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公开(公告)号：US20080271525A1
公开(公告)日：2008-11-06
申请号：US11985879
申请日：2008-04-03
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/69
CPC分类号： G03H1/0891 , G03H1/0244 , G03H1/08 , G03H2001/0858 , G03H2210/30 , G03H2210/454 , G03H2223/12 , G03H2240/13 , G03H2240/23
摘要： A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane.
摘要翻译： 通过在取向<100>的N或轻掺杂P型硅衬底上进行微加工工艺的方法制造质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。
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公开(公告)号：US20070011867A1
公开(公告)日：2007-01-18
申请号：US11523436
申请日：2006-09-19
申请人： Yahong Yao , Chih-Chang Chen , Gafeng Wang , Liji Huang
发明人： Yahong Yao , Chih-Chang Chen , Gafeng Wang , Liji Huang
IPC分类号： H01B13/00
CPC分类号： G01F1/6845 , Y10T29/49082 , Y10T29/49083 , Y10T29/49117 , Y10T29/49124 , Y10T29/49155
摘要： A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane.
摘要翻译： 通过在取向<100>的N或轻掺杂P型硅衬底上进行微加工工艺的方法制造质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。
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公开(公告)号：US06641932B1
公开(公告)日：2003-11-04
申请号：US09892626
申请日：2001-06-28
申请人： Weilu Xu , Yuanda R. Cheng , Taesun Ernest Kim , Chung Shih , Liji Huang , Kueir Weii Chour , Steve Hwang , Roger Shih
发明人： Weilu Xu , Yuanda R. Cheng , Taesun Ernest Kim , Chung Shih , Liji Huang , Kueir Weii Chour , Steve Hwang , Roger Shih
IPC分类号： G11B566
CPC分类号： G11B5/72 , G11B5/66 , Y10T428/12847 , Y10T428/12854 , Y10T428/265 , Y10T428/31678
摘要： A flash chromium capping layer is deposited on a magnetic layer for improved corrosion resistance, reduced poisoning due to the absence of a protective overcoat or presence of discontinuities in a protective overcoat, and for reduced media noise do to inter-granular exchange coupling. Embodiments include depositing a flash chromium layer having a thickness up to about 10 Å on an upper magnetic layer and depositing an overlying lubricant topcoat. An optional protective overcoat, such as a carbon-containing protective overcoat, can also be deposited on the chromium capping layer. The chromium capping layer forms a protective oxide coating where exposed, as due to the absence of or at discontinuities in the protective overcoat.
摘要翻译： 闪光铬覆盖层沉积在磁性层上以提高耐腐蚀性，由于不存在保护性外涂层而减少中毒或在保护性外涂层中存在不连续性，并且对于颗粒间交换耦合来降低介质噪声。 实施例包括在上部磁性层上沉积厚度约为10埃的闪光铬层并沉积上覆的润滑剂面漆。 任选的保护性外涂层，例如含碳保护外涂层也可以沉积在铬覆盖层上。 铬覆盖层形成保护性氧化物涂层，其中暴露的是由于保护性外涂层中不存在或不连续的。
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公开(公告)号：US06556338B2
公开(公告)日：2003-04-29
申请号：US10003811
申请日：2001-11-02
申请人： Naiqian Han , Liji Huang
发明人： Naiqian Han , Liji Huang
IPC分类号： G02B2608
摘要： The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range.
摘要翻译： 本发明公开了一种优化的光衰减器件。 它包括由两个相同的反射镜形成的谐振器的设计，它们是由MEMS工艺制成的。 该结构实现了最小的插入损耗。 选择两种膜具有高反射率。 多层或金属层或它们的混合物可产生高反射率的膜。 高反射率导致一定衰减范围内的低调谐电压。
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公开(公告)号：US6117570A
公开(公告)日：2000-09-12
申请号：US152326
申请日：1998-09-14
申请人： Qixu David Chen , Liji Huang , Charles Leu , Rajiv Yadav Ranjan
发明人： Qixu David Chen , Liji Huang , Charles Leu , Rajiv Yadav Ranjan
CPC分类号： G11B5/732 , G11B5/8404 , Y10S428/90 , Y10T428/265
摘要： High areal density magnetic recording media exhibiting low noise are formed with a surface oxidized NiAl seed layer. Embodiments include forming the surface oxidized NiAl seed layer on a glass or glass-ceramic substrate, and sequentially depositing a Cr or Cr-alloy, such as CrV, an intermediate CoCrTa layer and a CoCrPtTa magnetic layer.
摘要翻译： 利用表面氧化的NiAl种子层形成表现出低噪声的高密度磁性记录介质。 实施例包括在玻璃或玻璃陶瓷衬底上形成表面氧化的NiAl种子层，并依次沉积Cr或Cr合金，例如CrV，中间CoCrTa层和CoCrPtTa磁性层。
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公开(公告)号：US20220136881A1
公开(公告)日：2022-05-05
申请号：US17088910
申请日：2020-11-04
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of an integrated MEMS mass flow meter with a conventional pressure regulator for fuel gas cylinder enabled with wireless data communication is exhibited in this disclosure. The battery-powered MEMS mass flow meter integrated with a pressure sensor, a temperature sensor and a Bluetooth as well as one long-distance communication devices is packed by the conventional fuel gas cylinder mechanical pressure regulator to form a new integrated apparatus. Such an apparatus can digitize the fuel gas consumption supplied by a cylinder to provide such consumption information to the fuel gas cylinder suppliers or the third-party service providers, and will also timely stream the cylinder status such as leakage and location data which will significantly improve the efficiency of fuel gas usage, control, and its supply logistics.
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公开(公告)号：US20220082466A1
公开(公告)日：2022-03-17
申请号：US17022988
申请日：2020-09-16
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L21/12
摘要： The design of a vacuum gauge utilizing a micromachined silicon vacuum sensor to measure the extended vacuum range from ambient to ultrahigh vacuum by registering the gas thermal properties at each vacuum range is disclosed in the present invention. This single device is capable of measuring the pressure range from ambient and above to ultrahigh vacuum. This device applies to all types of vacuum measurement where no medium attack silicon is present. The disclosed vacuum gauge operates with thermistors and thermal pile on a membrane of the thermal isolation diaphragm structure with a heat isolation cavity underneath.
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公开(公告)号：US20210396548A1
公开(公告)日：2021-12-23
申请号：US16903825
申请日：2020-06-17
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.
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公开(公告)号：US11179083B2
公开(公告)日：2021-11-23
申请号：US16202407
申请日：2018-11-28
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of a physiological fluid collection bag with instant data transmission capabilities, utilizing a micromachined thermal time-of-flight flow sensor as well as integrated pH and calorimetric mass flow sensors for simultaneous and continuous measurement of the instant volumetric flow rate, accumulated total volume, pH and density of data of a collected fluid is disclosed in embodiments. The fluid collection bag includes a collection chamber and storage chamber wherein the sensors are installed inside the storage chamber of the bag and the bag is fully disposable. The fluid collection bag is able to measure the flow rate and instantly relay the data to a reusable data processing unit that can transmit the data to a designated data center or to medical staff.
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公开(公告)号：US20180325183A1
公开(公告)日：2018-11-15
申请号：US16046797
申请日：2018-07-26
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
CPC分类号： A24F47/008 , G01F1/6845 , G01N33/0036
摘要： The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.
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