公开(公告)号：US07213908B2

公开(公告)日：2007-05-08

申请号：US10911186

申请日：2004-08-04

申请人： James M. Chwalek ,  John A. Lebens ,  Christopher N. Delametter ,  David P. Trauernicht ,  Gary A. Kneezel

发明人： James M. Chwalek ,  John A. Lebens ,  Christopher N. Delametter ,  David P. Trauernicht ,  Gary A. Kneezel

IPC分类号： B41J2/05

CPC分类号： B41J2/1601 ,  B41J2/14137 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1637 ,  B41J2002/1437 ,  B41J2002/14467 ,  Y10T29/49401

摘要： A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance includes a physical structure located between the nozzle and the fluid delivery channel.

摘要翻译： 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴，流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通，并且具有第一壁和第二壁，其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。

公开(公告)号：US07191520B2

公开(公告)日：2007-03-20

申请号：US10795050

申请日：2004-03-05

申请人： Lingadahalli G. Shantharama ,  John A. Lebens ,  Thomas M. Stephany

发明人： Lingadahalli G. Shantharama ,  John A. Lebens ,  Thomas M. Stephany

IPC分类号： B21D53/76 ,  G01D15/00

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A method for creating an inkjet chamber. The method comprises the steps of firstly providing a substrate having a nozzle opening and secondly etching the substrate through the nozzle opening by alternating between anisotropic and isotropic etching processes for forming a chamber having a shape approximating a cylinder by using multiple hemispheric etches.

摘要翻译： 一种用于产生喷墨室的方法。 该方法包括以下步骤：首先提供具有喷嘴开口的基板，并且通过使用多个半球蚀刻形成具有接近圆柱形状的室的各向异性和各向同性蚀刻工艺之间的交替，通过喷嘴开口二次蚀刻基板。

公开(公告)号：US07025443B2

公开(公告)日：2006-04-11

申请号：US10608498

申请日：2003-06-27

申请人： Antonio Cabal ,  John A. Lebens

发明人： Antonio Cabal ,  John A. Lebens

IPC分类号： B41J2/04 ,  B41J2/05

CPC分类号： B41J2/1639 ,  B41J2/14427 ,  B41J2/1628 ,  B41J2/1648 ,  B41J2002/14346

摘要： An apparatus for a liquid drop emitter, especially for use in an ink jet printhead, is disclosed. A chamber filled with a liquid, a nozzle and a thermo-mechanical actuator, extending into the chamber from at least one wall of the chamber is disclosed. A movable element of the thermo-mechanical actuator is configured with a bending portion which bends when heated, the bending portion having at least one actuator opening for passage of the liquid. Apparatus is adapted to apply heat pulses to the bending portion resulting in rapid deflection of the movable element, ejection of a liquid drop, and passage of liquid through the at least one actuator opening. A movable element configured as a cantilever or as a beam extending from anchor walls of the chamber is disclosed. The thermo-mechanical actuator may be formed as a laminate structure including a layer constructed of a deflector material having a high coefficient of thermal expansion and that is electrically resistive, for example, titanium aluminide. Apparatus adapted to apply heat pulses comprising a resistive heater formed in the deflector material in the bending portion is also disclosed.

公开(公告)号：US06896346B2

公开(公告)日：2005-05-24

申请号：US10329566

申请日：2002-12-26

申请人： David P. Trauernicht ,  John A. Lebens ,  Stephen F. Pond

发明人： David P. Trauernicht ,  John A. Lebens ,  Stephen F. Pond

IPC分类号： B41J2/045 ,  B41J2/05 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B41J29/38

CPC分类号： B41J2/04573 ,  B41J2/04585 ,  B41J2/04588 ,  B41J2/0459 ,  B41J2/04591 ,  B41J2/04593 ,  B41J2/14427 ,  B41J2/1628 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1648

