摘要:
There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.
摘要:
The present invention relates to a process for preparing dye-comprising aqueous polymer dispersions by free-radical aqueous emulsion polymerization of ethylenically unsaturated monomers in the presence of free-radical initiators, in which at least some of the monomers are employed in the form of an oil-in-water emulsion E1 whose disperse phase comprises at least one oil-soluble dye, wherein the disperse phase of E1 is formed essentially of dye-comprising monomer droplets having a diameter
摘要:
A method of selecting a pattern to be measured includes selecting only points from a combination of all factors effecting dimensional fluctuations. For example, fluctuation between wafers, fluctuation in a wafer, and fluctuation in a chip are candidates for measurement points of patterns to be measured. Further, the number of the selected points corresponds to a divisor of the combination of all factors.
摘要:
A first generator section generates a tolerance data corresponding to a target pattern set based on a design data of a semiconductor device. A second generator section generates an image data of a semi-conductor device pattern formed based on the target pattern. An extraction section extracts a contour data of the pattern from the image data supplied from the second generator section. A data synthesizing section is supplied with the tolerance data supplied from the second generator section and the contour data supplied from the extraction section. The data synthesizing section overlaps the tolerance data with the contour data.
摘要:
There is disclosed a graphic processing method in which a first figure skeleton apart from an outline of a figure by each equal distance in a central direction of the figure is calculated using at least one of a medial axis and a chordal axis with respect to a figure representing the outline of the object shape reflected in a digital image by a set of points, branch lines to the skeleton from a vertex of the figure in the calculated first figure skeleton are removed to obtain a second figure skeleton, and a curve coordinate system is defined using the second figure skeleton as one coordinate axis and using a distance between the second figure skeleton and the outline of the figure as the other coordinate axis with respect to data obtained by one circulation of the outline of the figure using one end point of the second figure skeleton as a start point and using the other end point as a terminal point to transform the coordinate of points on the outline of the figure into the other coordinate axis of the curve coordinate system.
摘要:
A pattern evaluation method includes: scanning an object to be measured on which a pattern has been formed with an energy beam and obtaining an image data of the object by detecting a scattered particle which is produced from the object; recognizing at least one edge of the pattern on the basis of the image data and calculating the coordinate positions of each edge point of a sequence of edge points constituting the shape of the edge of the pattern; deriving a straight line so that the sum of lengths of perpendiculars drawn from the edge points to the straight line is minimum; and statistically processing the lengths of perpendiculars when the straight line is derived and outputting evaluation information for quantitatively expressing roughness of the edge of the pattern.
摘要:
A document management system is provided to manage electronic documents in connection with copyrights. Herein, copyright management information is set with respect to a constituent element of a document that a user produces. The constituent element corresponds to a chapter, a paragraph, a sentence, a figure or a table, for example. The copyright management information represents copyright information regarding the use of the document, which is classified into prescribed levels such as a reference level, a copy level and a print level. In addition, it represents prescribed conditions as to whether the use of the document is allowed with payment of fee, with filing of application and with display of copyright or not, for example. Further, the content of the copyright management information can be changed in response to user levels respectively. The copyright management information is connected with information representing the constituent element. When the user requests to use a prescribed portion of another document other than the document that the user is presently producing, a use-allowed part is determined within the prescribed portion on the basis of the copyright management information of the constituent element overlapping with the prescribed portion. So, the user is capable of making a decision whether to actually use the use-allowed part in consideration of the prescribed conditions.
摘要:
An information activity management unit records an item characterizing information and an item of a user thereof per information collected. A user attribute information storage unit records a user attribute characterizing each user. When an information collecting unit fetches the information from a database system, a similar information user common attribute extracting unit obtains a user of information similar to the above information and obtains a user attribute common to the users from the user attribute information storage unit. An information distributing unit obtains all the users having this common user attribute from the user attribute information storage unit and distribute the collected information to these users. An activity state registering unit, when notified from the user of an effect that the distributed information is useful, registers the information activity management unit with this user as a user of the distributed information.
摘要:
A camera is loadable with a film cartridge having a rotary spool connected with a film and a display member rotatable with the rotary spool for displaying a used state of the film. The camera includes: a driver which generates a driving force for rotation of the rotary spool; a transmission device which is operable to execute transmission of the driving force from the driver to the rotary spool; and a controller which controls the transmission device to execute the transmission of the driving force to rotate the rotary spool for rewinding of the film into the film cartridge, and to suspend the transmission of the driving force to allow the rewound film to freely loosen, and to execute the transmission of the driving force to rotate the rotary spool until the display member reaches a position to display a specified used state of the film.
摘要:
An image reading device and method for producing a uniformly focused light image on a source document includes a document mount, an imaging device, and a drive assembly for moving at least one of the mounting device and the imaging device in a secondary scanning direction. The image reading device includes a control circuit for establishing multiple designated positions on the source document in the primary scanning direction and in the secondary scanning direction and for calculating the focus position from a signal output from the imaging device for the multiple designated positions. A cam member can be provided to adjust the position of the document mount along the optical axis of the light striking the document, a cam surface of the cam member contacting the document mount.