Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device
    61.
    发明授权
    Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device 有权
    用于校正焦点的曝光方法,以及半导体装置的制造方法

    公开(公告)号:US07248349B2

    公开(公告)日:2007-07-24

    申请号:US11220701

    申请日:2005-09-08

    CPC分类号: G03F7/70516

    摘要: There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.

    摘要翻译: 公开了一种用于校正焦点的曝光方法,包括:照射掩模,其中形成包括至少一组第一掩模图案和形成相互不同形状的第二掩模图案的掩模图案 使曝光装置的光轴离开的点为照明中心的方向,向图像接收元件曝光和投影所述掩模图案的图像; 测量曝光和投影在所述图像接收元件上的所述第一和第二掩模图案的图像之间的相对相对距离,从而测量所述曝光设备的投影光学系统的焦点; 并且基于所述测量的结果沿所述曝光装置的所述光轴的方向移动所述图像接收元件,并将所述图像接收元件设置在所述投影光学系统的适当焦点处。

    Apparatus and method for verifying an integrated circuit pattern
    64.
    发明申请
    Apparatus and method for verifying an integrated circuit pattern 有权
    用于验证集成电路图案的装置和方法

    公开(公告)号:US20050086618A1

    公开(公告)日:2005-04-21

    申请号:US10948540

    申请日:2004-09-24

    CPC分类号: G06F17/5081

    摘要: A first generator section generates a tolerance data corresponding to a target pattern set based on a design data of a semiconductor device. A second generator section generates an image data of a semi-conductor device pattern formed based on the target pattern. An extraction section extracts a contour data of the pattern from the image data supplied from the second generator section. A data synthesizing section is supplied with the tolerance data supplied from the second generator section and the contour data supplied from the extraction section. The data synthesizing section overlaps the tolerance data with the contour data.

    摘要翻译: 第一发生器部分基于半导体器件的设计数据生成对应于目标图案组的公差数据。 第二发生器部分生成基于目标图案形成的半导体器件图案的图像数据。 提取部分从从第二发生器部分提供的图像数据中提取图案的轮廓数据。 向数据合成部分提供从第二发生器部分提供的公差数据和从提取部分提供的轮廓数据。 数据合成部分与公差数据与轮廓数据重叠。

    Graphic processing method and device
    65.
    发明申请
    Graphic processing method and device 失效
    图形处理方法和装置

    公开(公告)号:US20050024361A1

    公开(公告)日:2005-02-03

    申请号:US10875295

    申请日:2004-06-25

    摘要: There is disclosed a graphic processing method in which a first figure skeleton apart from an outline of a figure by each equal distance in a central direction of the figure is calculated using at least one of a medial axis and a chordal axis with respect to a figure representing the outline of the object shape reflected in a digital image by a set of points, branch lines to the skeleton from a vertex of the figure in the calculated first figure skeleton are removed to obtain a second figure skeleton, and a curve coordinate system is defined using the second figure skeleton as one coordinate axis and using a distance between the second figure skeleton and the outline of the figure as the other coordinate axis with respect to data obtained by one circulation of the outline of the figure using one end point of the second figure skeleton as a start point and using the other end point as a terminal point to transform the coordinate of points on the outline of the figure into the other coordinate axis of the curve coordinate system.

    摘要翻译: 公开了一种图形处理方法,其中使用相对于图形的中间轴和弦线中的至少一个来计算除了图形的中心方向上每个相等距离的图形的轮廓之外的第一图形框架 代表通过一组点反映在数字图像中的对象形状的轮廓,去除所计算的第一图形骨架中的从图形的顶点到骨架的分支线以获得第二图形骨架,并且曲线坐标系为 使用第二图形骨架作为一个坐标轴定义,并且使用第二图形框架和图形的轮廓之间的距离作为另一个坐标轴,相对于通过使用图形的一个端点的图形的轮廓的一次循环而获得的数据 第二个图形骨架作为起始点,并使用另一个终点作为终点将图形轮廓上的点的坐标转换为另一个坐标 曲线坐标系的坐标轴。

    Pattern evaluation method, pattern evaluation system and computer readable recorded medium
    66.
    发明授权
    Pattern evaluation method, pattern evaluation system and computer readable recorded medium 失效
    模式评估方法,模式评估系统和计算机可读记录介质

    公开(公告)号:US06839470B2

    公开(公告)日:2005-01-04

    申请号:US09991916

    申请日:2001-11-26

    申请人: Takahiro Ikeda

    发明人: Takahiro Ikeda

    摘要: A pattern evaluation method includes: scanning an object to be measured on which a pattern has been formed with an energy beam and obtaining an image data of the object by detecting a scattered particle which is produced from the object; recognizing at least one edge of the pattern on the basis of the image data and calculating the coordinate positions of each edge point of a sequence of edge points constituting the shape of the edge of the pattern; deriving a straight line so that the sum of lengths of perpendiculars drawn from the edge points to the straight line is minimum; and statistically processing the lengths of perpendiculars when the straight line is derived and outputting evaluation information for quantitatively expressing roughness of the edge of the pattern.