摘要： An apparatus and method of operating a liquid drop emitter, such as an ink jet device, for emitting liquid drops of different volumes. The liquid drop emitter comprises a chamber, filled with a liquid, having a nozzle for emitting drops of the liquid, a thermo-mechanical actuator having a moveable portion within the chamber for applying pressure to the liquid at the nozzle, and apparatus adapted to apply heat pulses to the thermo-mechanical actuator. The method for operating comprises applying a first heat pulse having a first power P1, first pulse duration τp1, and first energy E1=P1×τp1, displacing the movable portion of the actuator so that a drop is emitted having a first drop volume Vd1, and traveling substantially at the target velocity v0; and applying a second heat pulse having a second power P2, second pulse duration τp2, and second energy E2=P2×τp2, displacing the movable portion of the actuator so that a drop is emitted having a second drop volume Vd2 and traveling substantially at the target velocity v0, wherein Vd2>Vd1, E2>E1, τp2>τp1, and P2

公开(公告)号：US06521513B1

公开(公告)日：2003-02-18

申请号：US09609617

申请日：2000-07-05

申请人： John A. Lebens ,  Constantine N. Anagnostopoulos

发明人： John A. Lebens ,  Constantine N. Anagnostopoulos

IPC分类号： H01L21301

CPC分类号： B81C1/00873 ,  B81C1/00888 ,  B81C2201/0132 ,  H01L21/78 ,  Y10S438/928

摘要： A method for singulating a semiconductor silicon wafer (10) comprising a plurality of semiconductor dice (20) arranged along a multiplicity of intersecting streets (30). Initially, a layer of photoresist (15)is patterned on the backside of the wafer (10). The semiconductor silicon wafer (10) is then etched using dry etching methods. As such, slots (22) are etched through the silicon of the wafer (10) aligned to the streets (30) forming a perforation. Simultaneously, tethers (40) are formed between the slots (22) interconnecting the adjacent dice (20) in order to maintain the wafer (10) mechanically intact. Furthermore, a membrane comprising integrated circuitry on the silicon wafer (10) is formed. The dice (20) of the wafer (10) are then separated for various purposes along the perforations. This is accomplished by applying pressure, such as manual pressure, to the wafer (10) so as to sever the tethers (40) which interconnect the dice (20) at their region (50) of reduced dimension.

摘要翻译： 一种用于单片化半导体硅晶片（10）的方法，包括沿着多个相交街道（30）布置的多个半导体晶片（20）。 最初，在晶片（10）的背面上形成一层光致抗蚀剂（15）。 然后使用干蚀刻方法蚀刻半导体硅晶片（10）。 因此，通过与街道（30）对准的形成穿孔的晶片（10）的硅蚀刻槽（22）。 同时，在互连相邻骰子（20）的槽（22）之间形成系绳（40），以便将机芯（10）机械地保持完整。 此外，形成包括硅晶片（10）上的集成电路的膜。 然后，晶片（10）的骰子（20）沿着穿孔分开用于各种目的。 这通过将压力（例如手动压力）施加到晶片（10）来实现，以便切断在其尺寸减小的区域（50）处将骰子（20）互连的系绳（40）。

公开(公告)号：US06502925B2

公开(公告)日：2003-01-07

申请号：US09792114

申请日：2001-02-22

申请人： Constantine N. Anagnostopoulos ,  John A. Lebens ,  David P. Trauernicht ,  James M. Chwalek ,  Christopher N. Delametter

发明人： Constantine N. Anagnostopoulos ,  John A. Lebens ,  David P. Trauernicht ,  James M. Chwalek ,  Christopher N. Delametter

IPC分类号： B41J205

CPC分类号： B41J2/03 ,  B41J2/105 ,  B41J2002/032 ,  B41J2202/13 ,  B41J2202/16 ,  B41J2202/22

摘要： An ink jet print head is formed of a silicon substrate that includes an integrated circuit formed therein for controlling operation of the print head. The silicon substrate has one or more ink channels formed therein along the longitudinal direction of the nozzle array. An insulating layer or layers overlie the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with an ink channel. The area comprising the nozzle openings forms a generally planar surface to facilitate maintenance of the printhead. A heater element is associated with each nozzle opening or bore for asymmetrically heating ink as ink passes through the nozzle opening or bore.

