公开(公告)号：US20060097158A1

公开(公告)日：2006-05-11

申请号：US11292002

申请日：2005-12-02

申请人： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

发明人： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

公开(公告)号：US20050285036A1

公开(公告)日：2005-12-29

申请号：US11166370

申请日：2005-06-27

申请人： Mitsugu Sato ,  Makoto Ezumi ,  Satoru Yamaguchi

发明人： Mitsugu Sato ,  Makoto Ezumi ,  Satoru Yamaguchi

IPC分类号： G01N23/225 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J2237/1501 ,  H01J2237/28 ,  H01J2237/304

摘要： A charged-particle beam emitting device which includes the following configuration devices so that a lowering in the image resolution will be suppressed even if a primary beam is tilted relative to a sample: A device for causing orbit of the primary beam to pass through off-axes of a plurality of lenses, and controlling off-axis orbit of the primary beam. This device allows the aberration which occurs in the objective lens at the time of beam tilt to be cancelled out by the aberration which occurs in the other lens. Also, there is provided a device for simultaneously modulating excitations of the plurality of lenses including the objective lens.

摘要翻译： 一种带电粒子束发射装置，其包括以下配置装置，使得即使主光束相对于样本倾斜，图像分辨率的降低也将被抑制：用于使一次光束的轨道穿过关闭的装置， 多个透镜的轴，并且控制主光束的离轴轨道。 该装置允许在光束倾斜时在物镜中发生的像差由在另一个透镜中出现的像差抵消。 此外，提供了一种用于同时调制包括物镜的多个透镜的激励的装置。

公开(公告)号：US20050232493A1

公开(公告)日：2005-10-20

申请号：US11104632

申请日：2005-04-13

申请人： Norio Satou ,  Akiyuki Sugiyama ,  Osamu Komuro ,  Satoru Yamaguchi

发明人： Norio Satou ,  Akiyuki Sugiyama ,  Osamu Komuro ,  Satoru Yamaguchi

IPC分类号： H01L21/66 ,  G06K9/62 ,  G06T1/00 ,  G06T7/00

CPC分类号： G06T7/001

摘要： According to the pattern search method of the present invention, detection of a detection image region relative to an observation image is performed by a pattern matching. An image whose size is substantially the same as that of the observation image is used as the detection image region. The detection image region is relatively displaced with reference to the observation image, thereby detecting a degree of similarity for a common region which is common to both of the region and the image. Displacement range of the detection image region is set in advance. If area of the common region is larger than a predetermined value, calculating the degree of similarity will be performed.

摘要翻译： 根据本发明的图案搜索方法，通过图案匹配来执行相对于观察图像的检测图像区域的检测。 使用与观察图像基本相同的图像作为检测图像区域。 检测图像区域相对于观察图像相对移位，从而检测对于区域和图像两者共同的公共区域的相似度。 预先设定检测图像区域的位移范围。 如果公共区域的面积大于预定值，则将执行相似度的计算。

公开(公告)号：US20050151078A1

公开(公告)日：2005-07-14

申请号：US11056191

申请日：2005-02-14

申请人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

发明人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

IPC分类号： G01B15/04 ,  G01B15/08 ,  H01J37/28 ,  H01L21/66 ,  G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/2815

摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.

摘要翻译： 用于确定凹陷/突起的方法，特别是用于形成在样本上的线和空间图案及其装置。 扫描带电粒子束的方向与带电粒子束的原始光轴倾斜，或者样品台倾斜，测量带电粒子束的扫描方向上的检测信号的变宽，比较加宽 其中当带电粒子束的扫描方向平行于带电粒子束的原始光轴时，并且基于增宽的增加/减小来确定扫描部分的凹陷/突起。

公开(公告)号：US4946374A

公开(公告)日：1990-08-07

申请号：US287648

申请日：1988-12-21

申请人： Satoru Yamaguchi ,  Jozo Shimizu ,  Kozaburoh Satoh ,  Haruo Andoh

发明人： Satoru Yamaguchi ,  Jozo Shimizu ,  Kozaburoh Satoh ,  Haruo Andoh

IPC分类号： C09D5/23 ,  C09D7/12 ,  G11B5/716

CPC分类号： G11B5/716 ,  Y10S428/90 ,  Y10T428/25 ,  Y10T428/257

摘要： A magnetic recording medium which comprises a first magnetic layer on a base and a second magnetic layer thereon, the first magnetic layer containing magnetic particles having an average particle length (long axis diameter) of 0.4 to 0.7 .mu., the second magnetic layer containing magnetic particles having an average particle length (long axis diameter) of 0.25 to 0.35 .mu., the coercive force of which being 370 to 460 oersteds, and the ratio of coercive force of the upper or second layer to that of the lower or first magnetic layer being 1.05/l to 1.5/l. The magnetic recording medium has excellent sensitivity and frequency characteristics at entire frequency bands with less noise.