    摘要翻译: 模式评估方法包括:用能量束扫描已经形成图案的被测量对象,并且通过检测从对象产生的散射粒子来获得对象的图像数据; 基于图像数据识别图案的至少一个边缘,并且计算构成图案边缘的形状的边缘点序列的每个边缘点的坐标位置; 导出直线,使得从边缘点到直线绘制的垂直线的总和最小; 并且在导出直线时统计处理垂直的长度,并且输出用于定量表示图案的边缘的粗糙度的评估信息。

    Determining copyright information based on overlapping information between portions of two documents
    67.
    发明授权
    Determining copyright information based on overlapping information between portions of two documents 失效
    基于两个文档的部分之间的重叠信息来确定版权信息

    公开(公告)号:US06327600B1

    公开(公告)日:2001-12-04

    申请号:US09078718

    申请日:1998-05-14

    IPC分类号: G06F1214

    CPC分类号: G06F21/10

    摘要: A document management system is provided to manage electronic documents in connection with copyrights. Herein, copyright management information is set with respect to a constituent element of a document that a user produces. The constituent element corresponds to a chapter, a paragraph, a sentence, a figure or a table, for example. The copyright management information represents copyright information regarding the use of the document, which is classified into prescribed levels such as a reference level, a copy level and a print level. In addition, it represents prescribed conditions as to whether the use of the document is allowed with payment of fee, with filing of application and with display of copyright or not, for example. Further, the content of the copyright management information can be changed in response to user levels respectively. The copyright management information is connected with information representing the constituent element. When the user requests to use a prescribed portion of another document other than the document that the user is presently producing, a use-allowed part is determined within the prescribed portion on the basis of the copyright management information of the constituent element overlapping with the prescribed portion. So, the user is capable of making a decision whether to actually use the use-allowed part in consideration of the prescribed conditions.

    摘要翻译: 提供文件管理系统来管理与版权有关的电子文件。 这里,关于用户生成的文档的构成要素设定版权管理信息。 构成要素对应于例如章节,段落,句子,图形或表格。 版权管理信息表示关于文档的使用的版权信息,其被分类为诸如参考级别,拷贝级别和打印级别的规定级别。 此外,代表规定的条件,例如,是否允许使用文件,支付费用,提交申请书和不显示版权。 此外,可以分别响应于用户级别来改变版权管理信息的内容。 版权管理信息与表示构成要素的信息相连。 当用户请求使用除用户当前正在生成的文档之外的另一文档的规定部分时,根据与规定的重叠的构成要素的版权管理信息,在规定的部分内确定使用允许部分 一部分。 因此,用户能够考虑到规定的条件来决定是否实际使用允许的部分。

    Information distributing system and storage medium recorded with a program for distributing information
    68.
    发明授权
    Information distributing system and storage medium recorded with a program for distributing information 失效
    记录有用于分发信息的程序的信息分发系统和存储介质

    公开(公告)号:US06178424B1

    公开(公告)日:2001-01-23

    申请号:US09078681

    申请日:1998-05-14

    IPC分类号: G06F1730

    摘要: An information activity management unit records an item characterizing information and an item of a user thereof per information collected. A user attribute information storage unit records a user attribute characterizing each user. When an information collecting unit fetches the information from a database system, a similar information user common attribute extracting unit obtains a user of information similar to the above information and obtains a user attribute common to the users from the user attribute information storage unit. An information distributing unit obtains all the users having this common user attribute from the user attribute information storage unit and distribute the collected information to these users. An activity state registering unit, when notified from the user of an effect that the distributed information is useful, registers the information activity management unit with this user as a user of the distributed information.

    摘要翻译: 信息活动管理单元根据收集的信息记录项目特征信息和用户的项目。 用户属性信息存储单元记录表示每个用户的用户属性。 当信息收集单元从数据库系统取出信息时,类似的信息用户公共属性提取单元获得与上述信息相似的信息的用户,并从用户属性信息存储单元获取用户共用的用户属性。 信息分发单元从用户属性信息存储单元获得具有该通用用户属性的所有用户,并将收集的信息分发给这些用户。 活动状态登记单元,当从用户通知分发信息有用的效果时,将该信息活动管理单元作为分发信息的用户登记在该用户身上。

    Camera and method for setting a used-state display
    69.
    发明授权
    Camera and method for setting a used-state display 失效
    用于设置使用状态显示的相机和方法

    公开(公告)号:US5815755A

    公开(公告)日:1998-09-29

    申请号:US799881

    申请日:1997-02-13

    IPC分类号: G03B7/24 G03B17/30 G03B1/18

    摘要: A camera is loadable with a film cartridge having a rotary spool connected with a film and a display member rotatable with the rotary spool for displaying a used state of the film. The camera includes: a driver which generates a driving force for rotation of the rotary spool; a transmission device which is operable to execute transmission of the driving force from the driver to the rotary spool; and a controller which controls the transmission device to execute the transmission of the driving force to rotate the rotary spool for rewinding of the film into the film cartridge, and to suspend the transmission of the driving force to allow the rewound film to freely loosen, and to execute the transmission of the driving force to rotate the rotary spool until the display member reaches a position to display a specified used state of the film.

    摘要翻译: 相机可以通过具有与胶片连接的旋转卷轴的胶片暗盒和可旋转的卷轴旋转的显示部件来显影胶片的使用状态。 相机包括:产生用于旋转滑阀旋转的驱动力的驱动器; 传动装置,其可操作以执行从所述驱动器到所述旋转卷轴的所述驱动力的传动; 以及控制器,其控制所述传动装置执行所述驱动力的传递以使所述旋转卷轴旋转以使所述胶片重新卷绕到所述暗盒中,并且悬挂所述驱动力的传递以允许所述倒带膜自由松开;以及 执行驱动力的传递以旋转旋转滑阀直到显示构件到达显示胶片的指定使用状态的位置。