摘要:
Phase shifting allows generating very narrow features in a printed features layer. Thus, forming a fabrication layout for a physical design layout having critical features typically includes providing a layout for shifters. Specifically, pairs of shifters can be placed to define critical features, wherein the pairs of shifters conform to predetermined design rules. After placement, phase information for the shifters associated with the set of critical features can be assigned. Complex designs can lead to phase-shift conflicts among shifters in the fabrication layout. An irresolvable conflict can be passed to the design process earlier than in a conventional processes, thereby saving valuable time in the fabrication process for printed circuits.
摘要:
A lithography mask layout is designed and verified incrementally to help reduce the amount of time to produce the mask layout. For one embodiment, a layout defining a target pattern may be processed to produce a mask layout, and the mask layout may be verified to identify errors. Rather than processing and verifying the entire mask layout for error correction over one or more subsequent iterations, sub-layouts having errors may be removed or copied from the mask layout for separate processing and verification. Because the amount of data defining a sub-layout is relatively small, the time to design and verify the mask layout is reduced. The resulting mask layout having one or more processed and verified sub-layout(s) may then be used to manufacture a mask set to help print the target pattern in manufacturing integrated circuits (ICs), for example.
摘要:
Techniques for forming a design layout with phase-shifted features, such as an integrated circuit layout, include receiving information about a particular phase-shift conflict in a first physical design layout. The information indicates one or more features logically associated with the particular phase-shift conflict. Then the first physical design layout is adjusted based on that information to produce a second design layout. The adjustments rearrange features in a unit of the design layout to collect free space around a selected feature associated with the phase-shift conflict. With these techniques, a unit needing more space for additional shifters can obtain the needed space during the physical design process making the adjustment. The needed space so obtained allows the fabrication design process to avoid or resolve phase conflicts while forming a fabrication layout, such as a mask, for substantiating the design layout in a printed features layer, such as in an actual integrated circuit.
摘要:
Phase shifting generates features in a printed features layer, such as a printed circuit, that are narrower than the features on a fabrication layout, such as a mask, projected onto the printed features layer using the same optical system without phase shifting. Techniques for forming a fabrication layout for a physical design layout having critical features employing phase shifting include techniques for providing a layout for shifters. The techniques include establishing placement of multiple pairs of shifters for a set of critical features. A critical feature employs phase shifting. The set of critical features constitutes a subset of all critical features in a layout. After establishing placement of the pairs of shifters, phase information for the shifters associated with the set of critical features is assigned. This and related techniques expedite resolving phase-shift conflicts in fabrication layouts for phase-shifted features. Complex designs can lead to phase-shift conflicts among shifters in the fabrication layout. According to these techniques, a conflict that cannot be resolved by a fabrication design process is passed to the design process earlier than in a conventional processes, saving valuable time in the fabrication process for printed circuits.
摘要:
A method and apparatus for creating a phase shifting mask and a structure mask for shrinking integrated circuit designs. One embodiment of the invention includes using a two mask process. The first mask is a phase shift mask and the second mask is a single phase structure mask. The phase shift mask primarily defines regions requiring phase shifting. The single phase structure mask primarily defines regions not requiring phase shifting. The single phase structure mask also prevents the erasure of the phase shifting regions and prevents the creation of undesirable artifact regions that would otherwise be created by the phase shift mask. Both masks are derived from a set of masks used in a larger minimum dimension process technology.
摘要:
An electrical connector includes an insulating housing which defines an inserting mouth penetrating through a front side thereof and terminal grooves communicating with the inserting mouth and each extending longitudinally to penetrate rearward through the insulating housing. A plurality of electrical terminals is assembled in the terminal grooves and each has a contact arm elastically stretching into the inserting mouth and defining a contact end. The insulating housing further defines a plurality of through holes penetrating vertically therethrough to connect with the inserting mouth and arranged in accordance with the contact ends of the electrical terminals. The through holes are used to provide action space for meeting movements of the contact ends and receiving the contact ends therein, when a mating part is inserted into the inserting mouth and pressure contacts with the contact ends.
摘要:
An electrical connector includes an insulating housing which defines an inserting mouth penetrating through a front side thereof and terminal grooves communicating with the inserting mouth and each extending longitudinally to penetrate rearward through the insulating housing. A plurality of electrical terminals is assembled in the terminal grooves and each has a contact arm elastically stretching into the inserting mouth and defining a contact end. The insulating housing further defines a plurality of through holes penetrating vertically therethrough to connect with the inserting mouth and arranged in accordance with the contact ends of the electrical terminals. The through holes are used to provide action space for meeting movements of the contact ends and receiving the contact ends therein, when a mating part is inserted into the inserting mouth and pressure contacts with the contact ends.
摘要:
An electrical connector includes a first insulating body having a base board and a tongue board extending rearward from the base board, and a second insulating body having a base portion and fingers extending forward from the base portion. Two opposite sides of the tongue board protrude upward to form two clipping walls and oppositely protrude outward to form two restraining portions spaced from the clipping walls. A receiving space is formed among the tongue board, the base board and the clipping walls for receiving the second insulating body therein. The base portion is clipped between the clipping walls. Front ends of the fingers prop against the base board. Each side surface of the base portion defines an elastic arm having a top connected with the side surface and a bottom beyond a bottom surface of the base portion to be restrained between the restraining portion and the clipping wall.