Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device
    1.
    发明授权
    Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device 有权
    用于校正焦点的曝光方法,以及半导体装置的制造方法

    公开(公告)号:US07248349B2

    公开(公告)日:2007-07-24

    申请号:US11220701

    申请日:2005-09-08

    CPC分类号: G03F7/70516

    摘要: There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.

    摘要翻译: 公开了一种用于校正焦点的曝光方法,包括:照射掩模,其中形成包括至少一组第一掩模图案和形成相互不同形状的第二掩模图案的掩模图案 使曝光装置的光轴离开的点为照明中心的方向,向图像接收元件曝光和投影所述掩模图案的图像; 测量曝光和投影在所述图像接收元件上的所述第一和第二掩模图案的图像之间的相对相对距离,从而测量所述曝光设备的投影光学系统的焦点; 并且基于所述测量的结果沿所述曝光装置的所述光轴的方向移动所述图像接收元件,并将所述图像接收元件设置在所述投影光学系统的适当焦点处。

    Method for inspecting exposure apparatus, exposure method for correcting focal point, and method for manufacturing semiconductor device
    2.
    发明授权
    Method for inspecting exposure apparatus, exposure method for correcting focal point, and method for manufacturing semiconductor device 有权
    检查曝光装置的方法,用于校正焦点的曝光方法以及半导体装置的制造方法

    公开(公告)号:US06967719B2

    公开(公告)日:2005-11-22

    申请号:US10287522

    申请日:2002-11-05

    CPC分类号: G03F7/70516

    摘要: There is here disclosed a method for inspecting an exposure apparatus, comprising illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of the mask-pattern toward an image-receiving element, and measuring a mutual relative distance between images of the first and second mask-patterns exposed and projected on the image-receiving element, thereby inspecting a state of an optical system of the exposure apparatus.

    摘要翻译: 这里公开了一种用于检查曝光装置的方法,包括:照射掩模,其中形成至少包括一组第一掩模图案和形成相互不同形状的第二掩模图案的掩模图案, 其中位于曝光装置的光轴外的点是照明中心,并且将图案的图像曝光并投影到图像接收元件,并且测量第一和第二图像的图像之间的相对相对距离 掩模图案曝光并投影在图像接收元件上,从而检查曝光装置的光学系统的状态。

    Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device
    3.
    发明申请
    Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device 有权
    用于校正焦点的曝光方法,以及半导体装置的制造方法

    公开(公告)号:US20060061756A1

    公开(公告)日:2006-03-23

    申请号:US11220701

    申请日:2005-09-08

    IPC分类号: G01B9/00

    CPC分类号: G03F7/70516

    摘要: There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.

    摘要翻译: 公开了一种用于校正焦点的曝光方法,包括:照射掩模,其中形成包括至少一组第一掩模图案和形成相互不同形状的第二掩模图案的掩模图案 使曝光装置的光轴离开的点为照明中心的方向,向图像接收元件曝光和投影所述掩模图案的图像; 测量曝光和投影在所述图像接收元件上的所述第一和第二掩模图案的图像之间的相对相对距离,从而测量所述曝光设备的投影光学系统的焦点; 并且基于所述测量的结果沿所述曝光装置的所述光轴的方向移动所述图像接收元件,并将所述图像接收元件设置在所述投影光学系统的适当焦点处。

    System and method for Hilbert phase imaging
    4.
    发明授权
    System and method for Hilbert phase imaging 有权
    希尔伯特相位成像系统和方法

    公开(公告)号:US08772693B2

    公开(公告)日:2014-07-08

    申请号:US11389670

    申请日:2006-03-24

    IPC分类号: H01L27/00

    摘要: Hilbert phase microscopy (HPM) as an optical technique for measuring high transverse resolution quantitative phase images associated with optically transparent objects. Due to its single-shot nature, HPM is suitable for investigating rapid phenomena that take place in transparent structures such as biological cells. A preferred embodiment is used for measuring biological systems including measurements on red blood cells, while its ability to quantify dynamic processes on the millisecond scale, for example, can be illustrated with measurements on evaporating micron-size water droplets.

