公开(公告)号：US20140210224A1

公开(公告)日：2014-07-31

申请号：US14235115

申请日：2012-08-09

申请人： Yasuhiko Hashimoto ,  Shigeki Ono ,  Takayuki Fukushima

发明人： Yasuhiko Hashimoto ,  Shigeki Ono ,  Takayuki Fukushima

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67781 ,  H01L21/68707

摘要： An end effector device attached to a tip end portion of a robot arm includes a plurality of support units provided on a blade. Each of the support units includes: a plurality of nail pieces configured to support peripheral portions of a plurality of semiconductor wafers such that the semiconductor wafers are parallel to one another and spaced apart from one another; and a pitch changing mechanism configured to change upper-lower intervals of the nail pieces. The pitch changing mechanism includes: a coil spring configured to support the plurality of nail pieces such that the plurality of nail pieces are spaced apart from one another in an upper-lower direction and elastically deform in the upper-lower direction; and an operating mechanism configured to cause the coil spring to elastically deform in the upper-lower direction. The operating mechanism includes a piston pin fitted in the coil spring to move up and down.

摘要翻译： 附接到机器人臂的末端部分的端部执行器装置包括设置在叶片上的多个支撑单元。 每个支撑单元包括：多个钉片，其构造成支撑多个半导体晶片的周边部分，使得半导体晶片彼此平行并彼此间隔开; 以及变桨机构，其构造成改变所述钉片的上下间隔。 间距改变机构包括：螺旋弹簧，其构造成支撑多个钉片，使得多个钉片在上下方向上彼此间隔开，并在上下方向上弹性变形; 以及操作机构，其构造成使所述螺旋弹簧沿上下方向弹性变形。 操作机构包括安装在螺旋弹簧中以上下移动的活塞销。

公开(公告)号：US08746631B2

公开(公告)日：2014-06-10

申请号：US12990731

申请日：2009-04-27

申请人： Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

发明人： Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

IPC分类号： H02G11/00

CPC分类号： B25J19/0025 ,  H01L21/67766 ,  H02G11/00

摘要： An article carrier robot includes: a horizontal base; a horizontally movable unit supported by the horizontal base so as to be movable in a horizontal direction; a robot main body supported by the horizontally movable unit; at least one of wiring and piping introduced into the robot main body from the horizontal base; and a restriction unit supported by the horizontally movable unit so as to be swayable about a pivot provided to the horizontally movable unit. The restriction unit is configured to restrict deformation of a part of the at least one of wiring and piping.

摘要翻译： 物品载体机器人包括：水平底座; 水平移动单元，其由水平基座支撑，以便能够在水平方向上移动; 由水平移动单元支撑的机器人主体; 从水平底座引入机器人主体的布线和管道中的至少一个; 以及由水平移动单元支撑的限制单元，以便围绕设置在水平移动单元的枢轴摆动。 限制单元被配置为限制布线和管道中的至少一个的一部分的变形。

公开(公告)号：US08478443B2

公开(公告)日：2013-07-02

申请号：US13148623

申请日：2010-02-08

申请人： Yasuhiko Hashimoto ,  Kenji Bando

发明人： Yasuhiko Hashimoto ,  Kenji Bando

IPC分类号： G05B19/00 ,  G05D23/00

CPC分类号： B25J19/06 ,  B25J9/101

摘要： The present invention provides a robot system including a robot having a plurality of move axes and a safeguard apparatus provided independently of a control system of the robot and adapted for limiting a movable range of the robot. The safeguard apparatus includes at least two individual-axis-detection external sensors configured to be respectively turned ON/OFF in response to a rotational position or a transfer position of respective at least two move axes among the plurality of move axes of the robot, and an apparatus body configured to limit a move of the robot based on a combination of ON/OFF conditions of at least two output signals obtained from the at least two individual-axis-detection external sensors.

摘要翻译： 本发明提供了一种机器人系统，其包括具有多个移动轴的机器人和独立于机器人的控制系统设置的适于限制机器人的可移动范围的保护装置。 保护装置包括响应于机器人的多个移动轴中的相应的至少两个移动轴的旋转位置或转移位置而被配置为分别接通/断开的至少两个单独轴检测外部传感器，以及 基于从所述至少两个独立轴检测外部传感器获得的至少两个输出信号的ON / OFF条件的组合，被配置为限制所述机器人的移动的装置主体。

公开(公告)号：US20130156531A1

公开(公告)日：2013-06-20

申请号：US13811785

申请日：2011-08-25

申请人： Yasuhiko Hashimoto ,  Shigeki Ono ,  Kenji Bando

发明人： Yasuhiko Hashimoto ,  Shigeki Ono ,  Kenji Bando

IPC分类号： B65G1/04

CPC分类号： B65G1/04 ,  H01L21/67313 ,  H01L21/67326 ,  H01L21/6734

摘要： A rack includes: a rack main body including a storage space configured to store a plurality of plate-shaped members and a carry-in opening; a plurality of upper supporting portions configured to respectively support upper edge portions of the plurality of plate-shaped members; lower supporting portions respectively provided under the plurality of upper supporting portions and configured to respectively support lower edge portions of the plurality of standing plate-shaped members; and lower edge portion storage portions provided to be each located at an outer side of an end of the upper supporting portion and an end of the lower supporting portion in the arrangement direction and configured to store the lower edge portions of the plate-shaped members, and at least one of the upper supporting portions is configured to be able to support the upper edge portion of the plate-shaped member.

