公开(公告)号：US07372047B2

公开(公告)日：2008-05-13

申请号：US11038478

申请日：2005-01-21

Applicant: Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

Inventor： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

IPC: G21K5/00

CPC classification number: H01J37/28 ,  H01J2237/2826

Abstract: A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

Abstract translation: 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。

公开(公告)号：US07366620B2

公开(公告)日：2008-04-29

申请号：US11185852

申请日：2005-07-21

Applicant: Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: G01B19/00 ,  G06F19/00

CPC classification number: G01B15/08 ,  G01N23/2251 ,  G03F7/70625 ,  H01J2237/223 ,  H01J2237/2817

Abstract: Equipment extracts components of spatial frequency that need to be evaluated in manufacturing a device or in analyzing a material or process out of edge roughness on fine line patterns and displays them as indexes. The equipment acquires data of edge roughness over a sufficiently long area, integrates a components corresponding to a spatial frequency region being set on a power spectrum by the operator, and displays them on a length measuring SEM. Alternatively, the equipment divides the edge roughness data of the sufficiently long area, computes long-period roughness and short-period roughness that correspond to an arbitrary inspection area by performing statistical processing and fitting based on theoretical calculation, and displays them on the length measuring SEM.

公开(公告)号：US20060188216A1

公开(公告)日：2006-08-24

申请号：US11357020

申请日：2006-02-21

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: H04N5/91

CPC classification number: H04N5/76 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2487 ,  H01J2237/2817 ,  H04N5/772 ,  H04N5/775 ,  H04N5/781 ,  H04N5/907 ,  H04N9/8205

Abstract: It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image Im(t2) obtained by retroceding from a sample image Im(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.

Abstract translation: 在扫描电子显微镜中便于执行再现测试的劳动，对执行自动观察过程所引起的问题进行基本分析，并确认导致错误的细节。 扫描电子显微镜从检测到异常的误差时，提取通过从存储有与出现错误的时间te相关联的样本图像Im（te）所取得的样本图像Im（t 2） 例如由输入输出装置预先设定和登记的总记录时间段t 2），从被记录装置中存储的样本图像中被重写，并将得到的样本图像存储在另一个记录装置中。

公开(公告)号：US20050109937A1

公开(公告)日：2005-05-26

申请号：US10933342

申请日：2004-09-03

Applicant: Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: H01L21/66 ,  G01N23/04 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q30/04 ,  G21K7/00 ,  H01J37/22 ,  H01J37/28 ,  G01N23/00

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。 为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔 构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

公开(公告)号：US06803573B2

公开(公告)日：2004-10-12

申请号：US10615864

申请日：2003-07-10

Applicant: Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: H01J3728

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。 为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔 构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

公开(公告)号：US06627888B2

公开(公告)日：2003-09-30

申请号：US09792721

申请日：2001-02-23

Applicant: Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: H01J3728

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少检查定位或输入操作的过程的扫描电子显微镜，从而以高精度高功能运行。为了实现上述目的，本发明提供一种扫描电子显微镜，其具有 用于基于预先登记的图案来识别期望位置的功能，其包括用于设置关于图案种类的信息的装置，构成图案的多个部分之间的间隔和构成图案的部分的尺寸的装置，以及用于 基于由相关装置获得的信息，形成由多个部分组成的图案图像。

公开(公告)号：US5966806A

公开(公告)日：1999-10-19

申请号：US871938

申请日：1997-06-10

Applicant: Tatsuya Maeda ,  Chiaki Hatano

Inventor： Tatsuya Maeda ,  Chiaki Hatano

IPC: G01R31/04 ,  H01R43/048 ,  H01R43/04

CPC classification number: B30B15/148 ,  H01R43/0486 ,  H01R43/0488 ,  Y10T29/49174 ,  Y10T29/49181 ,  Y10T29/49185

Abstract: A terminal crimping device is composed of an elevating crimper for crimping terminals onto the exposed conductors of cables and an anvil positioned opposite said crimper. The crimper is caused to ascend and descend by means of drive means including a servo motor. The controlling of the terminal crimping operation is done by monitoring the height of the crimper at the time of terminal crimping and the load applied to said drive means and comparing a detected load to the height with the preset reference data to determine whether the terminal crimping performance is good or not. Thus, a reliable determination whether the terminal crimping performance is good or not is performed.