摘要翻译： 一种磁记录介质，包括在基底上的第一磁性层和其上的第二磁性层，所述第一磁性层含有平均粒子长度（长轴直径）为0.4至0.7μm的磁性颗粒，所述第二磁性层含有磁性颗粒 平均粒径（长轴直径）为0.25〜0.35μm，矫顽力为370〜460奥斯特，上层或第二层与下层或第一层的矫顽力比为1.05 / l至1.5 / l。 磁记录介质在噪声较小的整个频段具有优异的灵敏度和频率特性。

公开(公告)号：US4550264A

公开(公告)日：1985-10-29

申请号：US480585

申请日：1983-03-30

申请人： Hitoshi Takahaski ,  Satoru Yamaguchi ,  Hideo Nunokawa

发明人： Hitoshi Takahaski ,  Satoru Yamaguchi ,  Hideo Nunokawa

IPC分类号： H03K5/02 ,  H03K17/0412 ,  H03K17/06 ,  H03K17/687 ,  H03K17/693 ,  H03K19/094 ,  H03K19/096 ,  H03K3/57

CPC分类号： H03K17/693 ,  H03K17/04123 ,  H03K17/06 ,  H03K19/096

摘要： A boosting circuit includes a plurality of variable capacitors with controllable capacitance values in accordance with the voltage level at first and second terminals of each of the variable capicitors A plurality of first buffer circuits is located at the first terminal side, each acting to increase the voltage level at the corresponding first terminal to a first level. A single second buffer circuit located at the second terminal side cooperating commonly with the variable capacitors, to increase the voltage level at each second terminal. The first level is thus boosted to a second level which results in an output of the circuit concerned. Each variable capacitor is fabricated by a MOS transistor capacitor.

摘要翻译： 升压电路包括具有可变电容值的多个可变电容器，其根据每个可变标识符的第一和第二端子处的电压电平。多个第一缓冲电路位于第一端子侧，每个起作用以增加电压 在相应的第一终端处的电平达到第一级。 位于第二端子侧的单个第二缓冲电路与可变电容器共同配合，以增加每个第二端子处的电压电平。 因此，第一电平被提升到第二电平，这导致有关电路的输出。 每个可变电容器由MOS晶体管电容器制成。

公开(公告)号：US08953855B2

公开(公告)日：2015-02-10

申请号：US12393321

申请日：2009-02-26

申请人： Hitoshi Namai ,  Osamu Komuro ,  Satoru Yamaguchi ,  Fumihiro Sasajima

发明人： Hitoshi Namai ,  Osamu Komuro ,  Satoru Yamaguchi ,  Fumihiro Sasajima

IPC分类号： G06K9/00 ,  G06K9/46 ,  G06T7/00

CPC分类号： G06K9/4609 ,  G06T7/13

摘要： An object of the present invention is to provide an edge detection technique and equipment which are capable of stably detecting an edge by suppressing the influence of noise even in the case where the image is obtained by charged particle radiation equipment, such as a scanning electron microscope and has a low S/N ratio. More specifically, the present invention is to propose a technique and equipment which are configured to determine a peak position (edge) on the basis of the following two edge extraction techniques. That is, the present invention is to propose a technique and equipment wherein at least two peaks are formed by using, as edge detection techniques, for example, one peak detection technique having a relatively high sensitivity and the other peak detection technique which is relatively less susceptible to the influence of noise than the one peak detection technique, and wherein a position where the peaks coincide with each other is determined as a true peak position (edge position).