摘要翻译： 机架包括：机架主体，包括被构造成存储多个板状构件和进入开口的存储空间; 多个上支撑部分，其构造成分别支撑所述多个板状构件的上边缘部分; 下部支撑部分分别设置在所述多个上部支撑部分下方，并且构造成分别支撑所述多个竖立板状构件的下边缘部分; 以及下边缘部收容部，其设置成位于上支撑部的端部的外侧，下部支撑部的端部沿排列方向设置，并且构造成存储板状构件的下边缘部， 并且所述上支撑部中的至少一个构造成能够支撑所述板状构件的上边缘部。

公开(公告)号：US08454068B2

公开(公告)日：2013-06-04

申请号：US12951356

申请日：2010-11-22

申请人： Yasuhiko Hashimoto ,  Tośhiaki Yoshida

发明人： Yasuhiko Hashimoto ,  Tośhiaki Yoshida

IPC分类号： B25J15/00

CPC分类号： B25J15/00

摘要： A chuck hand 1 includes a pressing mechanism 14 having a pusher 25 which presses a semiconductor process wafer 3 in the direction of a front guide 12 to thereby grip the semiconductor process wafer 3. The pressing mechanism 14 further has a pusher supporting body 22 and a buffering member 28. The pusher supporting body 22 is configured such that it can advance and retract. The pusher supporting body 22 is disposed in the pusher 25 such that it can slide back and forth. A gap 26a is defined forward relative to the pusher supporting body 22. The buffering member 28, which has a low bounce and is elastically deformable, is interposingly placed in the gap 26a. When the pusher supporting body 22 moves forward, it pushes the pusher 25 through the buffering member 28 whereby the pusher 25 is moved forward. The pusher 25 is abutted and pressed against the semiconductor process wafer 3.

摘要翻译： 卡盘手1包括按压机构14，该按压机构14具有按照前导向件12的方向按压半导体处理晶片3从而夹持半导体处理晶片3的推动器25.按压机构14还具有推动支撑体22和 缓冲构件28.推动器支撑体22构造成能够前进和后退。 推动器支撑体22设置在推动器25中，使得其可以前后滑动。 间隙26a相对于推动器支撑体22被向前定义。具有低反弹并且可弹性变形的缓冲构件28插入地设置在间隙26a中。 当推动器支撑体22向前移动时，推动器25通过缓冲构件28推动推动器25向前移动。 推动器25抵靠半导体处理晶片3。

公开(公告)号：US08210789B2

公开(公告)日：2012-07-03

申请号：US13017552

申请日：2011-01-31

申请人： Yasuhiko Hashimoto

发明人： Yasuhiko Hashimoto

IPC分类号： H01L21/677

CPC分类号： H01L21/67778 ,  H01L21/67775 ,  Y10S414/137

摘要： An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step.

摘要翻译： 一种组装基板输送装置的组装方法，包括：传送系统单元形成步骤，将机器人和基板容器保持器固定到构成基板传送装置的一部分的分割体上，并且可分离地形成在主结构体上， 从而形成传送系统单元; 检查固定到转印系统单元的机器人是否能够作为基板转印装置的一部分进行操作的操作检查步骤; 以及在操作检查步骤之后将传送系统单元安装在基板传送装置的主结构体上的安装步骤。

公开(公告)号：US20110313571A1

公开(公告)日：2011-12-22

申请号：US13148623

申请日：2010-02-08

申请人： Yasuhiko Hashimoto ,  Kenji Bando

发明人： Yasuhiko Hashimoto ,  Kenji Bando

IPC分类号： B25J19/06 ,  G05B19/048

CPC分类号： B25J19/06 ,  B25J9/101

摘要： The present invention provides a robot system including a robot having a plurality of move axes and a safeguard apparatus provided independently of a control system of the robot and adapted for limiting a movable range of the robot. The safeguard apparatus includes at least two individual-axis-detection external sensors configured to be respectively turned ON/OFF in response to a rotational position or a transfer position of respective at least two move axes among the plurality of move axes of the robot, and an apparatus body configured to limit a move of the robot based on a combination of ON/OFF conditions of at least two output signals obtained from the at least two individual-axis-detection external sensors.

