摘要:
An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.
摘要:
An oscillating angular speed sensor includes a detector, a driving portion, and a separating portion. When an angular speed is generated while the detector is driven to oscillate by the driving portion, Coriolis force is applied to the detector. Therefore, the angular speed is detected based on a capacitance variation in accordance with a variation of an interval between a movable electrode and a fixed electrode of the detector. The separating portion is distanced from the detector and the driving portion, and is configured to separate a first space accommodating the detector and a second space accommodating the driving portion.
摘要:
In a method of making an electronic apparatus, electronic devices and a mold are placed in a package such that pads of electronic devices are covered with the mold. An electrical insulator is poured into the package, in which the mold is placed, to fill the package. The mold is removed from the electrical insulator to form a space where the pads are exposed. An electrical conductor is placed in the space such that the pads are electrically connected together through the electrical conductor. The electrical conductor is in the form of a liquid or a solid having both fluidity and deformability.
摘要:
The present invention provides a human anti-α9 integrin antibody or an antibody fragment which specifically recognize human α9 integrin and mouse α9 integrin, inhibit interaction with their ligands, particularly, the antibody or antibody fragment which recognize loop regions of human and mouse α9 integrins, a gene encoding the antibody or antibody fragment, a recombinant expression vector containing the gene, a transformant harboring the gene, production method of human anti-α9 integrin antibody or antibody fragment using the transformant, and an agent for the prophylaxis or treatment of rheumatoid arthritis which contains the antibody or antibody fragment.
摘要:
An angular rate sensor includes a base member serving as a base, an angular rate sensing element having a vibrating member, a wiring member having a flexible, electrical insulating tape portion and a electrical wire portion. The wiring member has end portions fixed to the base member and a middle portion positioned between the end portions. The middle portion is separated from the base member and the sensing element is mounted to the middle portion. Thus, due to an elasticity of the wiring member, the sensing element can be isolated from an external vibration.
摘要:
An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.
摘要:
An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the drive oscillation of the oscillator, a predetermined electric charge is accumulated in the oscillator, and electric charges of opposite polarities are alternately and periodically accumulated in the first and second driving electrodes, respectively, to exert an attractive force between the oscillator and a corresponding one of the first and second driving electrodes and also to exert a repulsive force between the oscillator and the other one of the first and second driving electrodes, and vice versa.
摘要:
An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the drive oscillation of the oscillator, a predetermined electric charge is accumulated in the oscillator, and electric charges of opposite polarities are alternately and periodically accumulated in the first and second driving electrodes, respectively, to exert an attractive force between the oscillator and a corresponding one of the first and second driving electrodes and also to exert a repulsive force between the oscillator and the other one of the first and second driving electrodes, and vice versa.
摘要:
An angular velocity detector includes a disk-shaped inertial mass supported on a substrate via driving beams and a second mass connected to the inertial mass via detecting beams. The inertial mass is oscillated in its rotational direction around a center axis (z) by an electrostatic force. When an angular velocity around a detection axis (x), which is perpendicular to the center axis (z), is imposed on the second mass while the inertial mass is oscillating, the second mass displaces in the direction parallel to the center axis (z). A capacitance between the second mass and the substrate changes according to the displacement of the second mass. The angular velocity is detected based on the changes in the capacitance. Since the driving beams allow the inertial mass to oscillate only in the rotational direction, the driving beams can be easily designed and manufactured.
摘要:
An oscillation type of micro gyro sensor equipped with two vibrators is provided. The gyro sensor has a monitoring electrode, a signal processor, and a driving electrode attached to both the vibrators. The monitoring electrode monitors a vibration of only one of the two vibrators to output signal indicative of the monitored vibration. The signal processor drives the two vibrators in mutually opposite phases, by using the signal from said monitoring electrode. The driving electrode drives both the vibrators on the basis of the two driving signals.