摘要:
There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.
摘要:
There is here disclosed a method for inspecting an exposure apparatus, comprising illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of the mask-pattern toward an image-receiving element, and measuring a mutual relative distance between images of the first and second mask-patterns exposed and projected on the image-receiving element, thereby inspecting a state of an optical system of the exposure apparatus.
摘要:
There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.
摘要:
Hilbert phase microscopy (HPM) as an optical technique for measuring high transverse resolution quantitative phase images associated with optically transparent objects. Due to its single-shot nature, HPM is suitable for investigating rapid phenomena that take place in transparent structures such as biological cells. A preferred embodiment is used for measuring biological systems including measurements on red blood cells, while its ability to quantify dynamic processes on the millisecond scale, for example, can be illustrated with measurements on evaporating micron-size water droplets.
摘要:
A cell observation device is provided with a reflection interference measurement light source 106, a quantitative phase measurement light source 105, a reflection interference detection camera 110 which images light emitted from the reflection interference measurement light source 106 and reflected from cells 101, to generate a reflection interference image, a quantitative phase detection camera 112 which images light emitted from the quantitative phase measurement light source 105 and transmitted by the cells 101, to generate a quantitative phase image, an image alignment unit 201 which matches a spatial position of the reflection interference image with a spatial position of the quantitative phase image, to implement alignment between the two images, a first extraction unit 204 which extracts a first parameter from the reflection interference image in alignment with the quantitative phase image, and a second extraction unit 205 which extracts a second parameter from the quantitative phase image in alignment with the reflection interference image.
摘要:
A three-dimensional ultrasonic inspection apparatus includes: an ultrasonic transducer disposed m×n piezoelectric vibrators in a matrix; a signal processing device to receive, detect an echo, and generate a three-dimensional image data by processing an electric signal of the echo detected; and a display processing device to display a result of processing the three-dimensional image data generated by the signal processing device, wherein the display processing device includes a peak detecting unit to detect a first peak and a second peak of an intensity distribution of the three-dimensional image data in a depth (z) direction, a joint portion image creation unit to create a three-dimensional image of the joined area by mapping z direction distance of the first peak and the second peak to x-y plane, a determination unit to determine whether the joined area is sound or not, and a display unit to display the three-dimensional image and the determination result of the joined area.
摘要:
An interchangeable lens includes a zoom lens, a driver configured to drive the zoom lens, an operation unit configured to receive a user's operation for changing a magnification of the zoom lens, and a controller configured to control the driver according to the operation of the operation unit. The controller controls the driver in either one of a first operation mode for enabling the zoom lens to stop at an arbitrary position according to the operation of the operation unit and a second operation mode for enabling the zoom lens to stop at one of discrete predetermined stop positions according to the operation of the operation unit.
摘要:
An ultrasonic transducer is provided with a distance measuring ultrasonic sensor for detecting a distance between the ultrasonic transducer and a surface of an inspection object and an inclination of the ultrasonic transducer with respect to the surface of the inspection object, to control the distance and the inclination of the ultrasonic transducer with respect to the inspection object based on information detected by the distance measuring ultrasonic sensor, and at least part of ultrasonic wave transmission/reception by the distance measuring ultrasonic sensor is performed during execution of aperture synthesis processing during which transmission/reception by the ultrasonic transducer is not performed.
摘要:
A membrane potential change detection device 1 is provided with a reflection interference measurement light source 106, a holder 103 which holds a transparent member 102a on which cells 101 are mounted, a reflection interference detection camera 110 which images light emitted from the reflection interference measurement light source 106 and reflected from the cells 101 through the transparent member 102a, to generate a reflection interference image, and an analysis unit 202 which calculates a parameter dI about adhesion between the cells 101 and the transparent member 102a from the reflection interference image and detects a change of membrane potential of the cells 101 on the basis of a change of the parameter dI.
摘要:
With respect to each part at which a word included in a characteristic condition defining a characteristic text set designated by a user through the input device appears in text, the characteristic condition assurance degree calculating unit of the text mining device obtains a reliability of the word from the word reliability storage unit to operate a value of a characteristic condition assurance degree for each text by predetermined operation based on all the obtained reliabilities. The characteristic condition assurance degree calculating unit executes operation such that when a value of each reliability is large, a value of a degree of assurance becomes large. The representative text output unit outputs text whose characteristic condition assurance degree is the highest among texts whose characteristic condition assurance degrees are calculated together with its characteristic condition assurance degree.