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65 条记录 (耗时 0.029 秒)

    Micro-actuation element provided with torsion bars
    52.
    发明申请
    Micro-actuation element provided with torsion bars 有权
    配有扭杆的微动元件

    公开(公告)号：US20080285108A1

    公开(公告)日：2008-11-20

    申请号：US11987899

    申请日：2007-12-05

    申请人： Osamu Tsuboi ,  Yoshihiro Mizuno ,  Satoshi Ueda ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Hiromitsu Soneda ,  Norinao Kouma

    发明人： Osamu Tsuboi ,  Yoshihiro Mizuno ,  Satoshi Ueda ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Hiromitsu Soneda ,  Norinao Kouma

    IPC分类号： G02B26/08 ,  H02N1/00

    CPC分类号： G02B26/0841 ,  G02B26/085 ,  H02N1/008

    摘要： The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.

    摘要翻译： 微致动元件（X 1）包括可移动单元（111），框架（112）和用于连接它们的耦合器（113），其中单元，框架和耦合器一体形成在具有 由导电层（110a-110c），例如芯导电层（110b）和介于导电层（110a-110c）之间的绝缘层（110d，110e））组成的多层结构， 。 可移动单元（111）包括源于芯导电层（110b）的第一结构。 框架（112）包括源于芯导电层（110b）的第二结构。 耦合器（113）包括多个电分离的扭力杆（113a，113b），其产生在芯导电层（110b）中并连续地连接到第一结构和第二结构。

    Micromirror unit and method of making the same
    54.
    发明授权
    Micromirror unit and method of making the same 有权
    微镜单元及其制作方法

    公开(公告)号：US06887396B2

    公开(公告)日：2005-05-03

    申请号：US09950710

    申请日：2001-09-13

    申请人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Fumio Yamagishi

    发明人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Fumio Yamagishi

    IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G11B7/09 ,  C03C15/00

    CPC分类号： B81C1/00142 ,  B81B3/0078 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00396 ,  G02B26/0841 ,  Y10S359/904

    摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.

    摘要翻译： 提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。 该方法包括以下步骤。 首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。 然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。 然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。 然后，选择性地去除第二掩模图案。 然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。 最后，删除第一个掩模图案。

    Method of fabricating diffraction grating and diffraction grating
    57.
    发明授权
    Method of fabricating diffraction grating and diffraction grating 失效
    衍射光栅和衍射光栅的制作方法

    公开(公告)号：US06723474B2

    公开(公告)日：2004-04-20

    申请号：US09795442

    申请日：2001-03-01

    申请人： Junji Tomita ,  Fumio Yamagishi

    发明人： Junji Tomita ,  Fumio Yamagishi

    IPC分类号： G03F900

    CPC分类号： G03F7/201 ,  G02B5/1857 ,  G03F7/0005

    摘要： A method of fabricating a diffraction grating by utilizing a single substrate comprises the steps of forming a photosensitive material layer and a light transmission reducing film having a predetermined pattern integrally with each other on the substrate, exposing the photosensitive material layer by exposure irradiation light via the light transmission reducing film, and developing the photosensitive material layer after exposure. It is composed so that the direction of exposure and the direction of development are opposite to each other. It is possible to fabricate a diffraction grating in which each grating is formed on a predetermined substrate at a predetermined pitch and a root portion in a cross-section of each diffraction grating is constricted. In this way, it is possible to reduce or eliminate interfaces, so that the generation of noise light can be effectively suppressed and a diffraction grating having a high diffraction efficiency can be made.