    摘要翻译: 希尔伯特相位显微镜(HPM)作为用于测量与光学透明物体相关的高横向分辨率定量相位图像的光学技术。 由于其单次性质,HPM适用于调查在诸如生物细胞的透明结构中发生的快速现象。 优选的实施例用于测量生物系统,包括对红血细胞的测量,而其量化毫秒级别的动态过程的能力可以用蒸发微米级水滴的测量来说明。

    CELL OBSERVATION DEVICE AND CELL OBSERVATION METHOD
    5.
    发明申请
    CELL OBSERVATION DEVICE AND CELL OBSERVATION METHOD 有权
    细胞观察装置和细胞观察方法

    公开(公告)号:US20130288286A1

    公开(公告)日:2013-10-31

    申请号:US13642012

    申请日:2011-04-13

    IPC分类号: G01N21/55

    摘要: A cell observation device is provided with a reflection interference measurement light source 106, a quantitative phase measurement light source 105, a reflection interference detection camera 110 which images light emitted from the reflection interference measurement light source 106 and reflected from cells 101, to generate a reflection interference image, a quantitative phase detection camera 112 which images light emitted from the quantitative phase measurement light source 105 and transmitted by the cells 101, to generate a quantitative phase image, an image alignment unit 201 which matches a spatial position of the reflection interference image with a spatial position of the quantitative phase image, to implement alignment between the two images, a first extraction unit 204 which extracts a first parameter from the reflection interference image in alignment with the quantitative phase image, and a second extraction unit 205 which extracts a second parameter from the quantitative phase image in alignment with the reflection interference image.

    摘要翻译: 电池观察装置设置有反射干涉测量光源106,定量相位测量光源105,反射干涉检测照相机110,其反射从反射干涉测量光源106发射并从单元101反射的光,以产生 反射干涉图像,定量相位检测摄像机112,其对从定量相位测量光源105发射并由单元101发送的光进行成像以产生定量相位图像;图像对准单元201,其匹配反射干涉的空间位置 具有定量相位图像的空间位置的图像,以实现两个图像之间的对准;第一提取单元204,其从反射干涉图像中提取与定量相位图像对准的第一参数;以及第二提取单元205,其提取 来自定量的第二个参数 与反射干涉图像对准的相位图像。

    Three-dimensional ultrasonic inspection apparatus
    6.
    发明授权
    Three-dimensional ultrasonic inspection apparatus 有权
    三维超声波检测仪

    公开(公告)号:US08488871B2

    公开(公告)日:2013-07-16

    申请号:US13002349

    申请日:2009-06-29

    IPC分类号: G06K9/00 A61K49/00

    摘要: A three-dimensional ultrasonic inspection apparatus includes: an ultrasonic transducer disposed m×n piezoelectric vibrators in a matrix; a signal processing device to receive, detect an echo, and generate a three-dimensional image data by processing an electric signal of the echo detected; and a display processing device to display a result of processing the three-dimensional image data generated by the signal processing device, wherein the display processing device includes a peak detecting unit to detect a first peak and a second peak of an intensity distribution of the three-dimensional image data in a depth (z) direction, a joint portion image creation unit to create a three-dimensional image of the joined area by mapping z direction distance of the first peak and the second peak to x-y plane, a determination unit to determine whether the joined area is sound or not, and a display unit to display the three-dimensional image and the determination result of the joined area.

    摘要翻译: 一种三维超声波检查装置包括:以矩阵形式设置m×n个压电振动器的超声波换能器; 信号处理装置,用于通过处理检测到的回波的电信号来接收,检测回波并产生三维图像数据; 以及显示处理装置,用于显示由信号处理装置生成的三维图像数据的处理结果,其中显示处理装置包括峰值检测单元,用于检测三维图像的强度分布的第一峰值和第二峰值 在深度(z)方向上的三维图像数据,联合部分图像创建单元,通过将第一峰值和第二峰值的z方向距离映射到xy平面来创建连接区域的三维图像,确定单元 确定接合区域是否是声音;以及显示单元,用于显示接合区域的三维图像和确定结果。

    INTERCHANGEABLE LENS AND CAMERA BODY
    7.
    发明申请
    INTERCHANGEABLE LENS AND CAMERA BODY 有权
    可互换镜头和摄像机身

    公开(公告)号:US20130148008A1

    公开(公告)日:2013-06-13

    申请号:US13818707

    申请日:2011-08-24

    申请人: Takahiro Ikeda

    发明人: Takahiro Ikeda

    IPC分类号: G03B17/14 H04N5/225 G02B7/04

    摘要: An interchangeable lens includes a zoom lens, a driver configured to drive the zoom lens, an operation unit configured to receive a user's operation for changing a magnification of the zoom lens, and a controller configured to control the driver according to the operation of the operation unit. The controller controls the driver in either one of a first operation mode for enabling the zoom lens to stop at an arbitrary position according to the operation of the operation unit and a second operation mode for enabling the zoom lens to stop at one of discrete predetermined stop positions according to the operation of the operation unit.