摘要翻译： 本发明的目的是提供一种能够通过抑制噪声的影响来稳定地检测边缘的边缘检测技术和设备，即使在通过诸如扫描电子显微镜的带电粒子辐射设备获得图像的情况下 并具有较低的S / N比。 更具体地，本发明是提出一种被配置为基于以下两个边缘提取技术来确定峰值位置（边缘）的技术和设备。 也就是说，本发明提出一种技术和设备，其中通过使用作为边缘检测技术的至少两个峰形成例如具有相对较高灵敏度的一个峰值检测技术和相对较少的另一个峰值检测技术 容易受到噪声的影响而不是一个峰值检测技术，并且其中峰值彼此重合的位置被确定为真正的峰值位置（边缘位置）。

公开(公告)号：US20120037801A1

公开(公告)日：2012-02-16

申请号：US13263826

申请日：2010-04-07

申请人： Yuzuru Mochizuki ,  Maki Tanaka ,  Miki Isawa ,  Satoru Yamaguchi

发明人： Yuzuru Mochizuki ,  Maki Tanaka ,  Miki Isawa ,  Satoru Yamaguchi

IPC分类号： G01N23/00

CPC分类号： G01B15/04 ,  G01B15/00 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile of the sample (201) is acquired, the feature quantities of the secondary electron profile at the positions of edges (303, 305) are detected, and based on the detected feature quantities, whether each gap adjacent to each of the edges (303, 305) is the core gap (211) or the spacer gap (212) is determined. Furthermore, the waveform profile of the spacer (207) is previously stored, the secondary electron profile of the sample (201) is acquired, a matching degree of the secondary electron profile and the stored waveform profile at the position of each spacer (207) is detected, and based on the detected matching degree, whether the each gap adjacent to each spacer (207) is the core gap (211) or the spacer gap (212) is determined.

摘要翻译： 提供了一种图案测量装置和计算机程序，其确定样品（201）中形成的间隙是否为芯间隙（211）或间隔物间隙（212）。 获取样品（201）的二次电子分布，检测边缘（303,305）位置处的二次电子分布的特征量，并且基于检测到的特征量，确定与每个 边缘（303,305）是芯间隙（211）或确定间隔物间隙（212）。 此外，预先存储间隔物（207）的波形图，获取样品（201）的二次电子分布，二次电子分布的匹配度和在每个间隔物（207）的位置处存储的波形分布， 并且基于检测到的匹配度，确定与每个间隔物（207）相邻的每个间隙是否为芯间隙（211）或间隔物间隙（212）。

公开(公告)号：US07941008B2

公开(公告)日：2011-05-10

申请号：US11104632

申请日：2005-04-13

申请人： Norio Satou ,  Akiyuki Sugiyama ,  Osamu Komuro ,  Satoru Yamaguchi

发明人： Norio Satou ,  Akiyuki Sugiyama ,  Osamu Komuro ,  Satoru Yamaguchi

IPC分类号： G06K9/54

CPC分类号： G06T7/001

摘要： According to the pattern search method of the present invention, detection of a detection image region relative to an observation image is performed by a pattern matching. An image whose size is substantially the same as that of the observation image is used as the detection image region. The detection image region is relatively displaced with reference to the observation image, thereby detecting a degree of similarity for a common region which is common to both of the region and the image. Displacement range of the detection image region is set in advance. If area of the common region is larger than a predetermined value, calculating the degree of similarity will be performed.

摘要翻译： 根据本发明的图案搜索方法，通过图案匹配来执行相对于观察图像的检测图像区域的检测。 使用与观察图像基本相同的图像作为检测图像区域。 检测图像区域相对于观察图像相对移位，从而检测对于区域和图像两者共同的公共区域的相似度。 预先设定检测图像区域的位移范围。 如果公共区域的面积大于预定值，则将执行相似度的计算。

公开(公告)号：US07826735B2

公开(公告)日：2010-11-02

申请号：US11677183

申请日：2007-02-21

申请人： Satoru Yamaguchi

发明人： Satoru Yamaguchi

IPC分类号： G03B3/10

CPC分类号： G03B13/36

摘要： An auto focus unit, comprising a pursuit block, a lens driver, a detection block, and a controller, is provided. The pursuit block pursues the movements of an optical image of the target-object. The auto focus unit brings an optical image of the target-object into focus on a light-receiving surface. The target-object is desired to be brought into focus. The lens driver causes a focus lens to move so that an optical image of a scanning-area is brought into focus. The detection block detects the light intensity of an area including the scanning area. The controller causes the pursuit block to suspend a pursuit of the target-object when the light intensity detected by the detection block is lower than a predetermined threshold value.

摘要翻译： 提供了包括追踪块，镜头驱动器，检测块和控制器的自动对焦单元。 追求块追求目标对象的光学图像的运动。 自动对焦单元将目标物体的光学图像聚焦在光接收表面上。 目标对象希望被聚焦。 透镜驱动器使聚焦透镜移动，使得扫描区域的光学图像被聚焦。 检测块检测包括扫描区域的区域的光强度。 当由检测块检测到的光强度低于预定阈值时，控制器使追踪块暂停对目标对象的追踪。