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185 条记录 (耗时 0.035 秒)

    Polymerizable ester compounds
    62.
    发明授权
    Polymerizable ester compounds 有权
    可聚合的酯化合物

    公开(公告)号：US07276623B2

    公开(公告)日：2007-10-02

    申请号：US11440107

    申请日：2006-05-25

    申请人： Yuji Harada ,  Jun Hatakeyama ,  Yoshio Kawai ,  Kazuhiko Maeda ,  Haruhiko Komoriya ,  Michitaka Ootani

    发明人： Yuji Harada ,  Jun Hatakeyama ,  Yoshio Kawai ,  Kazuhiko Maeda ,  Haruhiko Komoriya ,  Michitaka Ootani

    IPC分类号： C07C69/00 ,  G03C1/00

    CPC分类号： G03F7/0397 ,  G03F7/0046

    摘要： Ester compounds having formula (1) wherein R1 is fluorine or C1-C10 fluoroalkyl, R2 is C1-C10 alkylene or fluoroalkylene, and R3 is an acid labile group are novel. They can be polymerized into polymers which are used to formulate resist compositions, which are processed by the lithography involving ArF exposure, offering many advantages including improved resolution and transparency, minimal line edge roughness, improved etch resistance, and especially minimal surface roughness after etching.

    摘要翻译： 式（1）其中R 1是氟或C 1 -C 10氟烷基的酯化合物，其中R 1是氢或C 1 -C 10 - 是C 1 -C 10亚烷基或氟代亚烷基，R 3是酸不稳定基团是新的。 它们可以聚合成用于配制抗蚀剂组合物的聚合物，其通过涉及ArF曝光的光刻加工，提供许多优点，包括改进的分辨率和透明度，最小的线边缘粗糙度，改善的耐蚀刻性，以及蚀刻后特别是最小的表面粗糙度。

    Novel polymerizable ester compounds
    64.
    发明申请
    Novel polymerizable ester compounds 有权
    新型可聚合酯化合物

    公开(公告)号：US20060269870A1

    公开(公告)日：2006-11-30

    申请号：US11440107

    申请日：2006-05-25

    申请人： Yuji Harada ,  Jun Hatakeyama ,  Yoshio Kawai ,  Kazuhiko Maeda ,  Haruhiko Komoriya ,  Michitaka Ootani

    发明人： Yuji Harada ,  Jun Hatakeyama ,  Yoshio Kawai ,  Kazuhiko Maeda ,  Haruhiko Komoriya ,  Michitaka Ootani

    IPC分类号： G03C1/00

    CPC分类号： G03F7/0397 ,  G03F7/0046

    摘要： Ester compounds having formula (1) wherein R1 is fluorine or C1-C10 fluoroalkyl, R2 is C1-C10 alkylene or fluoroalkylene, and R3 is an acid labile group are novel. They can be polymerized into polymers which are used to formulate resist compositions, which are processed by the lithography involving ArF exposure, offering many advantages including improved resolution and transparency, minimal line edge roughness, improved etch resistance, and especially minimal surface roughness after etching.

    摘要翻译： 式（1）其中R 1是氟或C 1 -C 10氟烷基的酯化合物，其中R 1是氢或C 1 -C 10 - 是C 1 -C 10亚烷基或氟代亚烷基，R 3是酸不稳定基团是新的。 它们可以聚合成用于配制抗蚀剂组合物的聚合物，其通过涉及ArF曝光的光刻加工，提供许多优点，包括改进的分辨率和透明度，最小的线边缘粗糙度，改善的耐蚀刻性，以及蚀刻后特别是最小的表面粗糙度。

    Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions
    65.
    发明授权
    Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions 有权
    含氟化合物及其聚合物可用于抗反射膜材料和抗蚀剂组合物

    公开(公告)号：US07125943B2

    公开(公告)日：2006-10-24

    申请号：US10634997

    申请日：2003-08-06

    申请人： Shinichi Sumida ,  Haruhiko Komoriya ,  Kazuhiko Maeda

    发明人： Shinichi Sumida ,  Haruhiko Komoriya ,  Kazuhiko Maeda

    IPC分类号： C08F112/08

    CPC分类号： C08F20/30 ,  C08F14/18 ,  C08F20/28 ,  C08F216/1408 ,  C08F220/24 ,  C08F220/30 ,  C09D125/16 ,  C09D133/16 ,  Y10S430/108 ,  Y10S430/111 ,  C08F2/00

    摘要： A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1–25 or (b) an aromatic hydrocarbon group, each of the hydrogen group and the aromatic hydrocarbon group independently optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1–5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is present in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.

    摘要翻译： 由式1表示的含氟化合物，其中R 1是甲基或三氟甲基，R 2和R 3， 独立地为氢原子或含有（a）具有直链，支链或环状的碳原子数为1-25的烃基或（b）芳族烃基的基团，每个氢基和 芳族烃基独立地任选地含有氟原子，氧原子和羰基键中的至少一个，l为0〜2的整数，m和n分别为1-5的整数，以满足表达式 的m + n <= 6，当R 1，R 2和R 3中的至少一个存在多个时， R 1，R 2和R 3中的至少一个可以彼此相同或不同。