    摘要翻译： 通过利用单个基板制造衍射光栅的方法包括以下步骤：在基板上形成具有预定图案的感光材料层和相互一体的透光率降低膜，通过曝光照射光将光敏材料层经由 透光降低膜，曝光后显影感光材料层。 它的组成是使曝光方向和发展方向彼此相反。 可以制造衍射光栅，其中每个光栅以预定间距形成在预定基板上，并且每个衍射光栅的横截面中的根部被收缩。 以这种方式，可以减少或消除界面，从而可以有效地抑制噪声光的产生，并且可以制造具有高衍射效率的衍射光栅。

    Optical scanner using planar reflection holograms
    58.
    发明授权
    Optical scanner using planar reflection holograms 失效
    光学扫描仪采用平面反射全息图

    公开(公告)号：US5245170A

    公开(公告)日：1993-09-14

    申请号：US978509

    申请日：1992-11-18

    申请人： Hirokazu Aritake ,  Toshiyuki Ichikawa ,  Kozo Yamazaki ,  Fumio Yamagishi ,  Hiroyuki Ikeda

    发明人： Hirokazu Aritake ,  Toshiyuki Ichikawa ,  Kozo Yamazaki ,  Fumio Yamagishi ,  Hiroyuki Ikeda

    IPC分类号： G06K7/10

    CPC分类号： G06K7/10871 ,  G06K7/10663 ,  G06K7/10693

    摘要： An optical scanner suitable for use with a bar code reader includes a light source for generating a laser beam, a laser beam scanning device, a scanning pattern generating optical system, and a signal light condensing optical system for deflecting scattered signal light scattered by an object to be read to introduce the light to a photo-detector. The scanning pattern generating optical system or signal light condensing optical system includes strips of planar reflective holograms disposed substantially in parallel with each other in one plane to produce a reflection beam having an angle of reflection which is different from an angle of incidence of the laser beam thereon. Another embodiment discloses a condenser integrated with one of plane mirrors for deflecting the scan beam to form a hologram module of the reflection type. The scanner is a miniaturized apparatus as a result of the reflection holograms.

    摘要翻译： 适用于条形码读取器的光学扫描器包括用于产生激光束的光源，激光束扫描装置，扫描图形生成光学系统和用于偏转由物体散射的散射信号光的信号聚光光学系统 被读取以将光引入光电检测器。 扫描图形生成光学系统或信号聚光光学系统包括在一个平面中基本上彼此平行设置的平面反射全息图条，以产生具有不同于激光束的入射角的反射角的反射光束 上。 另一实施例公开了一种与平面镜之一集成的电容器，用于偏转扫描光束以形成反射型全息图模块。 扫描仪是作为反射全息图的结果的小型化装置。

    Method for detecting tracking error in optical disk system and its optical system devices thereof
    59.
    发明授权
    Method for detecting tracking error in optical disk system and its optical system devices thereof 失效
    光盘系统跟踪误差检测方法及其光学系统装置

    公开(公告)号：US5224082A

    公开(公告)日：1993-06-29

    申请号：US830753

    申请日：1992-02-06

    申请人： Kaneyuki Kurokawa ,  Masayuki Kato ,  Satoshi Maeda ,  Fumio Yamagishi ,  Hiroyuki Ikeda

    发明人： Kaneyuki Kurokawa ,  Masayuki Kato ,  Satoshi Maeda ,  Fumio Yamagishi ,  Hiroyuki Ikeda

    IPC分类号： G11B7/09

    CPC分类号： G11B7/09

    摘要： A method for detecting a tracking error in a process of tracking a groove track on a recording medium includes the steps of: irradiating a first light spot onto a groove track on a recording medium as a focused light beam for carrying out recording, reproducing, or erasing of information on the groove track of the recording medium; and irradiating a second and a third light spots onto an area around the groove track on the recording medium as focused light beams simultaneously with the irradiation of the first light spot, the second and third light spots are irradiated onto an area around the groove track on one side of the first light spot in a manner such that each of the second and third light spots covers both an inside and outside of the groove track.

    摘要翻译： 一种用于在跟踪记录介质上的凹槽轨道的过程中检测跟踪误差的方法包括以下步骤：将第一光斑照射到作为聚焦光束的记录介质上的凹槽轨道上，以执行记录，再现或 擦除记录介质凹槽轨迹上的信息; 并且将第二和第三光点照射到作为聚焦光束的记录介质上的凹槽轨道周围的区域上，同时照射第一光点，将第二和第三光斑照射到凹槽轨道周围的区域上 第一光点的一侧以使得第二和第三光斑中的每一个都覆盖凹槽轨道的内部和外部的方式。