage-forming substrate having a plurality of pressure generating chambers formed therein in such a manner as to communicate with corresponding nozzle orifices and as to be separated from one another by means of a plurality of compartment walls, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric layer, and an upper electrode. The vibration plate undergoes tensile stress; the number n of the pressure generating chambers arranged per inch is more than 200 and is related to width w of the pressure generating chamber and thickness d of the compartment wall as represented by (w+d)=1 inch/n; and the thickness d of the compartment wall is more than 10 &mgr;m and is related to thickness h of the passage-forming substrate as represented by (d×3)≦h≦(d×6). Thus, the rigidity of the compartment walls is maintained.

摘要翻译： 喷墨记录头包括通道形成基板和经由振动板设置在通道形成基板的一侧上的多个压电元件，所述通道形成基板具有形成在其中的多个压力发生室 与相应的喷嘴孔连通并且通过多个隔室壁彼此分离的方式，所述多个压电元件各自包括下电极，压电层和上电极。 振动板经受拉伸应力; 每英寸布置的压力发生室的数量n大于200，与（w + d）= 1英寸/ n表示的压力发生室的宽度w和隔室壁的厚度d有关; 隔室壁的厚度d大于10um，与（dx3）<= h <=（dx6）所示的通道形成基板的厚度h有关。 因此，保持隔室壁的刚度。

公开(公告)号：US5984459A

公开(公告)日：1999-11-16

申请号：US144459

申请日：1998-09-01

申请人： Tetsushi Takahashi ,  Yoshinao Miyata ,  Shiro Yazaki

发明人： Tetsushi Takahashi ,  Yoshinao Miyata ,  Shiro Yazaki

IPC分类号： B41J2/14 ,  B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14387 ,  B41J2002/14491 ,  B41J2202/11

摘要： An ink-jet printing head and an ink-jet printing apparatus using the same, the ink-jet head comprising a piezoelectric element, a vibrating plate constituting a part of a pressure generating chamber communicating with a nozzle aperture, a lower electrode, a piezoelectric layer, and an upper electrode, wherein said vibrating plate in an area opposite to the vicinity of at least one end in the longitudinal direction of a piezoelectric active part which is an area in which said piezoelectric layer substantially drives said vibrating plate is convex on the reverse side to said piezoelectric element.

摘要翻译： 喷墨打印头和使用其的喷墨打印装置，喷墨头包括压电元件，构成与喷嘴孔连通的压力产生室的一部分的振动板，下电极，压电 层和上电极，其中所述振动板在与所述压电层基本上驱动所述振动板的区域中的压电有源部分的纵向方向上的至少一端附近相反的区域中是凸起的 与所述压电元件相反。

公开(公告)号：US20110234710A1

公开(公告)日：2011-09-29

申请号：US13071435

申请日：2011-03-24

申请人： Seiichi Fujita ,  Shiro Yazaki

发明人： Seiichi Fujita ,  Shiro Yazaki

IPC分类号： B41J2/045 ,  H01L41/22

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  Y10T29/42

摘要： There is provided a liquid ejecting head in which a surface layer of a vibration plate at the side of a flow path formation substrate is formed by an insulating film made of zirconium oxide and a protection film made of a material which is resistant to liquid is provided on a surface of the flow path formation substrate so as to cover wall surfaces of liquid flow paths.

摘要翻译： 提供了一种液体喷射头，其中通过由氧化锆制成的绝缘膜形成在流路形成基板一侧的振动板的表面层，并且提供由耐液体的材料制成的保护膜 在流路形成基板的表面上，以覆盖液流路径的壁面。

公开(公告)号：US07252354B2

公开(公告)日：2007-08-07

申请号：US10488747

申请日：2002-09-11

申请人： Maki Ito ,  Masami Murai ,  Shiro Yazaki

发明人： Maki Ito ,  Masami Murai ,  Shiro Yazaki

IPC分类号： B41J29/38 ,  B41J2/045

CPC分类号： B41J2/04581 ,  B41J2/04588 ,  B41J2/04593

摘要： A liquid-ejecting apparatus according to which targeted good characteristics can be obtained, and moreover the scope for material selection can be broadened is provided. The liquid-ejecting apparatus contracts a pressure chamber and thus ejects liquid through application of voltage to a piezoelectric body, and is such that the driving waveform applied to the piezoelectric body during the liquid ejecting operation comprises a high potential period (a2) in which a voltage exhibiting an electric field strength exceeding the coercive electric field of the piezoelectric body is applied, and a reverse potential period (a6) in which a voltage such that the potential becomes of the opposite polarity to the polarity in the high potential period or the potential becomes zero is applied.

摘要翻译： 可以获得目标良好特性的液体喷射装置，并且还可以扩大材料选择的范围。 液体喷射装置使压力室收缩，从而通过向压电体施加电压喷射液体，并且使得在液体喷射操作期间施加到压电体的驱动波形包括高电位周期（a 2），其中 施加表现出超过压电体的矫顽电场的电场强度的电压，和施加使电位成为与高电位期间极性相反极性的电压的反向电势周期（a 6），或 电位变为零。