Abstract translation: 端子压接装置由用于将端子压接到暴露的电缆导体上的升降压接器和与所述压接器相对定位的砧座组成。 通过包括伺服电机的驱动装置使卷边机上升和下降。 端子压接操作的控制是通过在端子压接时监测压接器的高度和施加到所述驱动装置的负载并将检测到的负载与高度与预设的参考数据进行比较来确定端子压接性能 是否好。 因此，可以确定端子压接性能是否良好。

公开(公告)号：US5512747A

公开(公告)日：1996-04-30

申请号：US355927

申请日：1994-12-14

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: H01J37/22 ,  H01J37/141 ,  H01J37/21

CPC classification number: H01J37/21 ,  H01J2237/216

Abstract: An auto focusing apparatus of a scanning electron microscope includes an auto focusing mechanism which calculates a focus evaluation value, using an electron signal or picture signal generated from a specimen when the specimen is scanned by an electron beam focused by an objective lens, and controls an exciting current of the objective lens according to said focus evaluation value. A focus correction value register and a focus correction mechanism for correcting the focused position determined by the aforementioned auto focusing mechanism by as much as the correction value registered in the focus correction value register are provided.

Abstract translation: 扫描型电子显微镜的自动聚焦装置包括：自动对焦机构，其利用由被物体聚焦的电子束扫描样本时使用从样本产生的电子信号或图像信号来计算聚焦评价值，并且控制 根据所述焦点评估值，物镜的激励电流。 提供了一种聚焦校正值寄存器和用于将由上述自动对焦机构确定的聚焦位置校正与登记在聚焦校正值寄存器中的校正值一样多的聚焦校正机构。

公开(公告)号：US5404634A

公开(公告)日：1995-04-11

申请号：US235329

申请日：1994-04-29

Applicant: Kazutoshi Takeshita ,  Tatsuya Maeda ,  Masahiro Oishi ,  Hideyuki Kaneda ,  Yoshio Shimizu ,  Osamu Murata

Inventor： Kazutoshi Takeshita ,  Tatsuya Maeda ,  Masahiro Oishi ,  Hideyuki Kaneda ,  Yoshio Shimizu ,  Osamu Murata

IPC: H01R43/055 ,  H01R43/00

CPC classification number: H01R43/055 ,  Y10T29/49771 ,  Y10T29/514 ,  Y10T29/5142 ,  Y10T29/5193 ,  Y10T29/53243

Abstract: In an apparatus that prepares wires necessary for electric wiring by measuring and cutting a length of a wire fed from a wire paying-out device, conveying the cut length of wire in a direction perpendicular to the axial direction of the paid-out wire, stripping wire end portions, and pressing an electrical connector by a connector pressing device, the present invention provides a configuration in which the apparatus can selectively comprise a connector pressing unit composed of a connector pressing device and a pedestal for supporting it on a platform next to the location of the above stripping device, whereby it will facilitate production on many-kinds-and-small-amounts basis as it needs no programming time or adjustment for the replacement of lots.

Abstract translation: 在通过测量和切割从放线装置供给的丝线的长度来准备电线所必需的电线的装置中，沿着与被放电线的轴向垂直的方向输送电线的切割长度，剥离 电线端部，通过连接器按压装置按压电连接器，本发明提供一种结构，其中该装置可选择性地包括由连接器按压装置和底座构成的连接器按压单元，用于将其支撑在邻近 上述剥离装置的位置，由于它不需要编程时间或更换批次的调整，因此可以在许多种类的基础上促进生产。