摘要翻译： 本发明提供了一种机器人系统，其包括具有多个移动轴的机器人和独立于机器人的控制系统设置的适于限制机器人的可移动范围的保护装置。 保护装置包括响应于机器人的多个移动轴中的相应的至少两个移动轴的旋转位置或转移位置而被配置为分别接通/断开的至少两个单独轴检测外部传感器，以及 基于从所述至少两个独立轴检测外部传感器获得的至少两个输出信号的ON / OFF条件的组合，被配置为限制所述机器人的移动的装置主体。

公开(公告)号：US07874782B2

公开(公告)日：2011-01-25

申请号：US11879509

申请日：2007-07-18

申请人： Yasuhiko Hashimoto

发明人： Yasuhiko Hashimoto

IPC分类号： H01L21/677

CPC分类号： H01L21/67766 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139

摘要： A wafer transfer apparatus is provided. In a minimum transformed state where a robot arm is transformed such that a distance defined from a pivot axis to an arm portion, which is farthest in a radial direction relative to the pivot axis, is minimum, a minimum rotation radius R, is set to exceed ½ of a length B in the forward and backward directions of an interface space, the length B corresponding to a length between the front wall and the rear wall of the interface space forming portion, and is further set to be equal to or less than a subtracted value obtained by subtracting a distance L0 in the forward and backward directions from the rear wall of the interface space forming portion to the pivot axis, from the length B in the forward and backward directions of the interface space (i.e., B/2

摘要翻译： 提供晶片传送装置。 在最小变形状态下，机器人臂被变形为使得从枢转轴线到相对于枢转轴线的径向方向上最远的臂部分限定的距离最小，将最小旋转半径R设定为 在接口空间的前后方向上超过长度B的1/2，长度B对应于界面空间形成部分的前壁和后壁之间的长度，并且进一步设定为等于或小于 从界面空间形成部分的后壁到枢转轴线的前后方向上的距离L0从接口空间的前后方向（即B / 2）中减去的减法值

公开(公告)号：US20100290886A1

公开(公告)日：2010-11-18

申请号：US12656358

申请日：2010-01-27

申请人： Yasuhiko Hashimoto ,  Tetsuya Yoshida

发明人： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC分类号： H01L21/683 ,  B25J15/00 ,  B25J18/00

CPC分类号： B25J15/0014 ,  B25J9/042 ,  B25J9/10 ,  B25J11/0095 ,  B25J15/0052 ,  B25J15/0616 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/137 ,  Y10S414/141 ,  Y10T74/20305

摘要： The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member.

摘要翻译： 本发明涉及一种端部执行器，其包括：用于保持基板的叶片构件，每个构件用于保持基板，并且构造成可以改变叶片构件之间的每个间隔; 构造成支撑叶片构件的叶片支撑单元，叶片支撑单元构造成由机器人与叶片构件一体地驱动; 以及叶片驱动装置，其构造成通过相对于另一个叶片构件移动至少一个叶片构件来改变叶片构件之间的间隔。

公开(公告)号：US06896466B2

公开(公告)日：2005-05-24

申请号：US10096691

申请日：2002-03-12

申请人： Joichi Nishimura ,  Masami Ohtani ,  Yasuhiko Hashimoto

发明人： Joichi Nishimura ,  Masami Ohtani ,  Yasuhiko Hashimoto

IPC分类号： B65G49/07 ,  B25J18/02 ,  B25J18/04 ,  H01L21/677 ,  H01L21/687

CPC分类号： B25J18/025 ,  B25J18/04 ,  H01L21/68707 ,  Y10S414/139

摘要： A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopially nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48) upwardly to simultaneously elevate a vertical movement member (42d). As the vertical movement member (42d) rises, a pulley (47c) simultaneously moves upwardly. As the pulley (47c) moves upwardly, a vertical movement member (42c) is lifted upwardly by a belt (L1). Similar actions elevate a pair of transport arms (31a, 31b) provided on the top of a vertical movement member (42a). The increase in the number of tiers of the nestable multi-tier structure precludes the increase in height of the transport robot (TR1) in its retracted position. The substrate processing apparatus, if having an increased height, is capable of transporting a substrate to and from processing portions and eliminates the need to reassemble and adjust the transport robot (TR1) for transportation of the apparatus.

摘要翻译： 基板处理装置包括形成有所谓的可伸缩的多层结构的伸缩式垂直运动机构的输送机器人（TR1）。 驱动机构（D 1）最初被驱动以向上移动支撑构件（48）以同时升高垂直运动构件（42d）。 当垂直运动构件（42d）升高时，滑轮（47c）同时向上移动。 当滑轮（47c）向上移动时，垂直运动件（42c）被带（L1）向上提升。 类似的动作提升设置在垂直运动件（42,4a）顶部上的一对传送臂（31a，31b）。 可嵌套多层结构的层数的增加排除了运输机器人（TR 1）在缩回位置的高度增加。 基板处理装置如果具有增加的高度，则能够将基板输送到处理部分和从处理部分输送基板处理装置，并且不需要重新组装和调整运输机器人（TR 1）以便运送装置。