摘要翻译： 喷墨打印头由硅基板形成，该硅基板包括形成在其中的集成电路，用于控制打印头的操作。 硅基板沿着喷嘴阵列的纵向方向形成有一个或多个油墨通道。 绝缘层或层叠在硅衬底上，并且沿着衬底的长度形成有一系列或阵列的喷嘴开口或孔，并且每个喷嘴开口与油墨通道连通。 包括喷嘴开口的区域形成大致平坦的表面，以便于打印头的维护。 当墨水通过喷嘴开口或孔时，加热器元件与每个喷嘴开口或孔相关联，用于不对称地加热墨。

公开(公告)号：US06474795B1

公开(公告)日：2002-11-05

申请号：US09468987

申请日：1999-12-21

申请人： John A. Lebens ,  Christopher N. Delametter ,  David P. Trauernicht

发明人： John A. Lebens ,  Christopher N. Delametter ,  David P. Trauernicht

IPC分类号： B41J2105

CPC分类号： B41J2/03 ,  B41J2/09 ,  B41J2/105 ,  B41J2002/032 ,  B41J2202/16 ,  B41J2202/22

摘要： A continuous inkjet printer in which a continuous ink stream is deflected at the printhead nozzle bore without the need for charged deflection plates or tunnels. The printhead includes a primary ink delivery channel which delivers a primary flow of pressurized ink through an ink staging chamber to the nozzle bore to create an undeflected ink stream from the printhead. A secondary ink delivery channel adjacent to the primary channel is controlled by a thermally actuated valve to selectively create a lateral flow of pressurized ink into the primary flow thereby causing the emitted ink stream to deflect in a direction opposite to the direction from which the secondary ink stream impinges the primary ink stream in the ink staging chamber. A method of fabricating the printhead includes layering of the thermally actuated valve over the secondary ink delivery channel formed in a silicon substrate and creating the ink staging chamber over the delivery channels with sacrificial material which is later removed through the nozzle bore etched into the chamber wall formed over the sacrificial material.

摘要翻译： 连续喷墨打印机，其中连续墨水流在打印头喷嘴孔处偏转，而不需要带电偏转板或隧道。 打印头包括主要的墨水输送通道，其将加压油墨的一次流通过墨水分级室输送到喷嘴孔，以产生来自打印头的未偏转的墨水流。 邻近主要通道的次要油墨输送通道由热致动阀控制，以选择性地产生加压油墨的侧向流入主流，从而使排出的油墨流沿与二次油墨的方向相反的方向偏转 液流撞击墨水分级室中的主墨水流。 制造打印头的方法包括在形成在硅衬底中的辅助墨水输送通道上层叠热致动阀，并且通过牺牲材料在输送通道上产生墨水分级室，该牺牲材料随后通过蚀刻到腔壁中的喷嘴孔去除 形成在牺牲材料上。

公开(公告)号：US06435666B1

公开(公告)日：2002-08-20

申请号：US09976922

申请日：2001-10-12

申请人： David P. Trauernicht ,  John A. Lebens

发明人： David P. Trauernicht ,  John A. Lebens

IPC分类号： B41J204

CPC分类号： B41J2/14427

摘要： An apparatus and method of operating a liquid drop emitter, such as an ink jet device, for emitting a series of liquid drops using reduced energy, is disclosed. The method is applicable to a drop emitter comprising a liquid-filled chamber having a nozzle and an actuator, such as a thermal actuator, for applying pressure to liquid at the nozzle. The actuator has a movable portion and exhibits damped resonant oscillation having a fundamental period, TR, and a damping time constant, TD. Apparatus adapted to cause rapid displacement of the movable portion of the actuator in response to electrical pulses causes drop ejection and damped resonant oscillation of the thermal actuator. The method of operating comprises applying electrical pulses having a nominal energy if the actuator is quiescent or applying reduced energy pulses to the actuator if it is usefully oscillating due to a previous drop emission. By advantageous use of resonant oscillations of the actuator, overall energy usage is reduced, and the productivity of the drop emitter is increased.