    摘要翻译: 可互换镜头包括变焦镜头,被配置为驱动变焦镜头的驱动器,被配置为接收用户改变变焦镜头的倍率的操作的操作单元,以及被配置为根据操作的操作来控制驾驶员的控制器 单元。 控制器根据操作单元的操作使第一操作模式中的任一个控制驱动器,以使得变焦镜头能够在任意位置停止;以及第二操作模式,用于使得变焦镜头能够以离散的预定停止点之一停止 根据操作单元的操作进行定位。

    Ultrasonic inspection device and ultrasonic inspection method
    8.
    发明授权
    Ultrasonic inspection device and ultrasonic inspection method 有权
    超声波检测装置和超声波检测方法

    公开(公告)号:US08429973B2

    公开(公告)日:2013-04-30

    申请号:US12750181

    申请日:2010-03-30

    IPC分类号: G01N29/06

    摘要: An ultrasonic transducer is provided with a distance measuring ultrasonic sensor for detecting a distance between the ultrasonic transducer and a surface of an inspection object and an inclination of the ultrasonic transducer with respect to the surface of the inspection object, to control the distance and the inclination of the ultrasonic transducer with respect to the inspection object based on information detected by the distance measuring ultrasonic sensor, and at least part of ultrasonic wave transmission/reception by the distance measuring ultrasonic sensor is performed during execution of aperture synthesis processing during which transmission/reception by the ultrasonic transducer is not performed.

    摘要翻译: 超声波换能器设置有距离测量超声波传感器,用于检测超声波换能器与检查对象的表面之间的距离以及超声波换能器相对于检查对象的表面的倾斜度,以控制距离和倾斜度 根据距离测量超声波传感器检测到的信息,检测超声波传感器的超声波传感器的超声波传感器的超声波传感器的超声波发送接收的至少一部分,在进行发送/接收的孔径合成处理期间, 不执行超声波换能器。

    MEMBRANE POTENTIAL CHANGE DETECTION DEVICE AND MEMBRANE POTENTIAL CHANGE DETECTION METHOD
    9.
    发明申请
    MEMBRANE POTENTIAL CHANGE DETECTION DEVICE AND MEMBRANE POTENTIAL CHANGE DETECTION METHOD 有权
    膜电位变化检测装置和膜电位变化检测方法

    公开(公告)号:US20130088719A1

    公开(公告)日:2013-04-11

    申请号:US13642066

    申请日:2011-04-13

    IPC分类号: G01N21/45

    CPC分类号: G01N21/45 C12Q1/02 G01N21/253

    摘要: A membrane potential change detection device 1 is provided with a reflection interference measurement light source 106, a holder 103 which holds a transparent member 102a on which cells 101 are mounted, a reflection interference detection camera 110 which images light emitted from the reflection interference measurement light source 106 and reflected from the cells 101 through the transparent member 102a, to generate a reflection interference image, and an analysis unit 202 which calculates a parameter dI about adhesion between the cells 101 and the transparent member 102a from the reflection interference image and detects a change of membrane potential of the cells 101 on the basis of a change of the parameter dI.

    摘要翻译: 膜电位变化检测装置1设置有反射干涉测量光源106,保持安装有电池101的透明构件102a的保持件103,反射干涉检测照相机110对从反射干涉测量光 源106并且通过透明构件102a从单元101反射,以产生反射干涉图像;以及分析单元202,其从反射干涉图像计算关于单元101和透明构件102a之间的粘附的参数dI,并且检测 基于参数dI的变化来改变电池101的膜电位。

    Text mining device, text mining method, and text mining program
    10.
    发明授权
    Text mining device, text mining method, and text mining program 有权
    文本挖掘设备,文本挖掘方法和文本挖掘程序

    公开(公告)号:US08229956B2

    公开(公告)日:2012-07-24

    申请号:US12086190

    申请日:2006-11-30

    IPC分类号: G06F17/30

    CPC分类号: G06F17/30616

    摘要: With respect to each part at which a word included in a characteristic condition defining a characteristic text set designated by a user through the input device appears in text, the characteristic condition assurance degree calculating unit of the text mining device obtains a reliability of the word from the word reliability storage unit to operate a value of a characteristic condition assurance degree for each text by predetermined operation based on all the obtained reliabilities. The characteristic condition assurance degree calculating unit executes operation such that when a value of each reliability is large, a value of a degree of assurance becomes large. The representative text output unit outputs text whose characteristic condition assurance degree is the highest among texts whose characteristic condition assurance degrees are calculated together with its characteristic condition assurance degree.

    摘要翻译: 对于通过输入装置定义由用户指定的特征文本集的特征条件中包含的单词出现在文本中的每个部分,文本挖掘装置的特征条件保证度计算单元获得单词的可靠性, 字可靠性存储单元,用于通过基于所有获得的可靠性的预定操作来操作每个文本的特征条件保证度的值。 特征状态保证度计算单元执行操作,使得当每个可靠性的值大时,保证程度的值变大。 代表性文本输出单元输出其特征条件保证度与其特征条件保证度一起计算的文本中的特征条件保证度最高的文本。