Angular velocity sensor having drive member coupling beam spaced apart from drive members
    61.
    发明授权
    Angular velocity sensor having drive member coupling beam spaced apart from drive members 有权
    角速度传感器具有与驱动构件间隔开的驱动构件联接梁

    公开(公告)号:US08234920B2

    公开(公告)日:2012-08-07

    申请号:US12585052

    申请日:2009-09-01

    IPC分类号: G01P9/04 G01C19/56

    CPC分类号: G01C19/5719

    摘要: An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.

    摘要翻译: 角速度传感器包括第一和第二振荡器和耦合梁。 耦合光束以第一和第二振荡器在预定方向上相对于彼此振动的方式将第一和第二振荡器耦合在一起。 耦合梁包括接合到第一振荡器的表面的第一柱部分,与第二振荡器的表面接合的第二柱部分,以及将第一柱部分连接到第二柱部分的弹簧部分。 弹簧部分与第一和第二振荡器间隔开,并且在预定方向上具有弹性。

    Oscillating angular speed sensor
    62.
    发明授权
    Oscillating angular speed sensor 失效
    振荡角速度传感器

    公开(公告)号:US08210040B2

    公开(公告)日:2012-07-03

    申请号:US12722707

    申请日:2010-03-12

    IPC分类号: G01C19/56 G01P9/04 G01P1/02

    CPC分类号: G01C19/5719

    摘要: An oscillating angular speed sensor includes a detector, a driving portion, and a separating portion. When an angular speed is generated while the detector is driven to oscillate by the driving portion, Coriolis force is applied to the detector. Therefore, the angular speed is detected based on a capacitance variation in accordance with a variation of an interval between a movable electrode and a fixed electrode of the detector. The separating portion is distanced from the detector and the driving portion, and is configured to separate a first space accommodating the detector and a second space accommodating the driving portion.

    摘要翻译: 振动角速度传感器包括检测器,驱动部分和分离部分。 当检测器被驱动部分驱动振荡时产生角速度时,将科里奥利力施加到检测器。 因此,根据检测器的可动电极和固定电极之间的间隔的变化,基于电容变化来检测角速度。 分离部分远离检测器和驱动部分,并且被配置为分离容纳检测器的第一空间和容纳驱动部分的第二空间。

    Angular rate sensor
    65.
    发明授权
    Angular rate sensor 失效
    角速度传感器

    公开(公告)号:US07418863B2

    公开(公告)日:2008-09-02

    申请号:US11528606

    申请日:2006-09-28

    申请人: Hirofumi Higuchi

    发明人: Hirofumi Higuchi

    IPC分类号: G01P1/02

    CPC分类号: G01C19/5719

    摘要: An angular rate sensor includes a base member serving as a base, an angular rate sensing element having a vibrating member, a wiring member having a flexible, electrical insulating tape portion and a electrical wire portion. The wiring member has end portions fixed to the base member and a middle portion positioned between the end portions. The middle portion is separated from the base member and the sensing element is mounted to the middle portion. Thus, due to an elasticity of the wiring member, the sensing element can be isolated from an external vibration.

    摘要翻译: 角速率传感器包括用作基座的基座构件,具有振动构件的角速度检测元件,具有柔性电绝缘带部分和电线部分的布线构件。 布线构件具有固定到基部构件的端部和位于端部之间的中间部分。 中间部分与基部部件分离,并且感测元件安装到中间部分。 因此,由于布线构件的弹性,感测元件可以与外部振动隔离。

    Angular velocity sensor and method for operating the same
    66.
    发明申请
    Angular velocity sensor and method for operating the same 失效
    角速度传感器及其操作方法

    公开(公告)号:US20070199377A1

    公开(公告)日:2007-08-30

    申请号:US11653344

    申请日:2007-01-16

    IPC分类号: G01P15/125

    CPC分类号: G01C19/5719

    摘要: An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.

    摘要翻译: 角速度传感器包括第一振动器和第二振动器,该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个,交流电压之一或第一和第二驱动电压的占空比中的一个,使得第一振动器与第二振动器相反地振动。

    Electrostatically oscillated device

    公开(公告)号:US07159462B2

    公开(公告)日:2007-01-09

    申请号:US11075708

    申请日:2005-03-10

    申请人: Hirofumi Higuchi

    发明人: Hirofumi Higuchi

    IPC分类号: G01P15/125

    CPC分类号: G01C19/5762

    摘要: An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the drive oscillation of the oscillator, a predetermined electric charge is accumulated in the oscillator, and electric charges of opposite polarities are alternately and periodically accumulated in the first and second driving electrodes, respectively, to exert an attractive force between the oscillator and a corresponding one of the first and second driving electrodes and also to exert a repulsive force between the oscillator and the other one of the first and second driving electrodes, and vice versa.