摘要翻译： 公开了一种操作诸如喷墨装置的液滴发射器的装置和方法，用于使用减少的能量发射一系列液滴。 该方法适用于包括具有喷嘴和诸如热致动器的致动器的液体填充室的液滴发射器，用于在喷嘴处向液体施加压力。 致动器具有可移动部分并且具有基本周期TR和阻尼时间常数TD的阻尼谐振振荡。 适于引起致动器的可动部分响应于电脉冲的快速位移的装置引起热致动器的液滴喷射和阻尼的共振振荡。 操作的方法包括：如果致动器静止，则施加具有额定能量的电脉冲，或者如果由于先前的液滴发射有用地振荡，则施加减小的能量脉冲到致动器。 通过有利地使用致动器的共振振荡，总体能量消耗减少，并且液滴发射器的生产率增加。

公开(公告)号：US06426237B2

公开(公告)日：2002-07-30

申请号：US09867928

申请日：2001-05-30

申请人： Joseph Jech, Jr. ,  John A. Lebens ,  John C. Brazas, Jr. ,  Marek W. Kowarz

发明人： Joseph Jech, Jr. ,  John A. Lebens ,  John C. Brazas, Jr. ,  Marek W. Kowarz

IPC分类号： H01L21302

CPC分类号： B81C1/00611 ,  B81C2201/0121

摘要： A method for producing optically planar surfaces for micro-electromechanical system devices (MEMS), comprising the steps of: depositing a first layer over a substrate; forming a channel in the first layer wherein the channel has a depth defined by a thickness of the first layer and a width greater than 10 microns; depositing a second layer over the first layer wherein the second layer has a thickness greater than the depth of the channel and is composed of a different material than the first layer; removing the second layer from outside the channel leaving an overlap at the edge of the channel; and polishing the second layer that fills the channel to obtain an optically planar surface for the MEMS device.

摘要翻译： 一种用于制造用于微机电系统装置（MEMS）的光学平面的方法，包括以下步骤：在衬底上沉积第一层; 在第一层中形成通道，其中通道具有由第一层的厚度和大于10微米的宽度限定的深度; 在所述第一层上沉积第二层，其中所述第二层的厚度大于所述沟道的深度，并且由与所述第一层不同的材料构成; 从所述通道外部移除所述第二层，在所述通道的边缘处留下重叠; 并抛光填充通道的第二层以获得用于MEMS器件的光学平面表面。

公开(公告)号：US06276782B1

公开(公告)日：2001-08-21

申请号：US09481303

申请日：2000-01-11

申请人： Ravi Sharma ,  John A. Lebens

发明人： Ravi Sharma ,  John A. Lebens

IPC分类号： B41J205

CPC分类号： B41J2/14 ,  B41J2/005

摘要： A droplet generator is provided that is particularly adapted for generating micro droplets of ink on demand in an inkjet printhead having a plurality of nozzles. The droplet generator includes a droplet separator formed from the combination of a droplet assistor and a droplet initiator. The droplet assistor is coupled to ink in each of the nozzles and functions to lower the amount of energy necessary for an ink droplet to form and separate from an ink meniscus extending across the nozzle outlet. The droplet assistor may be, for example, a heater or surfactant supply mechanism for lowering the surface tension of the ink meniscus. Alternatively, the droplet assistor may be a mechanical oscillator such as a piezoelectric transducer that generates oscillations in the ink sufficient to periodically form convex ink menisci across the nozzle outlets, but insufficient to cause ink droplets to separate from the outlets. The droplet initiator cooperates with the droplet assistor and selectively causes an ink droplet to form and separate from the ink meniscus. The droplet initiator may be, for example, a thermally-actuated paddle. The droplet separator increases the speed and accuracy of ink micro droplets expelled from the printhead nozzles.

摘要翻译： 提供了一种液滴发生器，其特别适于在具有多个喷嘴的喷墨打印头中根据需要生成墨滴微滴。 液滴发生器包括由液滴组合物和液滴引发剂的组合形成的液滴分离器。 液滴组合器耦合到每个喷嘴中的油墨，并且用于降低墨滴形成并与从喷嘴出口延伸的油墨弯液面分离所需的能量的量。 液滴组合器可以是例如用于降低油墨弯液面的表面张力的加热器或表面活性剂供给机构。 或者，液滴组合器可以是诸如压电换能器的机械振荡器，其在油墨中产生足够的周期性地在喷嘴出口周围形成凸形墨水半月板的振荡，但不足以使墨滴与出口分离。 液滴引发剂与液滴组合物配合，并选择性地使油墨液滴形成并与油墨弯液面分离。 液滴引发剂可以是例如热致动桨。 液滴分离器增加从打印头喷嘴排出的墨微滴的速度和精度。