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    Charged particle system and a method for measuring image magnification
    1.
    发明授权
    Charged particle system and a method for measuring image magnification 有权
    带电粒子系统和测量图像放大倍数的方法

    公开(公告)号：US07372047B2

    公开(公告)日：2008-05-13

    申请号：US11038478

    申请日：2005-01-21

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    IPC分类号： G21K5/00

    CPC分类号： H01J37/28 ,  H01J2237/2826

    摘要： A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

    摘要翻译： 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。

    Charged particle system and a method for measuring image magnification
    2.
    发明申请
    Charged particle system and a method for measuring image magnification 有权
    带电粒子系统和测量图像放大倍数的方法

    公开(公告)号：US20050189501A1

    公开(公告)日：2005-09-01

    申请号：US11038478

    申请日：2005-01-21

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    IPC分类号： G21K5/00 ,  G03F7/20 ,  G21K5/04 ,  H01J37/08 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28 ,  H01L21/027 ,  H01L21/66

    CPC分类号： H01J37/28 ,  H01J2237/2826

    摘要： A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

    摘要翻译： 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。

    CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY
    7.
    发明申请
    CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY 有权
    充电颗粒光束设备和充电颗粒显微镜

    公开(公告)号：US20090084955A1

    公开(公告)日：2009-04-02

    申请号：US12234096

    申请日：2008-09-19

    申请人： Hiromi Inada ,  Mitsugu Sato ,  Atsushi Takane

    发明人： Hiromi Inada ,  Mitsugu Sato ,  Atsushi Takane

    IPC分类号： G01N23/00

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/223 ,  H01J2237/2826 ,  H01J2237/3045

    摘要： On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermined amount by a beam deflector in an image in which a specimen image is captured at a first magnification calibrated by using a specimen enlarged image of a specimen as a magnification standard, and also a displacement of the field of view before and after a deflection of the charged particle beam, extracted from a second specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by the predetermined amount by the beam deflector in an image in which a specimen image is captured at a second magnification, the second magnification is calibrated.

    摘要翻译： 基于从包括通过使带电粒子束偏转预定量而记录的视野的位移的第一标本图像提取的带电粒子束的偏转之前和之后的视场位移的基础上， 通过在通过使用样本的样本放大图像作为放大标准校准的第一倍率捕获样本图像的图像中的光束偏转器，以及在充电的偏转之前和之后的视场位移 从第二标本图像中提取出的粒子束，包括通过使带电粒子束在第二放大倍数下拍摄样本图像的图像中的光束偏转器偏转预定量而记录的视野的位移， 校准第二放大倍数。

    Charged particle beam equipment and charged particle microscopy
    8.
    发明授权
    Charged particle beam equipment and charged particle microscopy 有权
    带电粒子束设备和带电粒子显微镜

    公开(公告)号：US07435957B2

    公开(公告)日：2008-10-14

    申请号：US11302323

    申请日：2005-12-14

    申请人： Hiromi Inada ,  Mitsugu Sato ,  Atsushi Takane

    发明人： Hiromi Inada ,  Mitsugu Sato ,  Atsushi Takane

    IPC分类号： G01N23/00

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/223 ,  H01J2237/2826 ,  H01J2237/3045

    摘要： On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermined amount by a beam deflector in an image in which a specimen image is captured at a first magnification calibrated by using a specimen enlarged image of a specimen as a magnification standard, and also a displacement of the field of view before and after a deflection of the charged particle beam, extracted from a second specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by the predetermined amount by the beam deflector in an image in which a specimen image is captured at a second magnification, the second magnification is calibrated.

    摘要翻译： 基于从包括通过使带电粒子束偏转预定量而记录的视野的位移的第一标本图像提取的带电粒子束的偏转之前和之后的视场位移的基础上， 通过在通过使用样本的样本放大图像作为放大标准校准的第一倍率捕获样本图像的图像中的光束偏转器，以及在充电的偏转之前和之后的视场位移 从第二标本图像中提取出的粒子束，包括通过使带电粒子束在第二放大倍数下拍摄样本图像的图像中的光束偏转器偏转预定量而记录的视野的位移， 校准第二放大倍数。

    Method of forming a sample image and charged particle beam apparatus
    9.
    发明授权
    Method of forming a sample image and charged particle beam apparatus 有权
    形成样品图像和带电粒子束装置的方法

    公开(公告)号：US07800059B2

    公开(公告)日：2010-09-21

    申请号：US12073359

    申请日：2008-03-04

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    IPC分类号： G01N23/22 ,  H01J37/26 ,  H01J37/28 ,  G21K7/00

    CPC分类号： G01N23/22 ,  H01J37/222 ,  H01J37/28

    摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

    摘要翻译： 本发明的目的是提供一种在抑制由于带电粒子束的照射引起的充电的影响被抑制的情况下，能够高精度地实现视区域位移的抑制的样本图像形成方法和带电粒子束装置 。 为了实现上述目的，本发明提供一种通过在样品上扫描带电粒子束并基于从样品发射的二次信号形成图像来形成样品图像的方法，该方法包括以下步骤：形成多个 通过叠加通过多个扫描时间获得的多个图像的合成图像; 以及通过校正多个合成图像之间的位置偏移并叠加多个合成图像来形成另一个合成图像，以及用于实现上述方法的带电粒子束装置。