    Electrostatically oscillated device
    68.
    发明申请
    Electrostatically oscillated device 失效
    静电摆动装置

    公开(公告)号:US20060255694A1

    公开(公告)日:2006-11-16

    申请号:US11489682

    申请日:2006-07-20

    申请人: Hirofumi Higuchi

    发明人: Hirofumi Higuchi

    IPC分类号: G01P15/125 H01L41/00

    CPC分类号: G01C19/5762

    摘要: An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the drive oscillation of the oscillator, a predetermined electric charge is accumulated in the oscillator, and electric charges of opposite polarities are alternately and periodically accumulated in the first and second driving electrodes, respectively, to exert an attractive force between the oscillator and a corresponding one of the first and second driving electrodes and also to exert a repulsive force between the oscillator and the other one of the first and second driving electrodes, and vice versa.

    摘要翻译: 振荡器可在预定方向上振荡。 第一驱动电极和第二驱动电极固定到基座并向振荡器施加静电力,以使振荡器在预定方向上的驱动振荡。 在振荡器的驱动振荡时,在振荡器中累积预定的电荷,相反极性的电荷分别交替地周期地累积在第一和第二驱动电极中,以在振荡器之间施加吸引力 以及第一和第二驱动电极中的相应一个,并且还在振荡器和第一和第二驱动电极中的另一个之间施加排斥力,反之亦然。

    Angular velocity detector having inertial mass oscillating in rotational direction
    69.
    发明申请
    Angular velocity detector having inertial mass oscillating in rotational direction 审中-公开
    角速度检测器在旋转方向上具有惯性质量振荡

    公开(公告)号:US20060112764A1

    公开(公告)日:2006-06-01

    申请号:US11239084

    申请日:2005-09-30

    申请人: Hirofumi Higuchi

    发明人: Hirofumi Higuchi

    IPC分类号: G01P9/04

    CPC分类号: G01C19/5719

    摘要: An angular velocity detector includes a disk-shaped inertial mass supported on a substrate via driving beams and a second mass connected to the inertial mass via detecting beams. The inertial mass is oscillated in its rotational direction around a center axis (z) by an electrostatic force. When an angular velocity around a detection axis (x), which is perpendicular to the center axis (z), is imposed on the second mass while the inertial mass is oscillating, the second mass displaces in the direction parallel to the center axis (z). A capacitance between the second mass and the substrate changes according to the displacement of the second mass. The angular velocity is detected based on the changes in the capacitance. Since the driving beams allow the inertial mass to oscillate only in the rotational direction, the driving beams can be easily designed and manufactured.

    摘要翻译: 角速度检测器包括通过驱动梁支撑在基板上的盘形惯性质量块,以及通过检测梁连接到惯性质量块的第二质量块。 惯性质量通过静电力围绕中心轴线(z)以其旋转方向摆动。 当惯性质量正在振荡时,围绕垂直于中心轴线(z)的检测轴(x)的角速度施加在第二质量上时,第二质量沿平行于中心轴线(z )。 第二质量块和基板之间的电容根据第二质量块的位移而变化。 基于电容的变化来检测角速度。 由于驱动梁允许惯性质量仅在旋转方向上振荡,因此可以容易地设计和制造驱动梁。

    Vibration type of micro gyro sensor
    70.
    发明授权
    Vibration type of micro gyro sensor 失效
    振动型微陀螺传感器

    公开(公告)号:US06993969B2

    公开(公告)日:2006-02-07

    申请号:US10808544

    申请日:2004-03-25

    申请人: Hirofumi Higuchi

    发明人: Hirofumi Higuchi

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5719

    摘要: An oscillation type of micro gyro sensor equipped with two vibrators is provided. The gyro sensor has a monitoring electrode, a signal processor, and a driving electrode attached to both the vibrators. The monitoring electrode monitors a vibration of only one of the two vibrators to output signal indicative of the monitored vibration. The signal processor drives the two vibrators in mutually opposite phases, by using the signal from said monitoring electrode. The driving electrode drives both the vibrators on the basis of the two driving signals.

    摘要翻译: 提供了配有两个振动器的微型陀螺传感器的振荡型。 陀螺仪传感器具有监测电极,信号处理器和连接到两个振动器的驱动电极。 监视电极仅监测两个振动器中的一个的振动,以输出指示所监视的振动的信号。 信号处理器通过使用来自所述监控电极的信号来驱动两个相互相反相位的振动器。 驱动电极基于两个驱动信号驱动振动器。